ATE160901T1 - Kathodenzerstäubungs-drehkathode mit mehreren targets - Google Patents

Kathodenzerstäubungs-drehkathode mit mehreren targets

Info

Publication number: ATE160901T1
Authority: AT; Austria
Prior art keywords: rotating cathode; sputting; multiple target; tube; cylinders
Prior art date: 1994-09-22

Application number

AT95402127T

Other languages

English (en)

Inventor

Louis Dresse

Original Assignee

Saint Gobain Vitrage

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1994-09-22

Filing date

1995-09-21

Publication date

1997-12-15

1995-09-21 Application filed by Saint Gobain Vitrage filed Critical Saint Gobain Vitrage

1997-12-15 Application granted granted Critical

1997-12-15 Publication of ATE160901T1 publication Critical patent/ATE160901T1/de

Links

-1 Silicon and Titanium Chemical class 0.000 abstract 1
RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 abstract 1
230000003667 anti-reflective effect Effects 0.000 abstract 1
238000001816 cooling Methods 0.000 abstract 1
229910052751 metal Inorganic materials 0.000 abstract 1
239000002184 metal Substances 0.000 abstract 1
150000002739 metals Chemical class 0.000 abstract 1
230000003534 oscillatory effect Effects 0.000 abstract 1
229910052710 silicon Inorganic materials 0.000 abstract 1
239000010703 silicon Substances 0.000 abstract 1
239000010936 titanium Substances 0.000 abstract 1
229910052719 titanium Inorganic materials 0.000 abstract 1

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3414—Targets
- H01J37/3423—Shape
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
- H01J37/3405—Magnetron sputtering
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3414—Targets
- H01J37/3426—Material
- H01J37/3429—Plural materials
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3447—Collimators, shutters, apertures

Landscapes

Physics & Mathematics (AREA)
Engineering & Computer Science (AREA)
Plasma & Fusion (AREA)
Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Physical Vapour Deposition (AREA)
Microwave Tubes (AREA)
Coating By Spraying Or Casting (AREA)
Solid Thermionic Cathode (AREA)

AT95402127T 1994-09-22 1995-09-21 Kathodenzerstäubungs-drehkathode mit mehreren targets ATE160901T1 (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
FR9411319A FR2725073B1 (fr)	1994-09-22	1994-09-22	Cathode rotative de pulverisation cathodique a plusieurs cibles

Publications (1)

Publication Number	Publication Date
ATE160901T1 true ATE160901T1 (de)	1997-12-15

Family

ID=9467173

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AT95402127T ATE160901T1 (de)	1994-09-22	1995-09-21	Kathodenzerstäubungs-drehkathode mit mehreren targets

Country Status (5)

Country	Link
EP (1)	EP0703599B1 (de)
AT (1)	ATE160901T1 (de)
DE (1)	DE69501139T2 (de)
ES (1)	ES2111378T3 (de)
FR (1)	FR2725073B1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE10213043B4 (de) *	2002-03-22	2008-10-30	Von Ardenne Anlagentechnik Gmbh	Rohrmagnetron und seine Verwendung
EP1626432A1 (de) *	2004-08-10	2006-02-15	Applied Films GmbH & Co. KG	Magnetronsputtereinrichtung, Zylinderkathode und Verfahren zur Aufbringung von dünnen Schichten aus unterschiedlichen Materialien auf einem Substrat
PL1626433T3 (pl) *	2004-08-10	2007-06-29	Applied Mat Gmbh & Co Kg	Urządzenie do rozpylania magnetronowego, cylindryczna katoda i sposób nakładania cienkich warstw wieloskładnikowych na podłoże
DE502005000983D1 (de) *	2005-05-13	2007-08-16	Applied Materials Gmbh & Co Kg	Verfahren zum Betreiben einer Sputterkathode mit einem Target
US7842355B2 (en)	2005-11-01	2010-11-30	Applied Materials, Inc.	System and method for modulation of power and power related functions of PECVD discharge sources to achieve new film properties
EP1804275B1 (de)	2005-12-22	2009-03-11	Applied Materials GmbH & Co. KG	Zerstäubungsvorrichtung mit einer Rohrkathode und Verfahren zum Betreiben dieser Zerstäubungsvorrichtung

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS57145983A (en) *	1981-03-04	1982-09-09	Murata Mfg Co Ltd	Coaxial barrel sputtering device
US4424916A (en)	1981-06-11	1984-01-10	Pearson Donald L	Toothpaste dispenser
US4443318A (en)	1983-08-17	1984-04-17	Shatterproof Glass Corporation	Cathodic sputtering apparatus
JPS63266062A (ja) *	1987-04-23	1988-11-02	Sumitomo Metal Mining Co Ltd	多元素スパツタ薄膜の製造方法及びスパツタ装置
EP0393344A1 (de)	1989-04-20	1990-10-24	Balzers Aktiengesellschaft	Haltevorrichtung für Targets von Zerstäubungsquellen und Verfahren zum Festhalten eines Targets in einer Halterung
BE1003701A3 (fr) *	1990-06-08	1992-05-26	Saint Roch Glaceries	Cathode rotative.
GB9121665D0 (en) *	1991-10-11	1991-11-27	Boc Group Plc	Sputtering processes and apparatus
JPH05263225A (ja) *	1992-03-18	1993-10-12	Asahi Glass Co Ltd	スパッタリング方法

1994
- 1994-09-22 FR FR9411319A patent/FR2725073B1/fr not_active Expired - Fee Related
1995
- 1995-09-21 DE DE69501139T patent/DE69501139T2/de not_active Expired - Fee Related
- 1995-09-21 AT AT95402127T patent/ATE160901T1/de not_active IP Right Cessation
- 1995-09-21 EP EP95402127A patent/EP0703599B1/de not_active Expired - Lifetime
- 1995-09-21 ES ES95402127T patent/ES2111378T3/es not_active Expired - Lifetime

Also Published As

Publication number	Publication date
EP0703599A1 (de)	1996-03-27
DE69501139D1 (de)	1998-01-15
ES2111378T3 (es)	1998-03-01
FR2725073B1 (fr)	1996-12-20
DE69501139T2 (de)	1998-05-28
FR2725073A1 (fr)	1996-03-29
EP0703599B1 (de)	1997-12-03

Legal Events

Date	Code	Title	Description
1998-07-15	UEP	Publication of translation of european patent specification
2010-06-15	REN	Ceased due to non-payment of the annual fee

Publication	Publication Date	Title
ATE160901T1 (de)	1997-12-15	Kathodenzerstäubungs-drehkathode mit mehreren targets
DE59009892D1 (de)	1996-01-04	Drehanoden-Röntgenröhre mit wenigstens zwei Spiralrillenlagern.
DE69124179D1 (de)	1997-02-27	Drehanoden-Röntgenröhre
FR2690007B1 (fr)	1995-01-06	Tube à rayons X à anode rotative.
DE69113382D1 (de)	1995-11-02	Drehanoden-Röntgenröhre.
DE69404422D1 (de)	1997-09-04	Drehanodenröntgenröhre
DE69306454D1 (de)	1997-01-23	Drehanoden-Röntgenröhre
NL190880C (nl)	1994-10-03	Elektronenkanon voor in-line kleurenbeeldbuis met dynamisch werkend focusseringslenzenstelsel.
DE69118473D1 (de)	1996-05-09	Drehanoden-Röntgenröhre
BE879424A (fr)	1980-04-15	Tube de rontgen, muni d'une anode rotative
JPS5559410A (en)	1980-05-02	Zoom lens barrel which permits operation in two kinds of directions
JPS5328379A (en)	1978-03-16	Electron lens device
EP0645796A3 (de)	1996-10-30	Kathodenstrahlröhre.
US5694254A (en)	1997-12-02	Lens barrel with a rotational motion transmitting portion
JPS52110578A (en)	1977-09-16	X-ray tube
DE59107296D1 (de)	1996-03-07	Drehanodenröntgenröhre
RU93051902A (ru)	1996-05-20	Гибкий рукав с выносной опорой
DE69421995D1 (de)	2000-01-13	Lautsprechergehäuse mit erweiterter Diffusion
JPS53148431A (en)	1978-12-25	Zoom lens
JPS54114992A (en)	1979-09-07	Tomogram image pick up unit
JPS5498616A (en)	1979-08-03	Lens barrel for zoom lens
KR910009952A (ko)	1991-06-28	전자빔을 이용한 진공증착용 증발장치
JPS5614215A (en)	1981-02-12	Infrared ray image pickup unit
JPS5460519A (en)	1979-05-16	Scanning section rotary device for pickup device
JPS5578442A (en)	1980-06-13	Cathode ray tube equipped with optical system