ATE293258T1 - Optische vorrichtung mit magnetisch betriebenen mikroverschlüssen oder mikrospiegeln - Google Patents

Optische vorrichtung mit magnetisch betriebenen mikroverschlüssen oder mikrospiegeln

Info

Publication number
ATE293258T1
ATE293258T1 AT00830064T AT00830064T ATE293258T1 AT E293258 T1 ATE293258 T1 AT E293258T1 AT 00830064 T AT00830064 T AT 00830064T AT 00830064 T AT00830064 T AT 00830064T AT E293258 T1 ATE293258 T1 AT E293258T1
Authority
AT
Austria
Prior art keywords
micro
optical device
shutters
magnetically operated
substrate
Prior art date
Application number
AT00830064T
Other languages
English (en)
Inventor
Marco Pizzi
Piero Perlo
Valerian Koniachkine
Vito Lambertini
Original Assignee
Fiat Ricerche
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fiat Ricerche filed Critical Fiat Ricerche
Application granted granted Critical
Publication of ATE293258T1 publication Critical patent/ATE293258T1/de

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/02—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
  • Micromachines (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
AT00830064T 1999-02-02 2000-01-28 Optische vorrichtung mit magnetisch betriebenen mikroverschlüssen oder mikrospiegeln ATE293258T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT1999TO000071A IT1307130B1 (it) 1999-02-02 1999-02-02 Dispositivo ottico a micro-otturatori o micro-specchi ad effettomagnetico.

Publications (1)

Publication Number Publication Date
ATE293258T1 true ATE293258T1 (de) 2005-04-15

Family

ID=11417409

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00830064T ATE293258T1 (de) 1999-02-02 2000-01-28 Optische vorrichtung mit magnetisch betriebenen mikroverschlüssen oder mikrospiegeln

Country Status (4)

Country Link
EP (1) EP1026535B1 (de)
AT (1) ATE293258T1 (de)
DE (1) DE60019353T2 (de)
IT (1) IT1307130B1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITTO20031034A1 (it) * 2003-12-23 2005-06-24 Fiat Ricerche Spettrofotometro con micro-filtri.
DE102008009215A1 (de) 2008-02-13 2009-08-20 Universität Kassel Bauelement zur Darstellung von Symbolen und damit hergestellte optische Anzeigevorrichtung

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5233459A (en) * 1991-03-06 1993-08-03 Massachusetts Institute Of Technology Electric display device
EP0614101A3 (de) * 1993-02-03 1994-10-19 Canon Kk Optischer Ablenker und Verfahren zu seiner Herstellung.

Also Published As

Publication number Publication date
EP1026535A2 (de) 2000-08-09
IT1307130B1 (it) 2001-10-29
EP1026535B1 (de) 2005-04-13
ITTO990071A1 (it) 2000-08-02
DE60019353D1 (de) 2005-05-19
EP1026535A3 (de) 2004-06-23
DE60019353T2 (de) 2005-09-29

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties