ATE265912T1 - Schleifspindel für schleifmaschinen mit abschnittsweise harzgebundener grober und feiner körnung - Google Patents

Schleifspindel für schleifmaschinen mit abschnittsweise harzgebundener grober und feiner körnung

Info

Publication number
ATE265912T1
ATE265912T1 AT01900196T AT01900196T ATE265912T1 AT E265912 T1 ATE265912 T1 AT E265912T1 AT 01900196 T AT01900196 T AT 01900196T AT 01900196 T AT01900196 T AT 01900196T AT E265912 T1 ATE265912 T1 AT E265912T1
Authority
AT
Austria
Prior art keywords
grinding
spindle
fine grain
resin bonded
sections
Prior art date
Application number
AT01900196T
Other languages
English (en)
Inventor
Mark Andrew Stocker
Original Assignee
Unova Uk Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Unova Uk Ltd filed Critical Unova Uk Ltd
Application granted granted Critical
Publication of ATE265912T1 publication Critical patent/ATE265912T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D5/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting only by their periphery; Bushings or mountings therefor
    • B24D5/14—Zonally-graded wheels; Composite wheels comprising different abrasives
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/065—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of thin, brittle parts, e.g. semiconductors, wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q2210/00—Machine tools incorporating a specific component
    • B23Q2210/002—Flexures

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Disintegrating Or Milling (AREA)
AT01900196T 2000-02-02 2001-01-10 Schleifspindel für schleifmaschinen mit abschnittsweise harzgebundener grober und feiner körnung ATE265912T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0002251.7A GB0002251D0 (en) 2000-02-02 2000-02-02 Improvements in and relating to grinding machines
PCT/GB2001/000073 WO2001056739A1 (en) 2000-02-02 2001-01-10 Grinding pin for grinding machines comprising resin bonded selections of rough grit and fine grit

Publications (1)

Publication Number Publication Date
ATE265912T1 true ATE265912T1 (de) 2004-05-15

Family

ID=9884718

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01900196T ATE265912T1 (de) 2000-02-02 2001-01-10 Schleifspindel für schleifmaschinen mit abschnittsweise harzgebundener grober und feiner körnung

Country Status (11)

Country Link
US (1) US6739954B2 (de)
EP (1) EP1251996B1 (de)
JP (1) JP2003521816A (de)
KR (1) KR20020081291A (de)
CN (1) CN1424953A (de)
AT (1) ATE265912T1 (de)
AU (1) AU2001223873A1 (de)
DE (1) DE60103123T2 (de)
ES (1) ES2220703T3 (de)
GB (2) GB0002251D0 (de)
WO (1) WO2001056739A1 (de)

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DE102004057596B4 (de) * 2004-04-22 2009-06-04 Reishauer Ag Profilierzahnrad und Verfahren zum Profilieren einer Schleifschnecke
US7115023B1 (en) * 2005-06-29 2006-10-03 Lam Research Corporation Process tape for cleaning or processing the edge of a semiconductor wafer
CN101104246B (zh) * 2007-07-30 2012-10-10 刘小辉 磨边机
KR20090063804A (ko) * 2007-12-14 2009-06-18 주식회사 실트론 연삭 휠 트루잉 공구 및 그 제작방법, 이를 이용한 트루잉장치, 연삭 휠의 제작방법, 및 웨이퍼 에지 연삭장치
GB0801366D0 (en) 2008-01-25 2008-03-05 Cinetic Landis Grinding Ltd Machine tools and methods of operation thereof
GB2476468B (en) 2009-12-22 2012-08-15 Cinetic Landis Ltd Machine tools and methods of operation thereof
US8512098B1 (en) * 2010-09-28 2013-08-20 Jeffrey Bonner Machining technique using a plated superabrasive grinding wheel on a swiss style screw machine
CN102343539A (zh) * 2011-10-29 2012-02-08 重庆川仪自动化股份有限公司 蓝宝石圆柱体外圆面r环槽的加工方法
CN103128674B (zh) * 2011-11-22 2015-06-24 深圳市常兴技术股份有限公司 多层次多种粒度区域的金刚石磨具及其加工工艺
CN103128624B (zh) * 2011-11-22 2015-10-28 深圳市常兴技术股份有限公司 玻璃面板的加工工艺
CN102528615B (zh) * 2011-11-25 2015-02-11 深圳市创造机电有限公司 玻璃精磨机及其磨削控制方法
US8888565B2 (en) * 2012-11-20 2014-11-18 Welch Manufacturing Technologies, Ltd Sharpening tool, sharpening system and kit
CN103624699A (zh) * 2013-12-05 2014-03-12 湖南大学 一种用于棒材类零件粗精无心磨削的组合式砂轮
CN106425697A (zh) * 2015-08-10 2017-02-22 蓝思科技（长沙）有限公司 一种3d蓝宝石面板的制备方法及蓝宝石面板
CN106956225B (zh) * 2016-01-12 2019-02-19 蓝思科技股份有限公司 一种玻璃加工用砂轮棒及cnc玻璃成型方法
CN107414085B (zh) * 2017-07-07 2019-07-16 泉州众志金刚石工具有限公司 一种金刚石刀头胎体材料和细粒度金刚石锯片
DE102018217927A1 (de) * 2018-10-19 2020-04-23 Robert Bosch Gmbh Hydraulikaggregat
CN110394711A (zh) * 2019-07-17 2019-11-01 西安奕斯伟硅片技术有限公司 一种研磨装置、倒角加工装置及加工方法
JP7298100B2 (ja) * 2019-08-29 2023-06-27 株式会社ノリタケカンパニーリミテド 歯車研削用複層砥石
CN111993295A (zh) * 2020-06-16 2020-11-27 上海新欣晶圆半导体科技有限公司 一种带有一粗四精沟槽的砂轮及其应用
JP7093875B2 (ja) * 2021-06-24 2022-06-30 一郎 片山 ワーク加工装置、砥石、およびワーク加工方法
CN118081490A (zh) * 2024-02-27 2024-05-28 杭州中欣晶圆半导体股份有限公司 硅片边缘轮廓的加工方法
CN118990304A (zh) * 2024-10-24 2024-11-22 巢湖学院 一种水域遥感标记块抛光装置

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US3183632A (en) * 1962-07-09 1965-05-18 Gen Motors Corp Grinding tool
ZA713105B (en) * 1971-05-12 1972-09-27 De Beers Ind Diamond Diamond and the like grinding wheels
US4286415A (en) * 1979-03-12 1981-09-01 Ait Industries, Inc. Method of edging lenses
JPS6288579A (ja) * 1985-10-15 1987-04-23 Toyoda Mach Works Ltd 研削工具
DE8629226U1 (de) * 1986-11-03 1986-12-18 Wernicke & Co GmbH, 40231 Düsseldorf Drehwerkzeug zur Randbearbeitung von Brillenglasrändern
JPH081493A (ja) * 1994-06-17 1996-01-09 Shin Etsu Handotai Co Ltd ウェーハ面取部の鏡面研磨方法および鏡面研磨装置
US5542876A (en) * 1994-08-19 1996-08-06 Coburn Optical Industries, Inc. V-profile grinding wheel
JP3099216B2 (ja) * 1994-08-22 2000-10-16 旭栄研磨加工株式会社 ドーナツ状基板の研削工具
JP3010572B2 (ja) * 1994-09-29 2000-02-21 株式会社東京精密 ウェーハエッジの加工装置
JPH08243891A (ja) * 1995-03-07 1996-09-24 Kao Corp 基板のチャンファ加工装置
KR100303074B1 (ko) * 1996-06-15 2001-11-02 로이 아써턴 그라인딩및폴리싱장치와이를이용한그라인딩방법
JPH1133918A (ja) * 1997-07-16 1999-02-09 Nikon Corp 磁気記録媒体用基板の内外径加工用砥石及び内外径加工方法
JPH11221742A (ja) * 1997-09-30 1999-08-17 Hoya Corp 研磨方法及び研磨装置並びに磁気記録媒体用ガラス基板及び磁気記録媒体
GB2335620B (en) * 1998-03-25 2003-03-19 Unova Uk Ltd Improvements in and relating to grinding machines

Also Published As

Publication number Publication date
US20030003853A1 (en) 2003-01-02
GB0100613D0 (en) 2001-02-21
EP1251996B1 (de) 2004-05-06
EP1251996A1 (de) 2002-10-30
CN1424953A (zh) 2003-06-18
GB2360965A (en) 2001-10-10
DE60103123T2 (de) 2005-04-28
GB0002251D0 (en) 2000-03-22
JP2003521816A (ja) 2003-07-15
ES2220703T3 (es) 2004-12-16
US6739954B2 (en) 2004-05-25
WO2001056739A1 (en) 2001-08-09
AU2001223873A1 (en) 2001-08-14
DE60103123D1 (de) 2004-06-09
KR20020081291A (ko) 2002-10-26
GB2360965B (en) 2002-08-28

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