ATE233397T1 - Vorrichtung zur feststellung einer relativen bewegung - Google Patents

Vorrichtung zur feststellung einer relativen bewegung

Info

Publication number
ATE233397T1
ATE233397T1 AT95922098T AT95922098T ATE233397T1 AT E233397 T1 ATE233397 T1 AT E233397T1 AT 95922098 T AT95922098 T AT 95922098T AT 95922098 T AT95922098 T AT 95922098T AT E233397 T1 ATE233397 T1 AT E233397T1
Authority
AT
Austria
Prior art keywords
grating
detector
phase
orders
poly
Prior art date
Application number
AT95922098T
Other languages
German (de)
English (en)
Inventor
Donald K Mitchell
William G Thorburn
Original Assignee
Microe Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=26941047&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ATE233397(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Microe Inc filed Critical Microe Inc
Application granted granted Critical
Publication of ATE233397T1 publication Critical patent/ATE233397T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Vehicle Body Suspensions (AREA)
  • Valve-Gear Or Valve Arrangements (AREA)
AT95922098T 1994-05-27 1995-05-25 Vorrichtung zur feststellung einer relativen bewegung ATE233397T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US25066694A 1994-05-27 1994-05-27
US08/394,224 US5486923A (en) 1992-05-05 1995-02-24 Apparatus for detecting relative movement wherein a detecting means is positioned in the region of natural interference
PCT/US1995/006415 WO1995033179A1 (en) 1994-05-27 1995-05-25 Apparatus for detecting relative movement

Publications (1)

Publication Number Publication Date
ATE233397T1 true ATE233397T1 (de) 2003-03-15

Family

ID=26941047

Family Applications (1)

Application Number Title Priority Date Filing Date
AT95922098T ATE233397T1 (de) 1994-05-27 1995-05-25 Vorrichtung zur feststellung einer relativen bewegung

Country Status (7)

Country Link
US (2) US5486923A (ja)
EP (1) EP0760932B2 (ja)
JP (1) JP4037903B2 (ja)
AT (1) ATE233397T1 (ja)
CA (1) CA2191329C (ja)
DE (1) DE69529745T3 (ja)
WO (1) WO1995033179A1 (ja)

Families Citing this family (70)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5486923A (en) * 1992-05-05 1996-01-23 Microe Apparatus for detecting relative movement wherein a detecting means is positioned in the region of natural interference
JP3312086B2 (ja) * 1994-05-19 2002-08-05 株式会社リコー エンコーダ装置
EP0741282A3 (fr) * 1995-05-04 1998-06-17 CSEM Centre Suisse d'Electronique et de Microtechnique S.A. - Recherche et Développement Dispositif optique de mesure d'un déplacement relatif entre deux éléments
DE19536141A1 (de) * 1995-09-28 1997-04-03 Bosch Gmbh Robert Optische Vorrichtung zum Messen physikalischer Größen
US5710426A (en) * 1996-03-01 1998-01-20 Ta Instruments, Inc. Dynamic and thermal mechanical analyzer having an optical encoder with diffraction grating and a linear permanent magnet motor
DE19752511A1 (de) * 1996-12-07 1998-06-10 Heidenhain Gmbh Dr Johannes Abtasteinheit für eine optische Positionsmeßeinrichtung
US5754295A (en) * 1996-12-20 1998-05-19 Microe, Inc. Non-contacting torque sensor and displacement measuring apparatus and method
US5856872A (en) * 1997-10-02 1999-01-05 Microe, Inc. Vernier index position sensor
US5909283A (en) * 1997-10-07 1999-06-01 Eselun; Steven Albert Linear encoder using diverging light beam diffraction
JP4008552B2 (ja) * 1997-10-31 2007-11-14 株式会社トプコン 干渉計測装置及び干渉計測制御システム
US6144118A (en) * 1998-09-18 2000-11-07 General Scanning, Inc. High-speed precision positioning apparatus
US6188484B1 (en) 1998-10-29 2001-02-13 Maxtor Corporation Method and apparatus for measuring angular displacement of an actuator arm relative to a reference position
US6552802B1 (en) 1999-05-04 2003-04-22 Microe Systems, Inc. Apparatus and method for roll invariant reflective position sensing
DE19941318A1 (de) * 1999-08-31 2001-03-15 Heidenhain Gmbh Dr Johannes Optische Positionsmeßeinrichtung
US6707632B1 (en) 2000-02-08 2004-03-16 Seagate Technology Llc Disc drive with self-contained servo data writing capability
US6898537B1 (en) * 2001-04-27 2005-05-24 Nanometrics Incorporated Measurement of diffracting structures using one-half of the non-zero diffracted orders
JP4798911B2 (ja) * 2001-05-18 2011-10-19 株式会社東京精密 回折干渉式リニアスケール
EP1421343A2 (en) * 2001-08-30 2004-05-26 MicroE Systems Corporation Reference point talbot encoder
US7002137B2 (en) * 2001-08-30 2006-02-21 Gsi Lumonics Corporation Reference point talbot encoder
JP2005524050A (ja) * 2001-08-30 2005-08-11 マイクロイー システムズ コーポレイション 高調波抑制光検出器アレイ
US7061615B1 (en) 2001-09-20 2006-06-13 Nanometrics Incorporated Spectroscopically measured overlay target
US6957496B2 (en) * 2002-02-14 2005-10-25 Faro Technologies, Inc. Method for improving measurement accuracy of a portable coordinate measurement machine
US7519493B2 (en) * 2002-02-14 2009-04-14 Faro Technologies, Inc. Portable coordinate measurement machine with integrated line laser scanner
US6952882B2 (en) * 2002-02-14 2005-10-11 Faro Technologies, Inc. Portable coordinate measurement machine
USRE42082E1 (en) 2002-02-14 2011-02-01 Faro Technologies, Inc. Method and apparatus for improving measurement accuracy of a portable coordinate measurement machine
US7881896B2 (en) 2002-02-14 2011-02-01 Faro Technologies, Inc. Portable coordinate measurement machine with integrated line laser scanner
EP1474653B1 (en) * 2002-02-14 2013-01-02 Faro Technologies Inc. Portable coordinate measurement machine with integrated line laser scanner
US7073271B2 (en) 2002-02-14 2006-07-11 Faro Technologies Inc. Portable coordinate measurement machine
US7246030B2 (en) * 2002-02-14 2007-07-17 Faro Technologies, Inc. Portable coordinate measurement machine with integrated line laser scanner
US6973734B2 (en) * 2002-02-14 2005-12-13 Faro Technologies, Inc. Method for providing sensory feedback to the operator of a portable measurement machine
US6982793B1 (en) 2002-04-04 2006-01-03 Nanometrics Incorporated Method and apparatus for using an alignment target with designed in offset
US6949462B1 (en) 2002-04-04 2005-09-27 Nanometrics Incorporated Measuring an alignment target with multiple polarization states
RU2277222C2 (ru) * 2002-06-07 2006-05-27 Специальное конструкторско-технологическое бюро "Наука" КНЦ СО РАН Интерферометр
AU2003247899A1 (en) * 2002-07-08 2004-01-23 Microe Systems Corporation Multi-track optical encoder employing beam divider
DE10333772A1 (de) * 2002-08-07 2004-02-26 Dr. Johannes Heidenhain Gmbh Interferenzielle Positionsmesseinrichtung
US6992764B1 (en) 2002-09-30 2006-01-31 Nanometrics Incorporated Measuring an alignment target with a single polarization state
US7299991B2 (en) * 2003-04-08 2007-11-27 Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. Reflective members for use in encoder systems
DE10319609A1 (de) * 2003-05-02 2004-11-18 Dr. Johannes Heidenhain Gmbh Optoelektronische Detektoranordnung
DE10323088A1 (de) * 2003-05-16 2004-12-02 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
US7242481B2 (en) * 2003-09-22 2007-07-10 Celight, Inc. Laser vibrometry with coherent detection
US7126696B2 (en) * 2003-09-30 2006-10-24 Mitutoyo Corporation Interferometric miniature grating encoder readhead using fiber optic receiver channels
US7228034B2 (en) * 2003-11-03 2007-06-05 Intel Corporation Interference patterning
US7422211B2 (en) * 2005-01-21 2008-09-09 Xerox Corporation Lateral and skew registration using closed loop feedback on the paper edge position
DE102005009043A1 (de) * 2005-02-22 2006-08-31 Dr. Johannes Heidenhain Gmbh Abtasteinheit für eine Positionsmesseinrichtung
US20070024865A1 (en) * 2005-07-26 2007-02-01 Mitchell Donald K Optical encoder having slanted optical detector elements for harmonic suppression
US7552873B2 (en) * 2005-09-14 2009-06-30 Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. Transmissive optical encoder
US7469839B2 (en) * 2005-09-14 2008-12-30 Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. Reflective optical encoder
WO2007075675A2 (en) * 2005-12-22 2007-07-05 Board Of Supervisors Of Louisiana State University And Agricultural And Mechanical College High precision code plates and geophones
EP2082118B1 (en) * 2006-09-08 2015-10-07 GSI Group Corporation Interferometric optical position encoder employing spatial filtering of diffraction orders for improved accuracy
KR101025627B1 (ko) * 2007-08-06 2011-03-30 광주과학기술원 리모콘 마우스
JP2009094512A (ja) * 2007-10-09 2009-04-30 Asml Netherlands Bv 位置合わせ方法及び装置、リソグラフィ装置、計測装置、及びデバイス製造方法
SG174005A1 (en) * 2008-04-30 2011-09-29 Nikon Corp Stage device, pattern formation apparatus, exposure apparatus, stage drive method, exposure method, and device manufacturing method
DE112009002101T5 (de) 2008-08-28 2012-01-12 Faro Technologies, Inc. Mit einem Index versehender optischer Encoder, Verfahren zum Indexieren eines optischen Encoders und Verfahren zum dynamischen Einstellen von Verstärkung und Offset in einem optischen Encoder
JP5391115B2 (ja) * 2010-03-18 2014-01-15 株式会社ミツトヨ 光電式エンコーダ
EP2372302A1 (de) 2010-03-26 2011-10-05 Leica Geosystems AG Messverfahren für eine oberflächenvermessende Messmaschine
US8537377B2 (en) * 2011-04-27 2013-09-17 Raytheon Company Absolute position encoder
US9534934B2 (en) 2011-09-06 2017-01-03 Nikon Corporation High resolution encoder head
DK2823262T3 (da) 2012-03-05 2020-08-24 Novanta Corp Fremgangsmåde til faseestimering og apparat dertil
CA3028775C (en) * 2014-03-04 2020-01-07 Novadaq Technologies ULC Spatial and spectral filtering apertures and optical imaging systems including the same
CA2941273C (en) 2014-03-04 2019-10-01 Novadaq Technologies Inc. Relay lens system for broadband imaging
JP6386337B2 (ja) 2014-10-23 2018-09-05 株式会社ミツトヨ 光学式エンコーダ
DE112016001860T5 (de) 2015-04-22 2018-01-18 Faro Technologies, Inc. Indexierter optischer Drehgeber
KR102393740B1 (ko) * 2015-12-08 2022-05-02 케이엘에이 코포레이션 편광 타겟 및 편광 조명을 사용한 회절 차수의 진폭 및 위상의 제어
DE102016107715A1 (de) * 2016-04-26 2017-10-26 Osram Opto Semiconductors Gmbh Lasermodul mit einem optischen Bauteil
US10241244B2 (en) 2016-07-29 2019-03-26 Lumentum Operations Llc Thin film total internal reflection diffraction grating for single polarization or dual polarization
US10226657B2 (en) 2016-12-30 2019-03-12 Nautilus, Inc. Stationary exercise machine with a power measurement apparatus
DE102019206937A1 (de) * 2019-05-14 2020-11-19 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
US12481224B2 (en) * 2022-06-10 2025-11-25 Nanya Technology Corporation Method and system for overlay measurement
EP4639090A1 (en) 2022-12-20 2025-10-29 Renishaw plc Encoder apparatus
EP4390326A1 (en) 2022-12-20 2024-06-26 Renishaw PLC Encoder apparatus

Family Cites Families (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2316248A1 (de) * 1973-03-31 1974-10-10 Leitz Ernst Gmbh Fotoelektrischer schrittgeber
GB1474049A (en) * 1974-01-12 1977-05-18 Leitz Ernst Gmbh Arrangement for the modulation of light
CH626169A5 (ja) * 1976-11-25 1981-10-30 Leitz Ernst Gmbh
US4168908A (en) * 1977-12-30 1979-09-25 The United States Of America As Represented By The Secretary Of The Air Force Precision pointing and tracking control system
EP0112399B1 (de) * 1982-12-20 1987-03-11 Ibm Deutschland Gmbh Interferometrisches Messverfahren für Oberflächen
US4711573A (en) * 1983-03-07 1987-12-08 Beckman Instruments, Inc. Dynamic mirror alignment control
US4655587A (en) * 1983-03-07 1987-04-07 Beckman Instruments, Inc. Mirror scan velocity control
US4636077A (en) * 1983-04-15 1987-01-13 Matsushita Electric Industrial Co., Ltd. Aligning exposure method
DE3486178T2 (de) * 1983-11-04 1993-10-21 Sony Magnescale Inc Optisches Instrument zur Messung einer Verschiebung.
US4631416A (en) * 1983-12-19 1986-12-23 Hewlett-Packard Company Wafer/mask alignment system using diffraction gratings
GB8413955D0 (en) * 1984-05-31 1984-07-04 Pa Consulting Services Displacement measuring apparatus
US4967072A (en) * 1984-09-05 1990-10-30 Canon Kabushiki Kaisha Interferometric rotating condition detection apparatus
US4710026A (en) * 1985-03-22 1987-12-01 Nippon Kogaku K. K. Position detection apparatus
JPH0621801B2 (ja) * 1985-07-03 1994-03-23 キヤノン株式会社 ロ−タリ−エンコ−ダ−
JPS6212814A (ja) * 1985-07-10 1987-01-21 Canon Inc ロ−タリ−エンコ−ダ−
DE3700906C2 (de) * 1986-01-14 1995-09-28 Canon Kk Verschlüßler
JPS62172203A (ja) * 1986-01-27 1987-07-29 Agency Of Ind Science & Technol 相対変位測定方法
US4731772A (en) * 1986-05-06 1988-03-15 Lee Wai Hon Optical head using hologram lens for both beam splitting and focus error detection functions
EP0248277A3 (en) * 1986-06-03 1990-03-28 Optra, Inc. Two-frequency laser rotation sensor system
US4872751A (en) * 1986-06-03 1989-10-10 Michael Hercher Non-contact lateral displacement sensor and extensometer system
US4776698A (en) * 1986-08-04 1988-10-11 Eastman Kodak Company Measuring
DE3737278A1 (de) * 1986-11-04 1988-05-11 Canon Kk Verfahren und vorrichtung zum optischen erfassen der stellung eines objekts
US4728193A (en) * 1986-12-11 1988-03-01 Hughes Aircraft Company Precision automatic mask-wafer alignment system
US5066130A (en) * 1988-05-10 1991-11-19 Canon Kabushiki Kaisha Displacement measuring apparatus
JP2586120B2 (ja) * 1988-09-22 1997-02-26 キヤノン株式会社 エンコーダー
US5043775A (en) * 1989-02-21 1991-08-27 Wai-Hon Lee Semiconductor laser assembly
US5050153A (en) * 1989-06-06 1991-09-17 Wai-Hon Lee Semiconductor laser optical head assembly
US5098190A (en) * 1989-08-07 1992-03-24 Optra, Inc. Meterology using interferometric measurement technology for measuring scale displacement with three output signals
GB2239088B (en) * 1989-11-24 1994-05-25 Ricoh Kk Optical movement measuring method and apparatus
US5182610A (en) * 1990-04-19 1993-01-26 Sortec Corporation Position detecting method and device therefor as well as aligning device
US5136152A (en) * 1990-12-19 1992-08-04 Hoetron, Inc. Hybrid optical pickup with integrated power emission and reading photodetectors
US5104225A (en) * 1991-01-25 1992-04-14 Mitutoyo Corporation Position detector and method of measuring position
US5325349A (en) * 1991-05-29 1994-06-28 Sony Magnescale Inc. Hard disc drive and a servo signal writing apparatus
ATE182677T1 (de) * 1992-05-05 1999-08-15 Microe Inc Apparat zum detektieren einer relativen bewegung
US5486923A (en) * 1992-05-05 1996-01-23 Microe Apparatus for detecting relative movement wherein a detecting means is positioned in the region of natural interference
DE69320716T3 (de) † 1992-06-30 2011-05-19 Canon K.K. Gerät zur Detektion von Verschiebungsinformation
JP3210111B2 (ja) † 1992-12-24 2001-09-17 キヤノン株式会社 変位検出装置

Also Published As

Publication number Publication date
DE69529745T3 (de) 2010-04-01
WO1995033179A1 (en) 1995-12-07
US5646730A (en) 1997-07-08
JP4037903B2 (ja) 2008-01-23
EP0760932A4 (en) 1997-11-05
DE69529745T2 (de) 2004-02-05
US5486923A (en) 1996-01-23
JPH10501334A (ja) 1998-02-03
EP0760932A1 (en) 1997-03-12
CA2191329A1 (en) 1995-12-07
EP0760932B1 (en) 2003-02-26
CA2191329C (en) 2004-12-07
EP0760932B2 (en) 2009-08-26
DE69529745D1 (de) 2003-04-03

Similar Documents

Publication Publication Date Title
ATE233397T1 (de) Vorrichtung zur feststellung einer relativen bewegung
EP0639259A4 (en) APPARATUS FOR DETECTING A RELATIVE MOVEMENT.
DE69329912D1 (de) Diffraktive optische Vorrichtung
PT846110E (pt) Sulfonamidas contendo thf que sao inibidores de apartil-protease
DE69602159D1 (de) Hypertext-Dokumentvorbereitungsgerät
DE69125678D1 (de) Abstimmbares Beugungsgitter
DE69632739D1 (de) Vorrichtung zur fixierung von messbedingungen
DE69619151D1 (de) Kartographisches Datenbankgerät
DE69607192D1 (de) Lage empfindlicher hochanflösungs detektor für hohe flüsse ionisierender teilchen
DE69527039D1 (de) Lichtempfindliche vorrichtung
DE69116933D1 (de) Lichtempfindliches Element zur Elektrophotographie
MX9203159A (es) Iluminador de microscopio ajustable.
DE69637346D1 (de) Linsenmessgerät
GT199200023A (es) Procedimiento para la obtencion a escala industrial de siropes-glucosa-fructuosa a partir de sacarosa e instalacionparael mismo
NO950146L (no) Anordning for regulering av varmekjeler
DE69629000D1 (de) Fokusdetektor
TW582549U (en) Calculating apparatus of diffraction efficiency of diffraction lens, lens with optical grating device and reading optical system
DE69127400D1 (de) Lichtempfindliches Element für die Elektrophotographie
DE69119640D1 (de) Elektrophotographisches photoempfindliches Element
DE69609095D1 (de) Lichtempfindliches Element zur elektrophotographischen Verwendung
DE69319973D1 (de) Diffraktionselement und optische Abtastkopfanordnung
DE69224422D1 (de) Vorrichtung zur Bestimmung des optischen Lichtdurchlassgrades von Flüssigkeiten
NO965333D0 (no) Anordning for måling av hurtigströmmende fluider
DE69322823D1 (de) Entwickler für elektrophotographie des wärmefixierungstyps
EP0606901A3 (en) An electrophotographic apparatus.

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties