ATE288876T1 - Verfahren zur reinigung von stickstofftrifluorid durch kontinuierliche tieftemperaturdestillation - Google Patents

Verfahren zur reinigung von stickstofftrifluorid durch kontinuierliche tieftemperaturdestillation

Info

Publication number
ATE288876T1
ATE288876T1 AT01110115T AT01110115T ATE288876T1 AT E288876 T1 ATE288876 T1 AT E288876T1 AT 01110115 T AT01110115 T AT 01110115T AT 01110115 T AT01110115 T AT 01110115T AT E288876 T1 ATE288876 T1 AT E288876T1
Authority
AT
Austria
Prior art keywords
distillation column
low temperature
nitrogen trifluoride
continuous low
temperature distillation
Prior art date
Application number
AT01110115T
Other languages
English (en)
Inventor
Zbigniew Tadeusz Fidkowski
John Frederick Cirucci
Rakesh Agrawal
Shyam Ramchand Suchedo
Steven Ray Auvil
Original Assignee
Air Prod & Chem
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Prod & Chem filed Critical Air Prod & Chem
Application granted granted Critical
Publication of ATE288876T1 publication Critical patent/ATE288876T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/08—Separating gaseous impurities from gases or gaseous mixtures or from liquefied gases or liquefied gaseous mixtures
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/082—Compounds containing nitrogen and non-metals and optionally metals
    • C01B21/083—Compounds containing nitrogen and non-metals and optionally metals containing one or more halogen atoms
    • C01B21/0832—Binary compounds of nitrogen with halogens
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D3/00—Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping
    • B01D3/14—Fractional distillation or use of a fractionation or rectification column
    • B01D3/143—Fractional distillation or use of a fractionation or rectification column by two or more of a fractionation, separation or rectification step
    • B01D3/146—Multiple effect distillation
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/082—Compounds containing nitrogen and non-metals and optionally metals
    • C01B21/083—Compounds containing nitrogen and non-metals and optionally metals containing one or more halogen atoms
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S62/00—Refrigeration
    • Y10S62/918—Halocarbon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Separation By Low-Temperature Treatments (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
AT01110115T 2000-05-08 2001-05-03 Verfahren zur reinigung von stickstofftrifluorid durch kontinuierliche tieftemperaturdestillation ATE288876T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/566,075 US6276168B1 (en) 2000-05-08 2000-05-08 Purification of nitrogen trifluoride by continuous cryogenic distillation

Publications (1)

Publication Number Publication Date
ATE288876T1 true ATE288876T1 (de) 2005-02-15

Family

ID=24261365

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01110115T ATE288876T1 (de) 2000-05-08 2001-05-03 Verfahren zur reinigung von stickstofftrifluorid durch kontinuierliche tieftemperaturdestillation

Country Status (9)

Country Link
US (1) US6276168B1 (de)
EP (1) EP1153884B1 (de)
JP (1) JP3653006B2 (de)
KR (1) KR100398494B1 (de)
AT (1) ATE288876T1 (de)
CA (1) CA2345873C (de)
DE (1) DE60108801T2 (de)
ES (1) ES2237508T3 (de)
ZA (1) ZA200103625B (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050016829A1 (en) * 2003-04-14 2005-01-27 Miller Ralph Newton Distillation process for reducing the concentration of dinitrogen difluoride and dinitrogen tetrafluoride in nitrogen trifluoride
RU2289543C2 (ru) * 2004-02-02 2006-12-20 Общество с ограниченной ответственностью "НьюКем" Способ выделения трифторида азота и установка для его осуществления
RU2272973C1 (ru) * 2004-09-24 2006-03-27 Салават Зайнетдинович Имаев Способ низкотемпературной сепарации газа (варианты)
RU2304080C1 (ru) * 2006-03-16 2007-08-10 Общество с ограниченной ответственностью "Новые химические продукты" Способ очистки трифторида азота
CN111056540B (zh) * 2019-12-25 2023-09-15 中船(邯郸)派瑞特种气体股份有限公司 一种电解nf3连续预纯化装置及连续预纯化方法
RU2744357C1 (ru) * 2020-07-14 2021-03-05 Федеральное государственное бюджетное учреждение науки «Федеральный исследовательский центр «Институт катализа им. Г.К. Борескова Сибирского отделения Российской академии наук» (Институт катализа СО РАН, ИК СО РАН) Способ очистки трифторида азота от примеси тетрафторида углерода
CN112569625A (zh) * 2020-12-30 2021-03-30 中船重工（邯郸）派瑞特种气体有限公司 一种用于三氟化氮粗品的精馏提纯装置
CN113800484A (zh) * 2021-09-24 2021-12-17 中船重工（邯郸）派瑞特种气体有限公司 一种放空尾气中三氟化氮气体的回收设备和回收方法
CN115722027B (zh) * 2022-11-14 2026-01-27 上海森崚半导体科技有限公司 干刻尾气回收三氟化氮的方法及装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01261208A (ja) 1988-04-11 1989-10-18 Mitsui Toatsu Chem Inc 三弗化窒素ガスの精製方法
JPH0798648B2 (ja) 1990-01-10 1995-10-25 セントラル硝子株式会社 Ｎｆ３ガスの精製方法
US5502969A (en) 1995-02-16 1996-04-02 Praxair Technology, Inc. Cryogenic rectification system for fluorine compound recovery
US5626023A (en) 1995-02-16 1997-05-06 Praxair Technology, Inc. Cryogenic rectification system for fluorine compound recovery using additive liquid
JP3532345B2 (ja) 1996-05-14 2004-05-31 日本エア・リキード株式会社 超高純度三弗化窒素製造方法及びその装置
US5779863A (en) 1997-01-16 1998-07-14 Air Liquide America Corporation Perfluorocompound separation and purification method and system
US6047560A (en) * 1997-03-12 2000-04-11 Showa Denko K.K. Process for separating pentafluoroethane and 1,1,1-trifluoroethane
US5771713A (en) 1997-08-20 1998-06-30 Praxair Technology, Inc. Cryogenic rectification system for recovery of fluorine compounds
US6458249B2 (en) 1997-11-10 2002-10-01 E. I. Du Pont De Nemours And Company Process for purifying perfluorinated products

Also Published As

Publication number Publication date
ZA200103625B (en) 2002-11-04
JP3653006B2 (ja) 2005-05-25
KR20010104647A (ko) 2001-11-26
KR100398494B1 (ko) 2003-09-19
DE60108801D1 (de) 2005-03-17
EP1153884A1 (de) 2001-11-14
CA2345873C (en) 2003-10-28
US6276168B1 (en) 2001-08-21
CA2345873A1 (en) 2001-11-08
DE60108801T2 (de) 2005-08-04
EP1153884B1 (de) 2005-02-09
JP2002012414A (ja) 2002-01-15
ES2237508T3 (es) 2005-08-01

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