ATE225496T1 - Magnetische positionsbestimmung mit korrektur für nichtlineare sensorbereiche - Google Patents

Magnetische positionsbestimmung mit korrektur für nichtlineare sensorbereiche

Info

Publication number
ATE225496T1
ATE225496T1 AT99917523T AT99917523T ATE225496T1 AT E225496 T1 ATE225496 T1 AT E225496T1 AT 99917523 T AT99917523 T AT 99917523T AT 99917523 T AT99917523 T AT 99917523T AT E225496 T1 ATE225496 T1 AT E225496T1
Authority
AT
Austria
Prior art keywords
transducers
correction
residual error
magnet
position determination
Prior art date
Application number
AT99917523T
Other languages
English (en)
Inventor
Jay R Goetz
Michael L Rhodes
Philip J Zumsteg
Original Assignee
Honeywell Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Inc filed Critical Honeywell Inc
Application granted granted Critical
Publication of ATE225496T1 publication Critical patent/ATE225496T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
    • G01D5/145—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Geophysics And Detection Of Objects (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measuring Magnetic Variables (AREA)
  • Color Television Image Signal Generators (AREA)
  • Facsimile Heads (AREA)
AT99917523T 1998-04-14 1999-04-14 Magnetische positionsbestimmung mit korrektur für nichtlineare sensorbereiche ATE225496T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/059,798 US6097183A (en) 1998-04-14 1998-04-14 Position detection apparatus with correction for non-linear sensor regions
PCT/US1999/008239 WO1999053266A1 (en) 1998-04-14 1999-04-14 Position detection apparatus with correction for non-linear sensor regions

Publications (1)

Publication Number Publication Date
ATE225496T1 true ATE225496T1 (de) 2002-10-15

Family

ID=22025309

Family Applications (2)

Application Number Title Priority Date Filing Date
AT99917523T ATE225496T1 (de) 1998-04-14 1999-04-14 Magnetische positionsbestimmung mit korrektur für nichtlineare sensorbereiche
AT01204687T ATE408120T1 (de) 1998-04-14 1999-04-14 Apparat zur detektion der position mit korrektur für nicht linearen sensor-bereichen

Family Applications After (1)

Application Number Title Priority Date Filing Date
AT01204687T ATE408120T1 (de) 1998-04-14 1999-04-14 Apparat zur detektion der position mit korrektur für nicht linearen sensor-bereichen

Country Status (8)

Country Link
US (1) US6097183A (de)
EP (2) EP1071919B1 (de)
JP (1) JP4550276B2 (de)
AT (2) ATE225496T1 (de)
DE (2) DE69939556D1 (de)
DK (1) DK1071919T3 (de)
HK (1) HK1047311A1 (de)
WO (1) WO1999053266A1 (de)

Families Citing this family (87)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020124663A1 (en) * 1999-04-07 2002-09-12 Yoshitomo Tokumoto Rotational angle detecting device, torque detecting device and steering apparatus
US6434516B1 (en) 1999-11-12 2002-08-13 Balluff, Inc. Method and apparatus for synthesizing an incremental signal
US6674280B1 (en) 1999-12-31 2004-01-06 Honeywell International Inc. Position detection apparatus with distributed bridge sensor
DE10013196B4 (de) * 2000-03-17 2004-02-26 Festo Ag & Co. Positionserfassungseinrichtung
US6509732B1 (en) * 2000-05-01 2003-01-21 Honeywell International Inc. Enhanced methods for sensing positions of an actuator moving longitudinally
US6633462B2 (en) * 2000-07-13 2003-10-14 Koninklijke Philips Electronics N.V. Magnetoresistive angle sensor having several sensing elements
DE50003742D1 (de) * 2000-10-04 2003-10-23 Nti Ag Zuerich Verfahren zur Erhöhung der Positioniergenauigkeit eines relativ zu einem Stator bewegbar angeordneten Elements
US6727692B2 (en) 2001-02-15 2004-04-27 Petru Ciureanu Magnetic field sensor with enhanced sensitivity, internal biasing and magnetic memory
DE10108732A1 (de) * 2001-02-23 2002-09-05 Philips Corp Intellectual Pty Vorrichtung mit einem magnetischen Positionssensor
EP1243897B1 (de) * 2001-03-23 2013-12-18 Melexis Technologies NV Magnetischer Weggeber
US6757635B2 (en) 2001-12-12 2004-06-29 Balluff, Inc. Programmed method and apparatus for quadrature output sensors
US7521923B2 (en) * 2002-04-23 2009-04-21 Abas, Incorporated Magnetic displacement transducer
DE10320759B4 (de) * 2002-06-10 2013-03-14 Heidelberger Druckmaschinen Ag Transportsystem mit Gebern zur Lageerfassung in einer bedruckstoffverarbeitenden Maschine
US7106233B2 (en) * 2003-01-30 2006-09-12 Delphi Technologies, Inc. Integrated galvanomagnetic sensor array system
DE10331580A1 (de) * 2003-07-11 2005-01-27 Robert Bosch Gmbh Vorrichtung zur Detektion der Drehzahl und/oder der Position eines rotierenden Bauteils
US7394244B2 (en) * 2003-10-22 2008-07-01 Parker-Hannifan Corporation Through-wall position sensor
US7145326B2 (en) * 2003-12-31 2006-12-05 Honeywell International Inc. Systems and methods for position detection
US7126330B2 (en) * 2004-06-03 2006-10-24 Honeywell International, Inc. Integrated three-dimensional magnetic sensing device and method to fabricate an integrated three-dimensional magnetic sensing device
US7173414B2 (en) * 2004-10-18 2007-02-06 Honeywell International Inc. Position detection apparatus and method for linear and rotary sensing applications
US7112962B2 (en) * 2004-11-18 2006-09-26 Honeywell International Inc. Angular position detection utilizing a plurality of rotary configured magnetic sensors
US7408343B2 (en) * 2004-11-18 2008-08-05 Honeywell International Inc. Position detection utilizing an array of magnetic sensors with irregular spacing between sensing elements
US7030604B1 (en) * 2004-11-18 2006-04-18 Honeywell International Inc. Thermal coefficients of nudge compensation and tare for linear and rotary MR array position transducers
US7948231B2 (en) * 2004-12-14 2011-05-24 Ntn Corporation Rotation detecting apparatus having magnetic sensor array and bearing provided with same
DE102005039280A1 (de) * 2005-08-19 2007-02-22 Continental Teves Ag & Co. Ohg Universeller Sensorchip
US7469604B2 (en) * 2005-10-21 2008-12-30 Stoneridge Control Devices, Inc. Sensor system including a magnetized shaft
ATE452345T1 (de) * 2006-01-12 2010-01-15 Timken Us Corp Magnetischer sensor mit ausgleich
US20080007255A1 (en) * 2006-07-10 2008-01-10 Honeywell International Inc. Encoded linear position sensor
DE102006039493B4 (de) * 2006-08-21 2016-06-30 Kieselmann Gmbh Doppelt dichtendes Ventil, insbesondere für Lebensmittel-, Getränke- und die pharmazeutische Industrie
BRPI0718735A2 (pt) * 2006-12-13 2013-12-24 Stoneridge Control Devices Inc Sensor de posição de cilindro e cilindro incorporando o mesmo
JP2008157683A (ja) * 2006-12-21 2008-07-10 Ckd Corp 流体圧シリンダ用位置検出装置
US9752615B2 (en) * 2007-06-27 2017-09-05 Brooks Automation, Inc. Reduced-complexity self-bearing brushless DC motor
US8823294B2 (en) 2007-06-27 2014-09-02 Brooks Automation, Inc. Commutation of an electromagnetic propulsion and guidance system
WO2009003193A1 (en) 2007-06-27 2008-12-31 Brooks Automation, Inc. Position feedback for self bearing motor
US8283813B2 (en) 2007-06-27 2012-10-09 Brooks Automation, Inc. Robot drive with magnetic spindle bearings
US8659205B2 (en) 2007-06-27 2014-02-25 Brooks Automation, Inc. Motor stator with lift capability and reduced cogging characteristics
JP5663304B2 (ja) * 2007-06-27 2015-02-04 ブルックス オートメーション インコーポレイテッド 多次元位置センサ
KR101825595B1 (ko) 2007-07-17 2018-02-05 브룩스 오토메이션 인코퍼레이티드 챔버 벽들에 일체화된 모터들을 갖는 기판 처리 장치
CN101836085B (zh) * 2007-10-25 2013-03-27 玛克西姆综合公司 使用定向跟踪无接触地感测旋转和角度位置的方法和设备
FR2926881B1 (fr) * 2008-01-25 2010-12-10 Continental Automotive France Determination de la position d'un element magnetique par rapport a un reseau de capteurs a effet hall lineaires
US20090259609A1 (en) * 2008-04-15 2009-10-15 Honeywell International Inc. Method and system for providing a linear signal from a magnetoresistive position sensor
US8125217B2 (en) * 2008-04-15 2012-02-28 Honeywell International, Inc. Magnetoresistive array design for improved sensor-to-magnet carrier tolerances
JP2011521263A (ja) * 2008-05-19 2011-07-21 ストーンリッジ・コントロール・デバイスィズ・インコーポレーテッド シリンダ位置センサおよびシリンダ位置センサを組み込んだシリンダ
US7772835B2 (en) * 2008-06-16 2010-08-10 Honeywell International Inc. AMR array magnetic design for improved sensor flexibility and improved air gap performance
JP5467747B2 (ja) * 2008-09-16 2014-04-09 永一 坂東 原因物理量推定方法および装置
US20100097051A1 (en) * 2008-10-22 2010-04-22 Honeywell International Inc. Incremental position, speed and direction detection apparatus and method for rotating targets utilizing magnetoresistive sensor
US20110127994A1 (en) * 2009-12-02 2011-06-02 Honeywell International Inc. Magnetic sensor modules that couple together for extended distance position sensing
DE102010025170B4 (de) 2010-06-25 2013-02-28 Meas Deutschland Gmbh Vorrichtung zum Erzeugen eines Sensorsignals und Verfahren zur Bestimmung der Position eines Gebers
US20120139531A1 (en) * 2010-12-07 2012-06-07 Hamilton Sundstrand Corporation Position detecting system
DE102010056271B4 (de) * 2010-12-24 2018-09-20 Paragon Ag Sensoranordnung zur Erfassung sowohl der Axial- als auch der Drehstellung einer in Längsrichtung verschieblichen und drehbaren Welle
DE112012000422T5 (de) * 2011-01-07 2013-10-17 Woodward Mpc, Inc. Verfahren und Vorrichtung für ein Halbbrücken-Differentialtransformator-Positionserfassungssystem
US9581426B2 (en) * 2011-07-29 2017-02-28 Asahi Kasei Microdevices Corporation Magnetic field measuring device
US9182459B2 (en) 2011-09-08 2015-11-10 Honeywell International Inc. Wireless magnetic position sensor
US9360345B2 (en) 2011-10-10 2016-06-07 Honeywell International Inc. Extended smart position sensing range using electromagnetics
DE102012205902A1 (de) * 2012-04-11 2013-10-17 Tyco Electronics Amp Gmbh Weggeber zum berührungslosen Messen einer Position mittels einer Vielzahl von in Reihe angeordneten Magnetfeldsensoren
DE102012205903B4 (de) 2012-04-11 2014-01-30 Tyco Electronics Amp Gmbh Verfahren zum berührungslosen messen einer relativen position mittels eines magnetfeldsensorarrays auf halleffektbasis und weggeber
EP2735840B1 (de) * 2012-11-21 2015-04-22 Veyance Technologies, Inc. Messbereichschaltung für intelligente Luftfedern
US9018942B2 (en) 2013-01-11 2015-04-28 Bourns, Inc. Position measurement using a variable flux collector
WO2014153422A1 (en) 2013-03-19 2014-09-25 Regents Of The University Of Minnesota Position sensing system
US9303786B2 (en) * 2013-04-16 2016-04-05 Honeywell International Inc. Autonomous valve control and monitoring
US10969214B2 (en) 2013-12-31 2021-04-06 Joral Llc Position sensor with Wiegand wire, position magnet(s) and reset magnet
US9803998B1 (en) * 2013-12-31 2017-10-31 Joral Llc Absolute position sensor with fine resolution
DE102014106543A1 (de) * 2014-05-09 2015-11-12 Asm Assembly Systems Gmbh & Co. Kg Gurtförderer für einen Bestückautomaten sowie Bestückautomat
CN204421990U (zh) * 2015-01-14 2015-06-24 江苏多维科技有限公司 一种可消除相邻转轮磁干涉的直读表
WO2016163171A1 (ja) 2015-04-06 2016-10-13 株式会社村田製作所 液面検出装置
US20170227422A1 (en) * 2016-02-06 2017-08-10 Tyco Electronics (Shanghai) Co. Ltd. Method and system for sensing position of moving object and clutch piston position sensing system wtih sleep function
CN107044819A (zh) * 2016-02-06 2017-08-15 泰科电子(上海)有限公司 一种移动物体运动位置的感测方法及系统
DE102016002420B4 (de) * 2016-03-02 2017-11-30 TE Connectivity Sensors Germany GmbH Verfahren zur Bestimmung der Position eines Magneten relativ zu einer Sensorzelle
CN107462304B (zh) * 2016-06-03 2020-09-11 株式会社村田制作所 液面检测装置
US10914566B2 (en) 2016-07-22 2021-02-09 Regents Of The University Of Minnesota Position sensing system with an electromagnet
GB2552385B (en) * 2016-07-22 2021-09-15 Cmr Surgical Ltd Calibrating position sensor readings
US11647678B2 (en) 2016-08-23 2023-05-09 Analog Devices International Unlimited Company Compact integrated device packages
US10697800B2 (en) * 2016-11-04 2020-06-30 Analog Devices Global Multi-dimensional measurement using magnetic sensors and related systems, methods, and integrated circuits
DE102016225305B4 (de) * 2016-12-16 2019-07-11 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Offset-Kompensation eines Sensorsignals eines Hall-Sensors und Sensoranordnung
US10550958B2 (en) 2017-02-16 2020-02-04 Honeywell International Inc. Housing cover sealing detection means on a valve control head
US11628275B2 (en) 2018-01-31 2023-04-18 Analog Devices, Inc. Electronic devices
DE102018203884A1 (de) * 2018-03-14 2019-09-19 Festo Ag & Co. Kg Positionsbestimmungseinrichtung und Verfahren zur Bestimmung einer Position
DE102018111234B3 (de) * 2018-05-09 2019-08-29 Otto Bock Healthcare Products Gmbh Orthopädisches Hilfsmittel
JP6577635B1 (ja) * 2018-07-02 2019-09-18 株式会社マコメ研究所 位置検出装置
JP6577639B1 (ja) * 2018-08-13 2019-09-18 株式会社マコメ研究所 位置検出装置
CN109540266B (zh) * 2019-01-17 2023-11-07 北京锐达仪表有限公司 一种磁致伸缩液位计及液位测量方法
CN109916287B (zh) * 2019-01-30 2020-11-27 西安维控自动化科技有限公司 一种基于磁感应的平面位移传感器、位移检测方法及系统
US11156479B2 (en) 2019-07-03 2021-10-26 Schaeffler Technologies AG & Co. KG Variable pitch linear displacement sensor
US11327127B2 (en) 2019-07-10 2022-05-10 Allegro Microsystems, Llc Magnetic field sensor with reduced influence of external stray magnetic fields
DE102019122525A1 (de) * 2019-08-21 2021-02-25 Samson Aktiengesellschaft Drehwinkelmessung mit einem Polring
CN110500948B (zh) * 2019-08-29 2021-02-26 麦格雷博电子(深圳)有限公司 一种转子表磁检测偏心识别及修正方法
US11933641B2 (en) 2020-01-15 2024-03-19 Honeywell International Inc. Position detection apparatus, method, and system utilizing an array of magnetic sensors each comprising a sensor signal conditioning circuit
DE102021118302A1 (de) 2021-07-15 2023-01-19 Bürkert Werke GmbH & Co. KG Ventil mit einer Positionserfassungseinrichtung

Family Cites Families (66)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2805677A (en) * 1953-04-23 1957-09-10 Curtiss Wright Corp Detector for misalinement of rotating body
DE1069910B (de) * 1958-03-01 1959-11-26 Standard Elektrik Lorenz Aktiengesellschaft, Stuttgart-Zuffenhausen Kommandowerk mit Indexregister
US4088946A (en) * 1975-07-28 1978-05-09 Westinghouse Electric Corp. Magnetic bridge transducer formed with permanent magnets and a hall effect sensor for identifying the presence and location of ferromagnetic discontinuities within or on a tubular specimen
US4039936A (en) * 1976-04-05 1977-08-02 International Business Machines Corporation Interleaved magnetoresistive displacement transducers
US4119911A (en) * 1977-04-22 1978-10-10 Johnson Clark E Jun Magnetoresistor displacement sensor using a magnetoresistor positioned between relatively moving magnetized toothed members
NL7708012A (nl) * 1977-07-19 1979-01-23 Nedap Nv Detectiestelsel.
GB2052855B (en) * 1979-03-30 1983-05-18 Sony Corp Magnetoresistive transducers
US4260852A (en) * 1979-05-24 1981-04-07 Talos Systems, Inc. Up/down scanning digitizing apparatus and method
EP0027308B1 (de) * 1979-08-16 1984-10-24 Inoue-Japax Research Incorporated Herstellung und Verwendung magnetischer Skalenanordnungen
US4262287A (en) * 1979-09-24 1981-04-14 John McLoughlin Automatic scan flow meter means
DE3122376A1 (de) * 1981-06-05 1982-12-23 Robert Bosch Gmbh, 7000 Stuttgart Vorrichtung zur erfassung der drehzahl von rotierenden teilen
JPS5886405A (ja) * 1981-11-18 1983-05-24 Nec Corp 角度検出器
JPS58148914A (ja) * 1982-03-02 1983-09-05 Fanuc Ltd パルスコ−ダ
DE3244891C2 (de) * 1982-12-04 1985-07-11 Angewandte Digital Elektronik Gmbh, 2051 Brunstorf Einrichtung zur berührungslosen Positionsmessung
US4520300A (en) * 1982-12-06 1985-05-28 Fradella Richard B Brushless ultra-efficient regenerative servomechanism
DE3314111A1 (de) * 1983-04-19 1984-10-25 Dr.Ing.H.C. F. Porsche Ag, 7000 Stuttgart Einrichtung zur wegabhaengigen positionsangabe hydraulisch betaetigter schaltstangen
DE3325353A1 (de) * 1983-07-14 1985-01-24 Honeywell Gmbh Positionssensor
US4725776A (en) * 1984-01-25 1988-02-16 Matsushita Electric Industry Co., Ltd. Magnetic position detector using a thin film magnetoresistor element inclined relative to a moving object
US4673876A (en) * 1984-03-08 1987-06-16 General Scanning, Inc. Two-element angular positive sensor for rotatable shaft
DE3426784A1 (de) * 1984-07-20 1986-01-30 Bosch Gmbh Robert Magnetoresistiver sensor zur abgabe von elektrischen signalen
DE3443176C1 (de) * 1984-11-27 1990-11-15 Angewandte Digital Elektronik Gmbh, 2051 Brunstorf Verfahren zur Kalibrierung eines elektronischen Positionsgebers
US4733177A (en) * 1985-01-28 1988-03-22 International Business Machines Corporation High resolution high output magneto resistive transducer for determining static and dynamic position
KR900004780B1 (ko) * 1985-09-13 1990-07-05 후지쓰 가부시끼가이샤 자기(磁氣) 센서를 사용한 위치 검출장치
DD257178A3 (de) * 1985-09-27 1988-06-08 Hermsdorf Keramik Veb Anordnung zur erzeugung von steuersignalen
US4864434A (en) * 1985-11-20 1989-09-05 Magnetic Peripherals Inc. Method for writing a tri-phase servo pattern which provides information for positioning the transducers of a magnetic storage device
JPS62204118A (ja) * 1986-03-05 1987-09-08 Hitachi Ltd 磁気的に位置あるいは速度を検出する装置
JPH077012B2 (ja) * 1987-08-18 1995-01-30 富士通株式会社 加速度センサ
DE3742524A1 (de) * 1987-08-22 1989-03-02 Angewandte Digital Elektronik Verfahren zur ermittlung der position eines feldlinien aussendenden elementes
US4922197A (en) * 1988-08-01 1990-05-01 Eaton Corporation High resolution proximity detector employing magnetoresistive sensor disposed within a pressure resistant enclosure
JPH02166825A (ja) * 1988-12-21 1990-06-27 Alps Electric Co Ltd エンコーダ装置
DE4014885C2 (de) * 1989-05-13 1995-07-13 Aisan Ind Drehwinkelaufnehmer
USRE39076E1 (en) * 1989-06-01 2006-04-25 Papst Licensing Gmbh & Co. Kg Apparatus and method for controlling brushless electric motors and position encoders and indicating position thereof
US4924696A (en) * 1989-07-24 1990-05-15 General Motors Corporation Noncontacting position sensor for an automotive steering system
US5021736A (en) * 1989-09-19 1991-06-04 Texas Instruments Incorporated Speed/position sensor calibration method with angular adjustment of a magnetoresistive element
US5198740A (en) * 1989-10-04 1993-03-30 University Of Utah Research Foundation Sliding contact mechanical/electrical displacement transducer
US4992733A (en) * 1989-11-17 1991-02-12 Visi-Trak Corporation Position sensing transducer having a circular magnet with an integral flux distorting member and two magnetic field sensors
US5315244A (en) * 1989-11-17 1994-05-24 Visi-Trak Corporation Magnetic sensor with laminated field concentrating flux bar
JP3037380B2 (ja) * 1990-08-30 2000-04-24 日立金属株式会社 磁気式エンコーダ
US5038130A (en) * 1990-11-06 1991-08-06 Santa Barbara Research Center System for sensing changes in a magnetic field
US5239474A (en) * 1990-11-20 1993-08-24 Hughes Aircraft Company Dipole moment detection and localization
FR2670888B1 (fr) * 1990-12-19 1994-05-27 Aerospatiale Capteur de position angulaire a magnetoresistances.
JPH04275096A (ja) * 1991-02-27 1992-09-30 Secoh Giken Inc 負荷の数値制御装置
JP2990822B2 (ja) * 1991-03-14 1999-12-13 ソニー・プレシジョン・テクノロジー株式会社 磁気センサ
JP2581421Y2 (ja) * 1991-06-17 1998-09-21 株式会社村田製作所 磁気センサ
US5270645A (en) * 1991-08-30 1993-12-14 Nartron Corporation Linear-output, temperature-stable rotational sensor including magnetic field responsive device disposed within a cavity of a flux concentrator
DE4203073C2 (de) * 1992-02-04 1994-12-15 Heidenhain Gmbh Dr Johannes Positionsmeßeinrichtung
JPH05215504A (ja) * 1992-02-05 1993-08-24 Mitsubishi Electric Corp 位置検出装置
US5210493A (en) * 1992-02-27 1993-05-11 General Motors Corporation Method for embedding wires within a powder metal core and sensor assembly produced by such a method
US5196821A (en) * 1992-03-09 1993-03-23 General Motors Corporation Integrated magnetic field sensor
US5250925A (en) * 1992-05-11 1993-10-05 General Motors Corporation Package for speed sensing device having minimum air gap
JP3206204B2 (ja) * 1992-05-22 2001-09-10 株式会社デンソー スロットルポジションセンサ
JPH0626884A (ja) * 1992-07-07 1994-02-04 San Tesuto Kk 位置検出装置
US5291133A (en) * 1992-08-24 1994-03-01 General Motors Corporation Multi-bit encoder signal conditioning circuit having common mode disturbance compensation
JP3173531B2 (ja) * 1992-09-18 2001-06-04 ソニー株式会社 位置検出方法
JPH06232477A (ja) * 1993-02-04 1994-08-19 Mitsubishi Electric Corp 磁気センサ装置及びその製造方法
US5351003A (en) * 1993-04-02 1994-09-27 General Motors Corporation Temperature compensated magnetoresistive position sensor
US5351028A (en) * 1993-06-14 1994-09-27 Honeywell Inc. Magnetoresistive proximity sensor
US5545985A (en) * 1994-03-16 1996-08-13 Campbell; Peter Magnetoresistive position sensor including an encoder wherein the magnetization extends greater than 0.5 times the pole pitch below the surface
US5508611A (en) * 1994-04-25 1996-04-16 General Motors Corporation Ultrathin magnetoresistive sensor package
US5502380A (en) * 1994-04-28 1996-03-26 Rosemount Inc. Analog weighted binary absolute position encoder including an array of sense resistors each having material responsive to FWX and nonresponsive to flux
US5469055A (en) * 1994-05-04 1995-11-21 Honeywell Inc. Engine shaft with integrally formed complementary targets
US5589769A (en) * 1994-09-30 1996-12-31 Honeywell Inc. Position detection apparatus including a circuit for receiving a plurality of output signal values and fitting the output signal values to a curve
US5488294A (en) * 1995-01-18 1996-01-30 Honeywell Inc. Magnetic sensor with means for retaining a magnet at a precise calibrated position
US5500589A (en) * 1995-01-18 1996-03-19 Honeywell Inc. Method for calibrating a sensor by moving a magnet while monitoring an output signal from a magnetically sensitive component
JP3170449B2 (ja) * 1996-03-25 2001-05-28 オークマ株式会社 アブソリュートエンコーダ
DE19623742A1 (de) * 1996-06-14 1997-12-18 Wittenstein Motion Contr Gmbh Einrichtung zur Verschiebeweg- und/oder Positionserfassung bei einem Spindeltrieb

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EP1209439A3 (de) 2002-08-21
JP4550276B2 (ja) 2010-09-22
EP1209439A2 (de) 2002-05-29
ATE408120T1 (de) 2008-09-15
DE69903277D1 (de) 2002-11-07
HK1047311A1 (en) 2003-02-14
EP1071919A1 (de) 2001-01-31
DK1071919T3 (da) 2002-12-30
DE69903277T2 (de) 2003-06-12
US6097183A (en) 2000-08-01
EP1209439B1 (de) 2008-09-10
WO1999053266A1 (en) 1999-10-21
DE69939556D1 (de) 2008-10-23
EP1071919B1 (de) 2002-10-02
JP2002511571A (ja) 2002-04-16

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