ATE218194T1 - Mikroejektionspumpe - Google Patents

Mikroejektionspumpe

Info

Publication number
ATE218194T1
ATE218194T1 AT97951842T AT97951842T ATE218194T1 AT E218194 T1 ATE218194 T1 AT E218194T1 AT 97951842 T AT97951842 T AT 97951842T AT 97951842 T AT97951842 T AT 97951842T AT E218194 T1 ATE218194 T1 AT E218194T1
Authority
AT
Austria
Prior art keywords
pump
chamber
pump chamber
silicon
designed
Prior art date
Application number
AT97951842T
Other languages
English (en)
Inventor
Steffen Howitz
Mario Buerger
Thomas Wegener
Thomas Gehring
Original Assignee
Gesim Ges Fuer Silizium Mikros
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=7814406&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ATE218194(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Gesim Ges Fuer Silizium Mikros filed Critical Gesim Ges Fuer Silizium Mikros
Application granted granted Critical
Publication of ATE218194T1 publication Critical patent/ATE218194T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/08—Cooling; Heating; Preventing freezing

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
AT97951842T 1996-12-11 1997-12-11 Mikroejektionspumpe ATE218194T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19651568 1996-12-11
PCT/DE1997/002874 WO1998026179A1 (de) 1996-12-11 1997-12-11 Mikroejektionspumpe

Publications (1)

Publication Number Publication Date
ATE218194T1 true ATE218194T1 (de) 2002-06-15

Family

ID=7814406

Family Applications (1)

Application Number Title Priority Date Filing Date
AT97951842T ATE218194T1 (de) 1996-12-11 1997-12-11 Mikroejektionspumpe

Country Status (6)

Country Link
US (1) US6179584B1 (de)
EP (1) EP0956449B1 (de)
JP (1) JP2001505640A (de)
AT (1) ATE218194T1 (de)
DE (2) DE29724735U1 (de)
WO (1) WO1998026179A1 (de)

Families Citing this family (55)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1164203B1 (de) 1996-11-06 2007-10-10 Sequenom, Inc. DNA-Diagnostik mittels Massenspektrometrie
US7285422B1 (en) 1997-01-23 2007-10-23 Sequenom, Inc. Systems and methods for preparing and analyzing low volume analyte array elements
RU2143596C1 (ru) * 1998-09-08 1999-12-27 Попов Сергей Анатольевич Жидкостно-газовый эжектор
DE19913076A1 (de) 1999-03-23 2000-10-19 Hahn Schickard Ges Vorrichtung und Verfahren zum Aufbringen von Mikrotröpfchen auf ein Substrat
EP1128075A3 (de) * 2000-02-24 2003-10-29 Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V. Mikropumpe und/oder Mikromischer mit integriertem Sensor und Verfahren zu dessen Herstellung
AUPQ669000A0 (en) * 2000-04-04 2000-05-04 Cooke, Richard Screen display device
US6530755B2 (en) 2000-04-07 2003-03-11 Tecan Trading Ag Micropump
DE10196634T5 (de) * 2000-09-18 2005-04-07 Par Technologies Llc Piezoelektrisches Antriebselement und ein solches verwendende Pumpe
US7198250B2 (en) * 2000-09-18 2007-04-03 Par Technologies, Llc Piezoelectric actuator and pump using same
US20020142483A1 (en) 2000-10-30 2002-10-03 Sequenom, Inc. Method and apparatus for delivery of submicroliter volumes onto a substrate
US20040073175A1 (en) * 2002-01-07 2004-04-15 Jacobson James D. Infusion system
US6869275B2 (en) * 2002-02-14 2005-03-22 Philip Morris Usa Inc. Piezoelectrically driven fluids pump and piezoelectric fluid valve
US20030163111A1 (en) * 2002-02-26 2003-08-28 Daellenbach Keith K. End effector for needle-free injection system
FR2839662B1 (fr) * 2002-05-16 2005-12-02 Centre Nat Rech Scient Dispositif de depot localise d'au moins une solution biologique
US8080221B2 (en) 2002-08-05 2011-12-20 Palo Alto Research Center Incorporated Capillary-channel probes for liquid pickup, transportation and dispense using stressy metal
US7241420B2 (en) 2002-08-05 2007-07-10 Palo Alto Research Center Incorporated Capillary-channel probes for liquid pickup, transportation and dispense using stressy metal
EP1620147A4 (de) * 2003-04-21 2008-06-11 Corium Internat Inc Gerät und verfahren für die repetitive mikrostrahl-arzneimittelabgabe
FR2861814B1 (fr) * 2003-11-04 2006-02-03 Cit Alcatel Dispositif de pompage par micropompes a transpiration thermique
WO2005060593A2 (en) * 2003-12-10 2005-07-07 Purdue Research Foundation Micropump for electronics cooling
US7287965B2 (en) * 2004-04-02 2007-10-30 Adaptiv Energy Llc Piezoelectric devices and methods and circuits for driving same
US20050225201A1 (en) * 2004-04-02 2005-10-13 Par Technologies, Llc Piezoelectric devices and methods and circuits for driving same
US7290993B2 (en) * 2004-04-02 2007-11-06 Adaptivenergy Llc Piezoelectric devices and methods and circuits for driving same
US7312554B2 (en) * 2004-04-02 2007-12-25 Adaptivenergy, Llc Piezoelectric devices and methods and circuits for driving same
CN1583541B (zh) * 2004-05-27 2010-09-29 哈尔滨工程大学 采用多层驱动膜结构的微驱动器及其制作方法
US7104767B2 (en) * 2004-07-19 2006-09-12 Wilson Greatbatch Technologies, Inc. Diaphragm pump for medical applications
JP4626224B2 (ja) * 2004-08-27 2011-02-02 富士ゼロックス株式会社 マイクロポンプ
JP4645159B2 (ja) * 2004-11-02 2011-03-09 コニカミノルタホールディングス株式会社 マイクロポンプ
US7258533B2 (en) * 2004-12-30 2007-08-21 Adaptivenergy, Llc Method and apparatus for scavenging energy during pump operation
US20060147329A1 (en) * 2004-12-30 2006-07-06 Tanner Edward T Active valve and active valving for pump
US20060232171A1 (en) * 2005-04-13 2006-10-19 Par Technologies, Llc Piezoelectric diaphragm assembly with conductors on flexible film
US20060232166A1 (en) * 2005-04-13 2006-10-19 Par Technologies Llc Stacked piezoelectric diaphragm members
JP3896141B2 (ja) * 2005-06-28 2007-03-22 シャープ株式会社 マイクロポンプおよびマイクロポンプシステム
DE202006010293U1 (de) * 2005-07-22 2006-08-31 Tecan Trading Ag Pipettiergerät mit Computerprogrammprodukt zum Akzeptieren oder Verwerfen von pipettierten Flüssigkeitsproben
JP4779126B2 (ja) * 2005-07-27 2011-09-28 国立大学法人九州工業大学 バルブレスマイクロポンプ
US8591457B2 (en) * 2005-08-10 2013-11-26 Alza Corporation Method for making a needle-free jet injection drug delivery device
EP1921648A1 (de) * 2005-08-31 2008-05-14 Matsushita Electric Works, Ltd. Relaisvorrichtung mit leiterflüssigkeit
US20070075286A1 (en) * 2005-10-04 2007-04-05 Par Technologies, Llc Piezoelectric valves drive
US20070129681A1 (en) * 2005-11-01 2007-06-07 Par Technologies, Llc Piezoelectric actuation of piston within dispensing chamber
WO2007061610A1 (en) * 2005-11-18 2007-05-31 Par Technologies, Llc Human powered piezoelectric power generating device
KR100804686B1 (ko) 2006-11-23 2008-02-18 한국에너지기술연구원 기포 동력 마이크로 펌프
US20080246367A1 (en) * 2006-12-29 2008-10-09 Adaptivenergy, Llc Tuned laminated piezoelectric elements and methods of tuning same
WO2009039122A2 (en) 2007-09-17 2009-03-26 Sequenom, Inc. Integrated robotic sample transfer device
US8040022B2 (en) * 2007-12-12 2011-10-18 Aprolase Development Co., Llc Forced vibration piezo generator and piezo actuator
US8353864B2 (en) * 2009-02-18 2013-01-15 Davis David L Low cost disposable infusion pump
US20100211002A1 (en) * 2009-02-18 2010-08-19 Davis David L Electromagnetic infusion pump with integral flow monitor
US8197235B2 (en) * 2009-02-18 2012-06-12 Davis David L Infusion pump with integrated permanent magnet
DE102009030395A1 (de) 2009-06-25 2011-05-26 Tecan Trading Ag Differnziertes chromatographisches Analysenverfahren zur Kompensation von Varianzen in der signalerzeugenden Einheit bei quantifizierenden chromatographischen Analysen
US8579414B2 (en) 2009-12-23 2013-11-12 Xerox Corporation Self-assembling structures for electrostatic extraction of pigments from liquid inks for marking
KR101153613B1 (ko) * 2010-05-25 2012-06-18 삼성전기주식회사 마이크로 이젝터 및 그 제조방법
CN103429348B (zh) 2011-01-21 2016-03-09 拜奥－多特公司 具有纵向变换器和可替换毛细管的压电分配器
US10126264B2 (en) 2014-07-14 2018-11-13 Li-Cor, Inc. Analyte separator with electrohydrodynamic Taylor cone jet blotter
AU2017213725B2 (en) 2016-02-01 2021-12-23 Li-Cor, Inc. Capillary electrophoresis inkjet dispensing
DE102016002665A1 (de) 2016-03-08 2017-09-14 Hauni Maschinenbau Gmbh Elektronisches Zigarettenprodukt und Kartusche für ein elektronisches Zigarettenprodukt
CN109564187A (zh) 2016-08-08 2019-04-02 利康公司 用于微流体直接印迹的多鞘流和芯片上的终端电极
US11241689B2 (en) 2016-08-08 2022-02-08 Li-Cor, Inc. Microchip electrophoresis inkjet dispensing

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4152098A (en) * 1977-01-03 1979-05-01 Clark Ivan P Micropump
DE69026765T2 (de) * 1989-07-11 1996-10-24 Ngk Insulators Ltd Einen piezoelektrischen/elektrostriktiven Film enthaltende piezoelektrischer/elektrostriktiver Antrieb
KR910012538A (ko) * 1989-12-27 1991-08-08 야마무라 가쯔미 마이크로 펌프 및 그 제조 방법
US5094594A (en) 1990-04-23 1992-03-10 Genomyx, Incorporated Piezoelectric pumping device
DE69106240T2 (de) * 1990-07-02 1995-05-11 Seiko Epson Corp Mikropumpe und Verfahren zur Herstellung einer Mikropumpe.
ES2069896T3 (es) * 1990-07-10 1995-05-16 Westonbridge Int Ltd Valvula, metodo para producir dicha valvula y microbomba que incorpora dicha valvula.
SE508435C2 (sv) * 1993-02-23 1998-10-05 Erik Stemme Förträngningspump av membranpumptyp
SE501139C2 (sv) * 1993-04-08 1994-11-21 Sem Ab Anordning vid fluidpump av membrantyp
US5659171A (en) * 1993-09-22 1997-08-19 Northrop Grumman Corporation Micro-miniature diaphragm pump for the low pressure pumping of gases
CH689836A5 (fr) * 1994-01-14 1999-12-15 Westonbridge Int Ltd Micropompe.
DE4402119C2 (de) * 1994-01-25 1998-07-23 Karlsruhe Forschzent Verfahren zur Herstellung von Mikromembranpumpen
DE4422743A1 (de) * 1994-06-29 1996-01-04 Torsten Gerlach Mikropumpe
US5856174A (en) * 1995-06-29 1999-01-05 Affymetrix, Inc. Integrated nucleic acid diagnostic device
DE69617936D1 (de) * 1995-09-20 2002-01-24 Koninkl Philips Electronics Nv Pumpe
US5840062A (en) * 1995-11-08 1998-11-24 Gumaste; Anand V. Solid state fluid delivery system
US6054277A (en) * 1996-05-08 2000-04-25 Regents Of The University Of Minnesota Integrated microchip genetic testing system
US5779868A (en) * 1996-06-28 1998-07-14 Caliper Technologies Corporation Electropipettor and compensation means for electrophoretic bias
US5871336A (en) * 1996-07-25 1999-02-16 Northrop Grumman Corporation Thermal transpiration driven vacuum pump
DE19720482C5 (de) * 1997-05-16 2006-01-26 INSTITUT FüR MIKROTECHNIK MAINZ GMBH Mikromembranpumpe

Also Published As

Publication number Publication date
DE59707378D1 (de) 2002-07-04
EP0956449A1 (de) 1999-11-17
JP2001505640A (ja) 2001-04-24
EP0956449B1 (de) 2002-05-29
DE29724735U1 (de) 2003-11-13
US6179584B1 (en) 2001-01-30
WO1998026179A1 (de) 1998-06-18

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RZN Patent revoked