ATE219831T1 - Vorrichtung zum schutz gegen kontamination - Google Patents

Vorrichtung zum schutz gegen kontamination

Info

Publication number
ATE219831T1
ATE219831T1 AT96913582T AT96913582T ATE219831T1 AT E219831 T1 ATE219831 T1 AT E219831T1 AT 96913582 T AT96913582 T AT 96913582T AT 96913582 T AT96913582 T AT 96913582T AT E219831 T1 ATE219831 T1 AT E219831T1
Authority
AT
Austria
Prior art keywords
work surface
pct
gas stream
direction substantially
materials
Prior art date
Application number
AT96913582T
Other languages
English (en)
Inventor
Philippe Chevalier
Original Assignee
Unir
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Unir filed Critical Unir
Application granted granted Critical
Publication of ATE219831T1 publication Critical patent/ATE219831T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/163—Clean air work stations, i.e. selected areas within a space which filtered air is passed

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Apparatus For Disinfection Or Sterilisation (AREA)
  • Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
  • Ventilation (AREA)
  • Prevention Of Fouling (AREA)
  • Automobile Manufacture Line, Endless Track Vehicle, Trailer (AREA)
  • Cleaning In General (AREA)
  • Prostheses (AREA)
  • Main Body Construction Of Washing Machines And Laundry Dryers (AREA)
  • Air Bags (AREA)
AT96913582T 1995-04-14 1996-04-12 Vorrichtung zum schutz gegen kontamination ATE219831T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9504526A FR2733036B1 (fr) 1995-04-14 1995-04-14 Dispositif de protection anti-contamination rapprochee
PCT/FR1996/000563 WO1996032613A1 (fr) 1995-04-14 1996-04-12 Dispositif de protection anti-contamination rapprochee

Publications (1)

Publication Number Publication Date
ATE219831T1 true ATE219831T1 (de) 2002-07-15

Family

ID=9478140

Family Applications (1)

Application Number Title Priority Date Filing Date
AT96913582T ATE219831T1 (de) 1995-04-14 1996-04-12 Vorrichtung zum schutz gegen kontamination

Country Status (9)

Country Link
US (1) US6035549A (de)
EP (1) EP0830549B1 (de)
JP (1) JP4113256B2 (de)
AT (1) ATE219831T1 (de)
CA (1) CA2218416C (de)
DE (1) DE69622037T2 (de)
ES (1) ES2176454T3 (de)
FR (1) FR2733036B1 (de)
WO (1) WO1996032613A1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19712975A1 (de) * 1997-03-27 1998-10-01 Gwe Ges Fuer Wasseraufbereitun Verfahren zur Optimierung der Luftführung in einer Reinluft-Kabine
US6096135A (en) * 1998-07-21 2000-08-01 Applied Materials, Inc. Method and apparatus for reducing contamination of a substrate in a substrate processing system
FR2785040B1 (fr) 1998-10-22 2001-01-19 U N I R Ultra Propre Nutrition Dispositif et procede pour la protection rapprochee de produits ou objets sensibles a des agents contaminants vehicules par l'air ambiant
US20040251175A1 (en) * 1998-10-30 2004-12-16 Adams Thomas C. Apparatuses and methods for making glued screen assemblies
US7350315B2 (en) 2003-12-22 2008-04-01 Lam Research Corporation Edge wheel dry manifold
US7089687B2 (en) * 2004-09-30 2006-08-15 Lam Research Corporation Wafer edge wheel with drying function
FR2973100B1 (fr) * 2011-03-22 2018-02-09 Institut National De Recherche En Sciences Et Technologies Pour L'environnement Et L'agriculture (Irstea) Installation de diffusion de flux d'air

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4021928A (en) * 1973-12-18 1977-05-10 Research Corporation Cross-flow modular tobacco curing system
FR2485700B1 (fr) * 1980-06-24 1986-02-28 Aurore Sa Procede pour etablir un ecoulement laminaire determine et poste de travail en comportant application
US4750276A (en) * 1984-05-10 1988-06-14 Donald Paul Smith Impingement thermal treatment apparatus with collector plate
US4872400A (en) * 1988-12-12 1989-10-10 Air Concepts, Inc. Laboratory work station with controllable environment
JP2644912B2 (ja) * 1990-08-29 1997-08-25 株式会社日立製作所 真空処理装置及びその運転方法
FI88541C (fi) * 1991-04-23 1993-05-25 Ilmateollisuus Oy Foerfarande och anordning foer att aostadkomma en luftvaexling foer ett behandlingsrum
US5211106A (en) * 1991-05-22 1993-05-18 Oscar Mayer Foods Corporation Apparatus and method for cooking casingless shaped food products
US5351415A (en) * 1992-05-18 1994-10-04 Convey, Inc. Method and apparatus for maintaining clean articles
EP0582017B1 (de) * 1992-08-04 1995-10-18 International Business Machines Corporation Verteilungseinrichtung mit Gaszufuhr-Abgabevorrichtung zum Handhaben und Speichern von abdichtbaren tragbaren unter Druck stehenden Behältern
EP0582018B1 (de) * 1992-08-04 1995-10-18 International Business Machines Corporation Unter Druck stehende Koppelsysteme zum Transferieren von einem Halbleiterwafer zwischen einem tragbaren abdichtbaren unter druckstehenden Behälter und einer Bearbeitungsanlage
US5628121A (en) * 1995-12-01 1997-05-13 Convey, Inc. Method and apparatus for maintaining sensitive articles in a contaminant-free environment
US5724748A (en) * 1996-07-24 1998-03-10 Brooks; Ray G. Apparatus for packaging contaminant-sensitive articles and resulting package

Also Published As

Publication number Publication date
DE69622037D1 (de) 2002-08-01
WO1996032613A1 (fr) 1996-10-17
DE69622037T2 (de) 2002-11-21
EP0830549B1 (de) 2002-06-26
CA2218416A1 (fr) 1996-10-17
JPH11503815A (ja) 1999-03-30
CA2218416C (fr) 2008-07-08
ES2176454T3 (es) 2002-12-01
JP4113256B2 (ja) 2008-07-09
US6035549A (en) 2000-03-14
FR2733036B1 (fr) 1997-07-04
FR2733036A1 (fr) 1996-10-18
EP0830549A1 (de) 1998-03-25

Similar Documents

Publication Publication Date Title
DE69117824D1 (de) Vorrichtung und Verfahren zum Substratschutz während Substratbearbeitung
DE69114725D1 (de) Vorrichtung zum Abgeben eines Aerosols.
DE69014319D1 (de) Vorrichtung zum Schützen und Verarbeiten von Banknoten und Wertgegenstände.
DE69524606D1 (de) Vorrichtung und verfahren zum heiss-vakuumdrapieren von verbundwerkstoffen
EP0725164A3 (de) Verfahren und Vorrichtung zur Plasmaerzeugung und Verfahren zur Bearbeitung eines Halbleiters
DE69613742D1 (de) Vorrichtung zum Zuführen und Fördern von Blättern
DE59711035D1 (de) Vorrichtung zum schutz eines elektronischen geräts
DE59712262D1 (de) Vorrichtung und verfahren zum ansteuern wenigstens eines kapazitiven stellgliedes
DE59308518D1 (de) Verfahren und Vorrichtung zum Entwickeln von strahlungsempfindlichen, belichteten Druckformen
DE69420585D1 (de) Vorrichtung zum schützen vor stosswellen und splittern
DE69716097D1 (de) Vorrichtung zum pneumatischen zuführen eines emulsionsexplosivstoffes
DE69620854D1 (de) Vorrichtung zum schrittweise Zuführen sowie Lochen von blattförmigen Materialien
DE59004330D1 (de) Vorrichtung zum entfernen oxidierbarer bzw. verbrennbarer partikel aus abgasen.
ATE219831T1 (de) Vorrichtung zum schutz gegen kontamination
DE69626236D1 (de) Vorrichtung zum Wiederherstellen der Schulterdreherklappe
DE69102536D1 (de) Verfahren und vorrichtung zum verringern der wafer-verunreinigung.
DE69104698D1 (de) Vorrichtung zum Zuführen und Trennen von Blättern.
DE59502043D1 (de) Siebdruckverfahren sowie Vorrichtung zu dessen Durchführung
DE59407250D1 (de) Vorrichtung zum Vereinzeln von Bogen eines Bogenstapels
DE69005815D1 (de) Verfahren und gerät zum plasmaschneiden.
ES2020634A6 (es) Metodo para detectar capas protectoras sobre materiales compuestos.
DE59605427D1 (de) Vorrichtung zum beidseitigen Feinstbearbeiten eines Werkstücks
TW279242B (en) The wasted-gas processing method & device for CVD apparatus
DE59204982D1 (de) Vorrichtung zum Entfernen von Staubpartikeln auf Materialbahnen
ATA126094A (de) Vorrichtung zum nadeln eines vlieses

Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee