ATE237883T1 - Ansteuerungsverfahren für elektrostatische betätiger - Google Patents

Ansteuerungsverfahren für elektrostatische betätiger

Info

Publication number
ATE237883T1
ATE237883T1 AT98956652T AT98956652T ATE237883T1 AT E237883 T1 ATE237883 T1 AT E237883T1 AT 98956652 T AT98956652 T AT 98956652T AT 98956652 T AT98956652 T AT 98956652T AT E237883 T1 ATE237883 T1 AT E237883T1
Authority
AT
Austria
Prior art keywords
actuator
wave
voltage potential
signal
electrodes
Prior art date
Application number
AT98956652T
Other languages
English (en)
Inventor
Cleopatra Cabuz
Eugen Cabuz
Original Assignee
Honeywell Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Inc filed Critical Honeywell Inc
Application granted granted Critical
Publication of ATE237883T1 publication Critical patent/ATE237883T1/de

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Micromachines (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
  • Control Of Position Or Direction (AREA)
  • Valve Device For Special Equipments (AREA)
AT98956652T 1998-11-06 1998-11-06 Ansteuerungsverfahren für elektrostatische betätiger ATE237883T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US1998/023677 WO2000028651A1 (en) 1998-11-06 1998-11-06 Driving method for electrostatic actuators

Publications (1)

Publication Number Publication Date
ATE237883T1 true ATE237883T1 (de) 2003-05-15

Family

ID=22268247

Family Applications (1)

Application Number Title Priority Date Filing Date
AT98956652T ATE237883T1 (de) 1998-11-06 1998-11-06 Ansteuerungsverfahren für elektrostatische betätiger

Country Status (8)

Country Link
EP (1) EP1125357B1 (de)
JP (1) JP4113673B2 (de)
KR (1) KR100534488B1 (de)
CN (1) CN1181610C (de)
AT (1) ATE237883T1 (de)
CA (1) CA2349842C (de)
DE (1) DE69813637T2 (de)
WO (1) WO2000028651A1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6351054B1 (en) * 1997-10-09 2002-02-26 Honeywell International Inc. Compounded AC driving signal for increased reliability and lifetime in touch-mode electrostatic actuators
US6747863B2 (en) * 2002-01-11 2004-06-08 Hewlett-Packard Development Company, L.P. Electrostatic drive
JP2004061937A (ja) 2002-07-30 2004-02-26 Japan Aviation Electronics Industry Ltd 微小可動デバイス
DE60326962D1 (de) * 2002-08-06 2009-05-14 Ricoh Kk Durch ein halbleiterherstellungsverfahren gebildetes elektrostatisches stellglied
JP5260836B2 (ja) * 2006-02-15 2013-08-14 パナソニック株式会社 燃料電池システム
JP5649317B2 (ja) * 2010-03-16 2015-01-07 富士フイルム株式会社 液体供給装置、液体供給方法及び画像記録装置
DE102010061790A1 (de) 2010-11-23 2012-05-24 Robert Bosch Gmbh Digitale Ansteuerung für ein mikro-elektromechanisches Element
KR101415807B1 (ko) * 2012-03-22 2014-07-08 주식회사 에스앤에이 피에조 액츄에이터의 구동 장치 및 그 구동 방법

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5986381A (en) * 1997-03-14 1999-11-16 Hewlett-Packard Company Electrostatic actuator with spatially alternating voltage patterns

Also Published As

Publication number Publication date
EP1125357B1 (de) 2003-04-16
JP4113673B2 (ja) 2008-07-09
WO2000028651A1 (en) 2000-05-18
EP1125357A1 (de) 2001-08-22
KR100534488B1 (ko) 2005-12-07
DE69813637D1 (de) 2003-05-22
JP2002530045A (ja) 2002-09-10
KR20010107945A (ko) 2001-12-07
DE69813637T2 (de) 2004-03-04
CA2349842C (en) 2005-09-06
CN1337087A (zh) 2002-02-20
CN1181610C (zh) 2004-12-22
CA2349842A1 (en) 2000-05-18

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties