ATE249583T1 - Eingangsstufe für eine zweiflutige gasreibungspumpe - Google Patents

Eingangsstufe für eine zweiflutige gasreibungspumpe

Info

Publication number
ATE249583T1
ATE249583T1 AT97112843T AT97112843T ATE249583T1 AT E249583 T1 ATE249583 T1 AT E249583T1 AT 97112843 T AT97112843 T AT 97112843T AT 97112843 T AT97112843 T AT 97112843T AT E249583 T1 ATE249583 T1 AT E249583T1
Authority
AT
Austria
Prior art keywords
conveyor
double
pump
input stage
flow gas
Prior art date
Application number
AT97112843T
Other languages
English (en)
Inventor
Heinrich Lotz
Original Assignee
Pfeiffer Vacuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum Gmbh filed Critical Pfeiffer Vacuum Gmbh
Application granted granted Critical
Publication of ATE249583T1 publication Critical patent/ATE249583T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/02—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps having non-centrifugal stages, e.g. centripetal
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
AT97112843T 1996-08-23 1997-07-25 Eingangsstufe für eine zweiflutige gasreibungspumpe ATE249583T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19634095A DE19634095A1 (de) 1996-08-23 1996-08-23 Eingangsstufe für eine zweiflutige Gasreibungspumpe

Publications (1)

Publication Number Publication Date
ATE249583T1 true ATE249583T1 (de) 2003-09-15

Family

ID=7803497

Family Applications (1)

Application Number Title Priority Date Filing Date
AT97112843T ATE249583T1 (de) 1996-08-23 1997-07-25 Eingangsstufe für eine zweiflutige gasreibungspumpe

Country Status (5)

Country Link
US (1) US5927940A (de)
EP (1) EP0825346B1 (de)
JP (1) JP4050811B2 (de)
AT (1) ATE249583T1 (de)
DE (2) DE19634095A1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6328527B1 (en) * 1999-01-08 2001-12-11 Fantom Technologies Inc. Prandtl layer turbine
DE19930952A1 (de) * 1999-07-05 2001-01-11 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE10008691B4 (de) * 2000-02-24 2017-10-26 Pfeiffer Vacuum Gmbh Gasreibungspumpe
JP5149472B2 (ja) * 2000-05-15 2013-02-20 プファイファー・ヴァキューム・ゲーエムベーハー ガス摩擦ポンプ
DE10111546A1 (de) 2000-05-15 2002-01-03 Pfeiffer Vacuum Gmbh Gasreibungspumpe
FR2854933B1 (fr) * 2003-05-13 2005-08-05 Cit Alcatel Pompe moleculaire, turbomoleculaire ou hybride a vanne integree
DE10334455B4 (de) * 2003-07-29 2013-01-31 Pfeiffer Vacuum Gmbh Lecksuchverfahren und Lecksuchanordnung zur Durchführung des Verfahrens
CN100513798C (zh) * 2005-10-10 2009-07-15 储继国 双重拖动分子泵
DE102018119747B3 (de) 2018-08-14 2020-02-13 Bruker Daltonik Gmbh Turbomolekularpumpe für massenspektrometer

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB475840A (en) * 1935-12-21 1937-11-26 Wolfgang Gaede High vacuum pumps
GB536238A (en) * 1939-11-06 1941-05-07 Fritz Albert Max Heppner Improvements in and relating to internal combustion turbine plants
FR1293546A (fr) * 1961-02-09 1962-05-18 Alsacienne Constr Meca Perfectionnements aux pompes moléculaires rotatives
DE1428072A1 (de) * 1962-01-22 1969-03-20 Akad Wissenschaften Ddr Turbo-Molekularpumpe
US3189264A (en) * 1963-06-04 1965-06-15 Arthur Pfeiffer Company Vacuum pump drive and seal arrangement
DE2034285A1 (de) * 1970-07-10 1972-01-13 Pfeiffer Vakuumtechnik Molekularpumpe
DE2052120A1 (de) * 1970-10-23 1972-04-27 Pfeiffer Vakuumtechnik Lageranordnung für Molekularpumpen und Turbomolekularpumpen
GB1400011A (en) * 1972-01-18 1975-07-16 British Oxygen Co Ltd Rotary vacuum pumps
DD109918A1 (de) * 1974-02-22 1974-11-20
US3969039A (en) * 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
GB8507010D0 (en) * 1985-03-19 1985-04-24 Framo Dev Ltd Compressor unit
RU1807242C (ru) * 1990-10-24 1993-04-07 Научно-Исследовательский Институт Точного Электронного Машиностроения "Слава" Турбомолекул рный вакуумный насос
GB9525337D0 (en) * 1995-12-12 1996-02-14 Boc Group Plc Improvements in vacuum pumps

Also Published As

Publication number Publication date
DE59710716D1 (de) 2003-10-16
JP4050811B2 (ja) 2008-02-20
EP0825346A1 (de) 1998-02-25
EP0825346B1 (de) 2003-09-10
DE19634095A1 (de) 1998-02-26
JPH10141277A (ja) 1998-05-26
US5927940A (en) 1999-07-27

Similar Documents

Publication Publication Date Title
ATE105378T1 (de) Kombinierte turbomolekularpumpe mit zwei wellen und atmosphaerischem auslass.
BR0210169A (pt) Unidade de compressor compreendedndo um compressor centrìfugo e um motor elétrico
KR950011819A (ko) 배기가스 터보과급기 및 이를 작동하는 방법
MX171688B (es) Compresor centrifugo que tiene difusor hibrido y voluta difusora con exceso de area
ATE249583T1 (de) Eingangsstufe für eine zweiflutige gasreibungspumpe
DK0413113T3 (da) Elektronisk kommuteret motor til støvsugere og lignende
YU158782A (en) Turbocompressor driven by waste gasses with a bearing between turbine and compressor part
FI101564B (fi) Korkeapainepuhallin
DE69504961D1 (de) Verdichter
WO2000009861A3 (de) Stützvorrichtung für triebwerkschaufeln
ATE164662T1 (de) Verdichter
ATE113343T1 (de) Verbesserte turbomolekularpumpe.
EP0849434A3 (de) Hitzebeständiger Dampfturbinenrotor
ES2030561T3 (es) Grupo de bombas de vacio de varias fases.
DE3770417D1 (de) Befestigungsanordnung.
EP1039138A3 (de) Vakuumpumpe mit Aussenläufermotor
SE8201839L (sv) Centrifugal pump
ATE295939T1 (de) Turboverdichter
DE50015596D1 (de) Vakuumpumpe
CA2305400A1 (en) Improved turbine powerplant
DE50013185D1 (de) Turbomolekularpumpe
DE19780258D2 (de) Gasturbineneinheit
Oh et al. Development of Advanced TurboBlowers Using High-Spped BLDC Motors and Foil Air Bearings
ATE42613T1 (de) Querstromventilator zum foerdern von foerdergas.
FI103826B (fi) Korkeapainepuhallin

Legal Events

Date Code Title Description
REN Ceased due to non-payment of the annual fee