ATE232294T1 - Dynamischer drucksensor, photoakustischer gasdetektor, mikrophon, hydrophon und deren herstellungsverfahren - Google Patents

Dynamischer drucksensor, photoakustischer gasdetektor, mikrophon, hydrophon und deren herstellungsverfahren

Info

Publication number
ATE232294T1
ATE232294T1 AT98962716T AT98962716T ATE232294T1 AT E232294 T1 ATE232294 T1 AT E232294T1 AT 98962716 T AT98962716 T AT 98962716T AT 98962716 T AT98962716 T AT 98962716T AT E232294 T1 ATE232294 T1 AT E232294T1
Authority
AT
Austria
Prior art keywords
pressure sensor
dynamic pressure
hydrophone
microphone
production method
Prior art date
Application number
AT98962716T
Other languages
English (en)
Inventor
Frode Meringdal
Original Assignee
Presens As
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Presens As filed Critical Presens As
Application granted granted Critical
Publication of ATE232294T1 publication Critical patent/ATE232294T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Measuring Fluid Pressure (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
AT98962716T 1997-11-26 1998-11-25 Dynamischer drucksensor, photoakustischer gasdetektor, mikrophon, hydrophon und deren herstellungsverfahren ATE232294T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NO975447A NO308228B1 (no) 1997-11-26 1997-11-26 Dynamisk trykksensor
PCT/NO1998/000346 WO1999030122A1 (en) 1997-11-26 1998-11-25 Dynamic pressure sensor, photo acoustic gas detector, microphone, hydrophone and their manufacturing

Publications (1)

Publication Number Publication Date
ATE232294T1 true ATE232294T1 (de) 2003-02-15

Family

ID=19901373

Family Applications (1)

Application Number Title Priority Date Filing Date
AT98962716T ATE232294T1 (de) 1997-11-26 1998-11-25 Dynamischer drucksensor, photoakustischer gasdetektor, mikrophon, hydrophon und deren herstellungsverfahren

Country Status (7)

Country Link
US (1) US6474168B1 (de)
EP (1) EP1034415B1 (de)
AT (1) ATE232294T1 (de)
AU (1) AU1788799A (de)
DE (1) DE69811270D1 (de)
NO (1) NO308228B1 (de)
WO (1) WO1999030122A1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI118548B (fi) 2002-09-30 2007-12-14 Noveltech Solutions Ltd Fotoakustinen detektori
FI116859B (fi) * 2002-09-30 2006-03-15 Noveltech Solutions Ltd Fotoakustinen detektori
US20040182847A1 (en) * 2003-02-17 2004-09-23 Kazuaki Ohkubo Radiation source for gas sensor
EP1574841A1 (de) * 2004-03-08 2005-09-14 Siemens Building Technologies AG Photoakustischer Gassensor
US7188528B2 (en) * 2004-04-23 2007-03-13 Kulite Semiconductor Products, Inc. Low pass filter semiconductor structures for use in transducers for measuring low dynamic pressures in the presence of high static pressures
US20070028697A1 (en) * 2005-08-08 2007-02-08 Honeywell International Inc. One piece needle and diaphragm assembly
WO2009114818A2 (en) * 2008-03-13 2009-09-17 University Of Utah Research Foundation Methods of forming an embedded cavity for sensors
US20100014748A1 (en) * 2008-07-21 2010-01-21 International Business Machines Corporation Method and apparatus for real time fault detection in high speed semiconductor processes
FR2974628B1 (fr) * 2011-04-28 2013-12-27 Commissariat Energie Atomique Microdebitmetre et son procede de realisation
US8848191B2 (en) 2012-03-14 2014-09-30 Honeywell International Inc. Photoacoustic sensor with mirror
US9683675B2 (en) 2014-11-24 2017-06-20 General Electric Company Pressure modulator
DE202015002315U1 (de) * 2015-03-27 2015-05-06 Infineon Technologies Ag Gassensor
DE102016209798A1 (de) * 2016-06-03 2017-12-07 Robert Bosch Gmbh Mikroelektronische Sensorvorrichtung und Verfahren zum Herstellen einer mikroelektronischen Sensorvorrichtung
CN209326840U (zh) 2018-12-27 2019-08-30 热敏碟公司 压力传感器及压力变送器
EP3907491B1 (de) * 2020-05-07 2025-12-03 Infineon Technologies AG Fluidsensor

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4112736A (en) * 1977-01-17 1978-09-12 The Distillers Company (Carbon Dioxide) Ltd. Gas detector
DE3440568A1 (de) * 1984-11-07 1986-05-15 Robert Bosch Gmbh, 7000 Stuttgart Hochdrucksensor
US4771638A (en) * 1985-09-30 1988-09-20 Kabushiki Kaisha Toyota Chuo Kenkyusho Semiconductor pressure sensor
JPH01156637A (ja) * 1987-12-15 1989-06-20 Fujitsu Ltd ガス濃度測定装置
DE4108989C2 (de) 1990-03-19 1996-04-25 Hitachi Ltd Integrierter Multisensor zum Erfassen eines statischen und eines Differenzdruckes
US5633552A (en) 1993-06-04 1997-05-27 The Regents Of The University Of California Cantilever pressure transducer
NO300078B1 (no) * 1995-02-10 1997-04-01 Sinvent As Fotoakustisk gassdetektor
NO963924A (no) 1996-09-19 1997-12-15 Nyfotek As Foto-akustisk infrarød detektor

Also Published As

Publication number Publication date
EP1034415A1 (de) 2000-09-13
EP1034415B1 (de) 2003-02-05
NO975447D0 (no) 1997-11-26
WO1999030122A1 (en) 1999-06-17
AU1788799A (en) 1999-06-28
DE69811270D1 (de) 2003-03-13
NO308228B1 (no) 2000-08-14
NO975447L (no) 1999-05-27
US6474168B1 (en) 2002-11-05

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Legal Events

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RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties