ATE180329T1 - Katalytischer gassensor - Google Patents
Katalytischer gassensorInfo
- Publication number
- ATE180329T1 ATE180329T1 AT94928980T AT94928980T ATE180329T1 AT E180329 T1 ATE180329 T1 AT E180329T1 AT 94928980 T AT94928980 T AT 94928980T AT 94928980 T AT94928980 T AT 94928980T AT E180329 T1 ATE180329 T1 AT E180329T1
- Authority
- AT
- Austria
- Prior art keywords
- sensing structure
- pct
- substrate
- electrically conductive
- conductive track
- Prior art date
Links
- 230000003197 catalytic effect Effects 0.000 title abstract 3
- 239000000758 substrate Substances 0.000 abstract 4
- 230000004888 barrier function Effects 0.000 abstract 1
- 239000011324 bead Substances 0.000 abstract 1
- 238000009792 diffusion process Methods 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
- G01N27/16—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by burning or catalytic oxidation of surrounding material to be tested, e.g. of gas
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/20—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity
- G01N25/22—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on combustion or catalytic oxidation, e.g. of components of gas mixtures
- G01N25/28—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on combustion or catalytic oxidation, e.g. of components of gas mixtures the rise in temperature of the gases resulting from combustion being measured directly
- G01N25/30—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on combustion or catalytic oxidation, e.g. of components of gas mixtures the rise in temperature of the gases resulting from combustion being measured directly using electric temperature-responsive elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/122—Circuits particularly adapted therefor, e.g. linearising circuits
Landscapes
- Chemical & Material Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Physics & Mathematics (AREA)
- Pathology (AREA)
- Electrochemistry (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
- Measuring Oxygen Concentration In Cells (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| ZA937479 | 1993-10-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE180329T1 true ATE180329T1 (de) | 1999-06-15 |
Family
ID=25583298
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT94928980T ATE180329T1 (de) | 1993-10-08 | 1994-10-10 | Katalytischer gassensor |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US5902556A (de) |
| EP (1) | EP0722565B1 (de) |
| AT (1) | ATE180329T1 (de) |
| AU (1) | AU7820194A (de) |
| CA (1) | CA2173612A1 (de) |
| DE (1) | DE69418615T2 (de) |
| WO (1) | WO1995010770A1 (de) |
| ZA (1) | ZA948200B (de) |
Families Citing this family (46)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3494508B2 (ja) * | 1995-06-26 | 2004-02-09 | 日本碍子株式会社 | 可燃性ガスセンサ、可燃性ガス濃度の測定方法及び触媒劣化検知方法 |
| DE69630292D1 (de) * | 1996-07-31 | 2003-11-13 | St Microelectronics Srl | Verfahren zur Herstellung von integrierten Halbleiteranordnungen mit chemoresistivem Gasmikrosensor |
| EP0882978A1 (de) | 1997-06-04 | 1998-12-09 | STMicroelectronics S.r.l. | Integrierte Halbleitervorrichtung mit einem auf chemischer Widerstandsfähigkeit beruhenden Microgassensor und Verfahren zu deren Herstellung |
| US6248249B1 (en) * | 1997-07-15 | 2001-06-19 | Silverbrook Research Pty Ltd. | Method of manufacture of a Lorenz diaphragm electromagnetic ink jet printer |
| US6079873A (en) * | 1997-10-20 | 2000-06-27 | The United States Of America As Represented By The Secretary Of Commerce | Micron-scale differential scanning calorimeter on a chip |
| GB9819160D0 (en) * | 1998-09-02 | 1998-10-28 | City Tech | Pellistor |
| US6344174B1 (en) * | 1999-01-25 | 2002-02-05 | Mine Safety Appliances Company | Gas sensor |
| US6418784B1 (en) | 1999-10-08 | 2002-07-16 | Ford Global Technologies, Inc. | Combined combustible gas sensor and temperature detector |
| KR20010037655A (ko) * | 1999-10-19 | 2001-05-15 | 이진경 | 마이크로머시닝 기술에 의해 제조되는 저전력형 세라믹 가스센서 및 그 제조방법 |
| GB2361997A (en) * | 2000-05-04 | 2001-11-07 | Bw Technologies Ltd | Combustible gas detection |
| DE10029012C2 (de) * | 2000-06-13 | 2002-06-06 | Amtec Gmbh | Mikrostruktur und Verfahren zu deren Herstellung |
| EP1245528A1 (de) * | 2001-03-27 | 2002-10-02 | Delta Danish Electronics, Light & Acoustics | Ein einstückiges flexibles Mikrosystem und Verfahren zu dessen Herstellung |
| US7479255B2 (en) * | 2001-11-15 | 2009-01-20 | Riken Keiki Co., Ltd. | Gas sensor |
| FR2835316B1 (fr) * | 2002-01-28 | 2004-09-17 | Dgtec | Detecteur de gaz sur substrat mince |
| AU2003240513B8 (en) * | 2002-06-04 | 2008-04-17 | Scott Technologies, Inc. | Combustible-gas measuring instrument |
| DE112005000248B4 (de) * | 2004-01-27 | 2015-04-30 | H2Scan Corp. | Verfahren und Vorrichtung zur thermischen Isolation eines Gassensors |
| DE112005000251B4 (de) * | 2004-01-27 | 2016-03-10 | H2Scan Corp. | Isolierte Gassensoranordnung |
| GB2415047B (en) * | 2004-06-09 | 2008-01-02 | Schlumberger Holdings | Electro-chemical sensor |
| DE102005029841B4 (de) * | 2004-07-28 | 2013-09-05 | Robert Bosch Gmbh | Mikromechanischer Drucksensor mit beheiztem Passivierungsmittel und Verfahren zu seiner Steuerung |
| EP1820005B1 (de) * | 2004-11-24 | 2019-01-09 | Sensirion Holding AG | Verfahren zur selektiven auftragung einer schicht auf ein strukturiertes substrat durch verwendung eines temperaturgradienten im substrat |
| US20080098799A1 (en) * | 2006-10-25 | 2008-05-01 | Kirk Donald W | Hydrogen and/or Oxygen Sensor |
| JP5144090B2 (ja) * | 2007-02-26 | 2013-02-13 | シチズンホールディングス株式会社 | 接触燃焼式ガスセンサ及び接触燃焼式ガスセンサの製造方法 |
| KR20090064693A (ko) * | 2007-12-17 | 2009-06-22 | 한국전자통신연구원 | 마이크로 가스 센서 및 그 제작 방법 |
| ITMI20120276A1 (it) * | 2012-02-24 | 2013-08-25 | St Microelectronics Srl | Reattore per la generazione di energia mediante reazioni lenr (low energy nuclear reactions) tra idrogeno e metalli di transizione e relativo metodo di generazione dell¿energia |
| RU2510499C1 (ru) * | 2012-10-29 | 2014-03-27 | Закрытое акционерное общество "Производственное объединение "Электроточприбор" | Способ измерения концентрации метана и устройство для осуществления этого способа |
| WO2014128615A1 (en) * | 2013-02-22 | 2014-08-28 | Indian Institute Of Science | A cmos chip compatible gas sensor |
| EP2806266B1 (de) * | 2013-05-23 | 2017-06-14 | Honeywell International Inc. | Pellistor mit Einzelelement, der unempfindlich gegenüber internen und externen Störungen ist |
| JP6385743B2 (ja) * | 2013-07-16 | 2018-09-05 | 地方独立行政法人東京都立産業技術研究センター | マイクロヒータ |
| DE102013217465A1 (de) * | 2013-09-02 | 2015-03-05 | Continental Automotive Gmbh | Sensor zur Detektion oxidierbarer Gase |
| KR101489891B1 (ko) * | 2013-10-16 | 2015-02-04 | 한국해양대학교 산학협력단 | 인듐 주석 산화물 박막 센서를 이용한 해상 유류 및 위험유해물질 유출 감지장치 |
| DE102014018681B3 (de) * | 2014-12-18 | 2015-10-29 | Dräger Safety AG & Co. KGaA | Gassensor und Verfahren zur Herstellung eines Messelementes |
| JP2016151472A (ja) * | 2015-02-17 | 2016-08-22 | ヤマハファインテック株式会社 | 接触燃焼式ガスセンサ |
| US10234412B2 (en) | 2016-11-04 | 2019-03-19 | Msa Technology, Llc | Identification of combustible gas species via pulsed operation of a combustible gas sensor |
| CN107941857A (zh) * | 2017-10-18 | 2018-04-20 | 苏州慧闻纳米科技有限公司 | 一种传感器芯片及其制备方法 |
| US10900922B2 (en) | 2018-07-17 | 2021-01-26 | Msa Technology, Llc | Power reduction in combustible gas sensors |
| DE102018119212A1 (de) * | 2018-08-07 | 2020-02-13 | Tdk Corporation | Sensorvorrichtung und elektronische Anordnung |
| US11873098B2 (en) * | 2018-10-22 | 2024-01-16 | Goodrich Corporation | Heater design for carbon allotrope ice protection systems |
| WO2020117472A2 (en) | 2018-12-03 | 2020-06-11 | Carrier Corporation | Combustible gas sensor |
| US11543396B2 (en) * | 2019-06-11 | 2023-01-03 | Msa Technology, Llc | Gas sensor with separate contaminant detection element |
| CN110501086B (zh) * | 2019-08-01 | 2020-09-25 | 电子科技大学 | 一种柔性温度传感器及其制备方法 |
| US11049788B2 (en) | 2019-10-18 | 2021-06-29 | Microsoft Technology Licensing, Llc | Integrated circuit chip device with thermal control |
| US11703473B2 (en) | 2019-12-11 | 2023-07-18 | Msa Technology, Llc | Operation of combustible gas sensor in a dynamic mode with a constant resistance setpoint |
| US12478808B2 (en) | 2020-06-29 | 2025-11-25 | Dräger Safety AG & Co. KGaA | Monitoring system |
| DE102021111431A1 (de) | 2020-06-29 | 2021-12-30 | Dräger Safety AG & Co. KGaA | Überwachungssystem |
| US12292429B2 (en) | 2020-06-29 | 2025-05-06 | Dräger Safety AG & Co. KGaA | Monitoring system |
| DE102022102969A1 (de) * | 2021-02-22 | 2022-08-25 | Dräger Safety AG & Co. KGaA | Gasdetektionsvorrichtung mit einem Detektor und einem Kompensator und Gasdetektionsverfahren mit einer solchen Gasdetektionsvorrichtung |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5991350A (ja) * | 1982-11-17 | 1984-05-26 | Toyota Central Res & Dev Lab Inc | 薄膜酸素センサ |
| JPS60243549A (ja) * | 1984-05-05 | 1985-12-03 | ゲゼルシヤフト、フユール、ゲレーテバウ、ミツト、ベシユレンクテル、ハフツング | ガスの触媒燃焼用のセンサの製造方法 |
| US4935289A (en) * | 1986-09-18 | 1990-06-19 | Kabushiki Kaisha Toshiba | Gas sensor and method for production thereof |
| DE3844023A1 (de) * | 1988-12-27 | 1990-06-28 | Hartmann & Braun Ag | Sensor zur bestimmung der gaskonzentration in einem gasgemisch durch messung der waermetoenung |
| JP2849395B2 (ja) * | 1989-02-15 | 1999-01-20 | 株式会社リコー | ガスセンサの駆動方法 |
| CN1019331B (zh) * | 1989-08-11 | 1992-12-02 | 法国煤矿公司 | 薄膜细丝型传感器及其制造方法和应用 |
| GB2238617A (en) * | 1989-11-28 | 1991-06-05 | Eev Ltd | Detector for flammable gases |
| DE4008150A1 (de) * | 1990-03-14 | 1991-09-19 | Fraunhofer Ges Forschung | Katalytischer gassensor |
| DE4423289C1 (de) * | 1994-07-02 | 1995-11-02 | Karlsruhe Forschzent | Gassensor für reduzierende oder oxidierende Gase |
-
1994
- 1994-10-10 EP EP94928980A patent/EP0722565B1/de not_active Expired - Lifetime
- 1994-10-10 AT AT94928980T patent/ATE180329T1/de not_active IP Right Cessation
- 1994-10-10 US US08/624,450 patent/US5902556A/en not_active Expired - Fee Related
- 1994-10-10 CA CA002173612A patent/CA2173612A1/en not_active Abandoned
- 1994-10-10 WO PCT/GB1994/002231 patent/WO1995010770A1/en not_active Ceased
- 1994-10-10 DE DE69418615T patent/DE69418615T2/de not_active Expired - Fee Related
- 1994-10-10 AU AU78201/94A patent/AU7820194A/en not_active Abandoned
- 1994-10-19 ZA ZA948200A patent/ZA948200B/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| EP0722565A1 (de) | 1996-07-24 |
| DE69418615D1 (de) | 1999-06-24 |
| US5902556A (en) | 1999-05-11 |
| WO1995010770A1 (en) | 1995-04-20 |
| DE69418615T2 (de) | 1999-09-16 |
| CA2173612A1 (en) | 1995-04-20 |
| AU7820194A (en) | 1995-05-04 |
| EP0722565B1 (de) | 1999-05-19 |
| ZA948200B (en) | 1995-06-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |