ATE286154T1 - Verfahren und vorrichtung zur herstellung von hri-filmen - Google Patents

Verfahren und vorrichtung zur herstellung von hri-filmen

Info

Publication number
ATE286154T1
ATE286154T1 AT98923878T AT98923878T ATE286154T1 AT E286154 T1 ATE286154 T1 AT E286154T1 AT 98923878 T AT98923878 T AT 98923878T AT 98923878 T AT98923878 T AT 98923878T AT E286154 T1 ATE286154 T1 AT E286154T1
Authority
AT
Austria
Prior art keywords
vaporizer
vapor
film
lip
flexible wall
Prior art date
Application number
AT98923878T
Other languages
English (en)
Inventor
Gary S Barnard
Joseph R Gervais
Original Assignee
Crown Roll Leaf Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Crown Roll Leaf Inc filed Critical Crown Roll Leaf Inc
Application granted granted Critical
Publication of ATE286154T1 publication Critical patent/ATE286154T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0623—Sulfides, selenides or tellurides
    • C23C14/0629—Sulfides, selenides or tellurides of zinc, cadmium or mercury
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Optical Integrated Circuits (AREA)
  • Surface Treatment Of Glass (AREA)
  • Joining Of Glass To Other Materials (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
AT98923878T 1997-06-04 1998-06-02 Verfahren und vorrichtung zur herstellung von hri-filmen ATE286154T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/869,076 US5951769A (en) 1997-06-04 1997-06-04 Method and apparatus for making high refractive index (HRI) film
PCT/US1998/011139 WO1998055665A1 (en) 1997-06-04 1998-06-02 Method and apparatus for making high refractive index (hri) film

Publications (1)

Publication Number Publication Date
ATE286154T1 true ATE286154T1 (de) 2005-01-15

Family

ID=25352879

Family Applications (1)

Application Number Title Priority Date Filing Date
AT98923878T ATE286154T1 (de) 1997-06-04 1998-06-02 Verfahren und vorrichtung zur herstellung von hri-filmen

Country Status (6)

Country Link
US (2) US5951769A (de)
EP (1) EP1007755B1 (de)
AT (1) ATE286154T1 (de)
AU (1) AU7606498A (de)
DE (1) DE69828411D1 (de)
WO (1) WO1998055665A1 (de)

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JP2005029895A (ja) * 2003-07-04 2005-02-03 Agfa Gevaert Nv 蒸着装置
US7951421B2 (en) * 2006-04-20 2011-05-31 Global Oled Technology Llc Vapor deposition of a layer
US20120052189A1 (en) * 2010-08-30 2012-03-01 Litian Liu Vapor deposition system
JP5709588B2 (ja) * 2011-03-03 2015-04-30 ホーヤ レンズ マニュファクチャリング フィリピン インク 蒸着装置
US20130037251A1 (en) * 2011-08-11 2013-02-14 General Electric Company Liquid cooled thermal control system and method for cooling an imaging detector
CN102978572A (zh) * 2011-09-07 2013-03-20 无锡尚德太阳能电力有限公司 制备CdTe薄膜的方法及热蒸发设备
KR102054477B1 (ko) * 2013-04-05 2019-12-11 삼성디스플레이 주식회사 박막 증착 장치
US10184168B2 (en) 2015-01-20 2019-01-22 Kennametal Inc. IMC evaporator boat-thermal insulation cartridge assembly
US20160208373A1 (en) * 2015-01-20 2016-07-21 Kennametal Inc. Imc evaporator boat assembly
KR102093687B1 (ko) * 2015-04-24 2020-03-26 오츠카 일렉트로닉스 가부시키가이샤 광학 측정 장치 및 광학 측정 방법
DE102019110950A1 (de) 2019-04-29 2020-10-29 Kennametal Inc. Hartmetallzusammensetzungen und deren Anwendungen
WO2023059824A1 (en) * 2021-10-08 2023-04-13 Entegris, Inc. Compressible tray for solid chemical vaporizing chamber

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Also Published As

Publication number Publication date
WO1998055665A1 (en) 1998-12-10
US5951769A (en) 1999-09-14
EP1007755A1 (de) 2000-06-14
EP1007755B1 (de) 2004-12-29
US6194031B1 (en) 2001-02-27
EP1007755A4 (de) 2000-10-04
DE69828411D1 (de) 2005-02-03
AU7606498A (en) 1998-12-21

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Legal Events

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