ATE253990T1 - Spülgefäss mit äusserst reiner flüssigkeit - Google Patents

Spülgefäss mit äusserst reiner flüssigkeit

Info

Publication number
ATE253990T1
ATE253990T1 AT00410075T AT00410075T ATE253990T1 AT E253990 T1 ATE253990 T1 AT E253990T1 AT 00410075 T AT00410075 T AT 00410075T AT 00410075 T AT00410075 T AT 00410075T AT E253990 T1 ATE253990 T1 AT E253990T1
Authority
AT
Austria
Prior art keywords
pure liquid
washing vessel
extremely pure
tub
rinsing
Prior art date
Application number
AT00410075T
Other languages
English (en)
Inventor
Victoria Oravec
Original Assignee
Vaco Microtechnologies
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vaco Microtechnologies filed Critical Vaco Microtechnologies
Application granted granted Critical
Publication of ATE253990T1 publication Critical patent/ATE253990T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0406—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H10P72/0411—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H10P72/0414—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/048—Overflow-type cleaning, e.g. tanks in which the liquid flows over the tank in which the articles are placed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/102—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration with means for agitating the liquid
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0406—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H10P72/0411—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H10P72/0416—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S134/00—Cleaning and liquid contact with solids
    • Y10S134/902—Semiconductor wafer

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Weting (AREA)
  • Inking, Control Or Cleaning Of Printing Machines (AREA)
AT00410075T 1999-08-12 2000-07-12 Spülgefäss mit äusserst reiner flüssigkeit ATE253990T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9910532A FR2797405B1 (fr) 1999-08-12 1999-08-12 Bac de rincage a liquide ultra propre

Publications (1)

Publication Number Publication Date
ATE253990T1 true ATE253990T1 (de) 2003-11-15

Family

ID=9549172

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00410075T ATE253990T1 (de) 1999-08-12 2000-07-12 Spülgefäss mit äusserst reiner flüssigkeit

Country Status (9)

Country Link
US (1) US6412504B1 (de)
EP (1) EP1075878B1 (de)
JP (1) JP2001102351A (de)
KR (1) KR20010050040A (de)
AT (1) ATE253990T1 (de)
DE (1) DE60006460T2 (de)
DK (1) DK1075878T5 (de)
FR (1) FR2797405B1 (de)
TW (1) TW478971B (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE60140780D1 (de) * 2000-06-27 2010-01-28 Imec Verfahren und Vorrichtung zum Reinigen und Trocknen eines Substrats
KR20030028046A (ko) * 2001-09-27 2003-04-08 삼성전자주식회사 웨이퍼 습식 처리 장치
FR2833753B1 (fr) * 2001-12-18 2004-02-20 Vaco Microtechnologies Dispositif de gravure, de rincage, et de sechage de substrats en atmosphere ultra-propre
JP4514140B2 (ja) * 2005-02-28 2010-07-28 大日本スクリーン製造株式会社 基板処理装置及び基板処理方法
WO2009026805A1 (fr) * 2007-08-29 2009-03-05 Shenzhen Jingrui Industry Co., Ltd. Machine à laver les légumes
JP2009141022A (ja) * 2007-12-04 2009-06-25 Tokyo Electron Ltd 基板処理装置
US20140305471A1 (en) * 2011-08-19 2014-10-16 Akrion Systems Llc Reduced consumptions stand alone rinse tool having self-contained closed-loop fluid circuit, and method of rinsing substrates using the same
US8746260B2 (en) * 2011-10-04 2014-06-10 Phillip Alston Hewitt System and method for cleaning tokens
CN111069166A (zh) * 2019-12-18 2020-04-28 保山市嵘煌药业有限公司 一种滇黄精加工设备
TWI726728B (zh) * 2020-05-22 2021-05-01 辛耘企業股份有限公司 晶圓清洗裝置
US11682567B2 (en) 2020-06-30 2023-06-20 Applied Materials, Inc. Cleaning system with in-line SPM processing
CN118002546B (zh) * 2024-04-08 2024-06-04 江苏英思特半导体科技有限公司 一种硅片用自动清洗装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5415698A (en) * 1992-06-29 1995-05-16 Matsushita Electric Industrial Co., Ltd. Method for cleaning semiconductor wafers
JPH06177104A (ja) * 1992-10-08 1994-06-24 Fuji Electric Co Ltd ウェーハ洗浄装置
US5656097A (en) * 1993-10-20 1997-08-12 Verteq, Inc. Semiconductor wafer cleaning system
JP3146841B2 (ja) * 1994-03-28 2001-03-19 信越半導体株式会社 ウエーハのリンス装置
US5520205A (en) * 1994-07-01 1996-05-28 Texas Instruments Incorporated Apparatus for wafer cleaning with rotation
JP3343775B2 (ja) * 1996-09-04 2002-11-11 東京エレクトロン株式会社 超音波洗浄装置
JPH1116868A (ja) * 1997-06-27 1999-01-22 Toshiba Corp 薬液置換装置及び薬液置換方法
US6138698A (en) * 1997-11-20 2000-10-31 Tokyo Electron Limited Ultrasonic cleaning apparatus

Also Published As

Publication number Publication date
FR2797405B1 (fr) 2001-10-26
KR20010050040A (ko) 2001-06-15
EP1075878A1 (de) 2001-02-14
US6412504B1 (en) 2002-07-02
JP2001102351A (ja) 2001-04-13
DK1075878T3 (da) 2004-03-29
DK1075878T5 (da) 2004-05-10
FR2797405A1 (fr) 2001-02-16
TW478971B (en) 2002-03-11
DE60006460T2 (de) 2004-08-26
DE60006460D1 (de) 2003-12-18
EP1075878B1 (de) 2003-11-12

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