ATE311689T1 - Filtereinrichtung - Google Patents

Filtereinrichtung

Info

Publication number
ATE311689T1
ATE311689T1 AT01917108T AT01917108T ATE311689T1 AT E311689 T1 ATE311689 T1 AT E311689T1 AT 01917108 T AT01917108 T AT 01917108T AT 01917108 T AT01917108 T AT 01917108T AT E311689 T1 ATE311689 T1 AT E311689T1
Authority
AT
Austria
Prior art keywords
filter device
components
integrated
filter
filters
Prior art date
Application number
AT01917108T
Other languages
English (en)
Inventor
Robert Aigner
Pasi Tikka
Juha Ellae
Original Assignee
Infineon Technologies Ag
Nokia Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Infineon Technologies Ag, Nokia Corp filed Critical Infineon Technologies Ag
Application granted granted Critical
Publication of ATE311689T1 publication Critical patent/ATE311689T1/de

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/0023—Networks for transforming balanced signals into unbalanced signals and vice versa, e.g. baluns, or networks having balanced input and output
    • H03H9/0028—Networks for transforming balanced signals into unbalanced signals and vice versa, e.g. baluns, or networks having balanced input and output using surface acoustic wave devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/0023—Networks for transforming balanced signals into unbalanced signals and vice versa, e.g. baluns, or networks having balanced input and output
    • H03H9/0095—Networks for transforming balanced signals into unbalanced signals and vice versa, e.g. baluns, or networks having balanced input and output using bulk acoustic wave devices

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Surgical Instruments (AREA)
  • Centrifugal Separators (AREA)
  • Separation By Low-Temperature Treatments (AREA)
AT01917108T 2001-03-23 2001-03-23 Filtereinrichtung ATE311689T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2001/003328 WO2002082647A1 (en) 2001-03-23 2001-03-23 Filter device

Publications (1)

Publication Number Publication Date
ATE311689T1 true ATE311689T1 (de) 2005-12-15

Family

ID=8164343

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01917108T ATE311689T1 (de) 2001-03-23 2001-03-23 Filtereinrichtung

Country Status (7)

Country Link
US (1) US20030179053A1 (de)
EP (1) EP1371135B1 (de)
JP (1) JP2004519180A (de)
KR (1) KR100489851B1 (de)
AT (1) ATE311689T1 (de)
DE (1) DE60115504T2 (de)
WO (1) WO2002082647A1 (de)

Families Citing this family (70)

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US6542055B1 (en) * 2000-10-31 2003-04-01 Agilent Technologies, Inc. Integrated filter balun
US7194247B2 (en) * 2001-09-26 2007-03-20 Nokia Corporation Dual-channel passband filtering system using acoustic resonators in lattice topology
US6600390B2 (en) * 2001-12-13 2003-07-29 Agilent Technologies, Inc. Differential filters with common mode rejection and broadband rejection
US7276994B2 (en) * 2002-05-23 2007-10-02 Murata Manufacturing Co., Ltd. Piezoelectric thin-film resonator, piezoelectric filter, and electronic component including the piezoelectric filter
EP1588487A2 (de) * 2003-01-20 2005-10-26 Koninklijke Philips Electronics N.V. Struktur eines resonatorfilters mit gleichen resonanzfrequenzen
AU2003285700A1 (en) * 2003-01-20 2004-08-13 Koninklijke Philips Electronics N.V. Resonator filter structure with improved balance
US7275292B2 (en) 2003-03-07 2007-10-02 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Method for fabricating an acoustical resonator on a substrate
DE10317969B4 (de) * 2003-04-17 2005-06-16 Epcos Ag Duplexer mit erweiterter Funktionalität
US6946928B2 (en) 2003-10-30 2005-09-20 Agilent Technologies, Inc. Thin-film acoustically-coupled transformer
EP1528677B1 (de) 2003-10-30 2006-05-10 Agilent Technologies, Inc. Akustisch gekoppelter Dünnschicht-Transformator mit zwei piezoelektrischen Elementen, welche entgegengesetzte C-Axen Orientierung besitzten
US7358831B2 (en) 2003-10-30 2008-04-15 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Film bulk acoustic resonator (FBAR) devices with simplified packaging
US7019605B2 (en) 2003-10-30 2006-03-28 Larson Iii John D Stacked bulk acoustic resonator band-pass filter with controllable pass bandwidth
US7362198B2 (en) 2003-10-30 2008-04-22 Avago Technologies Wireless Ip (Singapore) Pte. Ltd Pass bandwidth control in decoupled stacked bulk acoustic resonator devices
US20070210876A1 (en) * 2004-06-17 2007-09-13 Matsushita Electric Industrial Co., Ltd. Fbar Filter
US7615833B2 (en) 2004-07-13 2009-11-10 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Film bulk acoustic resonator package and method of fabricating same
WO2006018788A1 (en) * 2004-08-20 2006-02-23 Philips Intellectual Property & Standards Gmbh Narrow band bulk acoustic wave filter
US7388454B2 (en) 2004-10-01 2008-06-17 Avago Technologies Wireless Ip Pte Ltd Acoustic resonator performance enhancement using alternating frame structure
DE102004048715B4 (de) * 2004-10-06 2014-05-22 Epcos Ag SAW-Filter mit Impedanz-Transformation
WO2006044866A2 (en) * 2004-10-19 2006-04-27 Earthcraft, Llc Devices for high voltage ignition of combustible gas
US8981876B2 (en) 2004-11-15 2015-03-17 Avago Technologies General Ip (Singapore) Pte. Ltd. Piezoelectric resonator structures and electrical filters having frame elements
US7202560B2 (en) 2004-12-15 2007-04-10 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Wafer bonding of micro-electro mechanical systems to active circuitry
US7791434B2 (en) 2004-12-22 2010-09-07 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic resonator performance enhancement using selective metal etch and having a trench in the piezoelectric
US7427819B2 (en) 2005-03-04 2008-09-23 Avago Wireless Ip Pte Ltd Film-bulk acoustic wave resonator with motion plate and method
US7369013B2 (en) 2005-04-06 2008-05-06 Avago Technologies Wireless Ip Pte Ltd Acoustic resonator performance enhancement using filled recessed region
US7436269B2 (en) 2005-04-18 2008-10-14 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustically coupled resonators and method of making the same
WO2006137275A1 (ja) * 2005-06-20 2006-12-28 Murata Manufacturing Co., Ltd. 圧電薄膜フィルタ
JP2007036829A (ja) * 2005-07-28 2007-02-08 Toshiba Corp 薄膜圧電共振器、フィルタ及び薄膜圧電共振器の製造方法
US7868522B2 (en) 2005-09-09 2011-01-11 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Adjusted frequency temperature coefficient resonator
US7391286B2 (en) 2005-10-06 2008-06-24 Avago Wireless Ip Pte Ltd Impedance matching and parasitic capacitor resonance of FBAR resonators and coupled filters
US7675390B2 (en) 2005-10-18 2010-03-09 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic galvanic isolator incorporating single decoupled stacked bulk acoustic resonator
US7423503B2 (en) 2005-10-18 2008-09-09 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic galvanic isolator incorporating film acoustically-coupled transformer
US7425787B2 (en) 2005-10-18 2008-09-16 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic galvanic isolator incorporating single insulated decoupled stacked bulk acoustic resonator with acoustically-resonant electrical insulator
US7525398B2 (en) 2005-10-18 2009-04-28 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustically communicating data signals across an electrical isolation barrier
US7737807B2 (en) 2005-10-18 2010-06-15 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic galvanic isolator incorporating series-connected decoupled stacked bulk acoustic resonators
US7463499B2 (en) 2005-10-31 2008-12-09 Avago Technologies General Ip (Singapore) Pte Ltd. AC-DC power converter
US7561009B2 (en) 2005-11-30 2009-07-14 Avago Technologies General Ip (Singapore) Pte. Ltd. Film bulk acoustic resonator (FBAR) devices with temperature compensation
US7612636B2 (en) 2006-01-30 2009-11-03 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Impedance transforming bulk acoustic wave baluns
KR101238359B1 (ko) * 2006-02-06 2013-03-04 삼성전자주식회사 듀플렉서
US7746677B2 (en) 2006-03-09 2010-06-29 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. AC-DC converter circuit and power supply
US7479685B2 (en) 2006-03-10 2009-01-20 Avago Technologies General Ip (Singapore) Pte. Ltd. Electronic device on substrate with cavity and mitigated parasitic leakage path
US7629865B2 (en) 2006-05-31 2009-12-08 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Piezoelectric resonator structures and electrical filters
US7508286B2 (en) 2006-09-28 2009-03-24 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. HBAR oscillator and method of manufacture
US20080101263A1 (en) * 2006-10-30 2008-05-01 Skyworks Solutions, Inc. Single-ended to differential duplexer filter
US7791435B2 (en) 2007-09-28 2010-09-07 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Single stack coupled resonators having differential output
DE102008003820B4 (de) * 2008-01-10 2013-01-17 Epcos Ag Frontendschaltung
JP5136134B2 (ja) * 2008-03-18 2013-02-06 ソニー株式会社 バンドパスフィルタ装置、その製造方法、テレビジョンチューナおよびテレビジョン受信機
US7732977B2 (en) 2008-04-30 2010-06-08 Avago Technologies Wireless Ip (Singapore) Transceiver circuit for film bulk acoustic resonator (FBAR) transducers
US7855618B2 (en) 2008-04-30 2010-12-21 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Bulk acoustic resonator electrical impedance transformers
US7834720B2 (en) * 2008-07-01 2010-11-16 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Bulk acoustic wave filter device and a method for trimming a bulk acoustic wave filter device
US8902023B2 (en) 2009-06-24 2014-12-02 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator structure having an electrode with a cantilevered portion
US8248185B2 (en) 2009-06-24 2012-08-21 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic resonator structure comprising a bridge
KR101634339B1 (ko) 2009-08-04 2016-06-28 삼성전자주식회사 Ｂａｗｒ을 이용한 듀얼-입력 듀얼-출력의 필터링 장치 및 상기 ｂａｗｒ로서 이용할 수 있는 공진 장치
KR101628240B1 (ko) * 2009-10-28 2016-06-08 삼성전자주식회사 박막 벌크 음향 공진기를 이용한 발룬
US8193877B2 (en) 2009-11-30 2012-06-05 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Duplexer with negative phase shifting circuit
US8796904B2 (en) 2011-10-31 2014-08-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic resonator comprising piezoelectric layer and inverse piezoelectric layer
US9243316B2 (en) 2010-01-22 2016-01-26 Avago Technologies General Ip (Singapore) Pte. Ltd. Method of fabricating piezoelectric material with selected c-axis orientation
KR101719325B1 (ko) * 2010-07-19 2017-03-23 삼성전자주식회사 Ｂａｗｒ을 이용한 밸런스 구조의 ｒｆ 듀플렉서 및 ｒｆ 필터
US8962443B2 (en) 2011-01-31 2015-02-24 Avago Technologies General Ip (Singapore) Pte. Ltd. Semiconductor device having an airbridge and method of fabricating the same
US9203374B2 (en) 2011-02-28 2015-12-01 Avago Technologies General Ip (Singapore) Pte. Ltd. Film bulk acoustic resonator comprising a bridge
US9083302B2 (en) 2011-02-28 2015-07-14 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked bulk acoustic resonator comprising a bridge and an acoustic reflector along a perimeter of the resonator
US9154112B2 (en) 2011-02-28 2015-10-06 Avago Technologies General Ip (Singapore) Pte. Ltd. Coupled resonator filter comprising a bridge
US9148117B2 (en) 2011-02-28 2015-09-29 Avago Technologies General Ip (Singapore) Pte. Ltd. Coupled resonator filter comprising a bridge and frame elements
US9425764B2 (en) 2012-10-25 2016-08-23 Avago Technologies General Ip (Singapore) Pte. Ltd. Accoustic resonator having composite electrodes with integrated lateral features
US9048812B2 (en) 2011-02-28 2015-06-02 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic wave resonator comprising bridge formed within piezoelectric layer
US9136818B2 (en) 2011-02-28 2015-09-15 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked acoustic resonator comprising a bridge
US9444426B2 (en) 2012-10-25 2016-09-13 Avago Technologies General Ip (Singapore) Pte. Ltd. Accoustic resonator having integrated lateral feature and temperature compensation feature
US8575820B2 (en) 2011-03-29 2013-11-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked bulk acoustic resonator
US8350445B1 (en) 2011-06-16 2013-01-08 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Bulk acoustic resonator comprising non-piezoelectric layer and bridge
US8922302B2 (en) 2011-08-24 2014-12-30 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator formed on a pedestal
KR101919115B1 (ko) 2012-02-29 2018-11-15 삼성전자주식회사 Ｂａｗｒ 을 이용한 필터

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JPH08148968A (ja) * 1994-11-24 1996-06-07 Mitsubishi Electric Corp 薄膜圧電素子
US5692279A (en) * 1995-08-17 1997-12-02 Motorola Method of making a monolithic thin film resonator lattice filter
JP3614234B2 (ja) * 1996-03-14 2005-01-26 沖電気工業株式会社 共振器型弾性表面波フィルタ
WO1998034345A1 (en) * 1997-01-31 1998-08-06 Motorola Inc. Inline-coupled resonator with lattice filter and method
JP2000114917A (ja) * 1998-09-30 2000-04-21 Kyocera Corp バランス型弾性表面波フィルタ
US6600390B2 (en) * 2001-12-13 2003-07-29 Agilent Technologies, Inc. Differential filters with common mode rejection and broadband rejection

Also Published As

Publication number Publication date
EP1371135B1 (de) 2005-11-30
WO2002082647A1 (en) 2002-10-17
DE60115504T2 (de) 2006-08-31
EP1371135A1 (de) 2003-12-17
JP2004519180A (ja) 2004-06-24
KR100489851B1 (ko) 2005-05-17
US20030179053A1 (en) 2003-09-25
DE60115504D1 (de) 2006-01-05
KR20030076977A (ko) 2003-09-29

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