ATE273575T1 - Vorrichtung zur halterung und zum ausbau eines optischen elements - Google Patents

Vorrichtung zur halterung und zum ausbau eines optischen elements

Info

Publication number
ATE273575T1
ATE273575T1 AT01104172T AT01104172T ATE273575T1 AT E273575 T1 ATE273575 T1 AT E273575T1 AT 01104172 T AT01104172 T AT 01104172T AT 01104172 T AT01104172 T AT 01104172T AT E273575 T1 ATE273575 T1 AT E273575T1
Authority
AT
Austria
Prior art keywords
optical element
tubular
gripping portion
extraction
holdering
Prior art date
Application number
AT01104172T
Other languages
English (en)
Inventor
Hans Kodeda
Helmut Frowein
Original Assignee
Tuilaser Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tuilaser Ag filed Critical Tuilaser Ag
Application granted granted Critical
Publication of ATE273575T1 publication Critical patent/ATE273575T1/de

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/034—Optical devices within, or forming part of, the tube, e.g. windows, mirrors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Lasers (AREA)
  • Led Device Packages (AREA)
AT01104172T 2000-02-22 2001-02-21 Vorrichtung zur halterung und zum ausbau eines optischen elements ATE273575T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/510,666 US6804284B1 (en) 2000-02-22 2000-02-22 Optical element holding and extraction device

Publications (1)

Publication Number Publication Date
ATE273575T1 true ATE273575T1 (de) 2004-08-15

Family

ID=24031672

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01104172T ATE273575T1 (de) 2000-02-22 2001-02-21 Vorrichtung zur halterung und zum ausbau eines optischen elements

Country Status (4)

Country Link
US (1) US6804284B1 (de)
EP (1) EP1130698B1 (de)
AT (1) ATE273575T1 (de)
DE (1) DE60104744T2 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6804284B1 (en) * 2000-02-22 2004-10-12 Tuilaser Ag Optical element holding and extraction device
DE102012005154B4 (de) * 2012-03-16 2017-05-18 Toptica Photonics Ag Ausgasarmer Resonator
US9927296B2 (en) * 2013-06-20 2018-03-27 Rosemount Analytical Inc. Alignment system for laser spectroscopy
US11670490B2 (en) 2017-09-29 2023-06-06 Taiwan Semiconductor Manufacturing Co., Ltd. Integrated circuit fabrication system with adjustable gas injector

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* Cited by examiner, † Cited by third party
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DE3130399A1 (de) 1981-07-31 1983-02-17 Siemens AG, 1000 Berlin und 8000 München Optischer sender (laser) mit einer justiervorrichtung fuer einen reflektorspiegel des laserresonators
JPS5861843A (ja) 1981-09-12 1983-04-13 Senichi Masuda 極短パルス高電圧発生装置
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EP0166028A3 (de) 1984-06-25 1987-04-22 Siemens Aktiengesellschaft Justiereinrichtung für einen Reflektorspiegel eines Laserresonators
US4686685A (en) 1985-06-06 1987-08-11 Laser Corporation Of America Gas laser having thermally stable optical mount
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JP2512137Y2 (ja) 1986-03-28 1996-09-25 日本電気株式会社 ガスレ−ザ発振器
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US5473162A (en) 1987-10-26 1995-12-05 Baylor University Infrared emission detection of a gas
JPH02250383A (ja) 1989-03-24 1990-10-08 Mitsubishi Heavy Ind Ltd 部分反射鏡角度調整装置
EP0456875A1 (de) 1990-05-18 1991-11-21 Siemens Aktiengesellschaft Wellenleiterlaser
JPH05152643A (ja) 1991-07-10 1993-06-18 Mitsubishi Electric Corp レーザ発振装置
DE4128776A1 (de) 1991-08-29 1993-03-04 Siemens Ag Spiegelfassung fuer laser
JPH0567823A (ja) 1991-09-05 1993-03-19 Nec Corp 放電励起パルスガスレーザ装置
US5373523A (en) 1992-10-15 1994-12-13 Kabushiki Kaisha Komatsu Seisakusho Excimer laser apparatus
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FR2698496B1 (fr) 1992-11-24 1995-02-10 Laserdot Tête de laser à gaz, à décharge et circulation transverses, à préionisation corona, et laser la comportant.
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JP3932207B2 (ja) * 1997-03-14 2007-06-20 デマリア エレクトロオプティックス システムズ アイエヌシー 無線周波数励起導波レーザ
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DE29715466U1 (de) 1997-08-28 1997-10-23 TUI Laser GmbH, 82166 Gräfelfing Resonatoranordnung für einen Laser
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US6804284B1 (en) * 2000-02-22 2004-10-12 Tuilaser Ag Optical element holding and extraction device
US6493375B1 (en) * 2000-02-22 2002-12-10 Tuilaser Ag Adjustable mounting unit for an optical element of a gas laser
US6363094B1 (en) 2000-06-09 2002-03-26 Cymer, Inc. Gas discharge laser electrode with reduced sensitivity to adverse boundary layer effects

Also Published As

Publication number Publication date
US6804284B1 (en) 2004-10-12
DE60104744D1 (de) 2004-09-16
DE60104744T2 (de) 2005-09-01
EP1130698A1 (de) 2001-09-05
EP1130698B1 (de) 2004-08-11

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