ATE229188T1 - Vielseitiges verfahren und vorrichtung zur schnellen, dreidimensionalen abbildung mikroskopischer ziele - Google Patents

Vielseitiges verfahren und vorrichtung zur schnellen, dreidimensionalen abbildung mikroskopischer ziele

Info

Publication number
ATE229188T1
ATE229188T1 AT99911132T AT99911132T ATE229188T1 AT E229188 T1 ATE229188 T1 AT E229188T1 AT 99911132 T AT99911132 T AT 99911132T AT 99911132 T AT99911132 T AT 99911132T AT E229188 T1 ATE229188 T1 AT E229188T1
Authority
AT
Austria
Prior art keywords
triangulation
data
electromagnetic radiation
targets
detector
Prior art date
Application number
AT99911132T
Other languages
English (en)
Inventor
Donald J Svetkoff
Donald B T Kilgus
Original Assignee
Gen Scanning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gen Scanning Inc filed Critical Gen Scanning Inc
Application granted granted Critical
Publication of ATE229188T1 publication Critical patent/ATE229188T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/46—Indirect determination of position data
    • G01S17/48—Active triangulation systems, i.e. using the transmission and reflection of electromagnetic waves other than radio waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95684—Patterns showing highly reflecting parts, e.g. metallic elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88—Lidar systems specially adapted for specific applications
    • G01S17/89—Lidar systems specially adapted for specific applications for mapping or imaging
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/008—Details of detection or image processing, including general computer control
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/008—Details of detection or image processing, including general computer control
    • G02B21/0084—Details of detection or image processing, including general computer control time-scale detection, e.g. strobed, ultra-fast, heterodyne detection
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/18—Arrangements with more than one light path, e.g. for comparing two specimens
    • G02B21/20—Binocular arrangements
    • G02B21/22—Stereoscopic arrangements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Remote Sensing (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Immunology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
AT99911132T 1998-03-05 1999-03-05 Vielseitiges verfahren und vorrichtung zur schnellen, dreidimensionalen abbildung mikroskopischer ziele ATE229188T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/035,580 US6098031A (en) 1998-03-05 1998-03-05 Versatile method and system for high speed, 3D imaging of microscopic targets
PCT/US1999/004827 WO1999045410A1 (en) 1998-03-05 1999-03-05 Versatile method and system for high speed, 3d imaging of microscopic targets

Publications (1)

Publication Number Publication Date
ATE229188T1 true ATE229188T1 (de) 2002-12-15

Family

ID=21883558

Family Applications (1)

Application Number Title Priority Date Filing Date
AT99911132T ATE229188T1 (de) 1998-03-05 1999-03-05 Vielseitiges verfahren und vorrichtung zur schnellen, dreidimensionalen abbildung mikroskopischer ziele

Country Status (6)

Country Link
US (1) US6098031A (de)
EP (2) EP1229350A3 (de)
AT (1) ATE229188T1 (de)
CA (1) CA2322181A1 (de)
DE (1) DE69904304T2 (de)
WO (1) WO1999045410A1 (de)

Families Citing this family (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6072898A (en) 1998-01-16 2000-06-06 Beaty; Elwin M. Method and apparatus for three dimensional inspection of electronic components
US6366357B1 (en) 1998-03-05 2002-04-02 General Scanning, Inc. Method and system for high speed measuring of microscopic targets
SI20305A (sl) 1999-08-06 2001-02-28 LEK, tovarna farmacevtskih in kemi�nih izdelkov, d.d. Kristali natrijeve soli pravastatina
IL133696A (en) * 1999-12-23 2006-04-10 Orbotech Ltd Cam reference inspection of multi-color and contour images
US6924746B2 (en) * 2000-08-09 2005-08-02 Terrance John Hermary Device and method to establish temporal correspondence in multiple sensor configurations
US6870611B2 (en) * 2001-07-26 2005-03-22 Orbotech Ltd. Electrical circuit conductor inspection
US6710799B2 (en) 2000-12-28 2004-03-23 Umech Technologies Microscopic motion measuring
EP1220596A1 (de) * 2000-12-29 2002-07-03 Icos Vision Systems N.V. Verfahren und Einrichtung zur Lageerfassung der Anschlusskontakte elektronischer Bauelemente
US6750974B2 (en) * 2002-04-02 2004-06-15 Gsi Lumonics Corporation Method and system for 3D imaging of target regions
KR100438212B1 (ko) * 2002-08-09 2004-07-01 학교법인고려중앙학원 전자현미경을 사용해서 물체의 3차원 공간 데이터를추출하는 방법 및 그 장치
US7672504B2 (en) * 2005-09-01 2010-03-02 Childers Edwin M C Method and system for obtaining high resolution 3-D images of moving objects by use of sensor fusion
DE102006060584B4 (de) * 2006-12-19 2008-10-30 Bundesrepublik Deutschland, vertr. d. d. Bundesministerium für Wirtschaft und Technologie, dieses vertr. d. d. Präsidenten der Physikalisch-Technischen Bundesanstalt Verfahren und Vorrichtung zur Messung von Verschiebungen und/oder einer Geometrie von Mikrostrukturen
US8725477B2 (en) * 2008-04-10 2014-05-13 Schlumberger Technology Corporation Method to generate numerical pseudocores using borehole images, digital rock samples, and multi-point statistics
WO2009126888A2 (en) 2008-04-10 2009-10-15 Services Petroliers Schlumberger Method for characterizing a geological formation traversed by a borehole
US8085882B1 (en) * 2008-04-15 2011-12-27 The United States Of America As Respresented By The Secretary Of The Army Multi-sensor signal fusion for modulation classification of weak signals
DK200801722A (en) * 2008-12-05 2010-06-06 Unisensor As Optical sectioning of a sample and detection of particles in a sample
US20100177190A1 (en) * 2008-12-16 2010-07-15 Ann-Shyn Chiang Microscopy system with revolvable stage
US20110004447A1 (en) * 2009-07-01 2011-01-06 Schlumberger Technology Corporation Method to build 3D digital models of porous media using transmitted laser scanning confocal mircoscopy and multi-point statistics
US8311788B2 (en) * 2009-07-01 2012-11-13 Schlumberger Technology Corporation Method to quantify discrete pore shapes, volumes, and surface areas using confocal profilometry
US8416403B2 (en) 2010-10-29 2013-04-09 GII Acquisitiom, LLC Method and system for high-speed, high-resolution 3-D imaging of manufactured parts of various sizes
US9228957B2 (en) 2013-05-24 2016-01-05 Gii Acquisition, Llc High speed method and system for inspecting a stream of parts
US9697596B2 (en) 2011-05-17 2017-07-04 Gii Acquisition, Llc Method and system for optically inspecting parts
US10094785B2 (en) 2011-05-17 2018-10-09 Gii Acquisition, Llc Method and system for optically inspecting headed manufactured parts
US10088431B2 (en) 2011-05-17 2018-10-02 Gii Acquisition, Llc Method and system for optically inspecting headed manufactured parts
US9575013B2 (en) 2011-05-17 2017-02-21 Gii Acquisition, Llc Non-contact method and system for inspecting a manufactured part at an inspection station having a measurement axis
US9372160B2 (en) 2011-05-17 2016-06-21 Gii Acquisition, Llc Method and system for optically inspecting the ends of a manufactured part at a single inspection station having a measurement axis
DE102011077564B4 (de) * 2011-06-15 2016-08-25 Sirona Dental Systems Gmbh Verfahren zur optischen dreidimensionalen Vermessung eines dentalen Objekts
US8993914B2 (en) 2012-12-14 2015-03-31 Gii Acquisition, Llc High-speed, high-resolution, triangulation-based, 3-D method and system for inspecting manufactured parts and sorting the inspected parts
US9486840B2 (en) * 2013-05-24 2016-11-08 Gii Acquisition, Llc High-speed, triangulation-based, 3-D method and system for inspecting manufactured parts and sorting the inspected parts
US10207297B2 (en) 2013-05-24 2019-02-19 GII Inspection, LLC Method and system for inspecting a manufactured part at an inspection station
US9539619B2 (en) 2013-05-24 2017-01-10 Gii Acquisition, Llc High speed method and system for inspecting a stream of parts at a pair of inspection stations
US10300510B2 (en) * 2014-08-01 2019-05-28 General Inspection Llc High speed method and system for inspecting a stream of parts
JP6671938B2 (ja) * 2014-12-16 2020-03-25 キヤノン株式会社 表面形状測定装置、欠陥判定装置、および表面形状の測定方法
US10989661B2 (en) 2015-05-01 2021-04-27 The Board Of Regents Of The University Of Texas System Uniform and scalable light-sheets generated by extended focusing
WO2017180680A1 (en) 2016-04-12 2017-10-19 The Board Of Regents Of The University Of Texas System LIGHT-SHEET MICROSCOPE WITH PARALLELIZED 3D lMAGE ACQUISITION
JP6423032B2 (ja) * 2017-03-29 2018-11-14 株式会社トプコン ３次元測量装置
DE102018004592A1 (de) * 2017-06-20 2018-12-20 Mitutoyo Corporation Messapparat für dreidimensionale Geometrie und Messverfahren für dreidimensionale Geometrie
CN108169764A (zh) * 2018-03-20 2018-06-15 深圳市砝石激光雷达有限公司 高速激光3d成像装置及方法
CN113567441B (zh) * 2021-09-27 2021-12-28 板石智能科技(武汉)有限公司 纳米量级物体探测方法、系统、设备及存储介质

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3013467A (en) * 1957-11-07 1961-12-19 Minsky Marvin Microscopy apparatus
US4634879A (en) * 1985-03-21 1987-01-06 General Electric Company Method and system for determining surface profile information
US4689491A (en) * 1985-04-19 1987-08-25 Datasonics Corp. Semiconductor wafer scanning system
US4873653A (en) * 1986-04-09 1989-10-10 Carl-Zeiss-Stiftung Microscope system for providing three-dimensional resolution
NL8700612A (nl) * 1987-03-13 1988-10-03 Tno Confocale laserscanning microscoop.
US4827125A (en) * 1987-04-29 1989-05-02 The United States Of America As Represented By The Secretary Of The Department Of Health And Human Services Confocal scanning laser microscope having no moving parts
JPS63306413A (ja) * 1987-06-09 1988-12-14 Olympus Optical Co Ltd 走査型光学顕微鏡
US5024529A (en) * 1988-01-29 1991-06-18 Synthetic Vision Systems, Inc. Method and system for high-speed, high-resolution, 3-D imaging of an object at a vision station
US5510894A (en) * 1988-12-22 1996-04-23 Renishaw Plc Spectroscopic apparatus and methods
US5153428A (en) * 1990-06-15 1992-10-06 Hamamatsu Photonics K.K. Confocal laser scanning microscope having relay lens and a slit for removing stray light
US5118192A (en) * 1990-07-11 1992-06-02 Robotic Vision Systems, Inc. System for 3-D inspection of objects
US5239178A (en) * 1990-11-10 1993-08-24 Carl Zeiss Optical device with an illuminating grid and detector grid arranged confocally to an object
GB9102903D0 (en) * 1991-02-12 1991-03-27 Oxford Sensor Tech An optical sensor
JP2511391B2 (ja) * 1991-12-04 1996-06-26 シーメンス アクチエンゲゼルシヤフト 光学式間隔センサ
US5248876A (en) * 1992-04-21 1993-09-28 International Business Machines Corporation Tandem linear scanning confocal imaging system with focal volumes at different heights
US5483055A (en) * 1994-01-18 1996-01-09 Thompson; Timothy V. Method and apparatus for performing an automatic focus operation for a microscope
US5479252A (en) * 1993-06-17 1995-12-26 Ultrapointe Corporation Laser imaging system for inspection and analysis of sub-micron particles
US5594235A (en) * 1993-06-17 1997-01-14 Ultrapointe Corporation Automated surface acquisition for a confocal microscope
US5546189A (en) * 1994-05-19 1996-08-13 View Engineering, Inc. Triangulation-based 3D imaging and processing method and system
DE19509962A1 (de) * 1995-03-18 1996-09-19 Univ Karlsruhe Verfahren und Vorrichtung zur Erfassung von dreidimensionalen Verschiebungsvektorfeldern
US5617209A (en) * 1995-04-27 1997-04-01 View Engineering, Inc. Method and system for triangulation-based, 3-D imaging utilizing an angled scaning beam of radiant energy
DE59609158D1 (de) * 1995-06-30 2002-06-06 Siemens Ag Optischer abstandssensor
US5859924A (en) * 1996-07-12 1999-01-12 Robotic Vision Systems, Inc. Method and system for measuring object features

Also Published As

Publication number Publication date
DE69904304D1 (de) 2003-01-16
EP1229350A2 (de) 2002-08-07
DE69904304T2 (de) 2003-07-24
WO1999045410A1 (en) 1999-09-10
EP1229350A3 (de) 2003-06-25
US6098031A (en) 2000-08-01
EP1058856A1 (de) 2000-12-13
EP1058856B1 (de) 2002-12-04
CA2322181A1 (en) 1999-09-10

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