ATE304736T1 - Mikro-elektromechanisches system und verfahren zu dessen herstellung - Google Patents

Mikro-elektromechanisches system und verfahren zu dessen herstellung

Info

Publication number
ATE304736T1
ATE304736T1 AT02796487T AT02796487T ATE304736T1 AT E304736 T1 ATE304736 T1 AT E304736T1 AT 02796487 T AT02796487 T AT 02796487T AT 02796487 T AT02796487 T AT 02796487T AT E304736 T1 ATE304736 T1 AT E304736T1
Authority
AT
Austria
Prior art keywords
micro
electromechanical system
production
elements
bistable
Prior art date
Application number
AT02796487T
Other languages
English (en)
Inventor
Ralf Struempler
Original Assignee
Abb Research Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/US2002/001662 external-priority patent/WO2002058089A1/en
Application filed by Abb Research Ltd filed Critical Abb Research Ltd
Application granted granted Critical
Publication of ATE304736T1 publication Critical patent/ATE304736T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/12—Contacts characterised by the manner in which co-operating contacts engage
    • H01H1/14—Contacts characterised by the manner in which co-operating contacts engage by abutting
    • H01H1/20—Bridging contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/50—Means for increasing contact pressure, preventing vibration of contacts, holding contacts together after engagement, or biasing contacts to the open position
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0042—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0078—Switches making use of microelectromechanical systems [MEMS] with parallel movement of the movable contact relative to the substrate

Landscapes

  • Micromachines (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
AT02796487T 2002-01-18 2002-12-23 Mikro-elektromechanisches system und verfahren zu dessen herstellung ATE304736T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
PCT/US2002/001662 WO2002058089A1 (en) 2001-01-19 2002-01-18 Bistable actuation techniques, mechanisms, and applications
EP02405334A EP1357571A1 (de) 2002-04-24 2002-04-24 Mikro-elektromechanisches System und Verfahren zu dessen Herstellung
PCT/CH2002/000722 WO2003060940A1 (de) 2002-01-18 2002-12-23 Mikro-elektromechanisches system und verfahren zu dessen herstellung

Publications (1)

Publication Number Publication Date
ATE304736T1 true ATE304736T1 (de) 2005-09-15

Family

ID=28686037

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02796487T ATE304736T1 (de) 2002-01-18 2002-12-23 Mikro-elektromechanisches system und verfahren zu dessen herstellung

Country Status (4)

Country Link
EP (2) EP1357571A1 (de)
AT (1) ATE304736T1 (de)
AU (1) AU2002361920A1 (de)
WO (1) WO2003060940A1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999052006A2 (en) 1998-04-08 1999-10-14 Etalon, Inc. Interferometric modulation of radiation
US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
US7446927B2 (en) 2004-09-27 2008-11-04 Idc, Llc MEMS switch with set and latch electrodes
EP1809568A2 (de) * 2004-09-27 2007-07-25 Idc, Llc Mems-schalter mit verformbarer membran
US7532195B2 (en) 2004-09-27 2009-05-12 Idc, Llc Method and system for reducing power consumption in a display
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
EP1850360A1 (de) 2006-04-26 2007-10-31 Seiko Epson Corporation Mikroschalter mit einem ersten betätigbaren Teil und mit einem zweiten Kontaktteil
US7724417B2 (en) 2006-12-19 2010-05-25 Qualcomm Mems Technologies, Inc. MEMS switches with deforming membranes
US8022896B2 (en) 2007-08-08 2011-09-20 Qualcomm Mems Technologies, Inc. ESD protection for MEMS display panels
EP4632782A1 (de) * 2024-04-11 2025-10-15 Siemens Aktiengesellschaft Vorrichtung und verfahren zur detektion von spannungsereignissen in einem elektrischen bauteil

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9309327D0 (en) * 1993-05-06 1993-06-23 Smith Charles G Bi-stable memory element
WO1997029538A1 (en) * 1996-02-10 1997-08-14 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Bistable microactuator with coupled membranes

Also Published As

Publication number Publication date
EP1357571A1 (de) 2003-10-29
EP1468436A1 (de) 2004-10-20
WO2003060940A1 (de) 2003-07-24
AU2002361920A1 (en) 2003-07-30
EP1468436B1 (de) 2005-09-14

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Legal Events

Date Code Title Description
REN Ceased due to non-payment of the annual fee