ATE190676T1 - Galvanische abscheidungszelle mit justiervorrichtung - Google Patents
Galvanische abscheidungszelle mit justiervorrichtungInfo
- Publication number
- ATE190676T1 ATE190676T1 AT96105230T AT96105230T ATE190676T1 AT E190676 T1 ATE190676 T1 AT E190676T1 AT 96105230 T AT96105230 T AT 96105230T AT 96105230 T AT96105230 T AT 96105230T AT E190676 T1 ATE190676 T1 AT E190676T1
- Authority
- AT
- Austria
- Prior art keywords
- container
- anode
- anode container
- titanium
- wall
- Prior art date
Links
- 230000008021 deposition Effects 0.000 title 1
- 229910052719 titanium Inorganic materials 0.000 abstract 4
- 239000010936 titanium Substances 0.000 abstract 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 abstract 2
- 238000009713 electroplating Methods 0.000 abstract 2
- 239000010405 anode material Substances 0.000 abstract 1
- 239000003792 electrolyte Substances 0.000 abstract 1
- 150000002500 ions Chemical class 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D1/00—Electroforming
- C25D1/10—Moulds; Masks; Masterforms
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroplating Methods And Accessories (AREA)
- Electrolytic Production Of Metals (AREA)
- Manufacturing Optical Record Carriers (AREA)
- Physical Vapour Deposition (AREA)
- Optical Measuring Cells (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP96105230A EP0799910B1 (de) | 1996-04-01 | 1996-04-01 | Galvanische Abscheidungszelle mit Justiervorrichtung |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE190676T1 true ATE190676T1 (de) | 2000-04-15 |
Family
ID=8222639
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT96105230T ATE190676T1 (de) | 1996-04-01 | 1996-04-01 | Galvanische abscheidungszelle mit justiervorrichtung |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US5976329A (de) |
| EP (2) | EP0913500B1 (de) |
| JP (2) | JP3135128B2 (de) |
| KR (1) | KR100297459B1 (de) |
| CN (1) | CN1094156C (de) |
| AT (1) | ATE190676T1 (de) |
| DE (1) | DE59604685D1 (de) |
| TW (1) | TW344763B (de) |
| WO (1) | WO1997037061A1 (de) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SE9801773L (sv) | 1998-05-19 | 1999-06-21 | Toolex Alpha Ab | Vikbar elektropläteringsanordning |
| JP2002004076A (ja) * | 2000-06-16 | 2002-01-09 | Sony Corp | 電鋳装置 |
| US20040055873A1 (en) * | 2002-09-24 | 2004-03-25 | Digital Matrix Corporation | Apparatus and method for improved electroforming |
| EP2746433B1 (de) * | 2012-12-20 | 2016-07-20 | ATOTECH Deutschland GmbH | Vorrichtung zur vertikalen galvanischen Ablagerung eines Metalls, vorzugsweise Kupfer, auf einem Substrat und zur Aufnahme solch einer Vorrichtung geeigneter Behälter |
| EP2746432A1 (de) * | 2012-12-20 | 2014-06-25 | Atotech Deutschland GmbH | Vorrichtung zur vertikalen galvanischen Metallabscheidung auf einem Substrat |
| TWI649245B (zh) * | 2016-12-09 | 2019-02-01 | 財團法人金屬工業研究發展中心 | transmission |
| WO2024192723A1 (zh) * | 2023-03-22 | 2024-09-26 | 京东方科技集团股份有限公司 | 电化学沉积设备 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1503553A (fr) * | 1966-05-25 | 1967-12-01 | Pathe Marconi Ind Music | Cuve de travail pour la reproduction galvanique de surfaces métalliques, notamment pour l'industrie du disque phonographique |
| US3573176A (en) * | 1968-07-19 | 1971-03-30 | Rca Corp | Selective anodization apparatus and process |
| SU642382A1 (ru) * | 1976-07-28 | 1979-01-15 | Предприятие П/Я А-7501 | Установка дл локального гальванопокрыти |
| US4120771A (en) * | 1976-09-10 | 1978-10-17 | Fabrication Belge de Disques "Fabeldis" | Device for manufacturing substantially flat dies |
| US4187154A (en) * | 1976-09-10 | 1980-02-05 | Fabrication Belge de Disques "Fabeldis" | Method for manufacturing substantially flat dies |
| DE2748763A1 (de) * | 1977-10-31 | 1979-05-03 | Tscherwitschke Gmbh Richard | Galvanisieraggregat mit wahlweise austauschbaren, ankuppelbaren trommeln |
| SE8101046L (sv) * | 1981-02-16 | 1982-08-17 | Europafilm | Anordning vid anleggningar, serskilt for matrisering av grammofonskivor och dylikt |
| JPS6017089A (ja) * | 1983-07-06 | 1985-01-28 | Daicel Chem Ind Ltd | 高密度情報記録担体製造用スタンパ−の電鋳方法および装置 |
| JPH045519A (ja) * | 1990-04-23 | 1992-01-09 | Morihisa Seisakusho:Kk | タンク内の液の深さ測定方法及び測深器 |
| JP2900326B2 (ja) | 1990-11-16 | 1999-06-02 | パイオニア株式会社 | ガラス原盤電鋳用治具 |
| CN1154722A (zh) * | 1995-04-10 | 1997-07-16 | 花王株式会社 | 非电镀镀膜法和盘模的制造方法及其制造装置 |
| US5670034A (en) * | 1995-07-11 | 1997-09-23 | American Plating Systems | Reciprocating anode electrolytic plating apparatus and method |
| US5597460A (en) * | 1995-11-13 | 1997-01-28 | Reynolds Tech Fabricators, Inc. | Plating cell having laminar flow sparger |
-
1996
- 1996-04-01 EP EP99100886A patent/EP0913500B1/de not_active Expired - Lifetime
- 1996-04-01 DE DE59604685T patent/DE59604685D1/de not_active Expired - Fee Related
- 1996-04-01 EP EP96105230A patent/EP0799910B1/de not_active Expired - Lifetime
- 1996-04-01 AT AT96105230T patent/ATE190676T1/de not_active IP Right Cessation
-
1997
- 1997-04-01 JP JP09534943A patent/JP3135128B2/ja not_active Expired - Fee Related
- 1997-04-01 KR KR1019970708675A patent/KR100297459B1/ko not_active Expired - Fee Related
- 1997-04-01 WO PCT/EP1997/001639 patent/WO1997037061A1/de not_active Ceased
- 1997-04-01 CN CN971902917A patent/CN1094156C/zh not_active Expired - Fee Related
- 1997-06-07 TW TW086107879A patent/TW344763B/zh active
- 1997-10-09 US US08/973,024 patent/US5976329A/en not_active Expired - Fee Related
-
2000
- 2000-09-21 JP JP2000291962A patent/JP3267601B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP3135128B2 (ja) | 2001-02-13 |
| CN1188518A (zh) | 1998-07-22 |
| DE59604685D1 (de) | 2000-04-20 |
| EP0799910A1 (de) | 1997-10-08 |
| KR100297459B1 (ko) | 2001-10-25 |
| TW344763B (en) | 1998-11-11 |
| JP3267601B2 (ja) | 2002-03-18 |
| EP0799910B1 (de) | 2000-03-15 |
| WO1997037061A1 (de) | 1997-10-09 |
| JP2001152382A (ja) | 2001-06-05 |
| US5976329A (en) | 1999-11-02 |
| EP0913500B1 (de) | 2002-07-03 |
| JPH10506684A (ja) | 1998-06-30 |
| KR19990022196A (ko) | 1999-03-25 |
| CN1094156C (zh) | 2002-11-13 |
| EP0913500A3 (de) | 1999-06-09 |
| EP0913500A2 (de) | 1999-05-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| REN | Ceased due to non-payment of the annual fee |