ATE194724T1 - Ionenquelle zur erzeugung von ionen aus gas oder dampf - Google Patents

Ionenquelle zur erzeugung von ionen aus gas oder dampf

Info

Publication number
ATE194724T1
ATE194724T1 AT96931925T AT96931925T ATE194724T1 AT E194724 T1 ATE194724 T1 AT E194724T1 AT 96931925 T AT96931925 T AT 96931925T AT 96931925 T AT96931925 T AT 96931925T AT E194724 T1 ATE194724 T1 AT E194724T1
Authority
AT
Austria
Prior art keywords
mirrors
gas
housing
space
anode
Prior art date
Application number
AT96931925T
Other languages
English (en)
Inventor
Arpad Barna
Dezso Szigethy
Original Assignee
Arpad Barna
Dezso Szigethy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Arpad Barna, Dezso Szigethy filed Critical Arpad Barna
Application granted granted Critical
Publication of ATE194724T1 publication Critical patent/ATE194724T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/04—Ion sources; Ion guns using reflex discharge, e.g. Penning ion sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/08—Ion sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/31—Processing objects on a macro-scale
    • H01J2237/3114—Machining

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Physical Vapour Deposition (AREA)
  • Electron Tubes For Measurement (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
AT96931925T 1996-09-27 1996-09-27 Ionenquelle zur erzeugung von ionen aus gas oder dampf ATE194724T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/HU1996/000054 WO1998013851A1 (en) 1996-09-27 1996-09-27 Ion source for generating ions of a gas or vapour

Publications (1)

Publication Number Publication Date
ATE194724T1 true ATE194724T1 (de) 2000-07-15

Family

ID=10987700

Family Applications (1)

Application Number Title Priority Date Filing Date
AT96931925T ATE194724T1 (de) 1996-09-27 1996-09-27 Ionenquelle zur erzeugung von ionen aus gas oder dampf

Country Status (7)

Country Link
US (1) US6236054B1 (de)
EP (1) EP0928495B1 (de)
JP (1) JP4016402B2 (de)
AT (1) ATE194724T1 (de)
AU (1) AU7092396A (de)
DE (1) DE69609358T2 (de)
WO (1) WO1998013851A1 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7838850B2 (en) 1999-12-13 2010-11-23 Semequip, Inc. External cathode ion source
EP1245036B1 (de) * 1999-12-13 2013-06-19 Semequip, Inc. Ionenquelle
US20070107841A1 (en) * 2000-12-13 2007-05-17 Semequip, Inc. Ion implantation ion source, system and method
US6525326B1 (en) * 2000-09-01 2003-02-25 Axcelis Technologies, Inc. System and method for removing particles entrained in an ion beam
RU2231162C2 (ru) * 2002-08-12 2004-06-20 Федеральное государственное унитарное предприятие Государственный научный центр Российской Федерации Институт теоретической и экспериментальной физики Источник с катодным конусом высокочастотных импульсов ионов водорода
JP5186347B2 (ja) * 2008-12-04 2013-04-17 ギガフォトン株式会社 差動排気システム
CA2755661C (en) * 2009-03-27 2017-09-26 Dh Technologies Development Pte. Ltd. Heated time of flight source
JP5872541B2 (ja) 2010-04-09 2016-03-01 イー エイ フィシオネ インストルメンツ インコーポレーテッドＥ．Ａ．Ｆｉｓｃｈｉｏｎｅ Ｉｎｓｔｒｕｍｅｎｔｓ， Ｉｎｃ． 改良型イオン源
US20140183349A1 (en) * 2012-12-27 2014-07-03 Schlumberger Technology Corporation Ion source using spindt cathode and electromagnetic confinement
US9633813B2 (en) * 2012-12-27 2017-04-25 Schlumberger Technology Corporation Ion source using heated cathode and electromagnetic confinement
US9362078B2 (en) 2012-12-27 2016-06-07 Schlumberger Technology Corporation Ion source using field emitter array cathode and electromagnetic confinement
EP2787523B1 (de) 2013-04-03 2016-02-10 Fei Company Niedrigenergieionendünnung oder -abscheidung
CN110676148B (zh) * 2019-10-12 2020-07-28 中国科学院地质与地球物理研究所 可控束斑离子发射装置及抛光蚀刻方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4423355A (en) * 1980-03-26 1983-12-27 Tokyo Shibaura Denki Kabushiki Kaisha Ion generating apparatus
FR2514946A1 (fr) * 1981-10-21 1983-04-22 Commissariat Energie Atomique Source d'ions comprenant une chambre d'ionisation a gaz avec oscillations d'electrons
HU190855B (en) * 1983-10-12 1986-11-28 Mta Mueszaki Fizikai Kutato Intezete,Hu Device for working solid samples by ion beam and ion source to the device

Also Published As

Publication number Publication date
DE69609358T2 (de) 2000-12-14
US6236054B1 (en) 2001-05-22
EP0928495B1 (de) 2000-07-12
JP4016402B2 (ja) 2007-12-05
WO1998013851A1 (en) 1998-04-02
EP0928495A1 (de) 1999-07-14
AU7092396A (en) 1998-04-17
DE69609358D1 (de) 2000-08-17
JP2001501024A (ja) 2001-01-23

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Legal Events

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