ATE302997T1 - Verfahren zur unterbrechung von metalldrähten - Google Patents
Verfahren zur unterbrechung von metalldrähtenInfo
- Publication number
- ATE302997T1 ATE302997T1 AT99913015T AT99913015T ATE302997T1 AT E302997 T1 ATE302997 T1 AT E302997T1 AT 99913015 T AT99913015 T AT 99913015T AT 99913015 T AT99913015 T AT 99913015T AT E302997 T1 ATE302997 T1 AT E302997T1
- Authority
- AT
- Austria
- Prior art keywords
- metal
- hole
- ablated
- metal wires
- pulsed
- Prior art date
Links
- 239000002184 metal Substances 0.000 title abstract 7
- 239000010408 film Substances 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 239000011521 glass Substances 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 230000008719 thickening Effects 0.000 abstract 1
- 239000010409 thin film Substances 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/362—Laser etching
- B23K26/364—Laser etching for making a groove or trench, e.g. for scribing a break initiation groove
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
- B23K26/389—Removing material by boring or cutting by boring of fluid openings, e.g. nozzles, jets
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
- Separation By Low-Temperature Treatments (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Photovoltaic Devices (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| AUPP2903A AUPP290398A0 (en) | 1998-04-09 | 1998-04-09 | Aluminium film interrupting process |
| PCT/AU1999/000268 WO1999053554A1 (en) | 1998-04-09 | 1999-04-09 | Metal film interrupting process |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE302997T1 true ATE302997T1 (de) | 2005-09-15 |
Family
ID=3807162
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT99913015T ATE302997T1 (de) | 1998-04-09 | 1999-04-09 | Verfahren zur unterbrechung von metalldrähten |
Country Status (6)
| Country | Link |
|---|---|
| EP (1) | EP1090430B1 (de) |
| AT (1) | ATE302997T1 (de) |
| AU (1) | AUPP290398A0 (de) |
| DE (1) | DE69926891T2 (de) |
| ES (1) | ES2244184T3 (de) |
| WO (1) | WO1999053554A1 (de) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AUPQ385899A0 (en) | 1999-11-04 | 1999-11-25 | Pacific Solar Pty Limited | Formation of contacts on thin films |
| ES2522582T3 (es) * | 2007-08-31 | 2014-11-17 | Aperam Alloys Imphy | Sustrato metálico texturizado cristalográficamente, dispositivo texturizado cristalográficamente, célula y módulo fotovoltaico que comprenden un dispositivo de este tipo, y procedimiento de depósito de capas finas |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4783421A (en) * | 1985-04-15 | 1988-11-08 | Solarex Corporation | Method for manufacturing electrical contacts for a thin-film semiconductor device |
| DE3514824A1 (de) * | 1985-04-24 | 1986-11-06 | Siemens Ag | Verfahren zur bildung von schmalen, metallfreien streifen in der metallschicht von kunststoffolien |
| DE3705500A1 (de) * | 1987-02-20 | 1988-09-01 | Siemens Ag | Verfahren zur strukturierung von solarzellen mit hilfe eines lasers im pulsbetrieb |
| NL8801553A (nl) * | 1988-06-17 | 1990-01-16 | Tno | Werkwijze voor het, onder toepassing van een laserbundel, micro-bewerken van het oppervlak van een werkstuk. |
| JP3150322B2 (ja) * | 1990-05-18 | 2001-03-26 | 株式会社日立製作所 | レーザによる配線切断加工方法及びレーザ加工装置 |
| AUPN736195A0 (en) * | 1995-12-29 | 1996-01-25 | Pacific Solar Pty Limited | Improved laser grooving method |
-
1998
- 1998-04-09 AU AUPP2903A patent/AUPP290398A0/en not_active Abandoned
-
1999
- 1999-04-09 DE DE69926891T patent/DE69926891T2/de not_active Expired - Lifetime
- 1999-04-09 WO PCT/AU1999/000268 patent/WO1999053554A1/en not_active Ceased
- 1999-04-09 EP EP99913015A patent/EP1090430B1/de not_active Expired - Lifetime
- 1999-04-09 AT AT99913015T patent/ATE302997T1/de not_active IP Right Cessation
- 1999-04-09 ES ES99913015T patent/ES2244184T3/es not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| ES2244184T3 (es) | 2005-12-01 |
| DE69926891D1 (de) | 2005-09-29 |
| EP1090430A1 (de) | 2001-04-11 |
| EP1090430A4 (de) | 2004-05-26 |
| WO1999053554A1 (en) | 1999-10-21 |
| AUPP290398A0 (en) | 1998-05-07 |
| EP1090430B1 (de) | 2005-08-24 |
| DE69926891T2 (de) | 2006-06-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR840002159A (ko) | 단결정막의 제조 방법 | |
| BR9405973A (pt) | Remoção de contaminantes superficiais por irradiação | |
| DK0679052T3 (da) | Fremgangsmåde til struktureret metallisering af substratoverflader | |
| TW335503B (en) | Semiconductor thin film and manufacturing method and semiconductor device and its manufacturing method | |
| DE3868259D1 (de) | Orthodontisches hilfsteil mit einer markierung und verfahren zur herstellung desselben. | |
| GB2396962B (en) | Mask for sequential lateral solidification and and crystallization method using thereof | |
| EP0398374A3 (de) | Verfahren und Apparatur zur Herstellung eines oxydsupraleitenden Drahtes | |
| KR970060380A (ko) | 금속 박막과 이의 제조 방법. 및 금속 박막을 사용하는 탄성 표면파 장치와 이의 형성 방법 | |
| ES2159541T3 (es) | Metodo de fabricacion de peliculas ultra-gruesas para controlar las propiedades termicas y de conduccion de corriente en circuitos hibridos. | |
| WO1999039371A3 (fr) | PROCEDE DE REALISATION D'UNE STRUCTURE DE TYPE SEMI-CONDUCTEUR SUR ISOLANT ET EN PARTICULIER SiCOI | |
| DE69404297D1 (de) | Vorrichtung zur abgabe von laserstrahlung an substrate | |
| KR950007032A (ko) | 반도체장치의 절연층 형성방법 및 그 형성장치 | |
| MY128008A (en) | Substrate fabrication method and device | |
| DK1641572T3 (da) | Laserfjernelse af lag eller belægning fra et substrat | |
| DK1218248T3 (da) | Laser-ætset trækflig til beholderåbningsindretning og fremgangsmåde til fremstilling deraf | |
| ES2141466T3 (es) | Tratamiento de superficie. | |
| RU99127463A (ru) | Маркирование алмаза | |
| ATE302997T1 (de) | Verfahren zur unterbrechung von metalldrähten | |
| MXPA03007648A (es) | Formacion de patron metalico. | |
| TW358986B (en) | Metal layer patterns of a semiconductor device and a method for forming the same | |
| EP1947685A3 (de) | Halbleiterbauelement mit dielektrischer Folie auf Fluorkohlenstoffbasis und Herstellungsverfahren dafür | |
| AU7267800A (en) | Method for producing a conductor pattern on a dielectric substrate | |
| ATE203214T1 (de) | Ein metallischer gegenstand mit visuell kontrastierenden oberflächenbereichen | |
| JPS5815226A (ja) | レ−ザアニ−リング法 | |
| JPS574139A (en) | Semiconductor device and manufacturing process therefor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |