ATE191585T1 - Detektoren für geladene teilchen sowie diese verwendende massenspektrometer - Google Patents

Detektoren für geladene teilchen sowie diese verwendende massenspektrometer

Info

Publication number: ATE191585T1
Authority: AT; Austria
Prior art keywords: same; charged particle; mass spectrometers; particle detectors; charged
Prior art date: 1995-09-07

Application number

AT96306426T

Other languages

English (en)

Inventor

Patrick James Turner

Raymond Clive Haines

Original Assignee

Micromass Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1995-09-07

Filing date

1996-09-05

Publication date

2000-04-15

1996-09-05 Application filed by Micromass Ltd filed Critical Micromass Ltd

2000-04-15 Application granted granted Critical

2000-04-15 Publication of ATE191585T1 publication Critical patent/ATE191585T1/de

Links

239000002245 particle Substances 0.000 title abstract 3
239000000758 substrate Substances 0.000 abstract 2
OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract 1
229910052799 carbon Inorganic materials 0.000 abstract 1
210000004027 cell Anatomy 0.000 abstract 1
230000001413 cellular effect Effects 0.000 abstract 1
210000003850 cellular structure Anatomy 0.000 abstract 1
230000000155 isotopic effect Effects 0.000 abstract 1
238000004519 manufacturing process Methods 0.000 abstract 1
239000011368 organic material Substances 0.000 abstract 1
239000002023 wood Substances 0.000 abstract 1

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/025—Detectors specially adapted to particle spectrometers

Landscapes

Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Electron Tubes For Measurement (AREA)
Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Analysing Materials By The Use Of Radiation (AREA)
Measurement Of Radiation (AREA)

AT96306426T 1995-09-07 1996-09-05 Detektoren für geladene teilchen sowie diese verwendende massenspektrometer ATE191585T1 (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
GBGB9518258.0A GB9518258D0 (en)	1995-09-07	1995-09-07	Charged-Particle detectors and mass spectrometers employing the same

Publications (1)

Publication Number	Publication Date
ATE191585T1 true ATE191585T1 (de)	2000-04-15

Family

ID=10780334

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AT96306426T ATE191585T1 (de)	1995-09-07	1996-09-05	Detektoren für geladene teilchen sowie diese verwendende massenspektrometer

Country Status (7)

Country	Link
US (2)	US5757012A (de)
EP (1)	EP0762472B1 (de)
JP (1)	JP2886508B2 (de)
AT (1)	ATE191585T1 (de)
CA (1)	CA2184963C (de)
DE (1)	DE69607543T2 (de)
GB (1)	GB9518258D0 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB9518258D0 (en) *	1995-09-07	1995-11-08	Micromass Ltd	Charged-Particle detectors and mass spectrometers employing the same
US6480278B1 (en) *	1997-12-16	2002-11-12	Stephen Douglas Fuerstenau	Method and apparatus for detection of charge on ions and particles
DE19838553B4 (de) *	1998-08-25	2010-08-12	Thermo Fisher Scientific (Bremen) Gmbh	Faraday-Auffänger zur Messung von Ionenströmen in Massenspektrometern
EP1073894B1 (de) *	1998-10-06	2010-10-06	The University Of Washington	Detektionsvorrichtung für einer strahl geladener teilchen
US6723998B2 (en) *	2000-09-15	2004-04-20	Varian Semiconductor Equipment Associates, Inc.	Faraday system for ion implanters
EP1405055A4 (de) *	2001-05-25	2007-05-23	Analytica Of Branford Inc	Mehrfachdetektionssysteme
US6815689B1 (en) *	2001-12-12	2004-11-09	Southwest Research Institute	Mass spectrometry with enhanced particle flux range
DE10258118A1 (de) *	2002-12-06	2004-07-08	Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.	Vorrichtung und Verfahren zum Messen und zur Bestimmung von Ladungsträgerströmen und davon ableitbaren Größen in ionen- und plasmagestützten Prozessen
DE10329383B4 (de) *	2003-06-30	2006-07-27	Advanced Micro Devices, Inc., Sunnyvale	Ionenstrahldetektor für Ionenimplantationsanlagen, Faraday-Behälter dafür und Verfahren zur Steuerung der Eigenschaften eines Ionenstrahls mittels des Ionenstrahldetektors
DE10329388B4 (de) *	2003-06-30	2006-12-28	Advanced Micro Devices, Inc., Sunnyvale	Faraday-Anordnung als Ionenstrahlmessvorrichtung für eine Ionenimplantationsanlage und Verfahren zu deren Betrieb
US7338683B2 (en) *	2004-05-10	2008-03-04	Superpower, Inc.	Superconductor fabrication processes
DE102005045463B4 (de) *	2005-09-22	2007-12-27	Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.	Messanordnung zur Strahlungserfassung unter Vakuumbedingungen
US8115166B2 (en)	2007-04-16	2012-02-14	Ulvac, Inc.	Method of controlling mass spectrometer and mass spectrometer
US8138473B2 (en)	2007-05-15	2012-03-20	Ulvac, Inc.	Mass spectrometry unit
DE102009048120B4 (de) *	2009-10-02	2013-08-01	Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.	Vorrichtung zum Erfassen von Umgebungs- und Betriebsparametern in Plasmen
CN108615666B (zh) *	2016-12-09	2024-04-19	上海凯世通半导体股份有限公司	束流检测装置
CN112558138B (zh) *	2020-12-07	2022-03-11	中国原子能科学研究院	质子注量率测量装置及系统
CN112687515B (zh) *	2020-12-30	2025-10-17	核工业北京地质研究院	一种法拉第杯接收器及其接收方法
CN114420528B (zh) *	2021-12-28	2024-06-11	四川红华实业有限公司	一种固定式同位素磁式质谱仪接收器及其方法
CN116031135B (zh) *	2022-12-26	2025-07-18	四川红华实业有限公司	一种封闭式法拉第接收杯结构
DE102023109164A1 (de)	2023-04-12	2024-10-17	Inficon Gmbh	Massenspektrometer zur Gasanalyse und Gasanalyseverfahren

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4811159A (en) *	1988-03-01	1989-03-07	Associated Mills Inc.	Ionizer
USRE34346E (en) *	1988-03-01	1993-08-17	Pollenex Corporation	Ionizer
DE3928836A1 (de) *	1989-06-14	1990-12-20	Finnigan Mat Gmbh	Massenspektrometer
FR2695499B1 (fr) *	1992-09-08	1997-04-30	Int Jeux	Dispositif de lecture de codes magnetiques et de codes optiques.
GB9219239D0 (en) *	1992-09-11	1992-10-28	Fisons Plc	Mass spectrometer with adjustable aperture mechanism
US5621209A (en) *	1995-04-10	1997-04-15	High Voltage Engineering Europa B.V.	Attomole detector
GB9518258D0 (en) *	1995-09-07	1995-11-08	Micromass Ltd	Charged-Particle detectors and mass spectrometers employing the same
US5650618A (en) *	1995-11-30	1997-07-22	The Regents Of The University Of California	Compact mass spectrometer for plasma discharge ion analysis

1995
- 1995-09-07 GB GBGB9518258.0A patent/GB9518258D0/en active Pending
1996
- 1996-09-05 EP EP96306426A patent/EP0762472B1/de not_active Expired - Lifetime
- 1996-09-05 AT AT96306426T patent/ATE191585T1/de active
- 1996-09-05 DE DE69607543T patent/DE69607543T2/de not_active Expired - Lifetime
- 1996-09-06 CA CA002184963A patent/CA2184963C/en not_active Expired - Lifetime
- 1996-09-06 US US08/709,089 patent/US5757012A/en not_active Expired - Lifetime
- 1996-09-09 JP JP8260283A patent/JP2886508B2/ja not_active Expired - Lifetime
1997
- 1997-10-27 US US08/958,608 patent/US5903002A/en not_active Expired - Lifetime

Also Published As

Publication number	Publication date
DE69607543D1 (de)	2000-05-11
US5903002A (en)	1999-05-11
EP0762472B1 (de)	2000-04-05
JP2886508B2 (ja)	1999-04-26
US5757012A (en)	1998-05-26
DE69607543T2 (de)	2000-12-07
GB9518258D0 (en)	1995-11-08
CA2184963A1 (en)	1997-03-08
EP0762472A1 (de)	1997-03-12
JPH09171083A (ja)	1997-06-30
CA2184963C (en)	2001-02-20

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