ATE25471T1 - Kapazitiver drucksensor. - Google Patents

Kapazitiver drucksensor.

Info

Publication number
ATE25471T1
ATE25471T1 AT84901191T AT84901191T ATE25471T1 AT E25471 T1 ATE25471 T1 AT E25471T1 AT 84901191 T AT84901191 T AT 84901191T AT 84901191 T AT84901191 T AT 84901191T AT E25471 T1 ATE25471 T1 AT E25471T1
Authority
AT
Austria
Prior art keywords
pressure sensor
capacitive pressure
capacitive
sensor
pressure
Prior art date
Application number
AT84901191T
Other languages
English (en)
Inventor
Karlheinz Ziegler
Original Assignee
Karlheinz Ziegler
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE3310643A external-priority patent/DE3310643C2/de
Application filed by Karlheinz Ziegler filed Critical Karlheinz Ziegler
Application granted granted Critical
Publication of ATE25471T1 publication Critical patent/ATE25471T1/de

Links

AT84901191T 1983-03-24 1984-03-14 Kapazitiver drucksensor. ATE25471T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE3310643A DE3310643C2 (de) 1983-03-24 1983-03-24 Drucksensor
EP84901191A EP0138893B1 (de) 1983-03-24 1984-03-14 Kapazitiver drucksensor
PCT/DE1984/000060 WO1984003767A1 (fr) 1983-03-24 1984-03-14 Detecteur de pression capacitif

Publications (1)

Publication Number Publication Date
ATE25471T1 true ATE25471T1 (de) 1987-02-15

Family

ID=25809346

Family Applications (1)

Application Number Title Priority Date Filing Date
AT84901191T ATE25471T1 (de) 1983-03-24 1984-03-14 Kapazitiver drucksensor.

Country Status (1)

Country Link
AT (1) ATE25471T1 (de)

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Legal Events

Date Code Title Description
REN Ceased due to non-payment of the annual fee