ATE215755T1 - Vorrichtung und verfahren zur anpassung einer last an eine quelle - Google Patents

Vorrichtung und verfahren zur anpassung einer last an eine quelle

Info

Publication number
ATE215755T1
ATE215755T1 AT97952597T AT97952597T ATE215755T1 AT E215755 T1 ATE215755 T1 AT E215755T1 AT 97952597 T AT97952597 T AT 97952597T AT 97952597 T AT97952597 T AT 97952597T AT E215755 T1 ATE215755 T1 AT E215755T1
Authority
AT
Austria
Prior art keywords
load
parameters
power source
match
electrical characteristics
Prior art date
Application number
AT97952597T
Other languages
English (en)
Inventor
Norman Williams
Russel F Jewett Jr
Original Assignee
Lam Res Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Res Corp filed Critical Lam Res Corp
Application granted granted Critical
Publication of ATE215755T1 publication Critical patent/ATE215755T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H01J37/32183—Matching circuits
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
    • H03H7/38—Impedance-matching networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
    • H03H7/38—Impedance-matching networks
    • H03H7/40—Automatic matching of load impedance to source impedance

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Drying Of Semiconductors (AREA)
  • Amplifiers (AREA)
  • Control Of Electrical Variables (AREA)
  • Control Of Voltage And Current In General (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
AT97952597T 1996-12-19 1997-12-19 Vorrichtung und verfahren zur anpassung einer last an eine quelle ATE215755T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/770,622 US5889252A (en) 1996-12-19 1996-12-19 Method of and apparatus for independently controlling electric parameters of an impedance matching network
PCT/US1997/023716 WO1998027646A1 (en) 1996-12-19 1997-12-19 Method of and apparatus for matching a load to a source

Publications (1)

Publication Number Publication Date
ATE215755T1 true ATE215755T1 (de) 2002-04-15

Family

ID=25089187

Family Applications (1)

Application Number Title Priority Date Filing Date
AT97952597T ATE215755T1 (de) 1996-12-19 1997-12-19 Vorrichtung und verfahren zur anpassung einer last an eine quelle

Country Status (9)

Country Link
US (1) US5889252A (de)
EP (1) EP0947047B1 (de)
JP (1) JP2001507181A (de)
KR (1) KR100490033B1 (de)
AT (1) ATE215755T1 (de)
AU (1) AU5617198A (de)
DE (1) DE69711691T2 (de)
TW (1) TW355865B (de)
WO (1) WO1998027646A1 (de)

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Also Published As

Publication number Publication date
AU5617198A (en) 1998-07-15
WO1998027646A1 (en) 1998-06-25
KR100490033B1 (ko) 2005-05-17
DE69711691D1 (de) 2002-05-08
EP0947047A1 (de) 1999-10-06
KR20000069545A (ko) 2000-11-25
DE69711691T2 (de) 2002-10-17
JP2001507181A (ja) 2001-05-29
US5889252A (en) 1999-03-30
EP0947047B1 (de) 2002-04-03
TW355865B (en) 1999-04-11

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