ATE169424T1 - Elektronenstrahlenanordnung für oberflächenbehandlung - Google Patents

Elektronenstrahlenanordnung für oberflächenbehandlung

Info

Publication number
ATE169424T1
ATE169424T1 AT94919218T AT94919218T ATE169424T1 AT E169424 T1 ATE169424 T1 AT E169424T1 AT 94919218 T AT94919218 T AT 94919218T AT 94919218 T AT94919218 T AT 94919218T AT E169424 T1 ATE169424 T1 AT E169424T1
Authority
AT
Austria
Prior art keywords
stripe
electron beam
segments
electron
array
Prior art date
Application number
AT94919218T
Other languages
English (en)
Inventor
George Wakalopulos
Original Assignee
American Int Tech
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by American Int Tech filed Critical American Int Tech
Application granted granted Critical
Publication of ATE169424T1 publication Critical patent/ATE169424T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/02—Vessels; Containers; Shields associated therewith; Vacuum locks
    • H01J5/18—Windows permeable to X-rays, gamma-rays, or particles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C71/00—After-treatment of articles without altering their shape; Apparatus therefor
    • B29C71/04—After-treatment of articles without altering their shape; Apparatus therefor by wave energy or particle radiation, e.g. for curing or vulcanising preformed articles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J33/00—Discharge tubes with provision for emergence of electrons or ions from the vessel; Lenard tubes
    • H01J33/02—Details
    • H01J33/04—Windows
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
    • B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
    • B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
    • B29C35/0866—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using particle radiation
    • B29C2035/0877—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using particle radiation using electron radiation, e.g. beta-rays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2007/00—Flat articles, e.g. films or sheets
    • B29L2007/008—Wide strips, e.g. films, webs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2031/00—Other particular articles
    • B29L2031/34—Electrical apparatus, e.g. sparking plugs or parts thereof
    • B29L2031/3462—Cables
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/16—Vessels
    • H01J2237/164—Particle-permeable windows

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
  • Electron Beam Exposure (AREA)
  • ing And Chemical Polishing (AREA)
AT94919218T 1993-05-26 1994-05-23 Elektronenstrahlenanordnung für oberflächenbehandlung ATE169424T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/068,052 US5414267A (en) 1993-05-26 1993-05-26 Electron beam array for surface treatment

Publications (1)

Publication Number Publication Date
ATE169424T1 true ATE169424T1 (de) 1998-08-15

Family

ID=22080124

Family Applications (1)

Application Number Title Priority Date Filing Date
AT94919218T ATE169424T1 (de) 1993-05-26 1994-05-23 Elektronenstrahlenanordnung für oberflächenbehandlung

Country Status (10)

Country Link
US (2) US5414267A (de)
EP (1) EP0704102B1 (de)
JP (1) JPH08510864A (de)
KR (1) KR100269911B1 (de)
AT (1) ATE169424T1 (de)
CA (1) CA2163554C (de)
DE (1) DE69412261T2 (de)
DK (1) DK0704102T3 (de)
TW (1) TW257892B (de)
WO (1) WO1994028573A1 (de)

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US6002202A (en) * 1996-07-19 1999-12-14 The Regents Of The University Of California Rigid thin windows for vacuum applications
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US6630774B2 (en) * 2001-03-21 2003-10-07 Advanced Electron Beams, Inc. Electron beam emitter
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US6831284B2 (en) * 2002-11-21 2004-12-14 Applied Materials, Inc. Large area source for uniform electron beam generation
JP2004207314A (ja) * 2002-12-24 2004-07-22 Tokyo Electron Ltd 膜改質の終点検出方法、その終点検出装置及び電子ビーム処理装置
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JP4401355B2 (ja) * 2003-01-28 2010-01-20 メディカル・インスティル・テクノロジーズ・インコーポレイテッド 熱シール可能なキャップを有するデバイスならびにそのデバイスを充填する装置及び方法
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Also Published As

Publication number Publication date
CA2163554A1 (en) 1994-12-08
KR100269911B1 (ko) 2000-10-16
DE69412261D1 (de) 1998-09-10
EP0704102B1 (de) 1998-08-05
EP0704102A4 (de) 1996-06-12
KR960702672A (ko) 1996-04-27
TW257892B (de) 1995-09-21
USRE35203E (en) 1996-04-09
DK0704102T3 (da) 1999-05-03
CA2163554C (en) 2003-08-19
US5414267A (en) 1995-05-09
JPH08510864A (ja) 1996-11-12
DE69412261T2 (de) 1999-04-01
WO1994028573A1 (en) 1994-12-08
EP0704102A1 (de) 1996-04-03

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