ATE231980T1 - Beugungsoptisches element und verfahren zu dessen herstellung - Google Patents

Beugungsoptisches element und verfahren zu dessen herstellung

Info

Publication number
ATE231980T1
ATE231980T1 AT98947758T AT98947758T ATE231980T1 AT E231980 T1 ATE231980 T1 AT E231980T1 AT 98947758 T AT98947758 T AT 98947758T AT 98947758 T AT98947758 T AT 98947758T AT E231980 T1 ATE231980 T1 AT E231980T1
Authority
AT
Austria
Prior art keywords
optical element
production
diffraction optical
diffractive optical
provides
Prior art date
Application number
AT98947758T
Other languages
English (en)
Inventor
Yoel Arieli
Original Assignee
Nano Or Technologies Israel Lt
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nano Or Technologies Israel Lt filed Critical Nano Or Technologies Israel Lt
Application granted granted Critical
Publication of ATE231980T1 publication Critical patent/ATE231980T1/de

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Lenses (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Holo Graphy (AREA)
AT98947758T 1997-10-07 1998-10-04 Beugungsoptisches element und verfahren zu dessen herstellung ATE231980T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IL12191297A IL121912A (en) 1997-10-07 1997-10-07 A chromatic diffractive optical component
PCT/IL1998/000485 WO1999018458A1 (en) 1997-10-07 1998-10-04 A diffractive optical element and a method for producing same

Publications (1)

Publication Number Publication Date
ATE231980T1 true ATE231980T1 (de) 2003-02-15

Family

ID=11070718

Family Applications (1)

Application Number Title Priority Date Filing Date
AT98947758T ATE231980T1 (de) 1997-10-07 1998-10-04 Beugungsoptisches element und verfahren zu dessen herstellung

Country Status (7)

Country Link
US (1) US6707608B1 (de)
EP (1) EP1019760B1 (de)
AT (1) ATE231980T1 (de)
AU (1) AU9457098A (de)
DE (1) DE69811099T2 (de)
IL (1) IL121912A (de)
WO (1) WO1999018458A1 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020097660A1 (en) * 2000-11-16 2002-07-25 Matsushita Electric Industrial Co., Ltd. Diffraction grating body, optical pick-up, semiconductor laser apparatus and optical information apparatus
JP2004288336A (ja) * 2003-03-25 2004-10-14 Hitachi Ltd 光ヘッド
US7203001B2 (en) * 2003-12-19 2007-04-10 Nanoopto Corporation Optical retarders and related devices and systems
US20050275944A1 (en) 2004-06-11 2005-12-15 Wang Jian J Optical films and methods of making the same
US7670758B2 (en) 2004-04-15 2010-03-02 Api Nanofabrication And Research Corporation Optical films and methods of making the same
US20060001969A1 (en) * 2004-07-02 2006-01-05 Nanoopto Corporation Gratings, related optical devices and systems, and methods of making such gratings
US7408724B2 (en) * 2004-09-27 2008-08-05 Tessera North America, Inc. Optical systems including a chromatic diffractive optical element corrector and associated methods
US7619816B2 (en) 2004-12-15 2009-11-17 Api Nanofabrication And Research Corp. Structures for polarization and beam control
US7262914B2 (en) * 2005-07-22 2007-08-28 Stuart Gary Mirell Method and apparatus for generating and detecting duality modulated electromagnetic radiation
KR100924876B1 (ko) * 2005-10-28 2009-11-02 미쓰비시덴키 가부시키가이샤 회절 광학 소자, 및 광 헤드 장치
US7969654B1 (en) * 2006-10-24 2011-06-28 Purdue Research Foundation Volume Fresnel zone plates fabricated by laser direct writing
FR2915811B1 (fr) 2007-05-04 2009-07-10 Saint Gobain Reseau diffusant la lumiere
US8049963B2 (en) * 2008-10-17 2011-11-01 Massachusetts Institute Of Technology Multiple-wavelength binary diffractive lenses
WO2011129814A1 (en) * 2010-04-13 2011-10-20 Hewlett-Packard Development Company, L.P. Controlling phase response in a sub-wavelength grating optical device
US8953239B2 (en) 2012-09-05 2015-02-10 University Of Utah Research Foundation Nanophotonic scattering structure
EP3019906A4 (de) 2013-07-08 2017-03-15 Ramot at Tel-Aviv University Ltd. Optisches element mit zwei phasenmasken
US9885671B2 (en) 2014-06-09 2018-02-06 Kla-Tencor Corporation Miniaturized imaging apparatus for wafer edge
US9645097B2 (en) 2014-06-20 2017-05-09 Kla-Tencor Corporation In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning
US10871601B2 (en) 2016-10-03 2020-12-22 Tipd, Llc Volume holographic optical elements for imaging with reduced aberrations
US11567253B2 (en) * 2017-10-27 2023-01-31 3M Innovative Properties Company Patterned optical retarders and methods for making thereof
US12066592B2 (en) * 2020-02-28 2024-08-20 Samsung Electronics Co., Ltd. Meta-optical device and electronic apparatus including the same

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4210391A (en) * 1977-09-14 1980-07-01 Cohen Allen L Multifocal zone plate
US4245882A (en) 1977-11-04 1981-01-20 Environmental Research Institute Of Michigan Doubly modulated on-axis thick hologram optical element
US5300190A (en) * 1987-06-24 1994-04-05 Mitsubishi Denki Kabushiki Kaisha Process of producing diffraction grating
US5071207A (en) * 1990-09-25 1991-12-10 The United States Of America As Represented By The United States Department Of Energy Broadband diffractive lens or imaging element
US5606434A (en) 1994-06-30 1997-02-25 University Of North Carolina Achromatic optical system including diffractive optical element
US5446588A (en) * 1994-07-29 1995-08-29 The University Of Rochester Wide-angle eyepiece optical system employing refractive and diffractive optical elements
US5847877A (en) 1994-09-12 1998-12-08 Olympus Optical Co., Ltd. Diffractive optical element
US6157488A (en) * 1995-08-29 2000-12-05 Olympus Optical Company Ltd. Diffractive optical element

Also Published As

Publication number Publication date
US6707608B1 (en) 2004-03-16
DE69811099T2 (de) 2004-01-15
AU9457098A (en) 1999-04-27
EP1019760A1 (de) 2000-07-19
WO1999018458A1 (en) 1999-04-15
EP1019760B1 (de) 2003-01-29
IL121912A0 (en) 1998-03-10
DE69811099D1 (de) 2003-03-06
IL121912A (en) 2004-05-12

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Legal Events

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RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties