ATE180329T1 - Katalytischer gassensor - Google Patents

Katalytischer gassensor

Info

Publication number
ATE180329T1
ATE180329T1 AT94928980T AT94928980T ATE180329T1 AT E180329 T1 ATE180329 T1 AT E180329T1 AT 94928980 T AT94928980 T AT 94928980T AT 94928980 T AT94928980 T AT 94928980T AT E180329 T1 ATE180329 T1 AT E180329T1
Authority
AT
Austria
Prior art keywords
sensing structure
pct
substrate
electrically conductive
conductive track
Prior art date
Application number
AT94928980T
Other languages
English (en)
Inventor
De Vyver James Edward Van
Marysia Brodalka
Michael George Howden
Ian Robert Leith
Rosalyn Claire Pennefather
Jeremy Rex Wallis
Original Assignee
Microchip Proprietary Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Microchip Proprietary Limited filed Critical Microchip Proprietary Limited
Application granted granted Critical
Publication of ATE180329T1 publication Critical patent/ATE180329T1/de

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/14Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
    • G01N27/16Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by burning or catalytic oxidation of surrounding material to be tested, e.g. of gas
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00Investigating or analyzing materials by the use of thermal means
    • G01N25/20Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity
    • G01N25/22Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on combustion or catalytic oxidation, e.g. of components of gas mixtures
    • G01N25/28Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on combustion or catalytic oxidation, e.g. of components of gas mixtures the rise in temperature of the gases resulting from combustion being measured directly
    • G01N25/30Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on combustion or catalytic oxidation, e.g. of components of gas mixtures the rise in temperature of the gases resulting from combustion being measured directly using electric temperature-responsive elements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/122Circuits particularly adapted therefor, e.g. linearising circuits

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Electrochemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
  • Measuring Oxygen Concentration In Cells (AREA)
AT94928980T 1993-10-08 1994-10-10 Katalytischer gassensor ATE180329T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ZA937479 1993-10-08

Publications (1)

Publication Number Publication Date
ATE180329T1 true ATE180329T1 (de) 1999-06-15

Family

ID=25583298

Family Applications (1)

Application Number Title Priority Date Filing Date
AT94928980T ATE180329T1 (de) 1993-10-08 1994-10-10 Katalytischer gassensor

Country Status (8)

Country Link
US (1) US5902556A (de)
EP (1) EP0722565B1 (de)
AT (1) ATE180329T1 (de)
AU (1) AU7820194A (de)
CA (1) CA2173612A1 (de)
DE (1) DE69418615T2 (de)
WO (1) WO1995010770A1 (de)
ZA (1) ZA948200B (de)

Families Citing this family (46)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3494508B2 (ja) * 1995-06-26 2004-02-09 日本碍子株式会社 可燃性ガスセンサ、可燃性ガス濃度の測定方法及び触媒劣化検知方法
DE69630292D1 (de) * 1996-07-31 2003-11-13 St Microelectronics Srl Verfahren zur Herstellung von integrierten Halbleiteranordnungen mit chemoresistivem Gasmikrosensor
EP0882978A1 (de) 1997-06-04 1998-12-09 STMicroelectronics S.r.l. Integrierte Halbleitervorrichtung mit einem auf chemischer Widerstandsfähigkeit beruhenden Microgassensor und Verfahren zu deren Herstellung
US6248249B1 (en) * 1997-07-15 2001-06-19 Silverbrook Research Pty Ltd. Method of manufacture of a Lorenz diaphragm electromagnetic ink jet printer
US6079873A (en) * 1997-10-20 2000-06-27 The United States Of America As Represented By The Secretary Of Commerce Micron-scale differential scanning calorimeter on a chip
GB9819160D0 (en) * 1998-09-02 1998-10-28 City Tech Pellistor
US6344174B1 (en) * 1999-01-25 2002-02-05 Mine Safety Appliances Company Gas sensor
US6418784B1 (en) 1999-10-08 2002-07-16 Ford Global Technologies, Inc. Combined combustible gas sensor and temperature detector
KR20010037655A (ko) * 1999-10-19 2001-05-15 이진경 마이크로머시닝 기술에 의해 제조되는 저전력형 세라믹 가스센서 및 그 제조방법
GB2361997A (en) * 2000-05-04 2001-11-07 Bw Technologies Ltd Combustible gas detection
DE10029012C2 (de) * 2000-06-13 2002-06-06 Amtec Gmbh Mikrostruktur und Verfahren zu deren Herstellung
EP1245528A1 (de) * 2001-03-27 2002-10-02 Delta Danish Electronics, Light & Acoustics Ein einstückiges flexibles Mikrosystem und Verfahren zu dessen Herstellung
US7479255B2 (en) * 2001-11-15 2009-01-20 Riken Keiki Co., Ltd. Gas sensor
FR2835316B1 (fr) * 2002-01-28 2004-09-17 Dgtec Detecteur de gaz sur substrat mince
AU2003240513B8 (en) * 2002-06-04 2008-04-17 Scott Technologies, Inc. Combustible-gas measuring instrument
DE112005000248B4 (de) * 2004-01-27 2015-04-30 H2Scan Corp. Verfahren und Vorrichtung zur thermischen Isolation eines Gassensors
DE112005000251B4 (de) * 2004-01-27 2016-03-10 H2Scan Corp. Isolierte Gassensoranordnung
GB2415047B (en) * 2004-06-09 2008-01-02 Schlumberger Holdings Electro-chemical sensor
DE102005029841B4 (de) * 2004-07-28 2013-09-05 Robert Bosch Gmbh Mikromechanischer Drucksensor mit beheiztem Passivierungsmittel und Verfahren zu seiner Steuerung
EP1820005B1 (de) * 2004-11-24 2019-01-09 Sensirion Holding AG Verfahren zur selektiven auftragung einer schicht auf ein strukturiertes substrat durch verwendung eines temperaturgradienten im substrat
US20080098799A1 (en) * 2006-10-25 2008-05-01 Kirk Donald W Hydrogen and/or Oxygen Sensor
JP5144090B2 (ja) * 2007-02-26 2013-02-13 シチズンホールディングス株式会社 接触燃焼式ガスセンサ及び接触燃焼式ガスセンサの製造方法
KR20090064693A (ko) * 2007-12-17 2009-06-22 한국전자통신연구원 마이크로 가스 센서 및 그 제작 방법
ITMI20120276A1 (it) * 2012-02-24 2013-08-25 St Microelectronics Srl Reattore per la generazione di energia mediante reazioni lenr (low energy nuclear reactions) tra idrogeno e metalli di transizione e relativo metodo di generazione dell¿energia
RU2510499C1 (ru) * 2012-10-29 2014-03-27 Закрытое акционерное общество "Производственное объединение "Электроточприбор" Способ измерения концентрации метана и устройство для осуществления этого способа
WO2014128615A1 (en) * 2013-02-22 2014-08-28 Indian Institute Of Science A cmos chip compatible gas sensor
EP2806266B1 (de) * 2013-05-23 2017-06-14 Honeywell International Inc. Pellistor mit Einzelelement, der unempfindlich gegenüber internen und externen Störungen ist
JP6385743B2 (ja) * 2013-07-16 2018-09-05 地方独立行政法人東京都立産業技術研究センター マイクロヒータ
DE102013217465A1 (de) * 2013-09-02 2015-03-05 Continental Automotive Gmbh Sensor zur Detektion oxidierbarer Gase
KR101489891B1 (ko) * 2013-10-16 2015-02-04 한국해양대학교 산학협력단 인듐 주석 산화물 박막 센서를 이용한 해상 유류 및 위험유해물질 유출 감지장치
DE102014018681B3 (de) * 2014-12-18 2015-10-29 Dräger Safety AG & Co. KGaA Gassensor und Verfahren zur Herstellung eines Messelementes
JP2016151472A (ja) * 2015-02-17 2016-08-22 ヤマハファインテック株式会社 接触燃焼式ガスセンサ
US10234412B2 (en) 2016-11-04 2019-03-19 Msa Technology, Llc Identification of combustible gas species via pulsed operation of a combustible gas sensor
CN107941857A (zh) * 2017-10-18 2018-04-20 苏州慧闻纳米科技有限公司 一种传感器芯片及其制备方法
US10900922B2 (en) 2018-07-17 2021-01-26 Msa Technology, Llc Power reduction in combustible gas sensors
DE102018119212A1 (de) * 2018-08-07 2020-02-13 Tdk Corporation Sensorvorrichtung und elektronische Anordnung
US11873098B2 (en) * 2018-10-22 2024-01-16 Goodrich Corporation Heater design for carbon allotrope ice protection systems
WO2020117472A2 (en) 2018-12-03 2020-06-11 Carrier Corporation Combustible gas sensor
US11543396B2 (en) * 2019-06-11 2023-01-03 Msa Technology, Llc Gas sensor with separate contaminant detection element
CN110501086B (zh) * 2019-08-01 2020-09-25 电子科技大学 一种柔性温度传感器及其制备方法
US11049788B2 (en) 2019-10-18 2021-06-29 Microsoft Technology Licensing, Llc Integrated circuit chip device with thermal control
US11703473B2 (en) 2019-12-11 2023-07-18 Msa Technology, Llc Operation of combustible gas sensor in a dynamic mode with a constant resistance setpoint
US12478808B2 (en) 2020-06-29 2025-11-25 Dräger Safety AG & Co. KGaA Monitoring system
DE102021111431A1 (de) 2020-06-29 2021-12-30 Dräger Safety AG & Co. KGaA Überwachungssystem
US12292429B2 (en) 2020-06-29 2025-05-06 Dräger Safety AG & Co. KGaA Monitoring system
DE102022102969A1 (de) * 2021-02-22 2022-08-25 Dräger Safety AG & Co. KGaA Gasdetektionsvorrichtung mit einem Detektor und einem Kompensator und Gasdetektionsverfahren mit einer solchen Gasdetektionsvorrichtung

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5991350A (ja) * 1982-11-17 1984-05-26 Toyota Central Res & Dev Lab Inc 薄膜酸素センサ
JPS60243549A (ja) * 1984-05-05 1985-12-03 ゲゼルシヤフト、フユール、ゲレーテバウ、ミツト、ベシユレンクテル、ハフツング ガスの触媒燃焼用のセンサの製造方法
US4935289A (en) * 1986-09-18 1990-06-19 Kabushiki Kaisha Toshiba Gas sensor and method for production thereof
DE3844023A1 (de) * 1988-12-27 1990-06-28 Hartmann & Braun Ag Sensor zur bestimmung der gaskonzentration in einem gasgemisch durch messung der waermetoenung
JP2849395B2 (ja) * 1989-02-15 1999-01-20 株式会社リコー ガスセンサの駆動方法
CN1019331B (zh) * 1989-08-11 1992-12-02 法国煤矿公司 薄膜细丝型传感器及其制造方法和应用
GB2238617A (en) * 1989-11-28 1991-06-05 Eev Ltd Detector for flammable gases
DE4008150A1 (de) * 1990-03-14 1991-09-19 Fraunhofer Ges Forschung Katalytischer gassensor
DE4423289C1 (de) * 1994-07-02 1995-11-02 Karlsruhe Forschzent Gassensor für reduzierende oder oxidierende Gase

Also Published As

Publication number Publication date
EP0722565A1 (de) 1996-07-24
DE69418615D1 (de) 1999-06-24
US5902556A (en) 1999-05-11
WO1995010770A1 (en) 1995-04-20
DE69418615T2 (de) 1999-09-16
CA2173612A1 (en) 1995-04-20
AU7820194A (en) 1995-05-04
EP0722565B1 (de) 1999-05-19
ZA948200B (en) 1995-06-12

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