ATE184423T1 - Quecksilberlampe vom kurzbogentyp und betriebsverfahren davon - Google Patents

Quecksilberlampe vom kurzbogentyp und betriebsverfahren davon

Info

Publication number: ATE184423T1
Authority: AT; Austria
Prior art keywords: mercury lamp; cathode; hermetically sealed; arch type; type mercury
Prior art date: 1995-06-26

Application number

AT96110077T

Other languages

English (en)

Inventor

Shinkichi Morimoto

Kiyotada Nakamura

Toshiyuki Shima

Osamu Inoue

Original Assignee

Ushio Electric Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1995-06-26

Filing date

1996-06-21

Publication date

1999-09-15

1996-06-21 Application filed by Ushio Electric Inc filed Critical Ushio Electric Inc

1999-09-15 Application granted granted Critical

1999-09-15 Publication of ATE184423T1 publication Critical patent/ATE184423T1/de

Links

QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 title abstract 2
229910052753 mercury Inorganic materials 0.000 title abstract 2
230000007774 longterm Effects 0.000 abstract 1

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
- H01J61/073—Main electrodes for high-pressure discharge lamps
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/84—Lamps with discharge constricted by high pressure
- H01J61/86—Lamps with discharge constricted by high pressure with discharge additionally constricted by close spacing of electrodes, e.g. for optical projection

Landscapes

Physics & Mathematics (AREA)
Engineering & Computer Science (AREA)
Plasma & Fusion (AREA)
General Physics & Mathematics (AREA)
Discharge Lamp (AREA)
Discharge Lamps And Accessories Thereof (AREA)
Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Vessels And Coating Films For Discharge Lamps (AREA)

AT96110077T 1995-06-26 1996-06-21 Quecksilberlampe vom kurzbogentyp und betriebsverfahren davon ATE184423T1 (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP18058195A JP3158972B2 (ja)	1995-06-26	1995-06-26	ショートアーク型水銀ランプ及びその点灯方法

Publications (1)

Publication Number	Publication Date
ATE184423T1 true ATE184423T1 (de)	1999-09-15

Family

ID=16085772

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AT96110077T ATE184423T1 (de)	1995-06-26	1996-06-21	Quecksilberlampe vom kurzbogentyp und betriebsverfahren davon

Country Status (7)

Country	Link
US (1)	US5818169A (de)
EP (1)	EP0751548B1 (de)
JP (1)	JP3158972B2 (de)
KR (1)	KR100389999B1 (de)
AT (1)	ATE184423T1 (de)
DE (1)	DE69604135T2 (de)
TW (1)	TW444229B (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP3298453B2 (ja) *	1997-03-18	2002-07-02	ウシオ電機株式会社	ショートアーク型放電ランプ
JP3558597B2 (ja) *	1999-02-05	2004-08-25	松下電器産業株式会社	高圧水銀蒸気放電ランプおよびランプユニット
DE20005764U1 (de)	2000-03-30	2000-06-08	Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH, 81543 München	Kurzbogenlampe
JP3669292B2 (ja) *	2001-06-14	2005-07-06	ウシオ電機株式会社	ショートアーク型放電ランプ
JP4042605B2 (ja) *	2003-03-31	2008-02-06	ウシオ電機株式会社	キセノンランプ
JP2008506231A (ja) *	2004-07-09	2008-02-28	コーニンクレッカフィリップスエレクトロニクスエヌヴィ	高輝度放電ランプに対する電極
JP5322217B2 (ja) *	2008-12-27	2013-10-23	ウシオ電機株式会社	光源装置
JP5363174B2 (ja) *	2009-04-10	2013-12-11	株式会社ユメックス	ショートアーク型放電灯
JP2016207482A (ja) *	2015-04-23	2016-12-08	岩崎電気株式会社	ショートアーク型放電ランプ
JP2017027765A (ja)	2015-07-22	2017-02-02	セイコーエプソン株式会社	放電灯、放電灯の製造方法、光源装置、およびプロジェクター
JP2019029272A (ja) *	2017-08-02	2019-02-21	ウシオ電機株式会社	レーザ駆動ランプ

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
BE475339A (de) *	1946-06-17
US3517248A (en) *	1967-10-23	1970-06-23	Us Navy	Pressure control of electrode position in gas tube
US3621322A (en) *	1968-09-12	1971-11-16	Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh	High-pressure compact arc lamp with electrodes containing tantalum carbide
US3543076A (en) *	1968-10-31	1970-11-24	Boeing Co	Aeorodynamic arc lamp electrodes
JPS592145B2 (ja) *	1979-10-01	1984-01-17	株式会社東芝	短弧光放電灯
JPH0773001B2 (ja) *	1985-10-18	1995-08-02	東芝ライテック株式会社	投光光源装置
JPH073784B2 (ja) *	1986-10-23	1995-01-18	東芝ライテック株式会社	シヨ−トア−ク放電灯
JP2765836B2 (ja) *	1987-04-13	1998-06-18	株式会社日立製作所	露光用光源
US4988918A (en) *	1988-06-23	1991-01-29	Toshiba Lighting And Technology Corporation	Short arc discharge lamp
JPH02304857A (ja) *	1989-05-19	1990-12-18	Ushio Inc	ショートアーク型高圧水銀蒸気ランプ
JPH03274648A (ja) *	1990-03-23	1991-12-05	Ushio Inc	ショートアーク型水銀蒸気放電灯
US5258691A (en) *	1990-11-14	1993-11-02	General Electric Company	Metal halide lamp having improved operation acoustic frequencies
US5083059A (en) *	1990-12-31	1992-01-21	Welch Allyn, Inc.	Electrode for metal halide discharge lamp
JP2732458B2 (ja) *	1991-05-31	1998-03-30	ウシオ電機株式会社	ショートアーク型高圧水銀蒸気放電灯
US5497049A (en) *	1992-06-23	1996-03-05	U.S. Philips Corporation	High pressure mercury discharge lamp
US5539273A (en) *	1994-06-29	1996-07-23	Welch Allyn, Inc.	Etched electrode for metal halide discharge lamps
JP3077538B2 (ja) *	1994-11-29	2000-08-14	ウシオ電機株式会社	ショートアーク型水銀ランプ
JP3124464U (ja)	2006-06-08	2006-08-17	株式会社よし与工房	焼成容器および焼成容器補助具

1995
- 1995-06-26 JP JP18058195A patent/JP3158972B2/ja not_active Expired - Lifetime
1996
- 1996-05-20 TW TW085105953A patent/TW444229B/zh not_active IP Right Cessation
- 1996-05-28 KR KR1019960018351A patent/KR100389999B1/ko not_active Expired - Lifetime
- 1996-06-21 EP EP96110077A patent/EP0751548B1/de not_active Expired - Lifetime
- 1996-06-21 AT AT96110077T patent/ATE184423T1/de not_active IP Right Cessation
- 1996-06-21 DE DE69604135T patent/DE69604135T2/de not_active Expired - Lifetime
- 1996-06-26 US US08/670,695 patent/US5818169A/en not_active Expired - Lifetime

Also Published As

Publication number	Publication date
JP3158972B2 (ja)	2001-04-23
DE69604135D1 (de)	1999-10-14
EP0751548B1 (de)	1999-09-08
EP0751548A1 (de)	1997-01-02
KR970003386A (ko)	1997-01-28
KR100389999B1 (ko)	2003-10-04
DE69604135T2 (de)	2000-01-05
JPH0917387A (ja)	1997-01-17
TW444229B (en)	2001-07-01
US5818169A (en)	1998-10-06

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Legal Events

Date	Code	Title	Description
2000-03-15	RER	Ceased as to paragraph 5 lit. 3 law introducing patent treaties