ATE286266T1 - Herstellungsverfahren für integrierten schaltkreis mit prozessor und gegenüberliegend angeordnetem räumlichen lichtmodulator - Google Patents

Herstellungsverfahren für integrierten schaltkreis mit prozessor und gegenüberliegend angeordnetem räumlichen lichtmodulator

Info

Publication number
ATE286266T1
ATE286266T1 AT00970564T AT00970564T ATE286266T1 AT E286266 T1 ATE286266 T1 AT E286266T1 AT 00970564 T AT00970564 T AT 00970564T AT 00970564 T AT00970564 T AT 00970564T AT E286266 T1 ATE286266 T1 AT E286266T1
Authority
AT
Austria
Prior art keywords
light modulator
spatial light
integrated circuit
processor
production method
Prior art date
Application number
AT00970564T
Other languages
English (en)
Inventor
Ronald D Smith
Kannan Raj
Original Assignee
Intel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intel Corp filed Critical Intel Corp
Application granted granted Critical
Publication of ATE286266T1 publication Critical patent/ATE286266T1/de

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1345—Conductors connecting electrodes to cell terminals
    • G02F1/13452—Conductors connecting driver circuitry and terminals of panels
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1345—Conductors connecting electrodes to cell terminals
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1345—Conductors connecting electrodes to cell terminals
    • G02F1/13454—Drivers integrated on the active matrix substrate
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136213—Storage capacitors associated with the pixel electrode
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136277—Active matrix addressed cells formed on a semiconductor substrate, e.g. of silicon
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/42—Arrangements for providing conduction through an insulating substrate

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Optics & Photonics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Mathematical Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Liquid Crystal (AREA)
  • Optical Integrated Circuits (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Facsimile Scanning Arrangements (AREA)
AT00970564T 1999-10-29 2000-10-04 Herstellungsverfahren für integrierten schaltkreis mit prozessor und gegenüberliegend angeordnetem räumlichen lichtmodulator ATE286266T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/430,284 US6348991B1 (en) 1999-10-29 1999-10-29 Integrated circuit with opposed spatial light modulator and processor
PCT/US2000/027336 WO2001033293A1 (en) 1999-10-29 2000-10-04 Integrated circuit with opposed spatial light modulator and processor

Publications (1)

Publication Number Publication Date
ATE286266T1 true ATE286266T1 (de) 2005-01-15

Family

ID=23706873

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00970564T ATE286266T1 (de) 1999-10-29 2000-10-04 Herstellungsverfahren für integrierten schaltkreis mit prozessor und gegenüberliegend angeordnetem räumlichen lichtmodulator

Country Status (10)

Country Link
US (2) US6348991B1 (de)
EP (2) EP1224504B1 (de)
JP (1) JP3611819B2 (de)
KR (1) KR100492378B1 (de)
AT (1) ATE286266T1 (de)
AU (1) AU7992500A (de)
DE (1) DE60017172T2 (de)
HK (1) HK1046038B (de)
TW (1) TW478020B (de)
WO (1) WO2001033293A1 (de)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6639714B2 (en) * 1999-10-29 2003-10-28 Intel Corporation Integrated circuit with opposed spatial light modulator and processor
US6795605B1 (en) * 2000-08-01 2004-09-21 Cheetah Omni, Llc Micromechanical optical switch
US7145704B1 (en) * 2003-11-25 2006-12-05 Cheetah Omni, Llc Optical logic gate based optical router
US7003188B2 (en) * 2001-04-17 2006-02-21 Ying Wen Hsu Low loss optical switching system
US6819824B1 (en) * 2001-05-21 2004-11-16 Calient Networks Optical switch package
US6814445B2 (en) * 2001-06-30 2004-11-09 Texas Instruments Incorporated DMD heat sink socket assembly
US6721077B2 (en) * 2001-09-11 2004-04-13 Intel Corporation Light emitting device addressed spatial light modulator
US20030122206A1 (en) * 2001-11-09 2003-07-03 Amal Bhattarai Multi-chip module integrating MEMS mirror array with electronics
US7110671B1 (en) * 2001-12-03 2006-09-19 Cheetah Omni, Llc Method and apparatus for scheduling communication using a star switching fabric
US20030107794A1 (en) * 2001-12-11 2003-06-12 Siekkinen James W. Micro mirror array
US7065113B2 (en) * 2002-04-30 2006-06-20 Mohammed Ershad Ali Method and apparatus for interconnecting a laser array and an integrated circuit of a laser-based transmitter
US7064212B2 (en) * 2002-06-20 2006-06-20 The Regents Of The University Of California Electrochromic salts, solutions, and devices
US20040125093A1 (en) * 2002-12-30 2004-07-01 Serge Rutman Micro-controller with integrated light modulator
US20040125283A1 (en) * 2002-12-30 2004-07-01 Samson Huang LCOS imaging device
US6897148B2 (en) 2003-04-09 2005-05-24 Tru-Si Technologies, Inc. Electroplating and electroless plating of conductive materials into openings, and structures obtained thereby
CA2526467C (en) 2003-05-20 2015-03-03 Kagutech Ltd. Digital backplane recursive feedback control
US7154587B2 (en) * 2003-06-30 2006-12-26 Asml Netherlands B.V Spatial light modulator, lithographic apparatus and device manufacturing method
US20050046016A1 (en) * 2003-09-03 2005-03-03 Ken Gilleo Electronic package with insert conductor array
US20050162727A1 (en) * 2004-01-24 2005-07-28 Fusao Ishii Micromirrors with support walls
JP4902953B2 (ja) * 2004-09-30 2012-03-21 ラピスセミコンダクタ株式会社 半導体装置の製造方法
TWI385435B (zh) * 2008-05-08 2013-02-11 Universal Scient Ind Shanghai 單晶矽液晶元件及其與線路板的組裝結構
US10025033B2 (en) 2016-03-01 2018-07-17 Advanced Semiconductor Engineering, Inc. Optical fiber structure, optical communication apparatus and manufacturing process for manufacturing the same
US10241264B2 (en) 2016-07-01 2019-03-26 Advanced Semiconductor Engineering, Inc. Semiconductor device packages

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2715446A1 (de) 1977-04-06 1978-10-12 Siemens Ag Anzeigevorrichtung
US6348907B1 (en) * 1989-08-22 2002-02-19 Lawson A. Wood Display apparatus with digital micromirror device
US5537234A (en) * 1993-01-19 1996-07-16 Hughes Aircraft Company Relective liquid crystal display including driver devices integrally formed in monocrystalline semiconductor layer and method of fabricating the display
US5510915A (en) 1994-08-02 1996-04-23 Ge; Shichao Out-Active-Matrix-LCD
JP2643098B2 (ja) 1994-12-07 1997-08-20 インターナショナル・ビジネス・マシーンズ・コーポレイション 液晶表示装置及びその製造方法並びに画像形成方法
US6153927A (en) * 1999-09-30 2000-11-28 Intel Corporation Packaged integrated processor and spatial light modulator
US6738104B2 (en) * 2000-02-25 2004-05-18 Texas Instruments Incorporated Robust color wheel phase error method for improved channel change re-lock performance

Also Published As

Publication number Publication date
DE60017172D1 (de) 2005-02-03
EP1515183A1 (de) 2005-03-16
US6388798B2 (en) 2002-05-14
HK1046038A1 (en) 2002-12-20
EP1224504B1 (de) 2004-12-29
US6348991B1 (en) 2002-02-19
JP3611819B2 (ja) 2005-01-19
TW478020B (en) 2002-03-01
US20020012158A1 (en) 2002-01-31
AU7992500A (en) 2001-05-14
JP2003513337A (ja) 2003-04-08
EP1224504A1 (de) 2002-07-24
HK1046038B (en) 2005-05-13
KR100492378B1 (ko) 2005-05-30
KR20020065496A (ko) 2002-08-13
WO2001033293A1 (en) 2001-05-10
DE60017172T2 (de) 2005-05-25

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