ATE28217T1 - MAGNETRON CATHODE SPRAYING DEVICE. - Google Patents

MAGNETRON CATHODE SPRAYING DEVICE.

Info

Publication number: ATE28217T1
Authority: AT; Austria
Prior art keywords: spraying device; magnetron cathode; cathode spraying; magnetron; spraying
Prior art date: 1981-02-12

Application number

AT82900891T

Other languages

German (de)

Inventor

Harold E Mckelvey

Original Assignee

Shatterproof Glass Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1981-02-12

Filing date

1982-02-11

Publication date

1987-07-15

1981-02-12 Priority claimed from US06/233,974 external-priority patent/US4356073A/en

1982-02-11 Application filed by Shatterproof Glass Corp filed Critical Shatterproof Glass Corp

1987-07-15 Application granted granted Critical

1987-07-15 Publication of ATE28217T1 publication Critical patent/ATE28217T1/en

Links

238000005507 spraying Methods 0.000 title 1

AT82900891T 1981-02-12 1982-02-11 MAGNETRON CATHODE SPRAYING DEVICE. ATE28217T1 (en)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
US06/233,974 US4356073A (en)	1981-02-12	1981-02-12	Magnetron cathode sputtering apparatus
EP82900891A EP0070899B1 (en)	1981-02-12	1982-02-11	Magnetron cathode sputtering apparatus
PCT/US1982/000171 WO1982002725A1 (en)	1981-02-12	1982-02-11	Magnetron cathode sputtering apparatus

Publications (1)

Publication Number	Publication Date
ATE28217T1 true ATE28217T1 (en)	1987-07-15

Family

ID=26087081

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AT82900891T ATE28217T1 (en)	1981-02-12	1982-02-11	MAGNETRON CATHODE SPRAYING DEVICE.

Country Status (1)

Country	Link
AT (1)	ATE28217T1 (en)

1982
- 1982-02-11 AT AT82900891T patent/ATE28217T1/en not_active IP Right Cessation

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Legal Events

Date	Code	Title	Description
1987-12-15	UEP	Publication of translation of european patent specification
2002-05-15	EELA	Cancelled due to lapse of time