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Priority claimed from JP56081760Aexternal-prioritypatent/JPS57196405A/ja
Priority claimed from JP56081759Aexternal-prioritypatent/JPS57196404A/ja
Application filed by Agency Ind Science Techn, Sumitomo Electric IndustriesfiledCriticalAgency Ind Science Techn
Priority claimed from EP82302756Aexternal-prioritypatent/EP0067591B1/de
Application grantedgrantedCritical
Publication of ATE19562T1publicationCriticalpatent/ATE19562T1/de