ATE159794T1 - Geänderte kryogene diffusionspumpe - Google Patents
Geänderte kryogene diffusionspumpeInfo
- Publication number
- ATE159794T1 ATE159794T1 AT94918346T AT94918346T ATE159794T1 AT E159794 T1 ATE159794 T1 AT E159794T1 AT 94918346 T AT94918346 T AT 94918346T AT 94918346 T AT94918346 T AT 94918346T AT E159794 T1 ATE159794 T1 AT E159794T1
- Authority
- AT
- Austria
- Prior art keywords
- pct
- diffusion pump
- gases
- outlet
- sec
- Prior art date
Links
- 238000009792 diffusion process Methods 0.000 title abstract 3
- 239000007789 gas Substances 0.000 abstract 4
- 238000005086 pumping Methods 0.000 abstract 3
- 230000004888 barrier function Effects 0.000 abstract 2
- 239000000203 mixture Substances 0.000 abstract 2
- 238000010438 heat treatment Methods 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
- F04F9/00—Diffusion pumps
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/10—Nuclear fusion reactors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S417/00—Pumps
- Y10S417/901—Cryogenic pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
- Electromagnetic Pumps, Or The Like (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
- Control Of The Air-Fuel Ratio Of Carburetors (AREA)
- Separation By Low-Temperature Treatments (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB9310465A GB2278644B (en) | 1993-05-20 | 1993-05-20 | Modified cryogenic diffusion pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE159794T1 true ATE159794T1 (de) | 1997-11-15 |
Family
ID=10735863
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT94918346T ATE159794T1 (de) | 1993-05-20 | 1994-05-13 | Geänderte kryogene diffusionspumpe |
Country Status (11)
| Country | Link |
|---|---|
| US (1) | US5611208A (de) |
| EP (1) | EP0699277B1 (de) |
| JP (1) | JPH08510525A (de) |
| AT (1) | ATE159794T1 (de) |
| CA (1) | CA2162593A1 (de) |
| DE (1) | DE69406539T2 (de) |
| DK (1) | DK0699277T3 (de) |
| ES (1) | ES2110242T3 (de) |
| GB (1) | GB2278644B (de) |
| GR (1) | GR3025254T3 (de) |
| WO (1) | WO1994028314A1 (de) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5799493A (en) * | 1996-09-05 | 1998-09-01 | Helix Technology Corporation | Corrosion resistant cryopump |
| US20060001569A1 (en) * | 2004-07-01 | 2006-01-05 | Marco Scandurra | Radiometric propulsion system |
| KR101454246B1 (ko) * | 2009-01-14 | 2014-10-23 | 엘지전자 주식회사 | 왕복동식 압축기 |
| JP6089727B2 (ja) * | 2013-01-29 | 2017-03-08 | 株式会社豊田中央研究所 | ポンプ及びポンプを用いた気体の生成方法 |
| EP3049736B1 (de) * | 2013-09-23 | 2020-08-19 | D-Wave Systems Inc. | Systeme und verfahren zur tieftemperaturkühlung |
| US10378803B2 (en) | 2014-08-08 | 2019-08-13 | D-Wave Systems Inc. | Systems and methods for electrostatic trapping of contaminants in cryogenic refrigeration systems |
| JP6090294B2 (ja) * | 2014-12-09 | 2017-03-08 | 株式会社豊田中央研究所 | 気体濾過装置および気体濾過方法 |
| US9822786B1 (en) | 2016-03-22 | 2017-11-21 | The United States Of America, As Represented By The Secretary Of The Navy | Light activated rotor |
| US9960715B1 (en) | 2016-03-22 | 2018-05-01 | The United States Of America, As Represented By The Secretary Of The Navy | Light activated piezoelectric converter |
| US9705383B1 (en) | 2016-03-22 | 2017-07-11 | The United States Of America, As Represented By The Secretary Of The Navy | Light activated generator |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2831549A (en) * | 1954-08-31 | 1958-04-22 | Westinghouse Electric Corp | Isolation trap |
| US3339627A (en) * | 1965-03-22 | 1967-09-05 | Philips Corp | Regenerator |
| FR1549434A (de) * | 1967-10-20 | 1968-12-13 | ||
| US3692095A (en) * | 1969-12-05 | 1972-09-19 | Gen Electric | Ultra-low temperature thermal regenerator |
| SU706574A1 (ru) * | 1975-07-03 | 1979-12-30 | Предприятие П/Я Р-6476 | Вакуумна система |
| JPS61169680A (ja) * | 1985-01-21 | 1986-07-31 | Choichi Furuya | 気体移動装置 |
| SU1268827A1 (ru) * | 1985-05-12 | 1986-11-07 | Предприятие П/Я А-3605 | Форвакуумна вымораживающа ловушка |
| JPS627985A (ja) * | 1985-07-02 | 1987-01-14 | Ulvac Corp | ヘリウムを連続排気し得るクライオポンプ |
| US4907413A (en) * | 1988-06-02 | 1990-03-13 | Grumman Aerospace Corporation | Regenerable cryosorption pump with movable physical barrier and physical barrier thereof |
| US4866943A (en) * | 1988-10-17 | 1989-09-19 | Cdc Partners | Cyrogenic regenerator |
-
1993
- 1993-05-20 GB GB9310465A patent/GB2278644B/en not_active Expired - Fee Related
-
1994
- 1994-05-13 DE DE69406539T patent/DE69406539T2/de not_active Expired - Fee Related
- 1994-05-13 DK DK94918346T patent/DK0699277T3/da active
- 1994-05-13 EP EP94918346A patent/EP0699277B1/de not_active Expired - Lifetime
- 1994-05-13 ES ES94918346T patent/ES2110242T3/es not_active Expired - Lifetime
- 1994-05-13 CA CA002162593A patent/CA2162593A1/en not_active Abandoned
- 1994-05-13 JP JP7500193A patent/JPH08510525A/ja active Pending
- 1994-05-13 AT AT94918346T patent/ATE159794T1/de active
- 1994-05-13 US US08/545,578 patent/US5611208A/en not_active Expired - Fee Related
- 1994-05-13 WO PCT/EP1994/001637 patent/WO1994028314A1/en not_active Ceased
-
1997
- 1997-11-05 GR GR970402891T patent/GR3025254T3/el unknown
Also Published As
| Publication number | Publication date |
|---|---|
| JPH08510525A (ja) | 1996-11-05 |
| DE69406539D1 (de) | 1997-12-04 |
| EP0699277A1 (de) | 1996-03-06 |
| GR3025254T3 (en) | 1998-02-27 |
| CA2162593A1 (en) | 1994-12-08 |
| GB2278644A (en) | 1994-12-07 |
| DE69406539T2 (de) | 1998-04-16 |
| US5611208A (en) | 1997-03-18 |
| DK0699277T3 (da) | 1998-07-20 |
| GB2278644B (en) | 1996-01-03 |
| WO1994028314A1 (en) | 1994-12-08 |
| ES2110242T3 (es) | 1998-02-01 |
| GB9310465D0 (en) | 1993-07-07 |
| EP0699277B1 (de) | 1997-10-29 |
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