ATE239183T1 - Ferrofluidabdichtung - Google Patents

Ferrofluidabdichtung

Info

Publication number
ATE239183T1
ATE239183T1 AT97945305T AT97945305T ATE239183T1 AT E239183 T1 ATE239183 T1 AT E239183T1 AT 97945305 T AT97945305 T AT 97945305T AT 97945305 T AT97945305 T AT 97945305T AT E239183 T1 ATE239183 T1 AT E239183T1
Authority
AT
Austria
Prior art keywords
shaft
pole piece
pressure environment
magnetic fluid
magnetic
Prior art date
Application number
AT97945305T
Other languages
English (en)
Inventor
Walter Helgeland
Original Assignee
Rigaku Usa Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rigaku Usa Inc filed Critical Rigaku Usa Inc
Application granted granted Critical
Publication of ATE239183T1 publication Critical patent/ATE239183T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/40—Sealings between relatively-moving surfaces by means of fluid
    • F16J15/43—Sealings between relatively-moving surfaces by means of fluid kept in sealing position by magnetic force
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/162—Special parts or details relating to lubrication or cooling of the sealing itself

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
  • Sealing Of Bearings (AREA)
  • Glass Compositions (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
AT97945305T 1996-10-02 1997-09-26 Ferrofluidabdichtung ATE239183T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/720,634 US5826885A (en) 1996-10-02 1996-10-02 Magnetic fluid sealing device
PCT/US1997/017337 WO1998014726A1 (en) 1996-10-02 1997-09-26 Magnetic fluid sealing device

Publications (1)

Publication Number Publication Date
ATE239183T1 true ATE239183T1 (de) 2003-05-15

Family

ID=24894728

Family Applications (1)

Application Number Title Priority Date Filing Date
AT97945305T ATE239183T1 (de) 1996-10-02 1997-09-26 Ferrofluidabdichtung

Country Status (6)

Country Link
US (1) US5826885A (de)
EP (1) EP0929764B1 (de)
JP (1) JP4132149B2 (de)
AT (1) ATE239183T1 (de)
DE (1) DE69721549T2 (de)
WO (1) WO1998014726A1 (de)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6199867B1 (en) * 1997-09-30 2001-03-13 Rigaku/Usa, Inc. Rotary motion feedthrough device
US5975536A (en) * 1997-09-30 1999-11-02 Rigaku/Usa, Inc. Rotary motion feedthrough with rotating magnet system
US6377658B1 (en) * 2001-07-27 2002-04-23 General Electric Company Seal for liquid metal bearing assembly
US6863736B2 (en) * 2002-05-29 2005-03-08 Ibis Technology Corporation Shaft cooling mechanisms
US6899338B2 (en) * 2003-03-06 2005-05-31 Ferrotec Usa Corporation Ferrofluid seal incorporating multiple types of ferrofluid
KR100973666B1 (ko) * 2003-06-17 2010-08-03 주성엔지니어링(주) 원자층증착장치의 가스밸브 어셈블리
JP4885490B2 (ja) * 2005-06-30 2012-02-29 株式会社リガク 磁性流体シール装置
US9163732B2 (en) * 2007-10-18 2015-10-20 Rigaku Innovative Technologies, Inc. Magnetic fluid seal with precise control of fluid volume at each seal stage
ATE505679T1 (de) * 2007-10-18 2011-04-15 Rigaku Innovative Technologies Verfahren zur herstellung einer magnet-fluid- dichtung mit präziser fluidmengensteuerung auf jeder dichtungsstufe
US20100004518A1 (en) 2008-07-03 2010-01-07 Masimo Laboratories, Inc. Heat sink for noninvasive medical sensor
WO2010014563A1 (en) * 2008-07-30 2010-02-04 Rigaku Innovative Technologies, Inc. Magnetic fluid seal with shunt element
US8630691B2 (en) 2008-08-04 2014-01-14 Cercacor Laboratories, Inc. Multi-stream sensor front ends for noninvasive measurement of blood constituents
JP5024965B2 (ja) * 2008-09-09 2012-09-12 株式会社リガク 磁性流体シール装置
JP5651596B2 (ja) * 2008-10-09 2015-01-14 リガク イノベイティブ テクノロジーズ インコーポレイテッド 圧縮可能リングによりベアリングとシャフトを中心に配置する磁性流体封止装置
US8013696B2 (en) * 2008-10-14 2011-09-06 Nexteer (Beijing) Technology Co., Ltd. Magnetic apparatus and method of manufacturing the magnetic apparatus
US20100128848A1 (en) * 2008-11-21 2010-05-27 General Electric Company X-ray tube having liquid lubricated bearings and liquid cooled target
US8688183B2 (en) 2009-09-03 2014-04-01 Ceracor Laboratories, Inc. Emitter driver for noninvasive patient monitor
CN101737497B (zh) * 2010-02-11 2011-08-03 北京交通大学 一种磁性液体与三斜口填料环组合式往复轴密封装置
JP5549552B2 (ja) * 2010-11-12 2014-07-16 東京エレクトロン株式会社 真空処理装置の組み立て方法及び真空処理装置
CN102600781B (zh) * 2011-01-24 2015-09-30 昆山密友机械密封有限公司 结构改良的反应釜冷却系统
CN102537366B (zh) * 2012-01-05 2014-07-09 北京交通大学 分瓣式磁性液体密封装置的密封方法
US9279185B2 (en) * 2012-06-14 2016-03-08 Asm Technology Singapore Pte Ltd Feed-through apparatus for a chemical vapour deposition device
US9322478B2 (en) * 2012-07-31 2016-04-26 General Electric Company Seal system and method for rotary machine
JP6464407B2 (ja) * 2014-05-13 2019-02-06 イーグルブルグマンジャパン株式会社 磁性流体シールの組立方法及び磁性流体シール
CN107076309B (zh) * 2014-10-24 2019-01-18 公益财团法人铁道综合技术研究所 高速旋转用磁性流体密封结构
CN108351031A (zh) * 2015-11-11 2018-07-31 日本伊格尔博格曼有限公司 磁性流体密封件
CN105952904B (zh) * 2016-07-15 2019-03-29 湖南维格磁流体股份有限公司 真空设备及其磁流体密封传动装置
RU2659305C2 (ru) * 2016-11-07 2018-06-29 Общество с ограниченной ответственностью "ИнТек Техно" (ООО "ИнТек Техно") Магнитожидкостное уплотнение
CN106763214A (zh) * 2017-01-18 2017-05-31 东南大学 一种用于电机后置式电主轴辅助支承的动静压水轴承
CN107893855B (zh) * 2017-12-13 2023-05-02 广西科技大学 一种凹阶梯轴磁流体密封装置
RU2686358C1 (ru) * 2018-01-10 2019-04-25 Федеральное государственное бюджетное образовательное учреждение высшего образования "Ивановская пожарно-спасательная академия Государственной противопожарной службы Министерства Российской Федерации по делам гражданской обороны, чрезвычайным ситуациям и ликвидации последствий стихийных бедствий" Комбинированное магнитожидкостное уплотнение
CN108692026B (zh) * 2018-06-06 2019-04-05 中国石油大学(华东) 一种轴向端面密封静环装置
CN114294424B (zh) * 2021-12-10 2022-06-03 清华大学 磁性液体密封装置

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3734578A (en) * 1970-01-23 1973-05-22 Ferrofluidics Corp Magnetic fluid pneumatic bearings
US3612630A (en) * 1970-01-23 1971-10-12 Ferrofluidics Corp Bearing arrangement with magnetic fluid defining bearing pads
US3620584A (en) * 1970-05-25 1971-11-16 Ferrofluidics Corp Magnetic fluid seals
US3917538A (en) * 1973-01-17 1975-11-04 Ferrofluidics Corp Ferrofluid compositions and process of making same
US3810055A (en) * 1973-05-21 1974-05-07 T Wright Magnetic holding device
DE2444843C2 (de) * 1973-10-01 1984-03-22 Novatome, 92350 Le-Plessis-Robinson, Hauts-de-Seine Spiralförmige Drehdichtung mit einem Fluid zur Abdichtung einer rotierenden Welle
US4054293A (en) * 1976-12-27 1977-10-18 Borg-Warner Corporation Hybrid magnetic fluid shaft seals
US4281724A (en) * 1979-08-24 1981-08-04 Smith International, Inc. Drilling head
US4309040A (en) * 1980-06-03 1982-01-05 Ferrofluidics Corporation Linear seal apparatus
JPS5950275A (ja) * 1982-09-16 1984-03-23 Rigaku Keisoku Kk 磁性流体軸封装置
US4527805A (en) * 1984-05-03 1985-07-09 Ferrofluidics Corporation High-pressure ferrofluid seal apparatus
US4502700A (en) * 1984-05-03 1985-03-05 Ferrofluidics Corporation Ferrofluid linear seal apparatus
JP2522995B2 (ja) * 1988-08-10 1996-08-07 日本ピラー工業株式会社 磁性流体シ―ル装置
US4865334A (en) * 1988-11-04 1989-09-12 Ferrofluidics Corporation Long-life multi-stage ferrofluid seals incorporating a ferrofluid reservoir
US4995622A (en) * 1989-02-07 1991-02-26 Nippon Pillar Packing Co., Ltd. Magnetic fluid seal device
JPH03172617A (ja) * 1989-11-29 1991-07-26 Toshiba Corp 軸受装置
US5007513A (en) * 1990-04-03 1991-04-16 Lord Corporation Electroactive fluid torque transmission apparatus with ferrofluid seal
US5557900A (en) * 1995-09-15 1996-09-24 The Shane Group, Inc. Playground structural member using recycled plastic

Also Published As

Publication number Publication date
DE69721549T2 (de) 2004-04-08
JPH10184932A (ja) 1998-07-14
US5826885A (en) 1998-10-27
DE69721549D1 (en) 2003-06-05
EP0929764A1 (de) 1999-07-21
EP0929764B1 (de) 2003-05-02
JP4132149B2 (ja) 2008-08-13
WO1998014726A1 (en) 1998-04-09

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