ATE296959T1 - Vorrichtung zur steuerung des drucks in einer prozesskammer und betriebsverfahren dafür - Google Patents

Vorrichtung zur steuerung des drucks in einer prozesskammer und betriebsverfahren dafür

Info

Publication number
ATE296959T1
ATE296959T1 AT03760812T AT03760812T ATE296959T1 AT E296959 T1 ATE296959 T1 AT E296959T1 AT 03760812 T AT03760812 T AT 03760812T AT 03760812 T AT03760812 T AT 03760812T AT E296959 T1 ATE296959 T1 AT E296959T1
Authority
AT
Austria
Prior art keywords
pump unit
outlet
process chamber
pressure
controlling
Prior art date
Application number
AT03760812T
Other languages
English (en)
Inventor
Martin Ernst Tollner
Original Assignee
Boc Group Plc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=9938993&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ATE296959(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Boc Group Plc filed Critical Boc Group Plc
Application granted granted Critical
Publication of ATE296959T1 publication Critical patent/ATE296959T1/de

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00—Control of fluid pressure
    • G05D16/20—Control of fluid pressure characterised by the use of electric means
    • G05D16/2006—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means
    • G05D16/2066—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using controlling means acting on the pressure source
    • G05D16/2073—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using controlling means acting on the pressure source with a plurality of pressure sources
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0253—Surge control by throttling
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/30—Use in a chemical vapor deposition [CVD] process or in a similar process
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0324—With control of flow by a condition or characteristic of a fluid
    • Y10T137/0379—By fluid pressure
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0396—Involving pressure control
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/85978—With pump
    • Y10T137/86083—Vacuum pump
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/85978—With pump
    • Y10T137/86131—Plural
    • Y10T137/86139—Serial

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Automation & Control Theory (AREA)
  • Drying Of Semiconductors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Control Of Fluid Pressure (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
AT03760812T 2002-06-20 2003-06-20 Vorrichtung zur steuerung des drucks in einer prozesskammer und betriebsverfahren dafür ATE296959T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0214273.5A GB0214273D0 (en) 2002-06-20 2002-06-20 Apparatus for controlling the pressure in a process chamber and method of operating same
PCT/GB2003/002690 WO2004001230A1 (en) 2002-06-20 2003-06-20 Apparatus for controlling the pressure in a process chamber and method of operating same

Publications (1)

Publication Number Publication Date
ATE296959T1 true ATE296959T1 (de) 2005-06-15

Family

ID=9938993

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03760812T ATE296959T1 (de) 2002-06-20 2003-06-20 Vorrichtung zur steuerung des drucks in einer prozesskammer und betriebsverfahren dafür

Country Status (9)

Country Link
US (1) US7814922B2 (de)
EP (1) EP1407148B1 (de)
JP (1) JP2005530094A (de)
CN (1) CN100385123C (de)
AT (1) ATE296959T1 (de)
AU (1) AU2003250377A1 (de)
DE (1) DE60300765T2 (de)
GB (1) GB0214273D0 (de)
WO (1) WO2004001230A1 (de)

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GB0401396D0 (en) 2004-01-22 2004-02-25 Boc Group Plc Pressure control method
GB0622564D0 (en) * 2006-11-13 2006-12-20 Airbus Uk Ltd Water scavenging system
DE102009017887A1 (de) * 2009-04-17 2010-10-21 Oerlikon Leybold Vacuum Gmbh Grobpumpverfahren für eine Verdrängerpumpe
WO2013032801A1 (en) 2011-09-02 2013-03-07 First Solar, Inc. Feeder system and method for a vapor transport deposition system
US9267605B2 (en) 2011-11-07 2016-02-23 Lam Research Corporation Pressure control valve assembly of plasma processing chamber and rapid alternating process
CH706231B1 (fr) * 2012-03-05 2016-07-29 Ateliers Busch Sa Installation de pompage et procédé de contrôle d'une telle installation.
GB2501735B (en) * 2012-05-02 2015-07-22 Edwards Ltd Method and apparatus for warming up a vacuum pump arrangement
GB2502134B (en) * 2012-05-18 2015-09-09 Edwards Ltd Method and apparatus for adjusting operating parameters of a vacuum pump arrangement
DE202012012359U1 (de) * 2012-12-22 2014-03-24 Oerlikon Leybold Vacuum Gmbh Pumpstand zum Pumpen leichter Gase
DE102013208829A1 (de) * 2013-05-14 2014-11-20 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
DE102013218506A1 (de) * 2013-09-16 2015-03-19 Inficon Gmbh Schnüffellecksucher mit mehrstufiger Membranpumpe
CN105673526B (zh) * 2016-04-07 2018-09-18 上海华力微电子有限公司 一种分子泵及其控制方法
JP6692202B2 (ja) * 2016-04-08 2020-05-13 東京エレクトロン株式会社 基板処理方法及び基板処理装置
US20180058453A1 (en) * 2016-08-30 2018-03-01 Agilent Technologies, Inc. Hermetic vacuum pump isolation valve
US20240367923A1 (en) * 2017-03-24 2024-11-07 Karmøy Winch As A pumping system and method
EP3438460B1 (de) * 2017-08-04 2024-03-20 Pfeiffer Vacuum Gmbh Vakuumpumpe
GB2569314A (en) * 2017-12-12 2019-06-19 Edwards Ltd A turbomolecular pump and method and apparatus for controlling the pressure in a process chamber
GB2575450B (en) 2018-07-09 2022-01-26 Edwards Ltd A variable inlet conductance vacuum pump, vacuum pump arrangement and method
GB2577876B (en) * 2018-10-05 2022-02-16 Edwards Ltd Portable vacuum pump assembly and mass spectrometer
CN113056610B (zh) * 2018-11-15 2023-03-31 福斯管理公司 用于抽空超大体积的设备和方法
CN109519407A (zh) * 2018-12-06 2019-03-26 北京东方计量测试研究所 一种宽量程高精度分子泵压缩比测试装置及方法
GB2588906A (en) 2019-11-13 2021-05-19 Edwards Ltd Gas purged valve
CN115135555B (zh) 2020-02-13 2024-06-25 芙罗服务私人有限公司 用于互连和隔离非常大的真空体积的设备和方法
US11492020B2 (en) 2020-05-05 2022-11-08 Flowserve Management Company Method of intelligently managing pressure within an evacuated transportation system
US12292026B2 (en) 2022-07-13 2025-05-06 Flowserve Pte. Ltd. Variable speed reconfigurable pump/turbine clusters

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Also Published As

Publication number Publication date
US7814922B2 (en) 2010-10-19
CN1662746A (zh) 2005-08-31
GB0214273D0 (en) 2002-07-31
US20050217732A1 (en) 2005-10-06
DE60300765T2 (de) 2006-03-23
EP1407148A1 (de) 2004-04-14
EP1407148B1 (de) 2005-06-01
AU2003250377A1 (en) 2004-01-06
JP2005530094A (ja) 2005-10-06
CN100385123C (zh) 2008-04-30
DE60300765D1 (de) 2005-07-07
WO2004001230A1 (en) 2003-12-31

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