ATE296460T1 - Verfahren und vorrichtung zur oberflächenorientierung - Google Patents

Verfahren und vorrichtung zur oberflächenorientierung

Info

Publication number
ATE296460T1
ATE296460T1 AT02725441T AT02725441T ATE296460T1 AT E296460 T1 ATE296460 T1 AT E296460T1 AT 02725441 T AT02725441 T AT 02725441T AT 02725441 T AT02725441 T AT 02725441T AT E296460 T1 ATE296460 T1 AT E296460T1
Authority
AT
Austria
Prior art keywords
radiation beam
magnetic
movable member
current
mirror
Prior art date
Application number
AT02725441T
Other languages
English (en)
Inventor
David C Brown
Felix Stukalin
Michael B Nussbaum
Original Assignee
Gsi Lumonics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/075,930 external-priority patent/US7136547B2/en
Priority claimed from US10/075,940 external-priority patent/US7129601B2/en
Priority claimed from US10/075,946 external-priority patent/US20020181069A1/en
Application filed by Gsi Lumonics Corp filed Critical Gsi Lumonics Corp
Application granted granted Critical
Publication of ATE296460T1 publication Critical patent/ATE296460T1/de

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/3572—Magnetic force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3554—3D constellations, i.e. with switching elements and switched beams located in a volume
    • G02B6/3556—NxM switch, i.e. regular arrays of switches elements of matrix type constellation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3586—Control or adjustment details, e.g. calibrating
    • G02B6/359—Control or adjustment details, e.g. calibrating of the position of the moving element itself during switching, i.e. without monitoring the switched beams
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1822—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors comprising means for aligning the optical axis
    • G02B7/1827—Motorised alignment
    • G02B7/1828—Motorised alignment using magnetic means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Control Of Position Or Direction (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Crystal (AREA)
AT02725441T 2001-03-30 2002-03-29 Verfahren und vorrichtung zur oberflächenorientierung ATE296460T1 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US28023201P 2001-03-30 2001-03-30
US10/075,930 US7136547B2 (en) 2001-03-30 2002-02-13 Method and apparatus for beam deflection
US10/075,940 US7129601B2 (en) 2001-03-30 2002-02-13 Apparatus for controlled movement of an element
US10/075,946 US20020181069A1 (en) 2001-03-30 2002-02-13 Free space optical switch
PCT/US2002/009940 WO2002079854A2 (en) 2001-03-30 2002-03-29 Method and apparatus for orienting a surface

Publications (1)

Publication Number Publication Date
ATE296460T1 true ATE296460T1 (de) 2005-06-15

Family

ID=27491225

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02725441T ATE296460T1 (de) 2001-03-30 2002-03-29 Verfahren und vorrichtung zur oberflächenorientierung

Country Status (7)

Country Link
EP (1) EP1377868B1 (de)
JP (1) JP3976683B2 (de)
AT (1) ATE296460T1 (de)
AU (1) AU2002256003A1 (de)
CA (1) CA2442514A1 (de)
DE (1) DE60204303T2 (de)
WO (1) WO2002079854A2 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2578203C (en) * 2004-06-23 2014-03-11 Quin Media Arts And Sciences Inc. Sculptural imaging with optical tiles
US7663269B2 (en) * 2006-12-13 2010-02-16 A-Tech Corporation High bandwidth linear actuator for steering mirror applications
JP5153719B2 (ja) * 2009-04-28 2013-02-27 三菱電機株式会社 ガルバノスキャナ
JP5236571B2 (ja) * 2009-05-13 2013-07-17 国立大学法人埼玉大学 磁気浮上装置
EP2435875B1 (de) * 2009-05-29 2020-06-10 Intenzity Innovation ApS Optischer einspiegelabtaster
EP3006975A3 (de) * 2014-10-08 2016-05-25 Optotune AG Vorrichtung zum Kippen eines optischen Elements, insbesondere eines Spiegels
US10516773B2 (en) 2016-10-13 2019-12-24 Samsung Electro-Mechanics Co., Ltd. Camera module and portable electronic device including the same
DE102017212384A1 (de) * 2017-07-19 2019-01-24 Myestro Interactive Gmbh Ablenkeinrichtung für einen Laserstrahl
US20210173177A1 (en) * 2019-12-05 2021-06-10 Panasonic Automotive Systems Company Of America, Division Of Panasonic Corporation Of North America Magnetic mirror movement
US11543652B2 (en) * 2020-04-20 2023-01-03 Luminar, Llc Imaging system having coil on mirror actuator

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6154302A (en) * 1997-11-15 2000-11-28 Canon Kabushiki Kaisha Light deflection device and array thereof
JPH11149050A (ja) * 1997-11-15 1999-06-02 Canon Inc 光偏向装置
US6188502B1 (en) * 1998-03-26 2001-02-13 Nec Corporation Laser pointing apparatus and on-fulcrum drive apparatus
DE19961684A1 (de) * 1999-12-21 2001-06-28 Philips Corp Intellectual Pty Aktuator mit einer Kugel und piezo-elektrischen Antrieben

Also Published As

Publication number Publication date
JP3976683B2 (ja) 2007-09-19
WO2002079854A3 (en) 2003-11-06
AU2002256003A1 (en) 2002-10-15
DE60204303T2 (de) 2006-05-18
EP1377868B1 (de) 2005-05-25
EP1377868A2 (de) 2004-01-07
JP2004524575A (ja) 2004-08-12
CA2442514A1 (en) 2002-10-10
DE60204303D1 (de) 2005-06-30
WO2002079854A2 (en) 2002-10-10

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Legal Events

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