ATE252311T1 - Durch mikrowellen gesteuertes plasmaspritzgerät und spritzverfahren - Google Patents
Durch mikrowellen gesteuertes plasmaspritzgerät und spritzverfahrenInfo
- Publication number
- ATE252311T1 ATE252311T1 AT96916694T AT96916694T ATE252311T1 AT E252311 T1 ATE252311 T1 AT E252311T1 AT 96916694 T AT96916694 T AT 96916694T AT 96916694 T AT96916694 T AT 96916694T AT E252311 T1 ATE252311 T1 AT E252311T1
- Authority
- AT
- Austria
- Prior art keywords
- spraying process
- plasma sprayer
- microwave
- controlled plasma
- sprayer
- Prior art date
Links
- 238000005507 spraying Methods 0.000 title abstract 2
- 238000000034 method Methods 0.000 title 1
- 238000011109 contamination Methods 0.000 abstract 1
- 238000007750 plasma spraying Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/32—Plasma torches using an arc
- H05H1/42—Plasma torches using an arc with provisions for introducing materials into the plasma, e.g. powder or liquid
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/32—Plasma torches using an arc
- H05H1/34—Details, e.g. electrodes, nozzles
- H05H1/3468—Vortex generators
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/32—Plasma torches using an arc
- H05H1/34—Details, e.g. electrodes, nozzles
- H05H1/3478—Geometrical details
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Electromagnetism (AREA)
- Geometry (AREA)
- Coating By Spraying Or Casting (AREA)
- Plasma Technology (AREA)
- Nozzles (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US08/476,081 US5793013A (en) | 1995-06-07 | 1995-06-07 | Microwave-driven plasma spraying apparatus and method for spraying |
| PCT/US1996/007837 WO1996041505A1 (en) | 1995-06-07 | 1996-05-28 | Microwave-driven plasma spraying apparatus and method for spraying |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE252311T1 true ATE252311T1 (de) | 2003-11-15 |
Family
ID=23890435
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT96916694T ATE252311T1 (de) | 1995-06-07 | 1996-05-28 | Durch mikrowellen gesteuertes plasmaspritzgerät und spritzverfahren |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US5793013A (de) |
| EP (1) | EP0829184B1 (de) |
| JP (1) | JPH11506805A (de) |
| AT (1) | ATE252311T1 (de) |
| BR (1) | BR9608565A (de) |
| CA (1) | CA2221624C (de) |
| DE (1) | DE69630377T2 (de) |
| WO (1) | WO1996041505A1 (de) |
Families Citing this family (62)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6362449B1 (en) * | 1998-08-12 | 2002-03-26 | Massachusetts Institute Of Technology | Very high power microwave-induced plasma |
| US7091605B2 (en) * | 2001-09-21 | 2006-08-15 | Eastman Kodak Company | Highly moisture-sensitive electronic device element and method for fabrication |
| US6696662B2 (en) | 2000-05-25 | 2004-02-24 | Advanced Energy Industries, Inc. | Methods and apparatus for plasma processing |
| DE10112494C2 (de) * | 2001-03-15 | 2003-12-11 | Mtu Aero Engines Gmbh | Verfahren zum Plasmaschweißen |
| JP4163432B2 (ja) * | 2002-03-26 | 2008-10-08 | 矢崎総業株式会社 | プラズマ処理装置 |
| US7560657B2 (en) | 2002-05-08 | 2009-07-14 | Btu International Inc. | Plasma-assisted processing in a manufacturing line |
| US7432470B2 (en) | 2002-05-08 | 2008-10-07 | Btu International, Inc. | Surface cleaning and sterilization |
| US7497922B2 (en) | 2002-05-08 | 2009-03-03 | Btu International, Inc. | Plasma-assisted gas production |
| US7638727B2 (en) | 2002-05-08 | 2009-12-29 | Btu International Inc. | Plasma-assisted heat treatment |
| JP2005524963A (ja) * | 2002-05-08 | 2005-08-18 | ダナ・コーポレーション | プラズマ触媒 |
| US7498066B2 (en) | 2002-05-08 | 2009-03-03 | Btu International Inc. | Plasma-assisted enhanced coating |
| US7465362B2 (en) | 2002-05-08 | 2008-12-16 | Btu International, Inc. | Plasma-assisted nitrogen surface-treatment |
| US7494904B2 (en) | 2002-05-08 | 2009-02-24 | Btu International, Inc. | Plasma-assisted doping |
| US7445817B2 (en) | 2002-05-08 | 2008-11-04 | Btu International Inc. | Plasma-assisted formation of carbon structures |
| CN100460128C (zh) * | 2002-12-04 | 2009-02-11 | Btu国际公司 | 等离子体辅助熔炼方法 |
| US7189940B2 (en) * | 2002-12-04 | 2007-03-13 | Btu International Inc. | Plasma-assisted melting |
| EP1579023A4 (de) * | 2002-12-04 | 2009-07-22 | Btu Int | Plasmaunterstütztes schmelzen |
| US7455828B2 (en) * | 2004-03-01 | 2008-11-25 | H2S Technologies, Ltd. | Process and apparatus for converting hydrogen sulfide into hydrogen and sulfur |
| US7799273B2 (en) | 2004-05-06 | 2010-09-21 | Smp Logic Systems Llc | Manufacturing execution system for validation, quality and risk assessment and monitoring of pharmaceutical manufacturing processes |
| US7444197B2 (en) | 2004-05-06 | 2008-10-28 | Smp Logic Systems Llc | Methods, systems, and software program for validation and monitoring of pharmaceutical manufacturing processes |
| DE102004026636B3 (de) * | 2004-06-01 | 2005-07-21 | Daimlerchrysler Ag | Vorrichtung und Verfahren zum Umschmelzen von metallischen Oberflächen |
| US7164095B2 (en) * | 2004-07-07 | 2007-01-16 | Noritsu Koki Co., Ltd. | Microwave plasma nozzle with enhanced plume stability and heating efficiency |
| US7806077B2 (en) * | 2004-07-30 | 2010-10-05 | Amarante Technologies, Inc. | Plasma nozzle array for providing uniform scalable microwave plasma generation |
| US7271363B2 (en) * | 2004-09-01 | 2007-09-18 | Noritsu Koki Co., Ltd. | Portable microwave plasma systems including a supply line for gas and microwaves |
| WO2007013875A2 (en) * | 2004-09-01 | 2007-02-01 | Amarante Technologies, Inc. | A portable microwave plasma discharge unit |
| US20060052883A1 (en) * | 2004-09-08 | 2006-03-09 | Lee Sang H | System and method for optimizing data acquisition of plasma using a feedback control module |
| GB0516695D0 (en) * | 2005-08-15 | 2005-09-21 | Boc Group Plc | Microwave plasma reactor |
| TW200742506A (en) * | 2006-02-17 | 2007-11-01 | Noritsu Koki Co Ltd | Plasma generation apparatus and work process apparatus |
| JP4619973B2 (ja) * | 2006-03-29 | 2011-01-26 | 株式会社サイアン | プラズマ発生装置およびそれを用いるワーク処理装置 |
| RU2328095C2 (ru) * | 2006-06-23 | 2008-06-27 | Закрытое акционерное общество "КОТЭС-Сибирь" | Свч-плазмотрон |
| US9173967B1 (en) | 2007-05-11 | 2015-11-03 | SDCmaterials, Inc. | System for and method of processing soft tissue and skin with fluids using temperature and pressure changes |
| US8507401B1 (en) | 2007-10-15 | 2013-08-13 | SDCmaterials, Inc. | Method and system for forming plug and play metal catalysts |
| JP5463573B2 (ja) * | 2008-03-31 | 2014-04-09 | 国立大学法人 琉球大学 | プラズマ生成装置及び方法 |
| WO2009128741A1 (ru) * | 2008-04-14 | 2009-10-22 | Закрытое Акционерное Общество "Kotэc-Cибиpь" | Свч-плазмотрон |
| US20100074808A1 (en) * | 2008-09-23 | 2010-03-25 | Sang Hun Lee | Plasma generating system |
| US20100074810A1 (en) * | 2008-09-23 | 2010-03-25 | Sang Hun Lee | Plasma generating system having tunable plasma nozzle |
| US7921804B2 (en) * | 2008-12-08 | 2011-04-12 | Amarante Technologies, Inc. | Plasma generating nozzle having impedance control mechanism |
| US20100201272A1 (en) * | 2009-02-09 | 2010-08-12 | Sang Hun Lee | Plasma generating system having nozzle with electrical biasing |
| US20100254853A1 (en) * | 2009-04-06 | 2010-10-07 | Sang Hun Lee | Method of sterilization using plasma generated sterilant gas |
| US9039916B1 (en) | 2009-12-15 | 2015-05-26 | SDCmaterials, Inc. | In situ oxide removal, dispersal and drying for copper copper-oxide |
| US8803025B2 (en) * | 2009-12-15 | 2014-08-12 | SDCmaterials, Inc. | Non-plugging D.C. plasma gun |
| US9126191B2 (en) | 2009-12-15 | 2015-09-08 | SDCmaterials, Inc. | Advanced catalysts for automotive applications |
| US8652992B2 (en) | 2009-12-15 | 2014-02-18 | SDCmaterials, Inc. | Pinning and affixing nano-active material |
| US8557727B2 (en) | 2009-12-15 | 2013-10-15 | SDCmaterials, Inc. | Method of forming a catalyst with inhibited mobility of nano-active material |
| US9149797B2 (en) | 2009-12-15 | 2015-10-06 | SDCmaterials, Inc. | Catalyst production method and system |
| KR20110088658A (ko) * | 2010-01-29 | 2011-08-04 | (주)에스피에스 | 전자파를 이용한 플라즈마 발생장치 및 이를 위한 도파관 |
| US8669202B2 (en) | 2011-02-23 | 2014-03-11 | SDCmaterials, Inc. | Wet chemical and plasma methods of forming stable PtPd catalysts |
| GB2490355B (en) * | 2011-04-28 | 2015-10-14 | Gasplas As | Method for processing a gas and a device for performing the method |
| CN103636059B (zh) * | 2011-06-24 | 2016-01-27 | 雷卡邦股份有限公司 | 微波谐振腔 |
| BR112014003781A2 (pt) | 2011-08-19 | 2017-03-21 | Sdcmaterials Inc | substratos revestidos para uso em catalisadores e conversores catalíticos e métodos para revestir substratos com composições de revestimento por imersão |
| US10477665B2 (en) * | 2012-04-13 | 2019-11-12 | Amastan Technologies Inc. | Microwave plasma torch generating laminar flow for materials processing |
| US9156025B2 (en) | 2012-11-21 | 2015-10-13 | SDCmaterials, Inc. | Three-way catalytic converter using nanoparticles |
| US9511352B2 (en) | 2012-11-21 | 2016-12-06 | SDCmaterials, Inc. | Three-way catalytic converter using nanoparticles |
| US9586179B2 (en) | 2013-07-25 | 2017-03-07 | SDCmaterials, Inc. | Washcoats and coated substrates for catalytic converters and methods of making and using same |
| MX2016004759A (es) | 2013-10-22 | 2016-07-26 | Sdcmaterials Inc | Composiciones para trampas de oxidos de nitrogeno (nox) pobres. |
| CN106061600A (zh) | 2013-10-22 | 2016-10-26 | Sdc材料公司 | 用于重型柴油机的催化剂设计 |
| US9687811B2 (en) | 2014-03-21 | 2017-06-27 | SDCmaterials, Inc. | Compositions for passive NOx adsorption (PNA) systems and methods of making and using same |
| USD824966S1 (en) * | 2016-10-14 | 2018-08-07 | Oerlikon Metco (Us) Inc. | Powder injector |
| US9767992B1 (en) * | 2017-02-09 | 2017-09-19 | Lyten, Inc. | Microwave chemical processing reactor |
| USD823906S1 (en) * | 2017-04-13 | 2018-07-24 | Oerlikon Metco (Us) Inc. | Powder injector |
| EP3841079A4 (de) | 2018-08-23 | 2022-05-25 | Transform Materials LLC | System und verfahren zur verarbeitung von gasen |
| US11633710B2 (en) | 2018-08-23 | 2023-04-25 | Transform Materials Llc | Systems and methods for processing gases |
Family Cites Families (38)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2480552A1 (fr) * | 1980-04-10 | 1981-10-16 | Anvar | Generateur de plasma |
| US4423303A (en) * | 1980-05-06 | 1983-12-27 | Tokyo Shibaura Denki Kabushiki Kaisha | Apparatus for treating powdery materials utilizing microwave plasma |
| JPS5782955A (en) * | 1980-11-12 | 1982-05-24 | Hitachi Ltd | Microwave plasma generating apparatus |
| US4411989A (en) * | 1981-08-13 | 1983-10-25 | Midwest Research Institute | Processes and devices for detection of substances such as enzyme inhibitors |
| JPH06105597B2 (ja) * | 1982-08-30 | 1994-12-21 | 株式会社日立製作所 | マイクロ波プラズマ源 |
| FR2533397A2 (fr) * | 1982-09-16 | 1984-03-23 | Anvar | Perfectionnements aux torches a plasma |
| US4503406A (en) * | 1983-06-30 | 1985-03-05 | The United States Of America As Represented By The Secretary Of The Navy | Inside collet for coaxial placement of diode |
| US4794230A (en) * | 1984-02-16 | 1988-12-27 | The United States Of America As Represented By The United States Department Of Energy | Low-pressure water-cooled inductively coupled plasma torch |
| JPS6128215A (ja) * | 1984-07-18 | 1986-02-07 | Tokyo Inst Of Technol | マイクロ波パルス源 |
| US4659899A (en) * | 1984-10-24 | 1987-04-21 | The Perkin-Elmer Corporation | Vacuum-compatible air-cooled plasma device |
| US4886160A (en) * | 1988-11-07 | 1989-12-12 | Kligerman Alan E | Carton for containing a plurality of items for transport, storage and display |
| JPS61259777A (ja) * | 1985-05-13 | 1986-11-18 | Onoda Cement Co Ltd | 単ト−チ型プラズマ溶射方法及び装置 |
| FR2583250B1 (fr) * | 1985-06-07 | 1989-06-30 | France Etat | Procede et dispositif d'excitation d'un plasma par micro-ondes a la resonance cyclotronique electronique |
| FR2590808B1 (fr) * | 1985-12-04 | 1989-09-15 | Canon Kk | Dispositif de soufflage de particules fines |
| US4833294A (en) * | 1986-08-29 | 1989-05-23 | Research Corporation | Inductively coupled helium plasma torch |
| US4766287A (en) * | 1987-03-06 | 1988-08-23 | The Perkin-Elmer Corporation | Inductively coupled plasma torch with adjustable sample injector |
| JPS63289799A (ja) * | 1987-05-20 | 1988-11-28 | Canon Inc | 反応装置 |
| JPH01184921A (ja) * | 1988-01-20 | 1989-07-24 | Canon Inc | エッチング、アッシング及び成膜等に有用なプラズマ処理装置 |
| EP0329338A3 (de) * | 1988-02-16 | 1990-08-01 | Alcan International Limited | Verfahren und Vorrichtung zum Erhitzen von Körpern auf eine hohe Temperatur mittels Mikrowellen-Energie |
| JP2805009B2 (ja) * | 1988-05-11 | 1998-09-30 | 株式会社日立製作所 | プラズマ発生装置及びプラズマ元素分析装置 |
| US5041713A (en) * | 1988-05-13 | 1991-08-20 | Marinelon, Inc. | Apparatus and method for applying plasma flame sprayed polymers |
| CA1324823C (en) * | 1988-08-08 | 1993-11-30 | Robert Chrong-Wen Chang | Method and apparatus for plasma pyrolysis of liquid waste |
| US4866240A (en) * | 1988-09-08 | 1989-09-12 | Stoody Deloro Stellite, Inc. | Nozzle for plasma torch and method for introducing powder into the plasma plume of a plasma torch |
| US4853515A (en) * | 1988-09-30 | 1989-08-01 | The Perkin-Elmer Corporation | Plasma gun extension for coating slots |
| JPH02216047A (ja) * | 1989-02-16 | 1990-08-28 | Yokogawa Electric Corp | 高周波誘導結合プラズマ質量分析計 |
| US4943345A (en) * | 1989-03-23 | 1990-07-24 | Board Of Trustees Operating Michigan State University | Plasma reactor apparatus and method for treating a substrate |
| US5083004A (en) * | 1989-05-09 | 1992-01-21 | Varian Associates, Inc. | Spectroscopic plasma torch for microwave induced plasmas |
| US5051557A (en) * | 1989-06-07 | 1991-09-24 | The United States Of America As Represented By The Secretary Of The Department Of Health And Human Services | Microwave induced plasma torch with tantalum injector probe |
| US5017754A (en) * | 1989-08-29 | 1991-05-21 | Hydro Quebec | Plasma reactor used to treat powder material at very high temperatures |
| US5179264A (en) * | 1989-12-13 | 1993-01-12 | International Business Machines Corporation | Solid state microwave powered material and plasma processing systems |
| US5131992A (en) * | 1990-01-08 | 1992-07-21 | The United States Of America, As Represented By The Secretary Of The Interior | Microwave induced plasma process for producing tungsten carbide |
| US5270515A (en) * | 1990-04-02 | 1993-12-14 | Long Raymond E | Microwave plasma detoxification reactor and process for hazardous wastes |
| US5159173A (en) * | 1990-09-26 | 1992-10-27 | General Electric Company | Apparatus for reducing plasma constriction by intermediate injection of hydrogen in RF plasma gun |
| DE4105407A1 (de) * | 1991-02-21 | 1992-08-27 | Plasma Technik Ag | Plasmaspritzgeraet zum verspruehen von festem, pulverfoermigem oder gasfoermigem material |
| JPH04351899A (ja) * | 1991-05-28 | 1992-12-07 | Toyonobu Yoshida | マイクロ波熱プラズマ反応装置 |
| US5349154A (en) * | 1991-10-16 | 1994-09-20 | Rockwell International Corporation | Diamond growth by microwave generated plasma flame |
| EP0578047B1 (de) * | 1992-06-23 | 1998-05-13 | Nippon Telegraph And Telephone Corporation | Plasmabearbeitungsgerät |
| US5387288A (en) * | 1993-05-14 | 1995-02-07 | Modular Process Technology Corp. | Apparatus for depositing diamond and refractory materials comprising rotating antenna |
-
1995
- 1995-06-07 US US08/476,081 patent/US5793013A/en not_active Expired - Lifetime
-
1996
- 1996-05-28 CA CA002221624A patent/CA2221624C/en not_active Expired - Fee Related
- 1996-05-28 JP JP9500776A patent/JPH11506805A/ja not_active Ceased
- 1996-05-28 DE DE69630377T patent/DE69630377T2/de not_active Expired - Fee Related
- 1996-05-28 EP EP96916694A patent/EP0829184B1/de not_active Expired - Lifetime
- 1996-05-28 AT AT96916694T patent/ATE252311T1/de not_active IP Right Cessation
- 1996-05-28 BR BR9608565-7A patent/BR9608565A/pt unknown
- 1996-05-28 WO PCT/US1996/007837 patent/WO1996041505A1/en not_active Ceased
-
1998
- 1998-02-17 US US09/024,291 patent/US5973289A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH11506805A (ja) | 1999-06-15 |
| CA2221624A1 (en) | 1996-12-19 |
| BR9608565A (pt) | 1999-11-30 |
| US5793013A (en) | 1998-08-11 |
| DE69630377T2 (de) | 2004-06-24 |
| WO1996041505A1 (en) | 1996-12-19 |
| US5973289A (en) | 1999-10-26 |
| EP0829184B1 (de) | 2003-10-15 |
| CA2221624C (en) | 2002-02-12 |
| EP0829184A1 (de) | 1998-03-18 |
| DE69630377D1 (de) | 2003-11-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| ATE252311T1 (de) | Durch mikrowellen gesteuertes plasmaspritzgerät und spritzverfahren | |
| DK0773167T3 (da) | Apparat og fremgangsmåde til fremstilling af en plastbeholder, som er belagt med carbonfilm | |
| KR100858396B1 (ko) | 플라즈마에 의한 가스 처리용 장치 | |
| EP0415122A3 (en) | Method and apparatus for film formation by high pressure microwave plasma chemical vapour deposition | |
| CA2362146A1 (en) | Magnetron sputtering method and apparatus | |
| TR200400076T4 (tr) | Bir kılıf oluşturmaya yarayan metot ve aparat | |
| TW326616B (en) | Plasma processing method and apparatus | |
| GB9322966D0 (en) | Method for making a semiconductor and apparatus for the same | |
| AU8049891A (en) | Process for the destruction of chemical waste by means of an electric plasma flame | |
| MY113565A (en) | Method for modifying the chemistry of an article surface | |
| BR0307769A (pt) | Processo de limpeza por plasma da superfìcie de um material recoberto com uma substância orgânica, e instalação para a sua realização | |
| DK0908922T3 (da) | Proceskammer til plasmabehandling og apparat, der anvender proceskammeret | |
| JPH06108257A (ja) | 大気圧吹き出し型プラズマ反応装置 | |
| JPS56105480A (en) | Plasma etching method | |
| DE69224211D1 (de) | Durch mikrowelle unterhaltener abscheideprozess, betrieben unter einem druck niederer als der minimaldruck nach der "paschen"-kurve | |
| CN1489426A (zh) | 常压射频冷等离子体系统及其喷枪 | |
| JPS57202733A (en) | Dry etching device | |
| RU94044979A (ru) | Свч-плазмотрон циклонного типа | |
| TW267291B (en) | Plasma treatment device | |
| JPS5615044A (en) | Plasma cleaning method | |
| JPS56166377A (en) | Plasma treating method of hollow body | |
| JPS5524941A (en) | Dry etching apparatus | |
| JPS57192266A (en) | Plasma surface treating apparatus | |
| JPS60254730A (ja) | レジスト剥離装置 | |
| RU2464U1 (ru) | Установка для ионного напыления |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |