ATE280043T1 - Piezoelektrische vibratoreinheit - Google Patents

Piezoelektrische vibratoreinheit

Info

Publication number
ATE280043T1
ATE280043T1 AT01113534T AT01113534T ATE280043T1 AT E280043 T1 ATE280043 T1 AT E280043T1 AT 01113534 T AT01113534 T AT 01113534T AT 01113534 T AT01113534 T AT 01113534T AT E280043 T1 ATE280043 T1 AT E280043T1
Authority
AT
Austria
Prior art keywords
piezoelectric vibrator
internal electrode
electrode layers
piezoelectric
layers
Prior art date
Application number
AT01113534T
Other languages
English (en)
Inventor
Tsuyoshi Kitahara
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Application granted granted Critical
Publication of ATE280043T1 publication Critical patent/ATE280043T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14274—Structure of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/1612—Production of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/206—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using only longitudinal or thickness displacement, e.g. d33 or d31 type devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14419—Manifold
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14491—Electrical connection

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
AT01113534T 2000-06-12 2001-06-12 Piezoelektrische vibratoreinheit ATE280043T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000175117A JP3511981B2 (ja) 2000-06-12 2000-06-12 圧電振動子ユニット、及び、これを用いたインクジェット式記録ヘッド

Publications (1)

Publication Number Publication Date
ATE280043T1 true ATE280043T1 (de) 2004-11-15

Family

ID=18677042

Family Applications (2)

Application Number Title Priority Date Filing Date
AT01113534T ATE280043T1 (de) 2000-06-12 2001-06-12 Piezoelektrische vibratoreinheit
AT03001358T ATE327894T1 (de) 2000-06-12 2001-06-12 Piezoelektrische vibratoreinheit

Family Applications After (1)

Application Number Title Priority Date Filing Date
AT03001358T ATE327894T1 (de) 2000-06-12 2001-06-12 Piezoelektrische vibratoreinheit

Country Status (5)

Country Link
US (1) US7111927B2 (de)
EP (2) EP1164016B1 (de)
JP (1) JP3511981B2 (de)
AT (2) ATE280043T1 (de)
DE (2) DE60120179T2 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4944687B2 (ja) * 2007-06-28 2012-06-06 株式会社リコー 圧電アクチュエータ及びその製造方法、液体吐出ヘッド、画像形成装置
JP5444593B2 (ja) * 2007-07-05 2014-03-19 Ｔｄｋ株式会社 積層型圧電素子
JP5223934B2 (ja) 2010-03-29 2013-06-26 パナソニック株式会社 インクジェット装置
JP5403170B2 (ja) * 2010-11-01 2014-01-29 株式会社村田製作所 積層型圧電アクチュエータ及び圧電振動装置
RU2489698C1 (ru) * 2012-04-27 2013-08-10 Фан Сагирович Сабиров Пьезоэлектрический вибратор
JP5983252B2 (ja) * 2012-09-28 2016-08-31 ブラザー工業株式会社 液体吐出装置、基板の接続構造、及び、液体吐出装置の製造方法
JP5679010B2 (ja) * 2013-05-07 2015-03-04 Tdk株式会社 圧電素子およびその製造方法
JP6205976B2 (ja) 2013-08-08 2017-10-04 セイコーエプソン株式会社 液体噴射ヘッド、および、液体噴射装置
CN105453288B (zh) 2013-10-22 2018-01-26 株式会社村田制作所 层叠陶瓷结构体及其制造方法、和压电致动器的制造方法
KR101878019B1 (ko) 2014-05-12 2018-07-13 파나소닉 아이피 매니지먼트 가부시키가이샤 압전 소자와 케이블 기판의 접속 방법, 케이블 기판 장착 압전 소자 및 이것을 사용한 잉크젯 헤드
JP6439422B6 (ja) * 2014-12-05 2019-01-30 Tdk株式会社 圧電アクチュエータ
JP6725049B1 (ja) * 2019-12-16 2020-07-15 Tdk株式会社 積層圧電素子

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61272984A (ja) 1985-05-28 1986-12-03 Nec Corp 電歪効果素子
JPH06105800B2 (ja) 1986-05-08 1994-12-21 日本電気株式会社 電歪効果素子
JPS6316685A (ja) 1986-07-08 1988-01-23 Nec Corp 電歪効果素子
JP2999492B2 (ja) 1989-12-26 2000-01-17 株式会社リコー 積層圧電アクチュエータ
JP2802138B2 (ja) 1990-03-15 1998-09-24 シャープ株式会社 インクジェット記録ヘッド
JP2998764B2 (ja) * 1991-06-13 2000-01-11 セイコーエプソン株式会社 インクジェット式印字ヘッド、インク補給方法、及び気泡除去方法
JP3439659B2 (ja) * 1991-06-13 2003-08-25 セイコーエプソン株式会社 インクジェット式印字ヘッド用圧電振動子ユニット、その製造方法、及びインクジェット式印字ヘッド
JPH04368852A (ja) * 1991-06-18 1992-12-21 Seiko Epson Corp インクジェット式印字ヘッド
JPH0584907A (ja) * 1991-09-26 1993-04-06 Seiko Epson Corp インクジエツト式印字ヘツド
JPH05110157A (ja) 1991-10-14 1993-04-30 Nec Corp 積層圧電アクチユエータ
JP3237163B2 (ja) * 1992-01-20 2001-12-10 セイコーエプソン株式会社 インクジェット式印字ヘッド
JP3214017B2 (ja) * 1992-01-21 2001-10-02 セイコーエプソン株式会社 積層形圧電変位素子及びインクジェット式印字ヘッド
JP3147964B2 (ja) * 1992-01-21 2001-03-19 セイコーエプソン株式会社 積層形圧電変位素子ユニット及びインクジェット記録ヘッド
JPH06312505A (ja) 1992-12-17 1994-11-08 Seiko Epson Corp 積層型圧電変位素子及びそれを用いたインクジェット記録ヘッド
DE4435914C2 (de) * 1993-10-07 1999-02-25 Seiko Epson Corp Piezoelektrischer Antrieb für einen Tintenstrahlaufzeichnungskopf und Verfahren zu dessen Herstellung
JP3355738B2 (ja) * 1993-12-22 2002-12-09 セイコーエプソン株式会社 インクジェットヘッド
JP3456380B2 (ja) * 1997-09-02 2003-10-14 株式会社村田製作所 圧電アクチュエータ
JPH1178006A (ja) * 1997-09-10 1999-03-23 Seiko Epson Corp インクジェットヘッドおよびその製造方法
JP3729997B2 (ja) * 1997-11-06 2005-12-21 セイコーエプソン株式会社 インクジェット式記録ヘッド、及びこれに使用する圧電振動子ユニットの製造方法
JP4008099B2 (ja) * 1998-03-30 2007-11-14 セイコーエプソン株式会社 インクジェット式記録ヘッド駆動用圧電振動子ユニット、及びその製造方法

Also Published As

Publication number Publication date
EP1306216A3 (de) 2003-10-22
DE60106522D1 (de) 2004-11-25
DE60120179T2 (de) 2007-03-29
EP1164016A2 (de) 2001-12-19
JP2001347660A (ja) 2001-12-18
EP1306216B1 (de) 2006-05-31
DE60120179D1 (de) 2006-07-06
JP3511981B2 (ja) 2004-03-29
DE60106522T2 (de) 2005-10-27
US20020017142A1 (en) 2002-02-14
EP1164016A3 (de) 2002-01-16
EP1306216A2 (de) 2003-05-02
EP1164016B1 (de) 2004-10-20
US7111927B2 (en) 2006-09-26
ATE327894T1 (de) 2006-06-15

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Legal Events

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