ATE255505T1 - Tintenstrahlaufzeichnungskopf, piezoelektrische vibratorelementeinheit und verfahren zur herstellung der piezoelektrischen vibratorelementeinheit - Google Patents

Tintenstrahlaufzeichnungskopf, piezoelektrische vibratorelementeinheit und verfahren zur herstellung der piezoelektrischen vibratorelementeinheit

Info

Publication number
ATE255505T1
ATE255505T1 AT00106070T AT00106070T ATE255505T1 AT E255505 T1 ATE255505 T1 AT E255505T1 AT 00106070 T AT00106070 T AT 00106070T AT 00106070 T AT00106070 T AT 00106070T AT E255505 T1 ATE255505 T1 AT E255505T1
Authority
AT
Austria
Prior art keywords
piezoelectric vibrator
element unit
vibrator element
producing
ink jet
Prior art date
Application number
AT00106070T
Other languages
English (en)
Inventor
Tsuyoshi Kitahara
Hiroshi Arai
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Application granted granted Critical
Publication of ATE255505T1 publication Critical patent/ATE255505T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/1612—Production of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14387—Front shooter

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
AT00106070T 1999-03-29 2000-03-29 Tintenstrahlaufzeichnungskopf, piezoelektrische vibratorelementeinheit und verfahren zur herstellung der piezoelektrischen vibratorelementeinheit ATE255505T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP8578899 1999-03-29
JP2000076269 2000-03-17

Publications (1)

Publication Number Publication Date
ATE255505T1 true ATE255505T1 (de) 2003-12-15

Family

ID=26426792

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00106070T ATE255505T1 (de) 1999-03-29 2000-03-29 Tintenstrahlaufzeichnungskopf, piezoelektrische vibratorelementeinheit und verfahren zur herstellung der piezoelektrischen vibratorelementeinheit

Country Status (3)

Country Link
EP (1) EP1040923B1 (de)
AT (1) ATE255505T1 (de)
DE (1) DE60006878T2 (de)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69233523T2 (de) * 1991-12-26 2006-03-16 Seiko Epson Corp. Tintenstrahldruckkopf
WO1996000151A1 (en) * 1994-06-23 1996-01-04 Citizen Watch Co., Ltd. Piezoelectric actuator for ink jet head and method of manufacturing same
DE69625296T2 (de) * 1995-09-05 2003-07-17 Seiko Epson Corp., Tokio/Tokyo Tintenstrahlaufzeichnungskopf und sein Herstellungsverfahren
JP3491187B2 (ja) * 1996-02-05 2004-01-26 セイコーエプソン株式会社 インクジェット式記録装置による記録方法
JP3589277B2 (ja) * 1997-01-27 2004-11-17 セイコーエプソン株式会社 インクジェット式記録ヘッド
EP0860279B1 (de) * 1997-02-21 2002-05-22 Seiko Epson Corporation Tintenstrahlaufzeichnungskopf
JPH10258509A (ja) * 1997-03-19 1998-09-29 Fujitsu Ltd インクジェットヘッド及びその製造方法

Also Published As

Publication number Publication date
EP1040923A2 (de) 2000-10-04
EP1040923B1 (de) 2003-12-03
DE60006878D1 (de) 2004-01-15
EP1040923A3 (de) 2000-11-08
DE60006878T2 (de) 2004-10-14

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties