ATE196004T1 - Opto-elektronisches skalen-ablese-apparat - Google Patents

Opto-elektronisches skalen-ablese-apparat

Info

Publication number
ATE196004T1
ATE196004T1 AT95939351T AT95939351T ATE196004T1 AT E196004 T1 ATE196004 T1 AT E196004T1 AT 95939351 T AT95939351 T AT 95939351T AT 95939351 T AT95939351 T AT 95939351T AT E196004 T1 ATE196004 T1 AT E196004T1
Authority
AT
Austria
Prior art keywords
pct
scale
readhead
index grating
grating
Prior art date
Application number
AT95939351T
Other languages
English (en)
Inventor
James Reynolds Henshaw
Original Assignee
Renishaw Plc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renishaw Plc filed Critical Renishaw Plc
Application granted granted Critical
Publication of ATE196004T1 publication Critical patent/ATE196004T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Character Input (AREA)
  • Sorting Of Articles (AREA)
  • Inspection Of Paper Currency And Valuable Securities (AREA)
  • Measuring Pulse, Heart Rate, Blood Pressure Or Blood Flow (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
AT95939351T 1994-12-10 1995-12-08 Opto-elektronisches skalen-ablese-apparat ATE196004T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB9424969.5A GB9424969D0 (en) 1994-12-10 1994-12-10 Opto-electronic scale reading apparatus
PCT/GB1995/002864 WO1996018868A1 (en) 1994-12-10 1995-12-08 Opto-electronic scale reading apparatus

Publications (1)

Publication Number Publication Date
ATE196004T1 true ATE196004T1 (de) 2000-09-15

Family

ID=10765744

Family Applications (1)

Application Number Title Priority Date Filing Date
AT95939351T ATE196004T1 (de) 1994-12-10 1995-12-08 Opto-elektronisches skalen-ablese-apparat

Country Status (6)

Country Link
US (1) US5861953A (de)
EP (1) EP0748436B1 (de)
AT (1) ATE196004T1 (de)
DE (1) DE69518630T2 (de)
GB (1) GB9424969D0 (de)
WO (1) WO1996018868A1 (de)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9924331D0 (en) * 1999-10-15 1999-12-15 Renishaw Plc Scale reading apparatus
GB0004120D0 (en) * 2000-02-23 2000-04-12 Renishaw Plc Opto-electronic scale reading apparatus
CN101061371A (zh) * 2004-11-22 2007-10-24 皇家飞利浦电子股份有限公司 探测物体的运动的光学系统
GB0608812D0 (en) * 2006-05-04 2006-06-14 Renishaw Plc Rotary encoder apparatus
EP2058630A1 (de) 2007-11-12 2009-05-13 FAGOR, S.Coop. Lesekopf für ein optoelektronisches Messgerät
ATE498825T1 (de) * 2009-03-02 2011-03-15 Fagor S Coop Lesekopf für ein optisches positionsmessgerät
US8772706B2 (en) * 2012-04-20 2014-07-08 Mitutoyo Corporation Multiple wavelength configuration for an optical encoder readhead including dual optical path region with an optical path length difference
GB201301186D0 (en) 2012-12-20 2013-03-06 Renishaw Plc Optical element
US10281301B2 (en) 2013-10-01 2019-05-07 Renishaw Plc Reference mark detector arrangement
EP3052896A1 (de) 2013-10-01 2016-08-10 Renishaw Plc. Positionsmessungscodierer
JP6811610B2 (ja) 2013-10-01 2021-01-13 レニショウ パブリック リミテッド カンパニーＲｅｎｉｓｈａｗ Ｐｕｂｌｉｃ Ｌｉｍｉｔｅｄ Ｃｏｍｐａｎｙ 電子コンポーネントを製造する方法
CN105814408B (zh) 2013-10-01 2018-06-12 瑞尼斯豪公司 编码器设备和编码器读头
JP6818550B2 (ja) 2013-11-05 2021-01-20 レニショウ パブリック リミテッド カンパニーＲｅｎｉｓｈａｗ Ｐｕｂｌｉｃ Ｌｉｍｉｔｅｄ Ｃｏｍｐａｎｙ 位置測定エンコーダキャリブレーション
WO2015078860A1 (en) 2013-11-26 2015-06-04 Renishaw Plc Metrological scale
DE102015209716B4 (de) * 2014-05-29 2023-04-20 Mitutoyo Corporation Optischer Codierer mit anpassbarer Auflösung
NL2015639A (en) * 2014-11-28 2016-09-20 Asml Netherlands Bv Encoder, position measurement system and lithographic apparatus.
CN108351229B (zh) 2015-09-09 2021-03-26 瑞尼斯豪公司 编码器装置
GB201916662D0 (en) 2019-11-15 2020-01-01 Renishaw Plc Encoder apparatus
GB201916641D0 (en) 2019-11-15 2020-01-01 Renishaw Plc Position measurement device
CN117813481A (zh) 2021-08-12 2024-04-02 瑞尼斯豪公司 位置编码器装置
EP4134633A1 (de) 2021-08-12 2023-02-15 Renishaw PLC Positionscodierer
WO2024134156A1 (en) 2022-12-20 2024-06-27 Renishaw Plc Encoder apparatus
EP4390327A1 (de) 2022-12-20 2024-06-26 Renishaw PLC Kodiergerät
EP4390325A1 (de) 2022-12-20 2024-06-26 Renishaw PLC Kodiergerät
EP4390326A1 (de) 2022-12-20 2024-06-26 Renishaw PLC Kodiergerät
EP4414664A1 (de) 2023-02-09 2024-08-14 Renishaw PLC Rotierende kodiervorrichtung
EP4484898A1 (de) 2023-06-29 2025-01-01 Renishaw PLC Kodiergerät

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH601799A5 (de) * 1974-01-12 1978-07-14 Leitz Ernst Gmbh
DE2605670A1 (de) * 1976-02-13 1977-08-18 Zeiss Carl Fa Einrichtung zur erzeugung phasenverschobener elektrischer signale
DE3322738C1 (de) * 1983-06-24 1984-10-18 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Lichtelektrische Längen- oder Winkelmeßeinrichtung
GB8320629D0 (en) * 1983-07-30 1983-09-01 Pa Consulting Services Displacement measuring apparatus
GB8432574D0 (en) * 1984-12-22 1985-02-06 Renishaw Plc Opto-electronic scale-reading apparatus
GB8616240D0 (en) * 1986-07-03 1986-08-13 Renishaw Plc Opto-electronic scale reading apparatus
DE3872227T2 (de) * 1987-12-15 1992-12-03 Renishaw Plc Opto-elektronischer skalenlese-apparat.
US4979827A (en) * 1988-02-26 1990-12-25 Kabushiki Kaisha Okuma Tekkosho Optical linear encoder
DE3905730C2 (de) * 1989-02-24 1995-06-14 Heidenhain Gmbh Dr Johannes Positionsmeßeinrichtung
EP0543513B2 (de) * 1991-11-06 2007-10-24 Renishaw Transducer Systems Limited Opto-elektronischer Skalenleseapparat

Also Published As

Publication number Publication date
DE69518630D1 (de) 2000-10-05
EP0748436A1 (de) 1996-12-18
EP0748436B1 (de) 2000-08-30
DE69518630T2 (de) 2001-01-11
GB9424969D0 (en) 1995-02-08
US5861953A (en) 1999-01-19
WO1996018868A1 (en) 1996-06-20

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UEP Publication of translation of european patent specification