ATE262542T1 - Herstellung von co- und terpolymeren von p- hydroxystyrol und alkylacrylaten - Google Patents
Herstellung von co- und terpolymeren von p- hydroxystyrol und alkylacrylatenInfo
- Publication number
- ATE262542T1 ATE262542T1 AT99911412T AT99911412T ATE262542T1 AT E262542 T1 ATE262542 T1 AT E262542T1 AT 99911412 T AT99911412 T AT 99911412T AT 99911412 T AT99911412 T AT 99911412T AT E262542 T1 ATE262542 T1 AT E262542T1
- Authority
- AT
- Austria
- Prior art keywords
- hydroxystyrene
- terpolymers
- acrylate
- tert
- alkyl
- Prior art date
Links
- FUGYGGDSWSUORM-UHFFFAOYSA-N 4-hydroxystyrene Chemical compound OC1=CC=C(C=C)C=C1 FUGYGGDSWSUORM-UHFFFAOYSA-N 0.000 title abstract 6
- 229920001897 terpolymer Polymers 0.000 title abstract 4
- NIXOWILDQLNWCW-UHFFFAOYSA-N Acrylic acid Chemical compound OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 title 1
- 229920001577 copolymer Polymers 0.000 abstract 3
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 abstract 2
- 125000005250 alkyl acrylate group Chemical class 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 2
- 239000000178 monomer Substances 0.000 abstract 2
- 229920000642 polymer Polymers 0.000 abstract 2
- ISXSCDLOGDJUNJ-UHFFFAOYSA-N tert-butyl prop-2-enoate Chemical compound CC(C)(C)OC(=O)C=C ISXSCDLOGDJUNJ-UHFFFAOYSA-N 0.000 abstract 2
- NIXOWILDQLNWCW-UHFFFAOYSA-M acrylate group Chemical group C(C=C)(=O)[O-] NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 abstract 1
- 230000001476 alcoholic effect Effects 0.000 abstract 1
- 125000005907 alkyl ester group Chemical group 0.000 abstract 1
- 239000003054 catalyst Substances 0.000 abstract 1
- 230000003197 catalytic effect Effects 0.000 abstract 1
- 238000003776 cleavage reaction Methods 0.000 abstract 1
- 150000002148 esters Chemical class 0.000 abstract 1
- 230000007062 hydrolysis Effects 0.000 abstract 1
- 238000006460 hydrolysis reaction Methods 0.000 abstract 1
- 239000003999 initiator Substances 0.000 abstract 1
- 238000004377 microelectronic Methods 0.000 abstract 1
- 238000005580 one pot reaction Methods 0.000 abstract 1
- 229920002120 photoresistant polymer Polymers 0.000 abstract 1
- 238000006116 polymerization reaction Methods 0.000 abstract 1
- 238000002360 preparation method Methods 0.000 abstract 1
- 150000003254 radicals Chemical class 0.000 abstract 1
- 230000007017 scission Effects 0.000 abstract 1
- 239000002904 solvent Substances 0.000 abstract 1
- 238000005809 transesterification reaction Methods 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F8/00—Chemical modification by after-treatment
- C08F8/12—Hydrolysis
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F8/00—Chemical modification by after-treatment
- C08F8/14—Esterification
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2800/00—Copolymer characterised by the proportions of the comonomers expressed
- C08F2800/10—Copolymer characterised by the proportions of the comonomers expressed as molar percentages
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2800/00—Copolymer characterised by the proportions of the comonomers expressed
- C08F2800/20—Copolymer characterised by the proportions of the comonomers expressed as weight or mass percentages
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2810/00—Chemical modification of a polymer
- C08F2810/50—Chemical modification of a polymer wherein the polymer is a copolymer and the modification is taking place only on one or more of the monomers present in minority
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- General Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US7293698A | 1998-05-05 | 1998-05-05 | |
| PCT/US1999/005667 WO1999057163A1 (en) | 1998-05-05 | 1999-03-15 | Preparation of co- and terpolymers of p-hydroxystyrene and alkyl acrylates |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE262542T1 true ATE262542T1 (de) | 2004-04-15 |
Family
ID=22110669
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT99911412T ATE262542T1 (de) | 1998-05-05 | 1999-03-15 | Herstellung von co- und terpolymeren von p- hydroxystyrol und alkylacrylaten |
Country Status (5)
| Country | Link |
|---|---|
| EP (1) | EP1076667B1 (de) |
| AT (1) | ATE262542T1 (de) |
| AU (1) | AU3005899A (de) |
| DE (1) | DE69915819T2 (de) |
| WO (1) | WO1999057163A1 (de) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6759483B2 (en) * | 1998-05-05 | 2004-07-06 | Chemfirst Electronic Materials L.P. | Preparation of homo-, co- and terpolymers of substituted styrenes |
| US6537724B1 (en) | 1999-11-02 | 2003-03-25 | Hyundai Electronics Industries Co., Ltd. | Photoresist composition for resist flow process, and process for forming contact hole using the same |
| US6787611B2 (en) * | 2000-06-27 | 2004-09-07 | Chemfirst Electronic Materials L.P. | Purification means |
| US6864324B2 (en) * | 2002-04-19 | 2005-03-08 | Chem First Electronic Materials L.P. | Anhydrous, liquid phase process for preparing hydroxyl containing polymers of enhanced purity |
| US20040242798A1 (en) * | 2003-05-08 | 2004-12-02 | Sounik James R. | Photoresist compositions and processes for preparing the same |
| US7834113B2 (en) | 2003-05-08 | 2010-11-16 | E. I. Du Pont De Nemours And Company | Photoresist compositions and processes for preparing the same |
| US7534837B2 (en) * | 2005-09-26 | 2009-05-19 | E.I. Du Pont De Nemours And Company | Random copolymers of ethylene and 4-vinylphenyl esters and method for preparing the same |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4636540A (en) * | 1985-07-08 | 1987-01-13 | Atlantic Richfield Company | Purification of polymer solutions |
| US4689371A (en) * | 1986-07-07 | 1987-08-25 | Celanese Corporation | Process for the preparation of poly (vinylphenol) from poly (acetoxystyrene) |
| EP0260104A3 (de) * | 1986-09-09 | 1989-03-15 | Celanese Corporation | Verfahren zur Herstellung von Polyvinylphenol durch gleichzeitige Methanolyse und Polymerisation von 4-Acetoxystyren |
| EP0277721A3 (de) * | 1987-01-28 | 1989-03-15 | Hoechst Celanese Corporation | Emulsionspolymerisation von 4-Acetoxystyren und Hydrolyse zu Poly(p-vinylphenol) |
| US4877843A (en) * | 1987-09-11 | 1989-10-31 | Hoechst Celanese Corporation | Selective hydrolysis of copolymers of para-acetoxy styrene and allyl esters of ethylenically unsaturated acids |
| JPH0768296B2 (ja) * | 1991-11-28 | 1995-07-26 | 丸善石油化学株式会社 | ビニルフェノール系重合体の金属除去方法 |
| EP0605089B1 (de) * | 1992-11-03 | 1999-01-07 | International Business Machines Corporation | Photolackzusammensetzung |
| WO1994014858A1 (en) * | 1992-12-29 | 1994-07-07 | Hoechst Celanese Corporation | Metal ion reduction in polyhydroxystyrene and photoresists |
| US5861231A (en) * | 1996-06-11 | 1999-01-19 | Shipley Company, L.L.C. | Copolymers and photoresist compositions comprising copolymer resin binder component |
-
1999
- 1999-03-15 AT AT99911412T patent/ATE262542T1/de not_active IP Right Cessation
- 1999-03-15 EP EP99911412A patent/EP1076667B1/de not_active Expired - Lifetime
- 1999-03-15 WO PCT/US1999/005667 patent/WO1999057163A1/en not_active Ceased
- 1999-03-15 DE DE69915819T patent/DE69915819T2/de not_active Expired - Lifetime
- 1999-03-15 AU AU30058/99A patent/AU3005899A/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| AU3005899A (en) | 1999-11-23 |
| DE69915819T2 (de) | 2005-01-27 |
| DE69915819D1 (de) | 2004-04-29 |
| HK1033467A1 (en) | 2001-08-31 |
| EP1076667B1 (de) | 2004-03-24 |
| EP1076667A1 (de) | 2001-02-21 |
| WO1999057163A1 (en) | 1999-11-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| ATE460438T1 (de) | Verfahren zur herstellung von vinylester- (meth)acrylsäureester-mischpolymerisaten | |
| KR890006776A (ko) | 저분자량 중합 첨가제 함유 접착 조성물 | |
| DE69504025D1 (de) | Verfahren zur Herstellung von Carbamat-funktionellen Polymeren | |
| ATE434635T1 (de) | Propfung von äthylenisch ungesättigten monomeren auf polymeren | |
| KR910000831A (ko) | 아크릴 공중합체 및 그의 제조방법 | |
| DK1023331T3 (da) | Fremgangsmåde til fremstilling af beskyttelseskolloidstabiliserede polymerer | |
| KR940007060A (ko) | 알칼리-용해성 단 및 알칼리-불용성 단을 갖는 다단중합체들 | |
| KR920021583A (ko) | 구조성 현탁액 psa 비드의 제조방법 | |
| KR940000542A (ko) | 다성분 접착제 조성물 및 그 제조방법 | |
| ATE166885T1 (de) | Verfahren zur herstellung von emulgatorfreien wässrigen polymerdispersionen | |
| KR860001139A (ko) | 방사선 중합성 혼합물 | |
| ATE262542T1 (de) | Herstellung von co- und terpolymeren von p- hydroxystyrol und alkylacrylaten | |
| ATE276292T1 (de) | Herstellungsverfahren von siliciumorganischen hybridcopolymeren durch kontrollierte radikalische polymerisation | |
| EP1090931A4 (de) | Wässrige emulsion und verfahren zu deren herstellung | |
| ATE504613T1 (de) | Herstellung von konjugierten polymeren via suzuki-kupplung in emulsion | |
| ATE455807T1 (de) | Verfahren zur um- oder veresterung von seitenketten in polymeren | |
| ATE258546T1 (de) | Verfahren zur herstellung von peroxydicarbonaten und ihre verwendung zur radikalpolymerisation von monomeren | |
| NO954719L (no) | Vannopplöselige polymerer fremstilt av met (akrylamid), etylenisk umettet, alifatisk karboklsylsyre eller salt og polyvinylmonomer og deres anvendelse som törrstyrkeadditiver for papir | |
| KR960701909A (ko) | 수성 중합체 분산액, 그의 제조방법 및 그의 페인트 조성물에의 응용(aqueous polymer dispersion, method for making same and use thereof for preparing paints) | |
| AR039431A1 (es) | Preparacion de homo-, co- y terpolimeros de estirenos substituidos | |
| KR980002070A (ko) | 충분히 가수분해된 폴리(비닐 알코올) 존재하에 제조되는 아크릴계 에멀션 | |
| GB793776A (en) | Esters of drying oil acids with certain vinyl polymers | |
| WO2001014431A3 (en) | Process for the preparation of carbamate functional polymers | |
| KR960031496A (ko) | 입자상 그라프트 공중합체 및 이를 함유하고 착색성이 개선된 열가소성 성형재료 | |
| ATE73826T1 (de) | Loesungspolymerisation von acrylsaeuremonomerderivaten durch verwendung von tertioalkyl(c5)-hydroperoxiden. |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |