ATE304737T1 - Probenhalter fuer ein elektronenmikroskop und vorrichtung und verfahren zum montieren einer probe in einem elektronenmikroskop - Google Patents

Probenhalter fuer ein elektronenmikroskop und vorrichtung und verfahren zum montieren einer probe in einem elektronenmikroskop

Info

Publication number
ATE304737T1
ATE304737T1 AT95942797T AT95942797T ATE304737T1 AT E304737 T1 ATE304737 T1 AT E304737T1 AT 95942797 T AT95942797 T AT 95942797T AT 95942797 T AT95942797 T AT 95942797T AT E304737 T1 ATE304737 T1 AT E304737T1
Authority
AT
Austria
Prior art keywords
electron microscope
specimen
sample
mounting
bar
Prior art date
Application number
AT95942797T
Other languages
English (en)
Inventor
Hendrik Willem Zandbergen
Van Voorst Andre Latenstein
Cornelis Westra
Gerardus Hendrikus Hoveling
Original Assignee
Univ Delft Tech
Stichting Scheikundig Onderzoe
Stichting Tech Wetenschapp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from NL9402226A external-priority patent/NL9402226A/nl
Priority claimed from NL9402241A external-priority patent/NL9402241A/nl
Application filed by Univ Delft Tech, Stichting Scheikundig Onderzoe, Stichting Tech Wetenschapp filed Critical Univ Delft Tech
Application granted granted Critical
Publication of ATE304737T1 publication Critical patent/ATE304737T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2001—Maintaining constant desired temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2007—Holding mechanisms
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/201—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated for mounting multiple objects
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/204—Means for introducing and/or outputting objects

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
AT95942797T 1994-12-28 1995-12-28 Probenhalter fuer ein elektronenmikroskop und vorrichtung und verfahren zum montieren einer probe in einem elektronenmikroskop ATE304737T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
NL9402226A NL9402226A (nl) 1994-12-28 1994-12-28 Inrichting en werkwijze voor het opnemen van een monster in een elektronenmicroscoop.
NL9402241A NL9402241A (nl) 1994-12-30 1994-12-30 Monsterhouder voor een elektronenmicroscoop en werkwijze voor het opnemen van een monster in een elektronenmicroscoop.
PCT/NL1995/000444 WO1996020495A2 (en) 1994-12-28 1995-12-28 Specimen holder for an electron microscope and device and method for mounting a specimen in an electron microscope

Publications (1)

Publication Number Publication Date
ATE304737T1 true ATE304737T1 (de) 2005-09-15

Family

ID=26647288

Family Applications (1)

Application Number Title Priority Date Filing Date
AT95942797T ATE304737T1 (de) 1994-12-28 1995-12-28 Probenhalter fuer ein elektronenmikroskop und vorrichtung und verfahren zum montieren einer probe in einem elektronenmikroskop

Country Status (5)

Country Link
EP (1) EP0801810B1 (de)
AT (1) ATE304737T1 (de)
AU (1) AU4402596A (de)
DE (1) DE69534447T2 (de)
WO (1) WO1996020495A2 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6891170B1 (en) 2002-06-17 2005-05-10 Zyvex Corporation Modular manipulation system for manipulating a sample under study with a microscope
US6967335B1 (en) 2002-06-17 2005-11-22 Zyvex Corporation Manipulation system for manipulating a sample under study with a microscope
WO2005031789A2 (en) 2003-09-23 2005-04-07 Zyvex Corporation Method, system and device for microscopic examination employing fib-prepared sample grasping element
TW200531420A (en) 2004-02-20 2005-09-16 Zyvex Corp Positioning device for microscopic motion
US7285778B2 (en) 2004-02-23 2007-10-23 Zyvex Corporation Probe current imaging
US7326293B2 (en) 2004-03-26 2008-02-05 Zyvex Labs, Llc Patterned atomic layer epitaxy
NL1027025C2 (nl) * 2004-09-13 2006-03-14 Univ Delft Tech Microreactor voor een transmissie elektronenmicroscoop en verwarmingselement en werkwijze voor vervaardiging daarvan.
EP1863066A1 (de) 2006-05-29 2007-12-05 FEI Company Probenträger und Probenhalter
EP1868225A1 (de) * 2006-05-29 2007-12-19 FEI Company Probenträger und Probenhalter
NL1032224C2 (nl) * 2006-07-21 2008-01-22 Univ Delft Tech Werkwijze voor sample preparatie voor cryo-elektronenmicroscopie (CEM), microreactor en laadperron.
US7884326B2 (en) 2007-01-22 2011-02-08 Fei Company Manipulator for rotating and translating a sample holder
EP2051280A1 (de) 2007-10-18 2009-04-22 The Regents of the University of California Motorisierter Manipulator zur Positionierung einer TEM-Probe
JP5517559B2 (ja) * 2009-10-26 2014-06-11 株式会社日立ハイテクノロジーズ 荷電粒子線装置及び荷電粒子線装置における三次元情報の表示方法
JP5753861B2 (ja) 2010-03-08 2015-07-22 マイクロスコピー イノベーションズ， エルエルシーＭｉｃｒｏｓｃｏｐｙ Ｉｎｎｏｖａｔｉｏｎｓ， Ｌｌｃ 電子顕微鏡グリッドおよび他の材料を担持するためのデバイス
CN114488506B (zh) * 2020-11-12 2025-05-02 邑流微测股份有限公司 显微镜观测载台
JP7646035B2 (ja) * 2021-12-28 2025-03-14 株式会社日立ハイテク 荷電粒子線装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4242586A (en) * 1978-08-08 1980-12-30 Commonwealth Scientific And Industrial Research Organization Specimen holder for electron microscopy and electron diffraction
WO1983003707A1 (en) * 1982-04-20 1983-10-27 Nicholson, Walter, Anthony, Patrick Low temperature stage for microanalysis
FR2578776A1 (fr) * 1985-03-15 1986-09-19 Commissariat Energie Atomique Boite de transfert
US4797261A (en) * 1987-11-03 1989-01-10 Gatan Inc. Multiple specimen cryotransfer holder for electron microscopes
US5225683A (en) * 1990-11-30 1993-07-06 Jeol Ltd. Detachable specimen holder for transmission electron microscope
EP0504972A1 (de) * 1991-03-18 1992-09-23 Koninklijke Philips Electronics N.V. Präparathalter zur Verwendung in einer Ladungsteilchenbündelanordnung
US5326971A (en) * 1993-05-17 1994-07-05 Motorola, Inc. Transmission electron microscope environmental specimen holder

Also Published As

Publication number Publication date
EP0801810A2 (de) 1997-10-22
DE69534447T2 (de) 2006-07-13
EP0801810B1 (de) 2005-09-14
WO1996020495A2 (en) 1996-07-04
WO1996020495A3 (en) 1996-09-06
DE69534447D1 (de) 2005-10-20
AU4402596A (en) 1996-07-19

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