ATE216506T1 - Herstellung von bedeckten mikrokanälen - Google Patents

Herstellung von bedeckten mikrokanälen

Info

Publication number
ATE216506T1
ATE216506T1 AT97906891T AT97906891T ATE216506T1 AT E216506 T1 ATE216506 T1 AT E216506T1 AT 97906891 T AT97906891 T AT 97906891T AT 97906891 T AT97906891 T AT 97906891T AT E216506 T1 ATE216506 T1 AT E216506T1
Authority
AT
Austria
Prior art keywords
substrate
filler
groove
covered microchannel
covered
Prior art date
Application number
AT97906891T
Other languages
English (en)
Inventor
Steve D Jons
Paul J O'connor
Ing-Fen Hu
Original Assignee
Univ Washington
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Washington filed Critical Univ Washington
Application granted granted Critical
Publication of ATE216506T1 publication Critical patent/ATE216506T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/60—Construction of the column
    • G01N30/6095—Micromachined or nanomachined, e.g. micro- or nanosize
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/416—Systems
    • G01N27/447—Systems using electrophoresis
    • G01N27/44756—Apparatus specially adapted therefor
    • G01N27/44791—Microapparatus
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0035—Multiple processes, e.g. applying a further resist layer on an already in a previously step, processed pattern or textured surface

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Molecular Biology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Nanotechnology (AREA)
  • Dispersion Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Micromachines (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Materials For Medical Uses (AREA)
AT97906891T 1996-02-02 1997-01-30 Herstellung von bedeckten mikrokanälen ATE216506T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/595,683 US5783452A (en) 1996-02-02 1996-02-02 Covered microchannels and the microfabrication thereof
PCT/US1997/001794 WO1997028490A1 (en) 1996-02-02 1997-01-30 Covered microchannels and the microfabrication thereof

Publications (1)

Publication Number Publication Date
ATE216506T1 true ATE216506T1 (de) 2002-05-15

Family

ID=24384241

Family Applications (1)

Application Number Title Priority Date Filing Date
AT97906891T ATE216506T1 (de) 1996-02-02 1997-01-30 Herstellung von bedeckten mikrokanälen

Country Status (6)

Country Link
US (1) US5783452A (de)
EP (1) EP0877972B1 (de)
AT (1) ATE216506T1 (de)
AU (1) AU2257797A (de)
DE (1) DE69712041T2 (de)
WO (1) WO1997028490A1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9715101D0 (en) 1997-07-18 1997-09-24 Environmental Sensors Ltd The production of microstructures for analysis of fluids
US6454840B1 (en) 1998-08-20 2002-09-24 Siemens Aktiengesellschaft Separation-column unit for a gas-chromatograph and method for making the same
US6096656A (en) * 1999-06-24 2000-08-01 Sandia Corporation Formation of microchannels from low-temperature plasma-deposited silicon oxynitride
WO2001017797A1 (en) * 1999-09-10 2001-03-15 Caliper Technologies Corp. Microfabrication methods and devices
DE10060433B4 (de) * 2000-12-05 2006-05-11 Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. Verfahren zur Herstellung eines Fluidbauelements, Fluidbauelement und Analysevorrichtung
US6649078B2 (en) * 2000-12-06 2003-11-18 The Regents Of The University Of California Thin film capillary process and apparatus
US7169577B2 (en) 2001-07-27 2007-01-30 Surface Logix, Inc. Cell isolation and screening device and method of using same
US7285412B2 (en) 2001-07-27 2007-10-23 Surface Logix Inc. Device for magnetic immobilization of cells
US7169578B2 (en) 2001-07-27 2007-01-30 Surface Logix, Inc. Cell isolation and screening device and method of using same
WO2004011144A2 (en) * 2002-07-29 2004-02-05 Dumas David P Transparent polymer support for electrophoresis and electrochromatography and related methods
JP2004253791A (ja) * 2003-01-29 2004-09-09 Nec Electronics Corp 絶縁膜およびそれを用いた半導体装置
US20080217796A1 (en) 2005-08-23 2008-09-11 Koninklijke Philips Electronics, N.V. Method for Manufacturing a Component Having a Three-Dimensional Structure in a Surface Region and a Ceramic Component

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3615913A (en) * 1968-11-08 1971-10-26 Westinghouse Electric Corp Polyimide and polyamide-polyimide as a semiconductor surface passivator and protectant coating
US3895429A (en) * 1974-05-09 1975-07-22 Rca Corp Method of making a semiconductor device
JPS61233365A (ja) * 1984-12-15 1986-10-17 Sord Comput Corp キヤピラリイ・カラム用基板
JPS61210631A (ja) * 1985-03-14 1986-09-18 Fujitsu Ltd 超微細管
US5116495A (en) * 1987-09-11 1992-05-26 Ottosensors Corporation Capillary chromatography device
US5205902A (en) * 1989-08-18 1993-04-27 Galileo Electro-Optics Corporation Method of manufacturing microchannel electron multipliers
US5128737A (en) * 1990-03-02 1992-07-07 Silicon Dynamics, Inc. Semiconductor integrated circuit fabrication yield improvements
US5298587A (en) * 1992-12-21 1994-03-29 The Dow Chemical Company Protective film for articles and method
DE4400315C1 (de) * 1994-01-07 1995-01-12 Kernforschungsz Karlsruhe Verfahren zum stufenweisen Aufbau von Mikrostrukturkörpern und damit hergestellter Mikrostrukturkörper
US5575929A (en) * 1995-06-05 1996-11-19 The Regents Of The University Of California Method for making circular tubular channels with two silicon wafers

Also Published As

Publication number Publication date
EP0877972A1 (de) 1998-11-18
EP0877972B1 (de) 2002-04-17
WO1997028490A1 (en) 1997-08-07
AU2257797A (en) 1997-08-22
DE69712041T2 (de) 2002-11-28
DE69712041D1 (de) 2002-05-23
US5783452A (en) 1998-07-21

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Legal Events

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