ATE272820T1 - Gasspulverwaltungssystem für gasgespulten taucherhitzer - Google Patents
Gasspulverwaltungssystem für gasgespulten taucherhitzerInfo
- Publication number
- ATE272820T1 ATE272820T1 AT97930005T AT97930005T ATE272820T1 AT E272820 T1 ATE272820 T1 AT E272820T1 AT 97930005 T AT97930005 T AT 97930005T AT 97930005 T AT97930005 T AT 97930005T AT E272820 T1 ATE272820 T1 AT E272820T1
- Authority
- AT
- Austria
- Prior art keywords
- aperture
- gas
- purge manifold
- bore
- vessel wall
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/78—Heating arrangements specially adapted for immersion heating
- H05B3/82—Fixedly-mounted immersion heaters
Landscapes
- Pipe Accessories (AREA)
- Devices For Use In Laboratory Experiments (AREA)
- Sampling And Sample Adjustment (AREA)
- Resistance Heating (AREA)
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
- Chemical Vapour Deposition (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US2044696P | 1996-06-18 | 1996-06-18 | |
| US08/872,903 US5919386A (en) | 1996-06-18 | 1997-06-11 | Purge management system for gas purged immersion heaters |
| PCT/US1997/010336 WO1997048952A1 (en) | 1996-06-18 | 1997-06-18 | Purge management system for gas purged immersion heaters |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE272820T1 true ATE272820T1 (de) | 2004-08-15 |
Family
ID=26693444
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT97930005T ATE272820T1 (de) | 1996-06-18 | 1997-06-18 | Gasspulverwaltungssystem für gasgespulten taucherhitzer |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US5919386A (de) |
| EP (1) | EP1000303B1 (de) |
| JP (1) | JP3943599B2 (de) |
| AT (1) | ATE272820T1 (de) |
| DE (1) | DE69730160T2 (de) |
| WO (1) | WO1997048952A1 (de) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999038356A1 (en) * | 1998-01-23 | 1999-07-29 | Lufran Incorporated | Demand anticipation control system for a high efficiency ultra-pure fluid heater |
| US10571135B2 (en) | 2012-04-09 | 2020-02-25 | David Kreutzman | Renewable energy hot water heater with heat pump |
| US8977117B2 (en) * | 2012-04-09 | 2015-03-10 | David Kreutzman | Renewable energy hot water heating elements |
| US9562703B2 (en) | 2012-08-03 | 2017-02-07 | Tom Richards, Inc. | In-line ultrapure heat exchanger |
| WO2019204160A1 (en) | 2018-04-20 | 2019-10-24 | Tom Richards, Inc. | In-line high purity chemical heater |
| US11988411B2 (en) * | 2020-07-29 | 2024-05-21 | Tom Richards, Inc. | Inline heater |
| KR102819280B1 (ko) * | 2021-11-26 | 2025-06-11 | 주식회사 원익아이피에스 | 기판처리장치 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4158764A (en) * | 1975-06-24 | 1979-06-19 | Yane Frank J | Device for heating liquid in a container |
| US4553024A (en) * | 1983-04-07 | 1985-11-12 | Lufran, Inc. | Gas-purged flexible cable-type immersion heater and method for heating highly corrosive liquids |
| US4835365A (en) * | 1986-09-29 | 1989-05-30 | Etheridge David R | De-ionized fluid heater and control system |
| US5021151A (en) * | 1989-05-12 | 1991-06-04 | Yane Daryl J | Plastic impeller pump and filtration unit for semi-conductor etching system |
| US5224503A (en) * | 1992-06-15 | 1993-07-06 | Semitool, Inc. | Centrifugal wafer carrier cleaning apparatus |
-
1997
- 1997-06-11 US US08/872,903 patent/US5919386A/en not_active Expired - Lifetime
- 1997-06-18 EP EP97930005A patent/EP1000303B1/de not_active Expired - Lifetime
- 1997-06-18 WO PCT/US1997/010336 patent/WO1997048952A1/en not_active Ceased
- 1997-06-18 JP JP50317298A patent/JP3943599B2/ja not_active Expired - Lifetime
- 1997-06-18 DE DE69730160T patent/DE69730160T2/de not_active Expired - Lifetime
- 1997-06-18 AT AT97930005T patent/ATE272820T1/de active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2002515111A (ja) | 2002-05-21 |
| US5919386A (en) | 1999-07-06 |
| EP1000303B1 (de) | 2004-08-04 |
| DE69730160D1 (de) | 2004-09-09 |
| DE69730160T2 (de) | 2005-09-01 |
| EP1000303A4 (de) | 2000-05-17 |
| JP3943599B2 (ja) | 2007-07-11 |
| WO1997048952A1 (en) | 1997-12-24 |
| EP1000303A1 (de) | 2000-05-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| UEP | Publication of translation of european patent specification |
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