ATE196012T1 - Kraftmessaufnehmer - Google Patents

Kraftmessaufnehmer

Info

Publication number
ATE196012T1
ATE196012T1 AT96850074T AT96850074T ATE196012T1 AT E196012 T1 ATE196012 T1 AT E196012T1 AT 96850074 T AT96850074 T AT 96850074T AT 96850074 T AT96850074 T AT 96850074T AT E196012 T1 ATE196012 T1 AT E196012T1
Authority
AT
Austria
Prior art keywords
silicon
spring means
sensor device
force sensor
vibration
Prior art date
Application number
AT96850074T
Other languages
English (en)
Inventor
Henrik Jakobsen
Terje Kvisteroy
Original Assignee
Sensonor Asa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sensonor Asa filed Critical Sensonor Asa
Application granted granted Critical
Publication of ATE196012T1 publication Critical patent/ATE196012T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V1/00—Seismology; Seismic or acoustic prospecting or detecting
    • G01V1/16—Receiving elements for seismic signals; Arrangements or adaptations of receiving elements
    • G01V1/18—Receiving elements, e.g. seismometer, geophone or torque detectors, for localised single point measurements
    • G01V1/186—Hydrophones
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V1/00—Seismology; Seismic or acoustic prospecting or detecting
    • G01V1/16—Receiving elements for seismic signals; Arrangements or adaptations of receiving elements
    • G01V1/18—Receiving elements, e.g. seismometer, geophone or torque detectors, for localised single point measurements
    • G01V1/181—Geophones

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Remote Sensing (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Geology (AREA)
  • Acoustics & Sound (AREA)
  • Geophysics (AREA)
  • Micromachines (AREA)
  • Measuring Fluid Pressure (AREA)
  • Steering Control In Accordance With Driving Conditions (AREA)
  • Air Bags (AREA)
  • Push-Button Switches (AREA)
  • Pressure Sensors (AREA)
AT96850074T 1995-04-12 1996-04-11 Kraftmessaufnehmer ATE196012T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US42167395A 1995-04-12 1995-04-12

Publications (1)

Publication Number Publication Date
ATE196012T1 true ATE196012T1 (de) 2000-09-15

Family

ID=23671552

Family Applications (1)

Application Number Title Priority Date Filing Date
AT96850074T ATE196012T1 (de) 1995-04-12 1996-04-11 Kraftmessaufnehmer

Country Status (5)

Country Link
EP (1) EP0737864B1 (de)
JP (1) JP3186975B2 (de)
KR (1) KR100239113B1 (de)
AT (1) ATE196012T1 (de)
DE (1) DE69610013T2 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4522143B2 (ja) * 2004-05-20 2010-08-11 キヤノン株式会社 真空計
EP1923674A1 (de) * 2006-11-14 2008-05-21 Infineon Technologies SensoNor AS Rückstrahlung Sensor
FR2917731B1 (fr) * 2007-06-25 2009-10-23 Commissariat Energie Atomique Dispositif resonant a detection piezoresistive realise en technologies de surface
RU2467296C1 (ru) * 2011-07-26 2012-11-20 Открытое акционерное общество "Авангард" Силоизмерительное устройство
CN109850840B (zh) * 2018-12-29 2024-09-06 杭州士兰集成电路有限公司 Mems器件及其制造方法
CN111654993B (zh) * 2020-05-22 2021-11-05 中国航空工业集团公司西安航空计算技术研究所 一种模块等质量变刚度方法及等质量变刚度模块
CN116216630B (zh) * 2023-04-28 2023-07-21 润芯感知科技(南昌)有限公司 一种半导体器件及其制造方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1596982A (en) * 1978-02-21 1981-09-03 Standard Telephones Cables Ltd Mechanical resonator arrangements
US4805456A (en) 1987-05-19 1989-02-21 Massachusetts Institute Of Technology Resonant accelerometer
GB2215053B (en) 1988-02-13 1991-09-11 Stc Plc Transducer device
DE3814952A1 (de) * 1988-05-03 1989-11-23 Bosch Gmbh Robert Sensor
EP0614087B1 (de) * 1993-03-01 2000-03-29 Murata Manufacturing Co., Ltd. Piezoelektrischer Vibrator und diesen verwendenden Beschleunigungssensor
FR2720509B1 (fr) 1994-05-27 1996-08-23 Sextant Avionique Microaccéléromètre à résonateur compensé en température.

Also Published As

Publication number Publication date
JPH08292207A (ja) 1996-11-05
DE69610013T2 (de) 2001-01-11
DE69610013D1 (de) 2000-10-05
EP0737864B1 (de) 2000-08-30
JP3186975B2 (ja) 2001-07-11
KR100239113B1 (ko) 2000-01-15
EP0737864A1 (de) 1996-10-16

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties