ATE212714T1 - OPTICAL POSITION MEASURING DEVICE - Google Patents

OPTICAL POSITION MEASURING DEVICE

Info

Publication number
ATE212714T1
ATE212714T1 AT97943885T AT97943885T ATE212714T1 AT E212714 T1 ATE212714 T1 AT E212714T1 AT 97943885 T AT97943885 T AT 97943885T AT 97943885 T AT97943885 T AT 97943885T AT E212714 T1 ATE212714 T1 AT E212714T1
Authority
AT
Austria
Prior art keywords
scanning
pct
graduation
plate
fields
Prior art date
Application number
AT97943885T
Other languages
German (de)
Inventor
Walter Huber
Original Assignee
Heidenhain Gmbh Dr Johannes
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heidenhain Gmbh Dr Johannes filed Critical Heidenhain Gmbh Dr Johannes
Application granted granted Critical
Publication of ATE212714T1 publication Critical patent/ATE212714T1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
  • Body Structure For Vehicles (AREA)
  • Vehicle Body Suspensions (AREA)
  • Eye Examination Apparatus (AREA)

Abstract

PCT No. PCT/EP97/05211 Sec. 371 Date Jun. 21, 1999 Sec. 102(e) Date Jun. 21, 1999 PCT Filed Sep. 23, 1997 PCT Pub. No. WO98/16802 PCT Pub. Date Apr. 23, 1998An optical position measuring system that has a scale graduation with a graduation period, TP, and connected with a first object that has a graduation and a scanning unit connected to a second object that moves relative to the first object, so that there is a displacement between the scale graduation and the scanning unit. The scanning unit includes a scanning plate with a first and second scanning fields that are arranged offset from each other in a measuring direction (x) by a distance, D. A first deflection element associated with the first scanning field and a second deflection element associated with the second scanning field, wherein the first and second deflection elements spatially separate the phase-shifted partial signals from the first and second scanning fields. First and second detector elements are placed downstream of the scanning plate and associated with the first scanning field. Third and fourth detector elements are placed downstream of the scanning plate and associated with the second scanning field. The first and second scanning fields are arranged on the scanning plate so that the offset distance D=TP/2*(N++E,fra 1/4+EE ), wherein N=0, 1, 2, . . .
AT97943885T 1996-10-16 1997-09-23 OPTICAL POSITION MEASURING DEVICE ATE212714T1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19642680 1996-10-16
PCT/EP1997/005211 WO1998016802A1 (en) 1996-10-16 1997-09-23 Optical position indicator

Publications (1)

Publication Number Publication Date
ATE212714T1 true ATE212714T1 (en) 2002-02-15

Family

ID=7808916

Family Applications (1)

Application Number Title Priority Date Filing Date
AT97943885T ATE212714T1 (en) 1996-10-16 1997-09-23 OPTICAL POSITION MEASURING DEVICE

Country Status (6)

Country Link
US (1) US6151128A (en)
EP (1) EP0932819B1 (en)
JP (1) JP3999274B2 (en)
AT (1) ATE212714T1 (en)
DE (2) DE59706261D1 (en)
WO (1) WO1998016802A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10333772A1 (en) * 2002-08-07 2004-02-26 Dr. Johannes Heidenhain Gmbh Interference-based position measurement instrument detects the relative movement of measurement and scanning gratings in that a periodic interference band pattern is generated from which phase shifts and positions are measured
US9212990B1 (en) 2011-12-06 2015-12-15 Zybertec Llc System and methods for molecular detection using intracavity laser absorption spectroscopy
JP6664211B2 (en) * 2015-12-22 2020-03-13 株式会社ミツトヨ Encoder
JP6705649B2 (en) * 2015-12-22 2020-06-03 株式会社ミツトヨ Encoder

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3239108A1 (en) * 1982-10-22 1984-04-26 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut POSITION MEASUREMENT METHOD AND DEVICES FOR CARRYING OUT THE METHOD
GB8413955D0 (en) * 1984-05-31 1984-07-04 Pa Consulting Services Displacement measuring apparatus
DE3541199C1 (en) * 1985-11-21 1987-06-25 Heidenhain Gmbh Dr Johannes Photoelectric position measuring device
US5283434A (en) * 1991-12-20 1994-02-01 Canon Kabushiki Kaisha Displacement detecting device with integral optics
JP3005131B2 (en) * 1992-12-28 2000-01-31 キヤノン株式会社 Displacement detector
DE4316221C2 (en) * 1993-05-14 1995-11-23 Heidenhain Gmbh Dr Johannes Position measuring device
JP3196459B2 (en) * 1993-10-29 2001-08-06 キヤノン株式会社 Rotary encoder
DE59305801D1 (en) * 1993-12-08 1997-04-17 Heidenhain Gmbh Dr Johannes Length measuring system
JP3513251B2 (en) * 1994-03-14 2004-03-31 キヤノン株式会社 Optical displacement sensor
DE19507613C2 (en) * 1995-03-04 1997-01-23 Heidenhain Gmbh Dr Johannes Length or angle measuring device
DE19521295C2 (en) * 1995-06-10 2000-07-13 Heidenhain Gmbh Dr Johannes Photoelectric position measuring device
DE59508231D1 (en) * 1995-06-22 2000-05-31 Heidenhain Gmbh Dr Johannes Position measuring device

Also Published As

Publication number Publication date
WO1998016802A1 (en) 1998-04-23
JP2001502423A (en) 2001-02-20
DE19741848A1 (en) 1998-04-23
JP3999274B2 (en) 2007-10-31
DE59706261D1 (en) 2002-03-14
EP0932819A1 (en) 1999-08-04
EP0932819B1 (en) 2002-01-30
US6151128A (en) 2000-11-21

Similar Documents

Publication Publication Date Title
US5747995A (en) Magnetic position measuring device using Hall elements as sensors and method for its operation
JP3168451B2 (en) Rotary encoder
ATE56091T1 (en) POSITION MEASUREMENT DEVICE.
DE69633067D1 (en) MULTI-DIMENSIONAL CAPACITIVE SENSOR
EP1111345A3 (en) Position measuring device
DE59403609D1 (en) Position measuring device
FR2786266B1 (en) POSITION SENSOR WITH HALL PROBE
DE69215760D1 (en) Cross correlation alignment system for an image sensor
DE69622256D1 (en) ARRANGEMENT FOR SEQUENTIAL MEASUREMENT OF BIOLOGICAL EVENTS
TW200609812A (en) Optical position sensing device including interlaced groups of photosensitive elements
EP0731340A3 (en) Length- or anglemeasuring device
DE69112045D1 (en) LONG-STROKE MULTI-MAGNET POSITION MEASURING PROBE.
CA2070738C (en) Linear displacement and strain measuring apparatus
ATE426795T1 (en) POSITION MEASURING METHOD AND POSITION MEASURING SYSTEM FOR SIGNAL PERIOD MULTIPLY
ATE263360T1 (en) PHOTOELECTRIC PATH AND ANGLE MEASURING SYSTEM FOR MEASURING THE DISPLACEMENT OF TWO OBJECTS TO EACH OTHER
FR2794504B1 (en) BEARING EQUIPPED WITH AN INFORMATION SENSOR DEVICE
ATE212714T1 (en) OPTICAL POSITION MEASURING DEVICE
ATE192566T1 (en) POSITION MEASURING DEVICE
SE9803702L (en) Measurement system with an inertial measurement device
MY123940A (en) Magnetic position sensor
ATE92180T1 (en) INCREMENTAL LENGTH OR ANGLE MEASUREMENT DEVICE.
DE50211460D1 (en) OPTICAL POSITION MEASURING DEVICE
ATE59470T1 (en) MEASURING DEVICE.
ATE200573T1 (en) LENGTH MEASURING DEVICE FOR MEASURING THE RELATIVE POSITION OF TWO OBJECTS
FR2696233B1 (en) Incremental sensor with fault signaling.

Legal Events

Date Code Title Description
REN Ceased due to non-payment of the annual fee