ATE246317T1 - Verfahren zum betrieb einer mehrkammer- vakuumanlage - Google Patents

Verfahren zum betrieb einer mehrkammer- vakuumanlage

Info

Publication number
ATE246317T1
ATE246317T1 AT00112484T AT00112484T ATE246317T1 AT E246317 T1 ATE246317 T1 AT E246317T1 AT 00112484 T AT00112484 T AT 00112484T AT 00112484 T AT00112484 T AT 00112484T AT E246317 T1 ATE246317 T1 AT E246317T1
Authority
AT
Austria
Prior art keywords
vacuum
operating
vacuum system
chamber vacuum
valve
Prior art date
Application number
AT00112484T
Other languages
English (en)
Inventor
Karl Abbel
Original Assignee
Pfeiffer Vacuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum Gmbh filed Critical Pfeiffer Vacuum Gmbh
Application granted granted Critical
Publication of ATE246317T1 publication Critical patent/ATE246317T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/85978—With pump
    • Y10T137/86083—Vacuum pump
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/85978—With pump
    • Y10T137/86131—Plural

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Vacuum Packaging (AREA)
AT00112484T 1999-06-28 2000-06-13 Verfahren zum betrieb einer mehrkammer- vakuumanlage ATE246317T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19929519A DE19929519A1 (de) 1999-06-28 1999-06-28 Verfahren zum Betrieb einer Mehrkammer-Vakuumanlage

Publications (1)

Publication Number Publication Date
ATE246317T1 true ATE246317T1 (de) 2003-08-15

Family

ID=7912784

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00112484T ATE246317T1 (de) 1999-06-28 2000-06-13 Verfahren zum betrieb einer mehrkammer- vakuumanlage

Country Status (5)

Country Link
US (1) US6446651B1 (de)
EP (1) EP1065385B1 (de)
JP (1) JP2001020860A (de)
AT (1) ATE246317T1 (de)
DE (2) DE19929519A1 (de)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002542396A (ja) * 1999-04-16 2002-12-10 ユナキス・バルツェルス・アクチェンゲゼルシャフト 加工物を真空処理する方法と真空処理装置
DE10048210B4 (de) * 2000-09-28 2007-02-15 Singulus Technologies Ag Vorrichtung und Verfahren zum Einschleusen eines Werkstücks über eine Vorvakuumkammer in eine Hochvakuumkammer und deren Verwendung
JP4335469B2 (ja) * 2001-03-22 2009-09-30 株式会社荏原製作所 真空排気装置のガス循環量調整方法及び装置
DE10150015A1 (de) 2001-10-11 2003-04-17 Leybold Vakuum Gmbh Mehrkammeranlage zur Behandlung von Gegenständen unter Vakuum, Verfahren zur Evakuierung dieser Anlage und Evakuierungssystem dafür
GB0212757D0 (en) * 2002-05-31 2002-07-10 Boc Group Plc A vacuum pumping system and method of controlling the same
GB0214273D0 (en) * 2002-06-20 2002-07-31 Boc Group Plc Apparatus for controlling the pressure in a process chamber and method of operating same
GB0229353D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping system and method of operating a vacuum pumping arrangement
GB0229356D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement
JP4633370B2 (ja) * 2004-02-17 2011-02-16 財団法人国際科学振興財団 真空装置
GB0418771D0 (en) * 2004-08-20 2004-09-22 Boc Group Plc Evacuation of a load lock enclosure
WO2007149652A2 (en) * 2006-05-11 2007-12-27 Cp Packaging, Inc. System and method for evacuating a vacuum chamber
US20090242046A1 (en) * 2008-03-31 2009-10-01 Benjamin Riordon Valve module
FR2947309A1 (fr) * 2009-06-26 2010-12-31 Alcatel Lucent Procede de prediction d'une defaillance de la rotation du rotor d'une pompe a vide et dispositif de pompage associe
EP3502472B1 (de) * 2009-12-24 2020-09-09 Sumitomo Seika Chemicals Co., Ltd. Abgasvibrationsunterdrückungsvorrichtung in einer doppelvakuumpumpe
GB201007814D0 (en) * 2010-05-11 2010-06-23 Edwards Ltd Vacuum pumping system
US9506478B2 (en) * 2012-01-13 2016-11-29 Edwards Limited Vacuum system
DE202012002684U1 (de) * 2012-03-15 2013-06-17 Oerlikon Leybold Vacuum Gmbh Untersuchungseinrichtung
DE102013108090A1 (de) * 2013-07-29 2015-01-29 Hella Kgaa Hueck & Co. Pumpenanordnung
DE102013219464A1 (de) * 2013-09-26 2015-03-26 Inficon Gmbh Evakuierung einer Folienkammer
EP3491243A1 (de) * 2016-07-12 2019-06-05 Dr.-ing. K. Busch GmbH Evakuierungssystem
DE202016007609U1 (de) 2016-12-15 2018-03-26 Leybold Gmbh Vakuumpumpsystem
DE102017004066A1 (de) 2017-04-23 2018-10-25 Alfred-Wegener-lnstitut, Helmholtz-Zentrum für Polar- und Meeresforschung Vakuumsystem zur Erzeugung von zumindest einem Hochvakuum in einem Rezipienten
GB201715151D0 (en) * 2017-09-20 2017-11-01 Edwards Ltd A drag pump and a set of vacuum pumps including a drag pump
JP7650633B2 (ja) 2020-10-06 2025-03-25 エドワーズ株式会社 真空排気システム

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3537474A (en) * 1968-02-19 1970-11-03 Varian Associates Push button vacuum control valve and vacuum system using same
US3986521A (en) * 1974-03-21 1976-10-19 Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften E.V. Evacuation device
JPH0545827Y2 (de) * 1988-06-24 1993-11-26
JPH04326943A (ja) * 1991-04-25 1992-11-16 Hitachi Ltd 真空排気システム及び排気方法
DE4213763B4 (de) * 1992-04-27 2004-11-25 Unaxis Deutschland Holding Gmbh Verfahren zum Evakuieren einer Vakuumkammer und einer Hochvakuumkammer sowie Hochvakuumanlage zu seiner Durchführung
US5433238A (en) * 1992-12-18 1995-07-18 Vlsi Technology, Inc. Pumping system for evacuating reactor chambers
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
JP3361162B2 (ja) * 1993-10-27 2003-01-07 清原 まさ子 タンク室付ブロックバルブ
JP3847357B2 (ja) * 1994-06-28 2006-11-22 株式会社荏原製作所 真空系の排気装置
JPH08321448A (ja) * 1995-05-25 1996-12-03 Tadahiro Omi 真空排気装置、半導体製造装置及び真空処理方法
DE19524609A1 (de) * 1995-07-06 1997-01-09 Leybold Ag Vorrichtung zum raschen Evakuieren einer Vakuumkammer
JPH10132711A (ja) * 1996-10-25 1998-05-22 Shinku Kagaku Kenkyusho 試料表面分析用真空排気装置
DE19645104B4 (de) * 1996-10-31 2007-12-20 Pfeiffer Vacuum Gmbh Verfahren zur Durchführung eines Prozesses in einem mit Unterdruck beaufschlagten Prozessraum
KR100252213B1 (ko) * 1997-04-22 2000-05-01 윤종용 반도체소자제조장치및그제조방법
JP2942239B2 (ja) * 1997-05-23 1999-08-30 キヤノン株式会社 排気方法及び排気装置、それを用いたプラズマ処理方法及びプラズマ処理装置
US6113698A (en) * 1997-07-10 2000-09-05 Applied Materials, Inc. Degassing method and apparatus
US6161576A (en) * 1999-06-23 2000-12-19 Mks Instruments, Inc. Integrated turbo pump and control valve system

Also Published As

Publication number Publication date
US6446651B1 (en) 2002-09-10
EP1065385A3 (de) 2001-04-11
DE19929519A1 (de) 2001-01-04
EP1065385B1 (de) 2003-07-30
EP1065385A2 (de) 2001-01-03
JP2001020860A (ja) 2001-01-23
DE50003072D1 (de) 2003-09-04

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Legal Events

Date Code Title Description
REN Ceased due to non-payment of the annual fee