ATE229188T1 - Vielseitiges verfahren und vorrichtung zur schnellen, dreidimensionalen abbildung mikroskopischer ziele - Google Patents

Vielseitiges verfahren und vorrichtung zur schnellen, dreidimensionalen abbildung mikroskopischer ziele

Info

Publication number
ATE229188T1
ATE229188T1 AT99911132T AT99911132T ATE229188T1 AT E229188 T1 ATE229188 T1 AT E229188T1 AT 99911132 T AT99911132 T AT 99911132T AT 99911132 T AT99911132 T AT 99911132T AT E229188 T1 ATE229188 T1 AT E229188T1
Authority
AT
Austria
Prior art keywords
triangulation
data
electromagnetic radiation
targets
detector
Prior art date
Application number
AT99911132T
Other languages
English (en)
Inventor
Donald J Svetkoff
Donald B T Kilgus
Original Assignee
Gen Scanning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gen Scanning Inc filed Critical Gen Scanning Inc
Application granted granted Critical
Publication of ATE229188T1 publication Critical patent/ATE229188T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/46—Indirect determination of position data
    • G01S17/48—Active triangulation systems, i.e. using the transmission and reflection of electromagnetic waves other than radio waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95684—Patterns showing highly reflecting parts, e.g. metallic elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88—Lidar systems specially adapted for specific applications
    • G01S17/89—Lidar systems specially adapted for specific applications for mapping or imaging
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/008—Details of detection or image processing, including general computer control
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/008—Details of detection or image processing, including general computer control
    • G02B21/0084—Details of detection or image processing, including general computer control time-scale detection, e.g. strobed, ultra-fast, heterodyne detection
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/18—Arrangements with more than one light path, e.g. for comparing two specimens
    • G02B21/20—Binocular arrangements
    • G02B21/22—Stereoscopic arrangements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • General Engineering & Computer Science (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
AT99911132T 1998-03-05 1999-03-05 Vielseitiges verfahren und vorrichtung zur schnellen, dreidimensionalen abbildung mikroskopischer ziele ATE229188T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/035,580 US6098031A (en) 1998-03-05 1998-03-05 Versatile method and system for high speed, 3D imaging of microscopic targets
PCT/US1999/004827 WO1999045410A1 (en) 1998-03-05 1999-03-05 Versatile method and system for high speed, 3d imaging of microscopic targets

Publications (1)

Publication Number Publication Date
ATE229188T1 true ATE229188T1 (de) 2002-12-15

Family

ID=21883558

Family Applications (1)

Application Number Title Priority Date Filing Date
AT99911132T ATE229188T1 (de) 1998-03-05 1999-03-05 Vielseitiges verfahren und vorrichtung zur schnellen, dreidimensionalen abbildung mikroskopischer ziele

Country Status (6)

Country Link
US (1) US6098031A (de)
EP (2) EP1229350A3 (de)
AT (1) ATE229188T1 (de)
CA (1) CA2322181A1 (de)
DE (1) DE69904304T2 (de)
WO (1) WO1999045410A1 (de)

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US7672504B2 (en) * 2005-09-01 2010-03-02 Childers Edwin M C Method and system for obtaining high resolution 3-D images of moving objects by use of sensor fusion
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US10094785B2 (en) 2011-05-17 2018-10-09 Gii Acquisition, Llc Method and system for optically inspecting headed manufactured parts
DE102011077564B4 (de) 2011-06-15 2016-08-25 Sirona Dental Systems Gmbh Verfahren zur optischen dreidimensionalen Vermessung eines dentalen Objekts
US9486840B2 (en) * 2013-05-24 2016-11-08 Gii Acquisition, Llc High-speed, triangulation-based, 3-D method and system for inspecting manufactured parts and sorting the inspected parts
US8993914B2 (en) 2012-12-14 2015-03-31 Gii Acquisition, Llc High-speed, high-resolution, triangulation-based, 3-D method and system for inspecting manufactured parts and sorting the inspected parts
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Also Published As

Publication number Publication date
EP1058856B1 (de) 2002-12-04
EP1229350A3 (de) 2003-06-25
US6098031A (en) 2000-08-01
CA2322181A1 (en) 1999-09-10
EP1058856A1 (de) 2000-12-13
DE69904304T2 (de) 2003-07-24
WO1999045410A1 (en) 1999-09-10
EP1229350A2 (de) 2002-08-07
DE69904304D1 (de) 2003-01-16

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