ATE194780T1 - Trockene abgasbehandlung - Google Patents

Trockene abgasbehandlung

Info

Publication number
ATE194780T1
ATE194780T1 AT89906149T AT89906149T ATE194780T1 AT E194780 T1 ATE194780 T1 AT E194780T1 AT 89906149 T AT89906149 T AT 89906149T AT 89906149 T AT89906149 T AT 89906149T AT E194780 T1 ATE194780 T1 AT E194780T1
Authority
AT
Austria
Prior art keywords
pct
date dec
sec
exhaust treatment
inlet
Prior art date
Application number
AT89906149T
Other languages
English (en)
Inventor
James Robert Smith
Peter Leslie Timms
Original Assignee
British Oxygen Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by British Oxygen Co Ltd filed Critical British Oxygen Co Ltd
Application granted granted Critical
Publication of ATE194780T1 publication Critical patent/ATE194780T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Environmental & Geological Engineering (AREA)
  • Analytical Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Treating Waste Gases (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Catalysts (AREA)
  • Exhaust Gas Treatment By Means Of Catalyst (AREA)
AT89906149T 1988-06-04 1989-05-31 Trockene abgasbehandlung ATE194780T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB888813270A GB8813270D0 (en) 1988-06-04 1988-06-04 Dry exhaust gas conditioning
PCT/GB1989/000600 WO1989011905A1 (en) 1988-06-04 1989-05-31 Dry exhaust gas conditioning

Publications (1)

Publication Number Publication Date
ATE194780T1 true ATE194780T1 (de) 2000-08-15

Family

ID=10638097

Family Applications (1)

Application Number Title Priority Date Filing Date
AT89906149T ATE194780T1 (de) 1988-06-04 1989-05-31 Trockene abgasbehandlung

Country Status (8)

Country Link
US (1) US5213767A (de)
EP (1) EP0419507B1 (de)
JP (1) JP2795504B2 (de)
KR (1) KR0125920B1 (de)
AT (1) ATE194780T1 (de)
DE (1) DE68929232T2 (de)
GB (1) GB8813270D0 (de)
WO (1) WO1989011905A1 (de)

Families Citing this family (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5417934A (en) * 1988-06-04 1995-05-23 Boc Limited Dry exhaust gas conditioning
US5582865A (en) * 1988-12-12 1996-12-10 Extraction Systems, Inc. Non-woven filter composite
US5626820A (en) * 1988-12-12 1997-05-06 Kinkead; Devon A. Clean room air filtering
GB8927314D0 (en) * 1989-12-02 1990-01-31 Plasma Products Limited Exhaust gas conditioning
US5486340A (en) * 1989-12-02 1996-01-23 The Boc Group Plc Exhaust gas conditioning
DE4233119C1 (de) * 1992-10-02 1993-12-09 Veitscher Magnesitwerke Ag Verfahren zur Reduzierung des Schadstoffgehaltes von Rauchgasen in einem Ofenaggregat
EP0611140B1 (de) * 1993-02-11 2000-06-28 The BOC Group plc Verfahren zur Reinigung von Gasströmen
US5853678A (en) * 1993-03-17 1998-12-29 Nipon Sanso Corporation Method for removing hydrides, alkoxides and alkylates out of a gas using cupric hydroxide
JP3340510B2 (ja) * 1993-05-19 2002-11-05 日本パイオニクス株式会社 有害ガスの浄化方法
US5607647A (en) * 1993-12-02 1997-03-04 Extraction Systems, Inc. Air filtering within clean environments
US5885845A (en) * 1993-12-22 1999-03-23 Nippon Sanso Corporation Method for detecting inorganic hydrides, inorganic halides and organometallic compounds in a gas using copper hydroxide
JP3280173B2 (ja) * 1994-11-29 2002-04-30 日本エア・リキード株式会社 排ガス処理装置
US5856198A (en) * 1994-12-28 1999-01-05 Extraction Systems, Inc. Performance monitoring of gas-phase air filters
US5468459A (en) * 1995-02-28 1995-11-21 The Boc Group, Inc. Gas stream treatment method for removing per-fluorocarbons
US6776970B1 (en) * 1995-08-07 2004-08-17 Giorgio Vergani Getter materials for deoxygenating ammonia/oxygen gas mixtures at low temperature
JP4037475B2 (ja) * 1996-09-04 2008-01-23 忠弘 大見 ハロゲン系化合物を含有する排ガスの処理方法
GB9608061D0 (en) 1996-04-16 1996-06-19 Boc Group Plc Removal of noxious substances from gas streams
US5928426A (en) * 1996-08-08 1999-07-27 Novellus Systems, Inc. Method and apparatus for treating exhaust gases from CVD, PECVD or plasma etch reactors
US5759498A (en) * 1996-12-12 1998-06-02 United Microelectronics Corp. Gas exhaust apparatus
US5955037A (en) * 1996-12-31 1999-09-21 Atmi Ecosys Corporation Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases
JP2002511376A (ja) 1998-04-09 2002-04-16 ユーエイチピー・マテリアルズ・インコーポレーテッド ジボランの調製および精製
KR100546282B1 (ko) * 1999-01-11 2006-01-26 삼성전자주식회사 칼슘화합물을 이용한 유해가스 정화방법
US20030049182A1 (en) * 2000-05-01 2003-03-13 Christopher Hertzler System and method for abatement of dangerous substances from a waste gas stream
US6821489B1 (en) * 2000-10-10 2004-11-23 International Business Machines Corporation System and method for abating the simultaneous flow of silane and arsine
WO2003002235A1 (en) * 2001-06-28 2003-01-09 Sued-Chemie Catalysts Japan, Inc. Treating agent for exhaust gas containing metal hydride, process for producing the same, and method of treating exhaust gas containing metal hydride
US6818566B2 (en) * 2002-10-18 2004-11-16 The Boc Group, Inc. Thermal activation of fluorine for use in a semiconductor chamber
US20040185661A1 (en) * 2003-03-17 2004-09-23 Sherer John Michael Scrubber system for pretreatment of an effluent waste stream containing arsenic
US20050053535A1 (en) * 2003-09-08 2005-03-10 Seh America, Inc. Gettering filter and associated method for removing oxygen from a gas
US20050123463A1 (en) * 2003-12-05 2005-06-09 Seeley Andrew J. Treatment of exhaust gases
US7569193B2 (en) 2003-12-19 2009-08-04 Applied Materials, Inc. Apparatus and method for controlled combustion of gaseous pollutants
US7736599B2 (en) 2004-11-12 2010-06-15 Applied Materials, Inc. Reactor design to reduce particle deposition during process abatement
US7368000B2 (en) * 2004-12-22 2008-05-06 The Boc Group Plc Treatment of effluent gases
CN101300411B (zh) * 2005-10-31 2012-10-03 应用材料公司 制程减降反应器
KR100654922B1 (ko) * 2006-01-26 2006-12-06 주식회사 코캣 반도체 제조공정으로부터 발생하는 배가스 처리장치 및방법
GB0602506D0 (en) * 2006-02-08 2006-03-22 Boc Group Plc Method of treating a gas stream
JP2008086913A (ja) * 2006-10-02 2008-04-17 Central Glass Co Ltd フッ素含有ガス中のフッ素の除去方法
US8512452B2 (en) 2008-08-19 2013-08-20 Tel Solar Ag Hot-trap assembly for trapping unreacted gas by-products
TW201016294A (en) * 2008-08-19 2010-05-01 Oerlikon Solar Ip Ag Trubbach Hot-trap assembly for trapping unreacted gas by-products using catalytically active surfaces
US20110212010A1 (en) * 2009-09-02 2011-09-01 Despatch Industries Limited Partnership Apparatus and Method for Thermal Destruction of Volatile Organic Compounds
JP5485669B2 (ja) * 2009-12-03 2014-05-07 大旺新洋株式会社 酸性ガスの中和処理方法及びその装置
EP2833989A4 (de) * 2012-03-30 2015-12-09 Fuel Tech Inc Trockenverfahren, vorrichtung, zusammensetzungen und systeme zur verringerung von schwefeloxiden und hci

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4036940A (en) * 1975-12-29 1977-07-19 Monsanto Company Recovery of iodine
SU990273A1 (ru) * 1980-12-01 1983-01-23 Ленинградский Институт Авиационного Приборостроения Способ очистки отход щих газов от паров тIсL @
JPS5949822A (ja) * 1982-09-14 1984-03-22 Nippon Sanso Kk 揮発性無機水素化物等を含有するガスの処理方法
US4442077A (en) * 1982-09-27 1984-04-10 Chemical Engineering Technology, Inc. Method of removing hydrides of phosphorus, arsenic, antimony and bismuth from hydrocarbon and non-hydrocarbon streams
DD221088A1 (de) * 1983-09-12 1985-04-17 Univ Schiller Jena Verfahren und anordnung zur entgiftung von f-kohlenstoffhaltigen abgasen
JPS61101231A (ja) * 1984-10-23 1986-05-20 Central Glass Co Ltd フツ素ガスの除去方法
GB8429709D0 (en) * 1984-11-23 1985-01-03 Alcan Int Ltd Halogen-containing organic compounds
JPS61204025A (ja) * 1985-03-06 1986-09-10 Central Glass Co Ltd Ｎｆ↓３の除害方法
US4743435A (en) * 1985-03-13 1988-05-10 Japan Pionics., Ltd. Method for cleaning exhaust gases
US4629611A (en) * 1985-04-29 1986-12-16 International Business Machines Corporation Gas purifier for rare-gas fluoride lasers
US4684510A (en) * 1985-12-20 1987-08-04 Hewlett-Packard Company Method and apparatus for prevention of atmospheric corrosion of electronic equipment
JPS62152519A (ja) * 1985-12-26 1987-07-07 Iwatani & Co ハロゲン系廃ガスの乾式処理方法
JPS6312322A (ja) * 1986-07-04 1988-01-19 Showa Denko Kk 排ガス処理方法
EP0294142B1 (de) * 1987-06-01 1992-03-25 Japan Pionics., Ltd. Verfahren zum Reinigen von Abgas
JPS6430626A (en) * 1987-07-28 1989-02-01 Ebara Res Co Ltd Treatment of exhaust gas

Also Published As

Publication number Publication date
WO1989011905A1 (en) 1989-12-14
GB8813270D0 (en) 1988-07-06
JPH04502726A (ja) 1992-05-21
DE68929232T2 (de) 2001-01-25
KR900701374A (ko) 1990-12-01
EP0419507B1 (de) 2000-07-19
JP2795504B2 (ja) 1998-09-10
KR0125920B1 (ko) 1997-12-19
DE68929232D1 (de) 2000-08-24
EP0419507A1 (de) 1991-04-03
US5213767A (en) 1993-05-25

Similar Documents

Publication Publication Date Title
ATE194780T1 (de) Trockene abgasbehandlung
DE69106285D1 (de) Termische Reaktoranlage zur Bearbeitung von Halbleiterscheiben und Betriebsverfahren eines solchem Reaktors.
TW350879B (en) Substrate processing apparatus
EG18232A (en) An improved process for the removal of acid gases from gas mixtures
GB2234232B (en) Dry processes for treating combustion exhaust gas
MY124698A (en) Fluorine abatement using steam injection in oxidation treatment of semiconductor manufacturing effluent gases
IT1238349B (it) Procedimento per eliminare composti gassosi contaminanti, in particolare di droganti da gas vettori contenenti composti di alogenosilano.
DK216089A (da) Rekombinant antistof og fremgangsmaade til dets fremstilling
ATE85764T1 (de) Verfahren zur behandlung von industriellen gasen, die schwefelverbindungen enthalten.
IT1194402B (it) Impianto per desolforare gas di combustione e procedimento per il suo funzionamento
DE59102932D1 (de) Akustische Kammer für die Aerosolbehandung von Abgasen.
JPS51129868A (en) A process for treatment of waste gas
EP1027918A4 (de) Verfahren und vorrichtung zur behandlung von abgasen aus der halbleiterherstellung
FR2513146B1 (fr) Dispositif d'abaissement de temperature et d'epuration d'un gaz au cours d'un processus de traitement
IT8223067A0 (it) Procedimento per il trattamento diprodotti finali provenienti dalla desolforazione di gas di combustione.
DK356785D0 (da) Fremgangsmaade til inhibering af carbamylering ved behandling af peptider
DE58905880D1 (de) Vorrichtung zur Reinigung von Abgasen aus CVD-Prozessen.
IT8249315A0 (it) Procedimento per trattare gas di scarico risultanti nella produzionedi silicio
IT1240462B (it) Procedimento per il trattamento di gas di scarico della combustione
DK570087A (da) Forbedringer ved et calcineringsapparat
EP0658633A3 (de) Rostfreie Stahlfolie für Katalysatorträger in Auspuffentgiftungsanlagen für Kraftfahrzeuge und Verfahren zu ihrer Herstellung.
EP0166846A3 (de) Vorrichtung zum Reinigen halogenhaltiger Schadstoffe
TW494794U (en) Exhaust gas processing device for semiconductor production process
OA07157A (fr) Procédé cryogénique pour l'enlèvement des gaz acides de mélanges de gaz qui les contiennent.
YU80387A (en) Process for making glass ampoules

Legal Events

Date Code Title Description
REN Ceased due to non-payment of the annual fee