ATE233891T1 - Abtastgerät für probenmikroskop - Google Patents

Abtastgerät für probenmikroskop

Info

Publication number
ATE233891T1
ATE233891T1 AT97309152T AT97309152T ATE233891T1 AT E233891 T1 ATE233891 T1 AT E233891T1 AT 97309152 T AT97309152 T AT 97309152T AT 97309152 T AT97309152 T AT 97309152T AT E233891 T1 ATE233891 T1 AT E233891T1
Authority
AT
Austria
Prior art keywords
sample surface
core
probe
scanning device
scanning apparatus
Prior art date
Application number
AT97309152T
Other languages
English (en)
Inventor
Akira Inoue
Original Assignee
Seiko Instr Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP08302026A external-priority patent/JP3106242B2/ja
Application filed by Seiko Instr Inc filed Critical Seiko Instr Inc
Application granted granted Critical
Publication of ATE233891T1 publication Critical patent/ATE233891T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Sampling And Sample Adjustment (AREA)
AT97309152T 1996-11-13 1997-11-13 Abtastgerät für probenmikroskop ATE233891T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP08302026A JP3106242B2 (ja) 1996-11-13 1996-11-13 プローブ顕微鏡

Publications (1)

Publication Number Publication Date
ATE233891T1 true ATE233891T1 (de) 2003-03-15

Family

ID=17904015

Family Applications (1)

Application Number Title Priority Date Filing Date
AT97309152T ATE233891T1 (de) 1996-11-13 1997-11-13 Abtastgerät für probenmikroskop

Country Status (4)

Country Link
KR (1) KR100527967B1 (de)
AT (1) ATE233891T1 (de)
DE (1) DE69719458T2 (de)
TW (1) TW358881B (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100761059B1 (ko) 2006-09-29 2007-09-21 파크시스템스 주식회사 오버행 샘플 측정이 가능한 주사 탐침 현미경

Also Published As

Publication number Publication date
KR19980042329A (ko) 1998-08-17
DE69719458D1 (de) 2003-04-10
TW358881B (en) 1999-05-21
DE69719458T2 (de) 2003-10-02
KR100527967B1 (ko) 2006-03-27

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties