ATE307976T1 - Microbearbeitete fluidische vorrichtung und herstellungsverfahren - Google Patents

Microbearbeitete fluidische vorrichtung und herstellungsverfahren

Info

Publication number
ATE307976T1
ATE307976T1 AT01951621T AT01951621T ATE307976T1 AT E307976 T1 ATE307976 T1 AT E307976T1 AT 01951621 T AT01951621 T AT 01951621T AT 01951621 T AT01951621 T AT 01951621T AT E307976 T1 ATE307976 T1 AT E307976T1
Authority
AT
Austria
Prior art keywords
wafer
silicon layer
cavity
moving member
layer
Prior art date
Application number
AT01951621T
Other languages
English (en)
Inventor
Lintel Harald T Van
Didier Maillefer
Stephan Gamper
Original Assignee
Debiotech Sa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Debiotech Sa filed Critical Debiotech Sa
Application granted granted Critical
Publication of ATE307976T1 publication Critical patent/ATE307976T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M5/00—Devices for bringing media into the body in a subcutaneous, intra-vascular or intramuscular way; Accessories therefor, e.g. filling or cleaning devices, arm-rests
    • A61M5/14—Infusion devices, e.g. infusing by gravity; Blood infusion; Accessories therefor
    • A61M5/142—Pressure infusion, e.g. using pumps
    • A61M5/14244—Pressure infusion, e.g. using pumps adapted to be carried by the patient, e.g. portable on the body

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Measuring Fluid Pressure (AREA)
  • Check Valves (AREA)
  • External Artificial Organs (AREA)
  • Measuring Volume Flow (AREA)
  • Micromachines (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
AT01951621T 2000-05-25 2001-05-25 Microbearbeitete fluidische vorrichtung und herstellungsverfahren ATE307976T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0006669 2000-05-25
PCT/EP2001/007032 WO2001090577A1 (fr) 2000-05-25 2001-05-25 Dispositif fluidique micro-usine et son procede de fabrication

Publications (1)

Publication Number Publication Date
ATE307976T1 true ATE307976T1 (de) 2005-11-15

Family

ID=8850593

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01951621T ATE307976T1 (de) 2000-05-25 2001-05-25 Microbearbeitete fluidische vorrichtung und herstellungsverfahren

Country Status (9)

Country Link
US (2) US7005078B2 (de)
EP (1) EP1283957B1 (de)
JP (1) JP4776139B2 (de)
CN (1) CN1324238C (de)
AT (1) ATE307976T1 (de)
AU (2) AU7250001A (de)
CA (1) CA2410306C (de)
DE (1) DE60114411T2 (de)
WO (1) WO2001090577A1 (de)

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Publication number Publication date
CA2410306A1 (en) 2002-11-22
JP2004505212A (ja) 2004-02-19
DE60114411T2 (de) 2006-07-20
US20040052657A1 (en) 2004-03-18
CN1324238C (zh) 2007-07-04
AU7250001A (en) 2001-12-03
CA2410306C (en) 2009-12-15
DE60114411D1 (de) 2005-12-01
EP1283957B1 (de) 2005-10-26
EP1283957A1 (de) 2003-02-19
CN1430703A (zh) 2003-07-16
US7005078B2 (en) 2006-02-28
JP4776139B2 (ja) 2011-09-21
US20060027523A1 (en) 2006-02-09
AU2001272500B2 (en) 2005-06-23
US7311503B2 (en) 2007-12-25
WO2001090577A1 (fr) 2001-11-29

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