ATE285081T1 - Interferometrische konfokale nahfeld- abtastmikroskopie - Google Patents

Interferometrische konfokale nahfeld- abtastmikroskopie

Info

Publication number
ATE285081T1
ATE285081T1 AT00953800T AT00953800T ATE285081T1 AT E285081 T1 ATE285081 T1 AT E285081T1 AT 00953800 T AT00953800 T AT 00953800T AT 00953800 T AT00953800 T AT 00953800T AT E285081 T1 ATE285081 T1 AT E285081T1
Authority
AT
Austria
Prior art keywords
near field
mask
field
scanning microscopy
field scanning
Prior art date
Application number
AT00953800T
Other languages
English (en)
Inventor
Henry Allen Hill
Original Assignee
Zetetic Inst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zetetic Inst filed Critical Zetetic Inst
Priority claimed from PCT/US2000/021090 external-priority patent/WO2001009662A2/en
Application granted granted Critical
Publication of ATE285081T1 publication Critical patent/ATE285081T1/de

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/004—Recording, reproducing or erasing methods; Read, write or erase circuits therefor
    • G11B7/0045—Recording
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0056—Optical details of the image generation based on optical coherence, e.g. phase-contrast arrangements, interference arrangements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0068—Optical details of the image generation arrangements using polarisation
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
    • G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
    • G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
    • G11B11/10532—Heads
    • G11B11/10534—Heads for recording by magnetising, demagnetising or transfer of magnetisation, by radiation, e.g. for thermomagnetic recording
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
    • G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
    • G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
    • G11B11/10532—Heads
    • G11B11/10541—Heads for reproducing
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/004—Recording, reproducing or erasing methods; Read, write or erase circuits therefor
    • G11B7/005—Reproducing
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1356—Double or multiple prisms, i.e. having two or more prisms in cooperation
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1372—Lenses
    • G11B7/1374—Objective lenses
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1381—Non-lens elements for altering the properties of the beam, e.g. knife edges, slits, filters or stops
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1387—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector using the near-field effect
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
    • G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
    • G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
    • G11B11/1055—Disposition or mounting of transducers relative to record carriers
    • G11B11/1058—Flying heads
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1372—Lenses
    • G11B2007/13727—Compound lenses, i.e. two or more lenses co-operating to perform a function, e.g. compound objective lens including a solid immersion lens, positive and negative lenses either bonded together or with adjustable spacing

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Microscoopes, Condenser (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Sampling And Sample Adjustment (AREA)
AT00953800T 1999-08-02 2000-08-02 Interferometrische konfokale nahfeld- abtastmikroskopie ATE285081T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14719699P 1999-08-02 1999-08-02
US22120000P 2000-07-27 2000-07-27
PCT/US2000/021090 WO2001009662A2 (en) 1999-08-02 2000-08-02 Scanning interferometric near-field confocal microscopy

Publications (1)

Publication Number Publication Date
ATE285081T1 true ATE285081T1 (de) 2005-01-15

Family

ID=26844679

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00953800T ATE285081T1 (de) 1999-08-02 2000-08-02 Interferometrische konfokale nahfeld- abtastmikroskopie

Country Status (5)

Country Link
US (3) US6606159B1 (de)
EP (1) EP1203257B1 (de)
AT (1) ATE285081T1 (de)
DE (1) DE60016761T2 (de)
TW (2) TW558642B (de)

Families Citing this family (103)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100701763B1 (ko) * 2002-09-24 2007-03-29 주식회사 케이티 단거리무선통신망을 이용한 버스 내 승객을 위한 정류소도착소요시간 안내 방법
US6403124B1 (en) * 1997-04-16 2002-06-11 Sigma-Tau Industrie Farmaceutiche Riunite S.P.A. Storage and maintenance of blood products including red blood cells and platelets
US7541201B2 (en) 2000-08-30 2009-06-02 Kla-Tencor Technologies Corporation Apparatus and methods for determining overlay of structures having rotational or mirror symmetry
US7317531B2 (en) 2002-12-05 2008-01-08 Kla-Tencor Technologies Corporation Apparatus and methods for detecting overlay errors using scatterometry
JP2002134396A (ja) * 2000-10-25 2002-05-10 Sony Corp 半導体装置の製造方法および半導体パターン自動調節装置
DE10156506C1 (de) * 2001-11-16 2003-05-22 Leica Microsystems Verfahren zur Erzeugung eines mehrfarbigen Bildes und Mikroskop
US7177236B2 (en) * 2001-12-13 2007-02-13 Mems Optical, Inc. Optical disc head including a bowtie grating antenna and slider for optical focusing, and method for making
KR20030056573A (ko) * 2001-12-28 2003-07-04 한국전자통신연구원 고체 결상 렌즈의 경사각 측정 장치
US6691052B1 (en) * 2002-01-30 2004-02-10 Kla-Tencor Corporation Apparatus and methods for generating an inspection reference pattern
JP3932944B2 (ja) * 2002-03-27 2007-06-20 日本電気株式会社 光学素子およびそれを用いた光ヘッド
US7123035B2 (en) * 2002-04-10 2006-10-17 Credence Systems Corporation Optics landing system and method therefor
US7042577B1 (en) * 2002-07-16 2006-05-09 Actinix Architectures for high-resolution photomask phase metrology
US7274462B2 (en) * 2002-09-09 2007-09-25 Zygo Corporation In SITU measurement and compensation of errors due to imperfections in interferometer optics in displacement measuring interferometry systems
US7619562B2 (en) * 2002-09-30 2009-11-17 Nanosys, Inc. Phased array systems
US7440105B2 (en) 2002-12-05 2008-10-21 Kla-Tencor Technologies Corporation Continuously varying offset mark and methods of determining overlay
US7084983B2 (en) * 2003-01-27 2006-08-01 Zetetic Institute Interferometric confocal microscopy incorporating a pinhole array beam-splitter
EP1606575A4 (de) * 2003-01-27 2006-12-27 Zetetic Inst Leckende geführte wellenmoden, die in der interferometrischen konfokalen mikroskopie zur messung von grabeneigenschaften verwendet werden
JP2006516763A (ja) * 2003-01-27 2006-07-06 ゼテテック インスティテュート 干渉計測対象物による反射／散乱および透過ビームの、四半分角視野共時測定のための装置および方法。
US7164480B2 (en) * 2003-02-04 2007-01-16 Zetetic Institute Compensation for effects of mismatch in indices of refraction at a substrate-medium interface in non-confocal, confocal, and interferometric confocal microscopy
US7263259B2 (en) * 2003-02-07 2007-08-28 Zetetic Institute Multiple-source arrays fed by guided-wave structures and resonant guided-wave structure cavities
EP1595106A4 (de) * 2003-02-13 2007-01-17 Zetetic Inst Interferometrische transvers-differential-konfokalmikroskopie
JP3787123B2 (ja) * 2003-02-13 2006-06-21 株式会社東芝 検査方法、プロセッサ及び半導体装置の製造方法
KR20050098940A (ko) * 2003-02-19 2005-10-12 제테틱 인스티튜트 암시야 간섭계 공초점 현미경을 위한 방법 및 장치
JP2006518487A (ja) * 2003-02-19 2006-08-10 ゼテテック インスティテュート 縦型微分干渉共焦点顕微鏡
JP2004259328A (ja) * 2003-02-24 2004-09-16 Pioneer Electronic Corp 光ピックアップ並びにこれを備えた情報再生装置
WO2004090582A2 (en) 2003-04-01 2004-10-21 Zetetic Institute Method for constructing a catadioptric lens system
KR20050119672A (ko) * 2003-04-01 2005-12-21 제테틱 인스티튜트 간섭계 내에서 물체에 의해 산란/반사 또는 투과된 직교편광 빔의 필드의 결합 측정을 위한 장치 및 방법
WO2004090466A2 (en) * 2003-04-03 2004-10-21 Zetetic Institute Apparatus and method for measurement of fields of backscattered and forward scattered/reflected beams by an object in interferometry
DE10324478B3 (de) * 2003-05-30 2004-12-09 Leica Microsystems Heidelberg Gmbh Vorrichtung zum Ermitteln der Lichtleistung eines Lichtstrahles und Scanmikroskop
WO2005008334A2 (en) 2003-07-07 2005-01-27 Zetetic Institute Apparatus and method for high speed scan for detection and measurement of properties of sub-wavelength defects and artifacts in semiconductor and mask metrology
US7324209B2 (en) * 2003-07-07 2008-01-29 Zetetic Institute Apparatus and method for ellipsometric measurements with high spatial resolution
WO2005026810A2 (en) * 2003-09-10 2005-03-24 Zetetic Institute Catoptric and catadioptric imaging systems with adaptive catoptric surfaces
WO2005031397A2 (en) * 2003-09-26 2005-04-07 Zetetic Institute Catoptric and catadioptric imaging systems with pellicle and aperture-array beam-splitters and non-adaptive and adaptive catoptric surfaces
NL1024404C2 (nl) * 2003-09-30 2005-03-31 Univ Delft Tech Optische microscoop en werkwijze voor het vormen van een optisch beeld.
US7312877B2 (en) * 2003-10-01 2007-12-25 Zetetic Institute Method and apparatus for enhanced resolution of high spatial frequency components of images using standing wave beams in non-interferometric and interferometric microscopy
DE10348250A1 (de) * 2003-10-16 2005-05-12 Bosch Gmbh Robert Interferometrische Messvorrichtung
KR20070012631A (ko) * 2003-12-05 2007-01-26 유니버시티 오브 피츠버그 오브 더 커먼웰쓰 시스템 오브 하이어 에듀케이션 금속성 나노-광학 렌즈 및 빔 정형 장치
WO2005108914A2 (en) * 2004-05-06 2005-11-17 Zetetic Institute Apparatus and methods for measurement of critical dimensions of features and detection of defects in uv, vuv, and euv lithography masks
TW200538704A (en) * 2004-05-21 2005-12-01 Zetetic Inst Apparatus and methods for overlay, alignment mark, and critical dimension metrologies based on optical interferometry
TW200607991A (en) * 2004-08-16 2006-03-01 Zetetic Inst Apparatus and method for joint and time delayed measurements of components of conjugated quadratures of fields of reflected/scattered and transmitted/scattered beams by an object in interferometry
WO2006023612A2 (en) * 2004-08-19 2006-03-02 Zetetic Institute Sub-nanometer overlay, critical dimension, and lithography tool projection optic metrology systems based on measurement of exposure induced changes in photoresist on wafers
US7145663B2 (en) * 2004-09-20 2006-12-05 Zetetic Institute Catoptric imaging systems comprising pellicle and/or aperture-array beam-splitters and non-adaptive and/or adaptive catoptric surfaces
JP4423168B2 (ja) * 2004-11-02 2010-03-03 株式会社ミツトヨ 表面性状測定装置
US20060091334A1 (en) * 2004-11-03 2006-05-04 Jan-Peter Urbach Con-focal imaging system and method using destructive interference to enhance image contrast of light scattering objects on a sample surface
CN1310023C (zh) * 2004-11-10 2007-04-11 哈尔滨工业大学 三差动共焦显微三维超分辨成像方法
WO2006068860A1 (en) * 2004-12-20 2006-06-29 Massachusetts Institute Of Technology Liquid expansion thermometer and microcalorimeter
US7085450B2 (en) * 2004-12-22 2006-08-01 3M Innovative Properties Company Fabrication of structures in an optical substrate
US20060186355A1 (en) * 2005-02-04 2006-08-24 Smith Henry I Phase-shift masked zone plate array lithography
US7339682B2 (en) * 2005-02-25 2008-03-04 Verity Instruments, Inc. Heterodyne reflectometer for film thickness monitoring and method for implementing
WO2007008265A2 (en) * 2005-04-11 2007-01-18 Zetetic Institute Apparatus and method for in situ and ex situ measurement of spatial impulse response of an optical system using phase-shifting point-diffraction interferometry
WO2006116673A1 (en) * 2005-04-28 2006-11-02 The Board Of Trustees Of The University Of Illinois Mutliplex near-field microscopy with diffractive elements
EP1883783A2 (de) * 2005-05-18 2008-02-06 Zetetic Institute Vorrichtung und verfahren für in-situ- und ex-situ-messungen eines optischen systemreflexes
JP4538388B2 (ja) * 2005-07-21 2010-09-08 株式会社ミツトヨ 位相シフト干渉計
US7924434B2 (en) * 2005-08-02 2011-04-12 Kla-Tencor Technologies Corp. Systems configured to generate output corresponding to defects on a specimen
TW200706831A (en) * 2005-08-08 2007-02-16 Zetetic Inst Apparatus and methods for reduction and compensation of effects of vibrations and of environmental effects in wavefront interferometry
US7808023B2 (en) * 2005-08-24 2010-10-05 Aptina Imaging Corporation Method and apparatus providing integrated color pixel with buried sub-wavelength gratings in solid state imagers
EP1917496A4 (de) * 2005-08-26 2010-07-28 Zetetic Inst Vorrichtung und verfahren zur messung und kompensierung von atmosphärischen turbulenzenauswirkungen bei der wellenfrontinterferometrie
US20070121115A1 (en) * 2005-11-15 2007-05-31 Zetetic Institute Apparatus and method for reducing effects of coherent artifacts and compensation of effects of vibrations and environmental changes in interferometry
US7799491B2 (en) * 2006-04-07 2010-09-21 Aptina Imaging Corp. Color filter array and imaging device containing such color filter array and method of fabrication
US20080204580A1 (en) * 2007-02-28 2008-08-28 Micron Technology, Inc. Method, apparatus and system providing imaging device with color filter array
GB2451442B (en) * 2007-07-30 2013-03-06 Lein Applied Diagnostics Ltd Optical measurement apparatus and method therefor
EP2110076A1 (de) * 2008-02-19 2009-10-21 Helmholtz Zentrum München Deutsches Forschungszentrum für Gesundheit und Umwelt (GmbH) Verfahren und Vorrichtung zur Nahfeld-Doppelwellen-Modalitätsbildgebung
CA2731409C (en) 2008-07-25 2016-01-05 Daniel Razansky Quantitative multi-spectral opto-acoustic tomography (msot) of tissue biomarkers
DE102009025562A1 (de) * 2008-10-20 2010-04-29 Siemens Aktiengesellschaft Verfahren zum optischen Untersuchen von Schichten
EP2389606B1 (de) * 2009-01-24 2019-08-28 Ecole Polytechnique Federale De Lausanne (EPFL) EPFL-TTO Hochauflösende mikroskopie- und photolithographievorrichtungen mit fokussierenden mikrospiegeln
WO2010096593A2 (en) * 2009-02-18 2010-08-26 Northwestern University Beam pen lithography
WO2010126790A1 (en) * 2009-04-27 2010-11-04 The Arizona Board Of Regents On Behalf Of The University Of Arizona A novel multi-point scan architecture
JP5566456B2 (ja) 2009-06-29 2014-08-06 ヘルムホルツ・ツェントルム・ミュンヒェン・ドイチェス・フォルシュンクスツェントルム・フューア・ゲズントハイト・ウント・ウムベルト（ゲーエムベーハー） 被写体を熱音響撮像するための撮像装置及び撮像方法、コンピュータプログラム並びにコンピュータで読み取り可能な記憶媒体を備える装置
US20110010678A1 (en) * 2009-07-09 2011-01-13 Greyson Gilson Method and Apparatus for Reference Distribution Aerial Image Formation Using Non-Laser Radiation
US10292593B2 (en) 2009-07-27 2019-05-21 Helmholtz Zentrum München Deutsches Forschungszentrum Für Gesundheit Und Umwelt (Gmbh) Imaging device and method for optoacoustic imaging of small animals
US9304308B2 (en) 2009-12-09 2016-04-05 Advanced Micro Devices, Inc. Laser scanning module including an optical isolator
EP2339581A1 (de) * 2009-12-21 2011-06-29 Thomson Licensing Verfahren und Vorrichtung zum Lesen aus einem optischen Nahfeldaufzeichnungsmedium und Nahfeldlinse für die Vorrichtung
TWI404894B (zh) * 2009-12-22 2013-08-11 Ind Tech Res Inst 照明系統
TWI407078B (zh) * 2010-06-08 2013-09-01 Chung Shan Inst Of Science Micro - lens array surface profile detection system and its detection method
NL2007177A (en) 2010-09-13 2012-03-14 Asml Netherlands Bv Alignment measurement system, lithographic apparatus, and a method to determine alignment of in a lithographic apparatus.
DE102011013613A1 (de) * 2010-10-01 2012-04-05 Carl Zeiss Microimaging Gmbh Mikroskop und Mikroskopierverfahren
US8982355B2 (en) * 2010-12-09 2015-03-17 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Smart optical material characterization system and method
CN102175143B (zh) * 2011-02-21 2012-11-28 哈尔滨工业大学 基于柱透镜光路的线扫描差动共焦测量装置
US20120314200A1 (en) * 2011-06-09 2012-12-13 Ophir Eyal Coupled multi-wavelength confocal systems for distance measurements
US9866379B2 (en) * 2011-09-30 2018-01-09 Los Alamos National Security, Llc Polarization tracking system for free-space optical communication, including quantum communication
WO2013124909A1 (ja) * 2012-02-22 2013-08-29 株式会社エス・ティ・ジャパン Ａｔｒ測定用の対物光学系およびａｔｒ測定装置
CA2882288C (en) 2012-08-17 2020-10-27 Los Alamos National Security, Llc Quantum communications system with integrated photonic devices
EP2888620A1 (de) * 2012-08-24 2015-07-01 Advanced Micro Devices, Inc. Laserabtastungsmodul mit einem optischer isolator
WO2014070444A1 (en) 2012-10-29 2014-05-08 Northwestern University Heat actuated and projected lithography systems and methods
EP2742854B1 (de) 2012-12-11 2021-03-10 iThera Medical GmbH Tragbare Vorrichtung und Verfahren für tomographische optoakustische Bildgebung eines Objekts
TWI456161B (zh) * 2012-12-21 2014-10-11 Univ Nan Kai Technology 以光學平衡偵測為基礎之二維表面輪廓量測干涉儀架構
EP2754388B1 (de) 2013-01-15 2020-09-09 Helmholtz Zentrum München Deutsches Forschungszentrum für Gesundheit und Umwelt GmbH System und Verfahren zur optoakustischen Abbildung eines Objekts mit verbesserter Qualität und hoher Rate
WO2014144496A1 (en) * 2013-03-15 2014-09-18 Bruker Nano, Inc. Chemical nano-identification of a sample using normalized near-field spectroscopy
US9696264B2 (en) 2013-04-03 2017-07-04 Kla-Tencor Corporation Apparatus and methods for determining defect depths in vertical stack memory
EP3138098A4 (de) * 2014-04-29 2017-12-13 Akonia Holographics, LLC Verfahren und vorrichtung für kohärente holographische datenkanäle
KR102242559B1 (ko) * 2014-12-01 2021-04-20 삼성전자주식회사 광학 검사 장치
WO2016156516A2 (en) 2015-03-31 2016-10-06 Samantree Medical Sa Systems and methods for in-operating-theatre imaging of fresh tissue resected during surgery for pathology assessment
US10451412B2 (en) 2016-04-22 2019-10-22 Kla-Tencor Corporation Apparatus and methods for detecting overlay errors using scatterometry
CN106842535B (zh) * 2017-01-13 2019-10-29 清华大学 基于光流的相位显微成像系统及其方法
EP3388779A1 (de) * 2017-04-11 2018-10-17 Université de Strasbourg Optisches fernfeld messsystem und -verfahren mit superauflösung im nanometerbereich
US10928621B2 (en) 2017-10-31 2021-02-23 Samantree Medical Sa Sample dishes for use in microscopy and methods of their use
US11747603B2 (en) 2017-10-31 2023-09-05 Samantree Medical Sa Imaging systems with micro optical element arrays and methods of specimen imaging
US10539776B2 (en) 2017-10-31 2020-01-21 Samantree Medical Sa Imaging systems with micro optical element arrays and methods of specimen imaging
US20210025951A1 (en) * 2019-07-24 2021-01-28 Kla Corporation Systems and Methods for MOKE Metrology with Consistent MRAM Die Orientation
CN113624156B (zh) * 2020-05-09 2026-03-06 深圳中科飞测科技股份有限公司 测量系统和方法
CN112484647B (zh) 2020-11-18 2022-06-10 北京华卓精科科技股份有限公司 干涉仪位移测量系统及方法
WO2025056241A1 (en) 2023-09-12 2025-03-20 Asml Netherlands B.V. An optical filter, a heterodyne interferometer system comprising the filter, and a method for filtering an input beam for a heterodyne interferometer
TWI892331B (zh) * 2023-11-28 2025-08-01 中央研究院 掃描裝置及iscat共軛焦顯微鏡系統及其觀察方法

Family Cites Families (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4659429A (en) 1983-08-03 1987-04-21 Cornell Research Foundation, Inc. Method and apparatus for production and use of nanometer scale light beams
US4681451A (en) 1986-02-28 1987-07-21 Polaroid Corporation Optical proximity imaging method and apparatus
JP2723949B2 (ja) 1988-01-27 1998-03-09 株式会社日立製作所 光情報読取り装置
US5105408A (en) 1988-05-12 1992-04-14 Digital Equipment Corporation Optical head with flying lens
DE69022318T2 (de) 1989-07-19 1996-05-15 Matsushita Electric Ind Co Ltd Fliegender optischer Kopf.
US5150338A (en) * 1989-08-10 1992-09-22 Hewlett-Packard Company Optical disk reading and writing system having magnetic write head mounted on an air-bearing slider
JP2626115B2 (ja) 1990-01-10 1997-07-02 松下電器産業株式会社 光学ヘッド
US5004307A (en) 1990-04-12 1991-04-02 The Board Of Trustees Of The Leland Stanford Junior University Near field and solid immersion optical microscope
US5241364A (en) * 1990-10-19 1993-08-31 Fuji Photo Film Co., Ltd. Confocal scanning type of phase contrast microscope and scanning microscope
US5121256A (en) 1991-03-14 1992-06-09 The Board Of Trustees Of The Leland Stanford Junior University Lithography system employing a solid immersion lens
US5125750A (en) 1991-03-14 1992-06-30 The Board Of Trustees Of The Leland Stanford Junior University Optical recording system employing a solid immersion lens
JPH0573980A (ja) 1991-09-12 1993-03-26 Ricoh Co Ltd 光デイスクドライブ装置の光ヘツド
JP2922698B2 (ja) 1991-12-25 1999-07-26 京セラ株式会社 光ヘッド用スライダー
JP3135389B2 (ja) 1992-10-23 2001-02-13 松下電器産業株式会社 情報再生方法、情報記録再生方法、情報再生装置、記録媒体及び光ヘッド
US5349443A (en) 1992-11-25 1994-09-20 Polaroid Corporation Flexible transducers for photon tunneling microscopes and methods for making and using same
US5442443A (en) 1993-04-08 1995-08-15 Polaroid Corporation Stereoscopic photon tunneling microscope
JP3303436B2 (ja) 1993-05-14 2002-07-22 キヤノン株式会社 投影露光装置及び半導体素子の製造方法
WO1995010060A1 (en) 1993-10-04 1995-04-13 International Business Machines Corporation Near-field optical microscope
US5371588A (en) 1993-11-10 1994-12-06 University Of Maryland, College Park Surface profile and material mapper using a driver to displace the sample in X-Y-Z directions
US5497359A (en) 1994-08-30 1996-03-05 National Business Machines Corporation Optical disk data storage system with radiation-transparent air-bearing slider
EP0757271B1 (de) 1995-08-04 2002-12-11 International Business Machines Corporation Interferometrischer Nahfeldapparat und Verfahren
US5602820A (en) 1995-08-24 1997-02-11 International Business Machines Corporation Method and apparatus for mass data storage
US5737084A (en) * 1995-09-29 1998-04-07 Takaoka Electric Mtg. Co., Ltd. Three-dimensional shape measuring apparatus
JPH09210629A (ja) 1996-02-02 1997-08-12 Canon Inc 面位置検出装置及びそれを用いたデバイスの製造方法
US5602643A (en) 1996-02-07 1997-02-11 Wyko Corporation Method and apparatus for correcting surface profiles determined by phase-shifting interferometry according to optical parameters of test surface
US5689480A (en) 1996-08-13 1997-11-18 The Board Of Trustees Of The Leland Stanford Junior University Magneto-optic recording system employing near field optics
US5666197A (en) 1996-08-21 1997-09-09 Polaroid Corporation Apparatus and methods employing phase control and analysis of evanescent illumination for imaging and metrology of subwavelength lateral surface topography
US5760901A (en) 1997-01-28 1998-06-02 Zetetic Institute Method and apparatus for confocal interference microscopy with background amplitude reduction and compensation
US5883872A (en) 1997-05-29 1999-03-16 The Board Of Trustees Of The Leland Stanford Junior University Near field magneto-optical recording system employing slit illumination
US6154326A (en) * 1998-03-19 2000-11-28 Fuji Xerox Co., Ltd. Optical head, disk apparatus, method for manufacturing optical head, and optical element
US6249352B1 (en) * 1999-09-30 2001-06-19 Trw Inc. Lateral shearing interferometer system with masked interference pattern
WO2002010832A2 (en) * 2000-07-27 2002-02-07 Zetetic Institute Scanning interferometric near-field confocal microscopy with background amplitude reduction and compensation
JP2004505312A (ja) * 2000-07-27 2004-02-19 ゼテティック・インスティチュート 近距離場顕微鏡検査におけるサブ波長アパチャ・アレイの位置および方向の制御

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