ATE230445T1 - Verfahren und vorrichtung zur ablagerung von parylen af4 auf halbleiterwafern - Google Patents

Verfahren und vorrichtung zur ablagerung von parylen af4 auf halbleiterwafern

Info

Publication number
ATE230445T1
ATE230445T1 AT96936895T AT96936895T ATE230445T1 AT E230445 T1 ATE230445 T1 AT E230445T1 AT 96936895 T AT96936895 T AT 96936895T AT 96936895 T AT96936895 T AT 96936895T AT E230445 T1 ATE230445 T1 AT E230445T1
Authority
AT
Austria
Prior art keywords
wafer
parylene
deposing
onto
semiconductor wafers
Prior art date
Application number
AT96936895T
Other languages
English (en)
Inventor
William F Beach
Roger A Olson
John Wary
Kermit Crain
Original Assignee
Specialty Coating Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/549,093 external-priority patent/US5536319A/en
Priority claimed from US08/549,635 external-priority patent/US5536322A/en
Priority claimed from US08/549,131 external-priority patent/US5536321A/en
Priority claimed from US08/549,133 external-priority patent/US5536317A/en
Priority claimed from US08/549,130 external-priority patent/US5556473A/en
Priority claimed from US08/549,087 external-priority patent/US5538758A/en
Priority claimed from US08/549,169 external-priority patent/US5534068A/en
Priority claimed from US08/549,395 external-priority patent/US5709753A/en
Application filed by Specialty Coating Systems Inc filed Critical Specialty Coating Systems Inc
Application granted granted Critical
Publication of ATE230445T1 publication Critical patent/ATE230445T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
    • C23C16/463—Cooling of the substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/60—Deposition of organic layers from vapour phase
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G61/00—Macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain of the macromolecule
    • C08G61/02—Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes
    • C08G61/025—Polyxylylenes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/4485—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation without using carrier gas in contact with the source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52—Controlling or regulating the coating process
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G2261/00—Macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain of the macromolecule
    • C08G2261/30—Monomer units or repeat units incorporating structural elements in the main chain
    • C08G2261/34—Monomer units or repeat units incorporating structural elements in the main chain incorporating partially-aromatic structural elements in the main chain
    • C08G2261/342—Monomer units or repeat units incorporating structural elements in the main chain incorporating partially-aromatic structural elements in the main chain containing only carbon atoms
    • C08G2261/3424—Monomer units or repeat units incorporating structural elements in the main chain incorporating partially-aromatic structural elements in the main chain containing only carbon atoms non-conjugated, e.g. paracyclophanes or xylenes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
  • Polyoxymethylene Polymers And Polymers With Carbon-To-Carbon Bonds (AREA)
  • Formation Of Insulating Films (AREA)
AT96936895T 1995-10-27 1996-10-25 Verfahren und vorrichtung zur ablagerung von parylen af4 auf halbleiterwafern ATE230445T1 (de)

Applications Claiming Priority (15)

Application Number Priority Date Filing Date Title
US08/549,093 US5536319A (en) 1995-10-27 1995-10-27 Parylene deposition apparatus including an atmospheric shroud and inert gas source
US08/549,635 US5536322A (en) 1995-10-27 1995-10-27 Parylene deposition apparatus including a heated and cooled support platen and an electrostatic clamping device
US08/549,131 US5536321A (en) 1995-10-27 1995-10-27 Parylene deposition apparatus including a post-pyrolysis filtering chamber and a deposition chamber inlet filter
US08/549,133 US5536317A (en) 1995-10-27 1995-10-27 Parylene deposition apparatus including a quartz crystal thickness/rate controller
US08/549,130 US5556473A (en) 1995-10-27 1995-10-27 Parylene deposition apparatus including dry vacuum pump system and downstream cold trap
US08/549,087 US5538758A (en) 1995-10-27 1995-10-27 Method and apparatus for the deposition of parylene AF4 onto semiconductor wafers
US08/549,169 US5534068A (en) 1995-10-27 1995-10-27 Parylene deposition apparatus including a tapered deposition chamber and dual vacuum outlet pumping arrangement
US08/549,395 US5709753A (en) 1995-10-27 1995-10-27 Parylene deposition apparatus including a heated and cooled dimer crucible
US68016196A 1996-07-15 1996-07-15
US67995896A 1996-07-15 1996-07-15
US67982796A 1996-07-15 1996-07-15
US68357796A 1996-07-15 1996-07-15
US68000596A 1996-07-15 1996-07-15
US67995696A 1996-07-15 1996-07-15
PCT/US1996/017003 WO1997015699A2 (en) 1995-10-27 1996-10-25 Method and apparatus for the deposition of parylene af4 onto semiconductor wafers

Publications (1)

Publication Number Publication Date
ATE230445T1 true ATE230445T1 (de) 2003-01-15

Family

ID=27585116

Family Applications (1)

Application Number Title Priority Date Filing Date
AT96936895T ATE230445T1 (de) 1995-10-27 1996-10-25 Verfahren und vorrichtung zur ablagerung von parylen af4 auf halbleiterwafern

Country Status (4)

Country Link
EP (1) EP0862664B1 (de)
JP (1) JP3808102B2 (de)
AT (1) ATE230445T1 (de)
WO (1) WO1997015699A2 (de)

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US6086679A (en) * 1997-10-24 2000-07-11 Quester Technology, Inc. Deposition systems and processes for transport polymerization and chemical vapor deposition
US6051321A (en) * 1997-10-24 2000-04-18 Quester Technology, Inc. Low dielectric constant materials and method
US6020458A (en) * 1997-10-24 2000-02-01 Quester Technology, Inc. Precursors for making low dielectric constant materials with improved thermal stability
US6140456A (en) * 1997-10-24 2000-10-31 Quester Techology, Inc. Chemicals and processes for making fluorinated poly(para-xylylenes)
WO1999057330A1 (en) 1998-05-01 1999-11-11 Desu Seshu B Oxide/organic polymer multilayer thin films deposited by chemical vapor deposition
US6495208B1 (en) 1999-09-09 2002-12-17 Virginia Tech Intellectual Properties, Inc. Near-room temperature CVD synthesis of organic polymer/oxide dielectric nanocomposites
US6825303B2 (en) 2001-02-26 2004-11-30 Dielectric Systems, Inc. Integration of low ε thin films and Ta into Cu dual damascene
US6797343B2 (en) 2001-12-20 2004-09-28 Dielectric Systems, Inc. Dielectric thin films from fluorinated precursors
US6881447B2 (en) * 2002-04-04 2005-04-19 Dielectric Systems, Inc. Chemically and electrically stabilized polymer films
US7026052B2 (en) 2001-02-26 2006-04-11 Dielectric Systems, Inc. Porous low k(<2.0) thin film derived from homo-transport-polymerization
US6703462B2 (en) * 2001-08-09 2004-03-09 Dielectric Systems Inc. Stabilized polymer film and its manufacture
US7192645B2 (en) 2001-02-26 2007-03-20 Dielectric Systems, Inc. Porous low E (<2.0) thin films by transport co-polymerization
RU2218364C2 (ru) * 2001-07-27 2003-12-10 Федеральное государственное унитарное предприятие "Научно-исследовательский физико-химический институт им. Л.Я. Карпова" ПЛЕНКА ИЗ ПОЛИ ( α,α,α′,α′- ТЕТРАФТОРПАРАКСИЛИЛЕНА), СПОСОБ ЕЕ ПОЛУЧЕНИЯ И ПОЛУПРОВОДНИКОВЫЙ ПРИБОР С ЕЕ ИСПОЛЬЗОВАНИЕМ
US7179283B2 (en) 2001-11-02 2007-02-20 Scimed Life Systems, Inc. Vapor deposition process for producing a stent-graft and a stent-graft produced therefrom
US6783598B2 (en) * 2002-08-15 2004-08-31 Fibersense Technology Corp. Moisture barrier sealing of fiber optic coils
US6962871B2 (en) 2004-03-31 2005-11-08 Dielectric Systems, Inc. Composite polymer dielectric film
US7094661B2 (en) 2004-03-31 2006-08-22 Dielectric Systems, Inc. Single and dual damascene techniques utilizing composite polymer dielectric film
US7309395B2 (en) 2004-03-31 2007-12-18 Dielectric Systems, Inc. System for forming composite polymer dielectric film
WO2007003502A2 (de) * 2005-07-01 2007-01-11 Siemens Aktiengesellschaft Parylen-beschichtung und verfahren zum herstellen einer parylen-beschichtung
US20070148390A1 (en) * 2005-12-27 2007-06-28 Specialty Coating Systems, Inc. Fluorinated coatings
EP2053070A4 (de) * 2006-07-28 2010-08-18 Daisankasei Co Ltd Cvd-vorrichtung und cvd-verfahren
DE102009003781A1 (de) 2008-06-03 2009-12-10 Aixtron Ag Verfahren zum Abscheiden eines dünnschichtigen Polymers in einer Niederdruckgasphase
RU2461429C2 (ru) * 2010-09-03 2012-09-20 Российская Федерация, от имени которой выступает Министерство образования и науки РФ (Минобрнаука РФ) Способ получения пленок полипараксилилена и его производных
US8816371B2 (en) * 2011-11-30 2014-08-26 Micron Technology, Inc. Coated color-converting particles and associated devices, systems, and methods
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US11933942B2 (en) * 2019-03-25 2024-03-19 Applied Materials, Inc. Non-line-of-sight deposition of coating on internal components of assembled device

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Also Published As

Publication number Publication date
JP3808102B2 (ja) 2006-08-09
JP2000508115A (ja) 2000-06-27
EP0862664A2 (de) 1998-09-09
EP0862664B1 (de) 2003-01-02
WO1997015699A2 (en) 1997-05-01
WO1997015699A3 (en) 1997-09-12

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